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1. 发明授权

US5432831A Vacuum optical system 失效
标题翻译：真空光学系统
公开(公告)号：US5432831A
公开(公告)日：1995-07-11
申请号：US118246
申请日：1993-09-09
申请人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
发明人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
IPC分类号： G02B21/26 , G03F7/20 , G21K7/00
CPC分类号： B82Y10/00 , G02B21/26 , G03F7/70033 , G03F7/70233 , G03F7/70841 , G03F7/70916 , G21K7/00
摘要： A vacuum optical system has a vacuum chamber for housing an optical system used in a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.
摘要翻译：真空光学系统具有用于容纳在真空中使用的光学系统的真空室。真空室配备有一个部件，光学系统至少安装在该部件上，由这些部件支撑，当真空室中的压力变化使真空室发生变形时，传递到光学系统的位移量小于取决于光学系统所需的精度的预定公差。因此，可以获得不需要重新调整光学对准的真空光学系统，并且紧凑。

2. 发明授权

US5533083A Vacuum optical system 失效
标题翻译：真空光学系统
公开(公告)号：US5533083A
公开(公告)日：1996-07-02
申请号：US431325
申请日：1995-04-28
申请人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
发明人： Komei Nagai , Yoshinori Iketaki , Yoshiaki Horikawa
IPC分类号： G02B21/26 , G03F7/20 , G21K7/00
CPC分类号： B82Y10/00 , G02B21/26 , G03F7/70033 , G03F7/70233 , G03F7/70841 , G03F7/70916 , G21K7/00
摘要： A vacuum optical system has a vacuum chamber for housing an optical system used In a vacuum. The vacuum chamber is equipped with a member, on which the optical system is at least mounted, supported by such parts that when a pressure in the vacuum chamber changes to deform the vacuum chamber, the amount of displacement transmitted to the optical system is smaller than a predetermined tolerance depending on an accuracy necessary for the optical system. Thus, the vacuum optical system can be obtained which does away with the need for readjustment of optical alignment and is compact.
摘要翻译：真空光学系统具有用于容纳在真空中使用的光学系统的真空室。真空室配备有一个部件，光学系统至少安装在该部件上，由这些部件支撑，当真空室中的压力变化使真空室发生变形时，传递到光学系统的位移量小于取决于光学系统所需的精度的预定公差。因此，可以获得不需要重新调整光学对准的真空光学系统，并且紧凑。

3. 发明授权

US5434901A Soft X-ray microscope 失效
标题翻译：软X射线显微镜
公开(公告)号：US5434901A
公开(公告)日：1995-07-18
申请号：US162470
申请日：1993-12-07
申请人： Komei Nagai , Yoshiaki Horikawa , Yoshinori Iketaki , Shoichiro Mochimaru
发明人： Komei Nagai , Yoshiaki Horikawa , Yoshinori Iketaki , Shoichiro Mochimaru
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： In a soft X-ray microscope including a soft X-ray source for emitting soft X-rays, a condenser lens for focusing the soft X-rays onto a specimen under inspection, an objective lens for focusing soft X-rays emanating from the specimen, a soft X-ray detector for receiving the soft X-rays focused by the objective lens, and a visually observing optical system for forming a visible image of the specimen by converting an optical property of the specimen other than contrast and color into a contrast in brightness or color. The visually observing optical system may be formed as phase contrast microscope, dark field microscope, polarizing microscope, differential interference microscope, or fluorescent microscope. Then, alignment and focus adjustment can be performed by observing the visible image of the specimen without irradiating the specimen with the soft X-rays even if the specimen has substantially no contrast and color.
摘要翻译：在包括用于发射软X射线的软X射线源的软X射线显微镜中，用于将软X射线聚焦到检查样本上的聚光透镜，用于聚焦从样本发出的软X射线的物镜用于接收由物镜聚焦的软X射线的软X射线检测器，以及用于通过将除了对比度和颜色之外的样本的光学性质转换成对比度而形成样本的可见图像的目视观察光学系统亮度或颜色。视觉观察光学系统可以形成为相差显微镜，暗视野显微镜，偏光显微镜，微分干涉显微镜或荧光显微镜。然后，即使样本基本上没有对比度和颜色，也可以通过观察样本的可见图像而不用软X射线照射样本来进行对准和聚焦调整。

