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1. 发明授权

US06656111B2 Control device for an endoscope 失效
标题翻译：内窥镜用控制装置
公开(公告)号：US06656111B2
公开(公告)日：2003-12-02
申请号：US09836221
申请日：2001-04-18
申请人： Yoshinori Fujii , Akira Sugiyama , Hiroyuki Katsurada
发明人： Yoshinori Fujii , Akira Sugiyama , Hiroyuki Katsurada
IPC分类号： A61B100
CPC分类号： A61B1/0052
摘要： An endoscope includes a hollow operational body, a hollow shaft provided on the hollow operational body, at least one hollow rotational control knob which is rotatably supported on the hollow shaft; and an air passage via which an inner space of the hollow operational body and an inner space of the at hollow rotational control knob have a communicative connection with each other, wherein the hollow shaft includes a portion of the passage.
摘要翻译：内窥镜包括中空操作体，设置在中空操作体上的空心轴，至少一个中空旋转控制旋钮，其被可旋转地支撑在中空轴上; 以及空气通道，空心操作体的内部空间和中空旋转控制旋钮的内部空间彼此具有连通性连接，其中空心轴包括通道的一部分。

2. 发明授权

US06673012B2 Control device for an endoscope 失效
标题翻译：内窥镜用控制装置
公开(公告)号：US06673012B2
公开(公告)日：2004-01-06
申请号：US09836505
申请日：2001-04-18
申请人： Yoshinori Fujii , Akira Sugiyama
发明人： Yoshinori Fujii , Akira Sugiyama
IPC分类号： A61B100
CPC分类号： G02B23/2476 , A61B1/0051 , A61B1/0052 , A61B1/018
摘要： An endoscope having an elongated insertion portion provided at a distal end thereof with a steerable bendable portion, includes at least one steering member which is rotated to bend the steerable bendable portion; at least one locking member which is rotated to lock the steering member, the steering member and the locking member being rotated about a common axis; and at least one axially-movable lock member which moves relative to the steering member along the common axis without rotating about the common axis to lock and unlock the steering member when the locking member is turned in a first rotational direction and a second rotational direction, respectively.
摘要翻译：一种具有细长插入部分的内窥镜，其具有可转向弯曲部分的远端，所述内窥镜包括至少一个转向部件，所述至少一个转动部件旋转以弯曲所述可转向弯曲部分; 至少一个锁定构件，其旋转以锁定所述转向构件，所述转向构件和所述锁定构件围绕公共轴线旋转; 以及至少一个轴向可移动的锁定构件，当所述锁定构件沿第一旋转方向和第二旋转方向转动时，所述至少一个轴向可移动的锁定构件相对于所述转向构件沿着所述公共轴线移动而不围绕所述公共轴线旋转，分别。

3. 发明申请

US20130343840A1 TRANSPORT APPARATUS AND VACUUM SYSTEM 有权
标题翻译：运输设备和真空系统
公开(公告)号：US20130343840A1
公开(公告)日：2013-12-26
申请号：US13982925
申请日：2012-03-16
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B65G49/00
CPC分类号： B65G49/00 , H01L21/67259 , H01L21/67742 , H01L21/681
摘要： A transport apparatus that supports and moves a substrate by using a robot hand between a plurality of chambers includes a first detection unit that detects the substrate, in a first stop position of the robot hand, using a first detection position set on one surface of the substrate supported by the robot hand, and a second detection unit that detects the substrate, in a second stop position of the robot hand, using a second detection position set on the one surface of the substrate supported by the robot hand.
摘要翻译：通过使用机器人手在多个室之间支撑和移动基板的输送装置包括：第一检测单元，其利用设置在所述机器人手的一个表面上的第一检测位置，在所述机器人手的第一停止位置中检测所述基板; 由机器人手支撑的基板和第二检测单元，其使用设置在由机器人手支撑的基板的一个表面上的第二检测位置来检测机器人手的第二停止位置中的基板。

4. 发明申请

US20100256811A1 DIAGNOSIS SYSTEM FOR TRANSPORT ROBOT 审中-公开
标题翻译：运输机器人诊断系统
公开(公告)号：US20100256811A1
公开(公告)日：2010-10-07
申请号：US12745823
申请日：2008-12-26
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H01L21/677 , G05B19/04
CPC分类号： H01L21/67259 , H01L21/67288
摘要： There is provided a low-cost diagnosis system for a transport robot which is capable of improving the apparatus operating rate without incurring an increase in the number of parts. In case a robot arm is detected by any of detection means when a substrate (S) is transported by the robot arm among processing chambers (C), operation data of the robot arm to be detected by the detection means is obtained and reference value is prepared. Then, every time the robot arm is detected by the detection means, the operation data is obtained and compared with the reference value. In case a change exceeds a predetermined range, the transport robot is judged to be abnormal.
摘要翻译：提供了一种用于运输机器人的低成本诊断系统，其能够在不引起部件数量增加的情况下提高设备运行速度。在通过机器人臂在处理室（C）中输送基板（S）时，通过检测机构检测到机器人臂的情况下，获得由检测单元检测的机器人手臂的操作数据，基准值为准备然后，每当检测装置检测到机器人臂时，获取操作数据并将其与参考值进行比较。如果变化超过预定范围，则传送机器人被判定为异常。

