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1. 发明授权

US5528646A Sample vessel for X-ray microscopes 失效
标题翻译： X射线显微镜样品容器
公开(公告)号：US5528646A
公开(公告)日：1996-06-18
申请号：US425233
申请日：1995-04-18
申请人： Yoshinori Iketaki , Shoichiro Mochimaru , Yoshiaki Horikawa , Komei Nagai
发明人： Yoshinori Iketaki , Shoichiro Mochimaru , Yoshiaki Horikawa , Komei Nagai
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： A sample vessel for X-ray microscopes comprising a first silicon base plate having an entrance window covered with a thin film of silicon nitride, and a second silicon base plate which has an exit window covered with a thin film of silicon nitride and matched with the entrance window. The second silicon base plate being connected the first base plate by way of a spacer so as to form a sealed space capable of accommodating samples to be observed. Disposed in the space is a mesh member made of a wire material having an angle of contact with water smaller than 90.degree. at a location adjacent to the thin film of silicon nitride covering the entrance window or a thin film of aluminium is evaporation-coated over the thin film of silicon nitride. This sample vessel makes it possible to enhance mechanical strength of the thin film of silicon nitride and limits shifting of samples within very narrow ranges with water films formed in meshes of the mesh member, thereby remarkably facilitating observation of the samples with X-rays and soft X-rays.
摘要翻译：一种用于X射线显微镜的样品容器，包括具有覆盖有氮化硅薄膜的入口窗口的第一硅基板和具有覆盖有氮化硅薄膜的出射窗口的第二硅基板，并与入口窗口第二硅基板通过间隔件连接第一基板，以便形成能够容纳观察样品的密封空间。在该空间中设置的是由与覆盖入口窗口的氮化硅薄膜相邻的位置处的与水接触的角度小于90°的网状构件，或者薄膜的铝被蒸发涂覆氮化硅薄膜。该样品容器使得可以提高氮化硅薄膜的机械强度，并且通过在网状构件的网眼中形成的水膜限制样品在非常窄的范围内的移动，从而显着地促进了用X射线和软的样品的观察 X光片。

2. 发明授权

US5434901A Soft X-ray microscope 失效
标题翻译：软X射线显微镜
公开(公告)号：US5434901A
公开(公告)日：1995-07-18
申请号：US162470
申请日：1993-12-07
申请人： Komei Nagai , Yoshiaki Horikawa , Yoshinori Iketaki , Shoichiro Mochimaru
发明人： Komei Nagai , Yoshiaki Horikawa , Yoshinori Iketaki , Shoichiro Mochimaru
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： In a soft X-ray microscope including a soft X-ray source for emitting soft X-rays, a condenser lens for focusing the soft X-rays onto a specimen under inspection, an objective lens for focusing soft X-rays emanating from the specimen, a soft X-ray detector for receiving the soft X-rays focused by the objective lens, and a visually observing optical system for forming a visible image of the specimen by converting an optical property of the specimen other than contrast and color into a contrast in brightness or color. The visually observing optical system may be formed as phase contrast microscope, dark field microscope, polarizing microscope, differential interference microscope, or fluorescent microscope. Then, alignment and focus adjustment can be performed by observing the visible image of the specimen without irradiating the specimen with the soft X-rays even if the specimen has substantially no contrast and color.
摘要翻译：在包括用于发射软X射线的软X射线源的软X射线显微镜中，用于将软X射线聚焦到检查样本上的聚光透镜，用于聚焦从样本发出的软X射线的物镜用于接收由物镜聚焦的软X射线的软X射线检测器，以及用于通过将除了对比度和颜色之外的样本的光学性质转换成对比度而形成样本的可见图像的目视观察光学系统亮度或颜色。视觉观察光学系统可以形成为相差显微镜，暗视野显微镜，偏光显微镜，微分干涉显微镜或荧光显微镜。然后，即使样本基本上没有对比度和颜色，也可以通过观察样本的可见图像而不用软X射线照射样本来进行对准和聚焦调整。

3. 发明授权

US5432831A Vacuum optical system 失效
标题翻译：真空光学系统
公开(公告)号：US5432831A
公开(公告)日：1995-07-11
申请号：US118246
申请日：1993-09-09
申请人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
发明人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
IPC分类号： G02B21/26 , G03F7/20 , G21K7/00
CPC分类号： B82Y10/00 , G02B21/26 , G03F7/70033 , G03F7/70233 , G03F7/70841 , G03F7/70916 , G21K7/00
摘要： A vacuum optical system has a vacuum chamber for housing an optical system used in a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.
摘要翻译：真空光学系统具有用于容纳在真空中使用的光学系统的真空室。真空室配备有一个部件，光学系统至少安装在该部件上，由这些部件支撑，当真空室中的压力变化使真空室发生变形时，传递到光学系统的位移量小于取决于光学系统所需的精度的预定公差。因此，可以获得不需要重新调整光学对准的真空光学系统，并且紧凑。

4. 发明授权

US5533083A Vacuum optical system 失效
标题翻译：真空光学系统
公开(公告)号：US5533083A
公开(公告)日：1996-07-02
申请号：US431325
申请日：1995-04-28
申请人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
发明人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
IPC分类号： G02B21/26 , G03F7/20 , G21K7/00
CPC分类号： B82Y10/00 , G02B21/26 , G03F7/70033 , G03F7/70233 , G03F7/70841 , G03F7/70916 , G21K7/00
摘要： A vacuum optical system has a vacuum chamber for housing an optical system used In a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.
摘要翻译：真空光学系统具有用于容纳在真空中使用的光学系统的真空室。真空室配备有一个部件，光学系统至少安装在该部件上，由这些部件支撑，当真空室中的压力变化使真空室发生变形时，传递到光学系统的位移量小于取决于光学系统所需的精度的预定公差。因此，可以获得不需要重新调整光学对准的真空光学系统，并且紧凑。

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