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    • 6. 发明授权
    • Method of producing a thin-film photovoltaic device
    • 制造薄膜光伏器件的方法
    • US06500690B1
    • 2002-12-31
    • US09536092
    • 2000-03-24
    • Hideo YamagishiHitoshi NishioTakayuki Suzuki
    • Hideo YamagishiHitoshi NishioTakayuki Suzuki
    • H01L3104
    • H01L31/052H01L31/022483H01L31/1884Y02E10/50
    • A method is provided for producing a thin-film photovoltaic device which has a rear electrode including a transparent conductive rear layer and a light-reflective metallic layer. In forming the light-reflective metallic layer, a first plasma region including fine particles of zinc oxide and a second plasma region including fine particles of silver are formed in a chamber at a sputtering gas pressure of about 0.1 to about 0.27 Pa. Then, the substrate is passed over the first and second plasma regions formed in the chamber to form a bonding layer comprising the zinc oxide and a light-reflective metallic layer comprising the silver, thereby providing the rear electrode having the transparent conductive rear layer, the bonding layer and the light-reflective metallic layer.
    • 提供一种制造薄膜光电器件的方法,该薄膜光伏器件具有包括透明导电后层和光反射金属层的后电极。 在形成光反射金属层时,在室内以大约0.1〜0.27Pa的溅射气体压力形成包含氧化锌微粒子和包含细小银粒子的第二等离子体区域的第一等离子体区域, 衬底通过形成在室中的第一等离子体区域和第二等离子体区域,以形成包含氧化锌和包含银的光反射金属层的结合层,从而提供具有透明导电后层的后电极,接合层和 光反射金属层。