4. 发明授权

US5528646A Sample vessel for X-ray microscopes 失效
标题翻译： X射线显微镜样品容器
公开(公告)号：US5528646A
公开(公告)日：1996-06-18
申请号：US425233
申请日：1995-04-18
申请人： Yoshinori Iketaki , Shoichiro Mochimaru , Yoshiaki Horikawa , Komei Nagai
发明人： Yoshinori Iketaki , Shoichiro Mochimaru , Yoshiaki Horikawa , Komei Nagai
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： A sample vessel for X-ray microscopes comprising a first silicon base plate having an entrance window covered with a thin film of silicon nitride, and a second silicon base plate which has an exit window covered with a thin film of silicon nitride and matched with the entrance window. The second silicon base plate being connected the first base plate by way of a spacer so as to form a sealed space capable of accommodating samples to be observed. Disposed in the space is a mesh member made of a wire material having an angle of contact with water smaller than 90.degree. at a location adjacent to the thin film of silicon nitride covering the entrance window or a thin film of aluminium is evaporation-coated over the thin film of silicon nitride. This sample vessel makes it possible to enhance mechanical strength of the thin film of silicon nitride and limits shifting of samples within very narrow ranges with water films formed in meshes of the mesh member, thereby remarkably facilitating observation of the samples with X-rays and soft X-rays.
摘要翻译：一种用于X射线显微镜的样品容器，包括具有覆盖有氮化硅薄膜的入口窗口的第一硅基板和具有覆盖有氮化硅薄膜的出射窗口的第二硅基板，并与入口窗口第二硅基板通过间隔件连接第一基板，以便形成能够容纳观察样品的密封空间。在该空间中设置的是由与覆盖入口窗口的氮化硅薄膜相邻的位置处的与水接触的角度小于90°的网状构件，或者薄膜的铝被蒸发涂覆氮化硅薄膜。该样品容器使得可以提高氮化硅薄膜的机械强度，并且通过在网状构件的网眼中形成的水膜限制样品在非常窄的范围内的移动，从而显着地促进了用X射线和软的样品的观察 X光片。

5. 发明授权

US5352897A Device for detecting X-rays 失效
标题翻译：用于检测X射线的装置
公开(公告)号：US5352897A
公开(公告)日：1994-10-04
申请号：US31470
申请日：1993-03-15
申请人： Yoshiaki Horikawa , Yoshinori Iketaki , Shoichiro Mochimaru , Koumei Nagai
发明人： Yoshiaki Horikawa , Yoshinori Iketaki , Shoichiro Mochimaru , Koumei Nagai
IPC分类号： G01T1/24 , H01L27/146 , H01L31/115
CPC分类号： H01L27/14665 , G01T1/24 , H01L27/146 , H01L31/115
摘要： A soft X-ray detector includes a surface electrode layer, a photoelectric conversion layer, and a semiconductor detector having an electrode connected to the photoelectric conversion layer, for detecting an electric charge produced In the photoelectric conversion layer. The photoelectric conversion layer and the surface electrode layer have thicknesses satisfying conditionsdA.gtoreq.0.183.lambda./KAdB.ltoreq.0.183.lambda./KBwhere dA is a thickness of the photoelectric conversion layer, dB is a thickness of the surface electrode layer, KA is an extinction coefficient of radiation of a wavelength .lambda. in a substance constituting the photoelectric conversion layer, and KB is an extinction coefficient of radiation of the wavelength .lambda.in a substance constituting the surface electrode layer. Thus, the soft X-ray detector has a high sensitivity to soft X rays and a lower sensitivity to visible light, so that only soft X rays can be selectively detected. Further, the detector has two kinds of pixels, with one kind sensitive to soft X-rays and the other kind sensitive to visible light. In addition, the detector includes a plurality of pixels, to which the surface electrode layer is divided to correspond so that it has a plurality of regions to obtain a desired wavelength.
摘要翻译：软X射线检测器包括表面电极层，光电转换层和具有连接到光电转换层的电极的半导体检测器，用于检测在光电转换层中产生的电荷。光电转换层和表面电极层具有满足条件dA> / =0.183λ/ KA dB