5. 发明申请

US20130092528A1 FILM-FORMING DEVICE AND FILM-FORMING METHOD 审中-公开
标题翻译：成膜装置和成膜方法
公开(公告)号：US20130092528A1
公开(公告)日：2013-04-18
申请号：US13581648
申请日：2011-06-30
申请人： Yoshinori Fujii , Shinya Nakamura
发明人： Yoshinori Fujii , Shinya Nakamura
IPC分类号： C23C14/50
CPC分类号： C23C14/505 , C23C14/3464
摘要： A film-forming device is provided, including: a chamber in which a substrate is disposed; a target, disposed within the chamber, which contains a material from which a film is formed; a substrate-supporting table disposed inside the chamber; driving unit that rotates the substrate-supporting table; a sputtering cathode that causes sputtered particles to be incident on the substrate from an oblique direction; and a control unit that controls the driving unit by setting a rotation period so that a sputtering film formation time required to form a film having a desired thickness is an integer multiple of a rotation period of the substrate-supporting table.
摘要翻译：提供了一种成膜装置，包括：其中设置有基板的室; 设置在所述室内的靶，其包含形成膜的材料; 设置在所述室内的基板支撑台; 旋转基板支撑台的驱动单元; 使溅射的粒子从倾斜方向入射到基板上的溅射阴极; 以及控制单元，其通过设定旋转周期来控制驱动单元，使得形成具有期望厚度的膜所需的溅射成膜时间为基板支撑台的旋转周期的整数倍。

6. 发明授权

US08393662B2 Robot hand for substrate transfer 有权
标题翻译：机器人手用于基片转印
公开(公告)号：US08393662B2
公开(公告)日：2013-03-12
申请号：US13288206
申请日：2011-11-03
申请人： Yoshinori Fujii , Shinya Nakamura
发明人： Yoshinori Fujii , Shinya Nakamura
IPC分类号： B65G49/07
CPC分类号： H01L21/67742 , H01L21/68707 , Y10S414/141
摘要： There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.
摘要翻译：提供了一种用于基板转印的机器人手，其中机器人手布置成使得即使在基板（S）引起翘曲的情况下，也可以稳定地支撑基板（S）。在机器人手的上表面上形成有第一就座表面，其上安置有基底（S）的下表面周边部分，并且在其周边上形成向上延伸的步骤。台阶设置有多个楼梯阶段。在机器人手的上表面向内离开第一座面，设置有第二座面，其朝向衬底（S）的中心向下倾斜，使得衬底（S）的下表面位于当基板（S）向下弯曲成凹形时，第二座面。

7. 发明申请

US20110125325A1 TEACHING METHOD FOR TRANSFER ROBOT 有权
标题翻译：传输机器人教学方法
公开(公告)号：US20110125325A1
公开(公告)日：2011-05-26
申请号：US13054824
申请日：2009-07-29
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B25J13/08
CPC分类号： H01L21/681 , B25J9/1692 , G05B2219/45031 , H01L21/67748
摘要： There is provided a teaching method for a transfer robot which is capable of quickly performing teaching at high reliability. Relative to a transfer robot which, in a state in which a substrate to be processed in a plurality of processing chambers is supported, transfers the substrate to a predetermined position by turning and telescopic action on the same plane, teaching is made of the transfer actions. At this time, by using at least one detection means that is disposed so as to detect the substrate when the substrate is transferred among the processing chambers, the transfer robot is caused to perform transfer action. At least one index part provided in advance on an operating part of the transfer robot is detected by the detection means. From this detection position, a reference position which serves as an origin of at least one of the turning action and the telescopic action is taught.
摘要翻译：提供了一种能够以高可靠性快速执行教学的传送机器人的教学方法。相对于在多个处理室中被处理的基板被支撑的状态下的转印机器人，通过在同一平面上的转动和伸缩动作将基板转移到预定位置，由传递机构。此时，通过使用至少一个检测装置，其被设置为当在处理室之间转移基板时检测基板，使得传送机器人执行传送动作。由检测装置检测在传送机器人的操作部分上预先提供的至少一个索引部分。从该检测位置，教导了作为转动动作和伸缩动作中的至少一个的原点的基准位置。

