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    • 1. 发明授权
    • Pressed-contact type semiconductor device
    • 压接式半导体器件
    • US07301178B2
    • 2007-11-27
    • US11212602
    • 2005-08-29
    • Yoshihiro YamaguchiKenji Oota
    • Yoshihiro YamaguchiKenji Oota
    • H01L29/74
    • H01L29/0661H01L24/72H01L29/0615H01L29/0657H01L29/32H01L29/74H01L2924/0102H01L2924/1301H01L2924/00
    • A P++-type first diffusion layer is formed by diffusing P-type impurities on a front side of an N−-type semiconductor substrate, and an N-type fourth diffusion layer which is shallower than the first diffusion layer is formed by diffusing N-type impurities on the front side, and a P-type second diffusion layer is locally formed in a ring-shape so as to be exposed on the lateral side by diffusing P-type impurities on the back side, and P-type impurities are diffused on the back side of the substrate and a P+-type third diffusion layer is locally formed so as to be distributed inward from the second diffusion layer and not to be exposed to the lateral side, and the P-type second diffusion layer and the P+-type third diffusion layer are formed in the two-stage structure, thereby various characteristics can be improved.
    • AP ++类型的第一扩散层是通过在N +型半导体衬底的正面扩散P型杂质形成的,N型第四扩散层 通过在前侧扩散N型杂质而形成比第一扩散层浅的层,并且P型第二扩散层局部形成为环状,以便通过扩散P而暴露在侧面 型杂质,P型杂质扩散到基板的背面,局部地形成P +型第三扩散层,以从第二层向内分布 扩散层并且不暴露于侧面,并且P型第二扩散层和P + +型第三扩散层形成在两级结构中,因此可以有各种特性 改进。
    • 5. 发明授权
    • Power semiconductor device
    • 功率半导体器件
    • US07244969B2
    • 2007-07-17
    • US11194593
    • 2005-08-02
    • Kenji OotaYoshihiro YamaguchiHiroshi Yamaguchi
    • Kenji OotaYoshihiro YamaguchiHiroshi Yamaguchi
    • H01L29/74H01L31/111
    • H01L29/0661H01L29/0619H01L29/0834H01L29/74
    • A power semiconductor device comprises a semiconductor substrate, a gate electrode region (control electrode region), a cathode electrode region (first main electrode region), an anode electrode region (second main electrode region) and a guard ring. The semiconductor substrate has a side surface portion having a vertical portion formed substantially vertical to a main surface and a mesa portion connected to the vertical portion in a cross section. The gate electrode region is formed in a first main surface of the semiconductor substrate. The cathode electrode region is formed in part of a surface of the gate electrode region. The anode electrode region is formed in a second main surface of the semiconductor substrate. The guard ring is formed in the second main surface of the semiconductor substrate and annularly surrounds the anode electrode region. With this constitution provided is a power semiconductor device which makes the impurity diffusion length of the anode electrode region shallower in order to ensure reduction in recovery loss.
    • 功率半导体器件包括半导体衬底,栅电极区域(控制电极区域),阴极电极区域(第一主电极区域),阳极电极区域(第二主电极区域)和保护环。 半导体衬底具有侧表面部分,该侧表面部分具有基本上垂直于主表面的垂直部分和在横截面中连接到垂直部分的台面部分。 栅电极区域形成在半导体衬底的第一主表面中。 阴极电极区域形成在栅电极区域的一部分表面。 阳极电极区域形成在半导体衬底的第二主表面中。 保护环形成在半导体衬底的第二主表面中并且环形地围绕阳极电极区域。 通过这样构成,为了确保降低回收损失,能够使阳极电极区域的杂质扩散长度变浅的功率半导体装置。
    • 7. 发明申请
    • Power semiconductor device
    • 功率半导体器件
    • US20060151805A1
    • 2006-07-13
    • US11194593
    • 2005-08-02
    • Kenji OotaYoshihiro YamaguchiHiroshi Yamaguchi
    • Kenji OotaYoshihiro YamaguchiHiroshi Yamaguchi
    • H01L29/45H01L29/76
    • H01L29/0661H01L29/0619H01L29/0834H01L29/74
    • A power semiconductor device comprises a semiconductor substrate, a gate electrode region (control electrode region), a cathode electrode region (first main electrode region), an anode electrode region (second main electrode region) and a guard ring. The semiconductor substrate has a side surface portion having a vertical portion formed substantially vertical to a main surface and a mesa portion connected to the vertical portion in a cross section. The gate electrode region is formed in a first main surface of the semiconductor substrate. The cathode electrode region is formed in part of a surface of the gate electrode region. The anode electrode region is formed in a second main surface of the semiconductor substrate. The guard ring is formed in the second main surface of the semiconductor substrate and annularly surrounds the anode electrode region. With this constitution provided is a power semiconductor device which makes the impurity diffusion length of the anode electrode region shallower in order to ensure reduction in recovery loss.
    • 功率半导体器件包括半导体衬底,栅电极区域(控制电极区域),阴极电极区域(第一主电极区域),阳极电极区域(第二主电极区域)和保护环。 半导体衬底具有侧表面部分,该侧表面部分具有基本上垂直于主表面的垂直部分和在横截面中连接到垂直部分的台面部分。 栅电极区域形成在半导体衬底的第一主表面中。 阴极电极区域形成在栅电极区域的一部分表面。 阳极电极区域形成在半导体衬底的第二主表面中。 保护环形成在半导体衬底的第二主表面中并且环形地围绕阳极电极区域。 通过这样构成,为了确保降低回收损失,能够使阳极电极区域的杂质扩散长度变浅的功率半导体装置。