6. 发明授权

US08947658B2 Nonlinear optical microscope and nonlinear optical microscopy 有权
标题翻译：非线性光学显微镜和非线性光学显微镜
公开(公告)号：US08947658B2
公开(公告)日：2015-02-03
申请号：US13610563
申请日：2012-09-11
申请人： Yoshinori Iketaki , Hideaki Kano
发明人： Yoshinori Iketaki , Hideaki Kano
IPC分类号： G01J3/44 , G01N21/65 , G01J3/10 , G02B21/00 , G02B21/08 , G02B21/14 , G02B27/44
CPC分类号： G01N21/65 , G01J3/10 , G01J3/44 , G01N2021/653 , G02B21/0004 , G02B21/082 , G02B21/14 , G02B27/425 , G02B27/44
摘要： Provided is a nonlinear optical microscope capable of improving the spatial resolution. The nonlinear optical microscope includes: an illuminating part for irradiating, through an objective lens, a sample with at least two colors of illumination light beams spatially and temporally overlapping each other; and a detecting part for detecting signal light generated from the sample due to nonlinear optical effect, the signal light resulting from the irradiation of the sample with the at least two colors of illumination light beams, in which the illuminating part irradiates the sample with the two colors of illumination light beams in which at least one of the illumination light beams has a wavefront distribution different from a wavefront distribution of the other one of the illumination light beams.
摘要翻译：提供了能够提高空间分辨率的非线性光学显微镜。非线性光学显微镜包括：照明部，其通过物镜照射具有空间和时间上彼此重叠的至少两种照明光束的样品; 以及检测部，其用于检测由于非线性光学效应而从样本产生的信号光，所述信号光由具有所述至少两种颜色的照明光束的所述样本的照射而产生，所述照明部分照射所述样本与所述两个其中至少一个照明光束具有与另一个照明光束的波前分布不同的波前分布的照明光束的颜色。

7. 发明授权

US06184535B2 Method of microscopic observation 有权
标题翻译：显微镜观察方法
公开(公告)号：US06184535B2
公开(公告)日：2001-02-06
申请号：US09156775
申请日：1998-09-18
申请人： Shingo Kashima , Yoshinori Iketaki
发明人： Shingo Kashima , Yoshinori Iketaki
IPC分类号： G01N2164
CPC分类号： G01N21/6458 , G01N21/6428 , G01N2021/6419 , G02B21/002 , G02B21/16
摘要： In a method of observing a specimen through a fluorescence microscope, molecules that could cause double-resonance absorption process in an appropriate manner are used to dye the specimen, and the specimen is irradiated with a plurality of light beams of different wavelengths in a good timing, so that a microscopic image with high spatial resolution is obtained. In the microscope to be used in the method of observation, the specimen is irradiated with two light beams of different wavelength bands via an aperture with an annular-zonal structure and an optical system that has different in-focus positions for these two wavelength bands, so that one of the two light beam is focused on a surface of the specimen and the other light beam is defocused thereon. Consequently, the microscope achieves improvement of the spatial resolution as to overcome the diffraction limit determined by the wavelengths in use.
摘要翻译：在通过荧光显微镜观察样品的方法中，使用可以以适当的方式引起双共振吸收过程的分子染色样品，并且以良好的时间用多个不同波长的光束照射样品，从而获得具有高空间分辨率的显微图像。在用于观察方法的显微镜中，通过具有环形区域结构和光学系统的孔径，用两个不同波长带的光束照射样品对于这两个波长带具有不同的对焦位置，使得两个光束中的一个被聚焦在样本的表面上，并且另一个光束在其上散焦。因此，显微镜实现空间分辨率的提高，以克服由使用的波长确定的衍射极限。