8. 发明申请

US20110014015A1 SUBSTRATE TRANSFER ROBOT AND VACUUM PROCESSING APPARATUS PROVIDED WITH SAME 审中-公开
标题翻译：基板传送机器人和真空加工设备
公开(公告)号：US20110014015A1
公开(公告)日：2011-01-20
申请号：US12667149
申请日：2008-06-30
申请人： Yoshinori Fujii , Nobuaki Mochizuki
发明人： Yoshinori Fujii , Nobuaki Mochizuki
IPC分类号： H01L21/677
CPC分类号： H01L21/68707 , H01L21/67742
摘要： Provided is a substrate transfer robot which can surely eliminate adhesion, shifting, dropping and the like of a substrate at the time of transferring the substrate. A vacuum processing apparatus provided with such substrate transfer robot is also provided. The substrate transfer robot is provided with a substrate receiving section for placing the substrate; a plurality of substrate slip preventing members, which are arranged on the upper surface of the substrate receiving section at intervals and are composed of an elastic material; and a extendable/retractable arm section whereupon the substrate receiving section is arranged at the leading end. On the upper end surface of the substrate slip preventing member, a protruding section is arranged. The vacuum processing apparatus is configured as a multi-chamber vacuum processing apparatus provided with the substrate transfer robot.
摘要翻译：提供了一种基板传送机器人，其可以在传送基板时可靠地消除基板的粘附，移动和落下等。还提供了一种设置有这种基板传送机器人的真空处理设备。衬底传送机器人设置有用于放置衬底的衬底接收部分; 多个基板防滑部件，其间隔设置在基板接收部的上表面上并且由弹性材料构成; 以及可延伸/可伸缩的臂部分，其中衬底接收部分布置在前端。在基板防滑部件的上端面设置有突出部。真空处理装置被配置为设置有基板传送机器人的多室真空处理装置。

9. 发明授权

US07821767B2 Electrostatic chuck device 有权
标题翻译：静电吸盘装置
公开(公告)号：US07821767B2
公开(公告)日：2010-10-26
申请号：US11666950
申请日：2005-10-27
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , H02N13/00
摘要： The object of this invention is to provide that an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed.In an electrostatic chuck device (11) attracting a substrate (W) to be processed on the surface of a susceptor (12) electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means (16) facing the surface of the susceptor (12), a diselectrifying potential (19), and a diselectrifying resistance (17) connected between the diselectrifying electrode means (16) and the diselectrifying potential (19). The resistance value of the diselectrifying resistance (178) is established such that it is lower than that of an insulating layer (13) of the surface of the susceptor (12 and the diselectrifying resistance (17) can hold the potential of the substrate (W) during an electrostatic chuck operation, and such that the diselectrifying resistance 17) can dissipate the potential of the substrate (W) into the ground potential (19) when the electrostatic chuck is canceled. This structure can appropriately and promptly diselectrify the substrate (W).
摘要翻译：本发明的目的是提供一种静电卡盘装置，其可以适当且迅速地使要处理的基板失电。在静电卡盘装置（11）中，在基座（12）的表面上吸引要处理的基板（W）的电气设置，设置有包括位于基座（12）的表面的电位差电极装置（16），分解电位（19）和连接在所述电位差电极装置（16）和所述致电电位（19）之间的耐混电阻（17）。确定耐电阻（178）的电阻值使其低于基座表面（12）的绝缘层（13）的电阻值，并且耐电阻（17）可以保持基板的电位（W ），并且使得当静电卡盘被取消时，耐电阻性电阻17）可以将基板（W）的电位耗散到接地电位（19）中。这种结构可以适当且迅速地使基片（W）失电。

10. 发明申请

US20070297118A1 Electrostatic Chuck Device 有权
标题翻译：静电卡盘装置
公开(公告)号：US20070297118A1
公开(公告)日：2007-12-27
申请号：US11666950
申请日：2005-10-27
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , H02N13/00
摘要： The object of this invention is to provide that an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed. In an electrostatic chuck device (11) attracting a substrate (W) to be processed on the surface of a susceptor (12) electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means (16) facing the surface of the susceptor (12), a diselectrifying potential (19), and a diselectrifying resistance (17) connected between the diselectrifying electrode means (16) and the diselectrifying potential (19). The resistance value of the diselectrifying resistance (178) is established such that it is lower than that of an insulating layer (13) of the surface of the susceptor (12 and the diselectrifying resistance (17) can hold the potential of the substrate (W) during an electrostatic chuck operation, and such that the diselectrifying reistance 17) can dissipate the potential of the substrate (W) into the ground potential (19) when the electrostatic chuck is canceled. This structure can appropriately and promptly diselectrify the substrate (W).
摘要翻译：本发明的目的是提供一种静电卡盘装置，其可以适当且迅速地使要处理的基板失电。在静电卡盘装置（11）中，在基座（12）的表面上吸引要处理的基板（W）的电气设置，设置有包括位于基座（12）的表面的电位差电极装置（16），分解电位（19）和连接在所述电位差电极装置（16）和所述致电电位（19）之间的耐混电阻（17）。确定耐电阻（178）的电阻值使其低于基座表面（12）的绝缘层（13）的电阻值，并且耐电阻（17）可以保持基板的电位（W ），并且当静电卡盘被取消时，使得相位偏移17）可以将基板（W）的电位耗散到地电位（19）中。这种结构可以适当且迅速地使基片（W）失电。

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