8. 发明授权

US5650616A Apparatus and method for analyzing surface 失效
标题翻译：用于分析表面的装置和方法
公开(公告)号：US5650616A
公开(公告)日：1997-07-22
申请号：US390352
申请日：1995-02-16
申请人： Yoshinori Iketaki
发明人： Yoshinori Iketaki
IPC分类号： G01N23/22 , B01D59/44 , H01J49/00
CPC分类号： H01J49/061 , G01N23/22 , H01J49/142
摘要： A surface analyzing apparatus includes a laser plasma radiation source, an optical condensing system for converging ultraviolet light, vacuum ultraviolet light, or X rays emitted from the laser plasma radiation source on the surface of a sample, and a mass spectrometer or a time-of-flight spectrometer for detecting the secondary ions emitted from the sample. Thus, the surface analyzing apparatus is capable of analyzing two-dimensionally adsorbed substances on the sample surface with a high resolving power.
摘要翻译：表面分析装置包括激光等离子体辐射源，用于会聚紫外光的聚光系统，真空紫外光或从激光等离子体辐射源在样品表面发射的X射线，以及质谱仪或时间 - 用于检测从样品发射的二次离子的光谱仪。因此，表面分析装置能够以高分辨能力分析样品表面上的二维吸附物质。

9. 发明授权

US07095556B2 Microscope with wavelength compensation 有权
标题翻译：具有波长补偿的显微镜
公开(公告)号：US07095556B2
公开(公告)日：2006-08-22
申请号：US10771729
申请日：2004-02-04
申请人： Yoshinori Iketaki , Takeshi Watanabe , Masaaki Fujii , Yasunori Igasaki , Toshio Suzuki
发明人： Yoshinori Iketaki , Takeshi Watanabe , Masaaki Fujii , Yasunori Igasaki , Toshio Suzuki
IPC分类号： G02B21/06 , G01J3/30
CPC分类号： G02B26/08
摘要： A microscope capable of being shaped into a beam with complete hollow shape by removing the disorder of the wavefront to the erase light, particularly, and capable of improving the spatial resolution by inducing a super-resolution near the limit, is provided. In the microscope, wherein a first light to excite a molecule from a ground-state to first electron excited state or a second light to excite the molecule from the first electron excited state to the second electron excited state with higher energy level, for a sample 56 including the molecule with three electronic states including at least a ground-state, are spatial phase-modulated into the prescribed beam shape, and parts of these first light and the second light are overlapped and focused to detect luminescence from the sample 56, a wavefront compensation means 61 is provided in the optical path of the first light and/or in the optical path of the second light, and the wavefront aberration caused in the first light and/or in the second light, is removed by the wavefront compensation means 61.
摘要翻译：提供了能够通过将擦除光的波阵面除去特别是并且能够通过在接近极限附近引起超分辨率来改善空间分辨率而将具有完全中空形状的光束成形为显微镜的显微镜。在显微镜中，其中将分子从基态激发到第一电子激发态的第一光或第二光以将分子从第一电子激发态激发至具有较高能级的第二电子激发态，对于样品包括具有至少包括基态的三种电子状态的分子被空间相位调制成规定的波束形状，并且这些第一光和第二光的一部分被重叠和聚焦以检测来自样品56的发光，波前补偿装置61设置在第一光的光路和/或第二光的光路中，并且在第一光和/或第二光中引起的波前像差被波前补偿装置除去 61。

10. 发明授权

US5835262A Multi-wavelength optical microscope 失效
标题翻译：多波长光学显微镜
公开(公告)号：US5835262A
公开(公告)日：1998-11-10
申请号：US580196
申请日：1995-12-28
申请人： Yoshinori Iketaki , Masaaki Fujii
发明人： Yoshinori Iketaki , Masaaki Fujii
IPC分类号： G02B21/06 , G02B5/30 , F21V9/16 , G02B13/14
CPC分类号： G02B21/06
摘要： A high-accuracy multi-wavelength optical microscope for providing a satisfactory contrast of image and much information about a sample. The microscope includes a plurality of light sources, a wavelength varietor independently varying the wavelength of the individual light sources, and polarization plane rotators on the optical path for each light source.
摘要翻译：一种高精度多波长光学显微镜，用于提供令人满意的图像对比度和关于样品的大量信息。显微镜包括多个光源，独立地改变各个光源的波长的波长变换器和用于每个光源的光路上的偏振面旋转器。

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