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1. 发明申请

US20100035439A1 FILM FORMING METHOD AND FILM FORMING APPARATUS 有权
标题翻译：薄膜成型方法和薄膜成型装置
公开(公告)号：US20100035439A1
公开(公告)日：2010-02-11
申请号：US12536913
申请日：2009-08-06
申请人： Yoshihiro Ishida , Katsushige Harada , Takuya Sugawara
发明人： Yoshihiro Ishida , Katsushige Harada , Takuya Sugawara
IPC分类号： H01L21/31
CPC分类号： H01L21/31641 , C23C16/40 , C23C16/45529 , C23C16/45546
摘要： The invention includes inserting an object to be processed into a processing vessel, which can be maintained vacuum, and making the processing vessel vacuum; performing a sequence of forming a ZrO2 film on a substrate by alternately supplying zirconium source and an oxidizer into the processing vessel for a plurality of times and a sequence of forming SiO2 film on the substrate by alternately supplying silicon source and an oxidizer into the processing vessel for one or more times, wherein the number of times of performing each of the sequences is adjusted such that Si concentration of the films is from about 1 atm % to about 4 atm %; and forming a zirconia-based film having a predetermined thickness by performing the film forming sequences for one or more cycles, wherein one cycle indicates that each of the ZrO2 film forming sequences and the SiO2 film forming sequences are repeated for the adjusted number of times of performances.
摘要翻译：本发明包括将待加工物体插入可维持真空的处理容器中，并使处理容器真空; 通过在处理容器中交替地向处理容器供给锆源和氧化剂多次，并在衬底上交替地供给硅源和氧化剂的步骤，从而在衬底上形成ZrO 2膜的顺序进行一次或多次，其中调节每个序列的执行次数，使得膜的Si浓度为约1atm％至约4atm％; 并且通过进行一个或多个循环的成膜顺序，形成具有预定厚度的氧化锆基膜，其中一个循环表示每个ZrO 2成膜顺序和SiO 2成膜顺序重复调节次数表演。

2. 发明授权

US08336487B2 Film forming apparatus 有权
标题翻译：成膜装置
公开(公告)号：US08336487B2
公开(公告)日：2012-12-25
申请号：US13095444
申请日：2011-04-27
申请人： Yoshihiro Ishida , Katsushige Harada , Takuya Sugawara
发明人： Yoshihiro Ishida , Katsushige Harada , Takuya Sugawara
IPC分类号： C23C16/52 , C23C16/40 , C23C16/455 , H01L21/31 , H01L21/469
CPC分类号： H01L21/31641 , C23C16/40 , C23C16/45529 , C23C16/45546
摘要： The invention includes inserting an object to be processed into a processing vessel, which can be maintained vacuum, and making the processing vessel vacuum; performing a sequence of forming a ZrO2 film on a substrate by alternately supplying zirconium source and an oxidizer into the processing vessel for a plurality of times and a sequence of forming SiO2 film on the substrate by alternately supplying silicon source and an oxidizer into the processing vessel for one or more times, wherein the number of times of performing each of the sequences is adjusted such that Si concentration of the films is from about 1 atm % to about 4 atm %; and forming a zirconia-based film having a predetermined thickness by performing the film forming sequences for one or more cycles, wherein one cycle indicates that each of the ZrO2 film forming sequences and the SiO2 film forming sequences are repeated for the adjusted number of times of performances.
摘要翻译：本发明包括将待加工物体插入可维持真空的处理容器中，并使处理容器真空; 通过在处理容器中交替地向处理容器供给锆源和氧化剂多次，并在衬底上交替地供给硅源和氧化剂的步骤，从而在衬底上形成ZrO 2膜的顺序进行一次或多次，其中调节每个序列的执行次数，使得膜的Si浓度为约1atm％至约4atm％; 并且通过进行一个或多个循环的成膜顺序，形成具有预定厚度的氧化锆基膜，其中一个循环表示每个ZrO 2成膜顺序和SiO 2成膜顺序重复调节次数表演。

3. 发明授权

US07968472B2 Film forming method and film forming apparatus 有权
标题翻译：成膜方法和成膜装置
公开(公告)号：US07968472B2
公开(公告)日：2011-06-28
申请号：US12536913
申请日：2009-08-06
申请人： Yoshihiro Ishida , Katsushige Harada , Takuya Sugawara
发明人： Yoshihiro Ishida , Katsushige Harada , Takuya Sugawara
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/31641 , C23C16/40 , C23C16/45529 , C23C16/45546
摘要： The invention includes inserting an object to be processed into a processing vessel, which can be maintained vacuum, and making the processing vessel vacuum; performing a sequence of forming a ZrO2 film on a substrate by alternately supplying zirconium source and an oxidizer into the processing vessel for a plurality of times and a sequence of forming SiO2 film on the substrate by alternately supplying silicon source and an oxidizer into the processing vessel for one or more times, wherein the number of times of performing each of the sequences is adjusted such that Si concentration of the films is from about 1 atm % to about 4 atm %; and forming a zirconia-based film having a predetermined thickness by performing the film forming sequences for one or more cycles, wherein one cycle indicates that each of the ZrO2 film forming sequences and the SiO2 film forming sequences are repeated for the adjusted number of times of performances.
摘要翻译：本发明包括将待加工物体插入可维持真空的处理容器中，并使处理容器真空; 通过在处理容器中交替地向处理容器供给锆源和氧化剂多次，并在衬底上交替地供给硅源和氧化剂的步骤，从而在衬底上形成ZrO 2膜的顺序进行一次或多次，其中调节每个序列的执行次数，使得膜的Si浓度为约1atm％至约4atm％; 并且通过进行一个或多个循环的成膜顺序，形成具有预定厚度的氧化锆基膜，其中一个循环表示每个ZrO 2成膜顺序和SiO 2成膜顺序重复调节次数表演。

4. 发明申请

US20100186667A1 VERTICAL HEAT PROCESSING APPARATUS AND COMPONENT FOR SAME, FOR FORMING HIGH DIELECTRIC CONSTANT FILM 审中-公开
标题翻译：用于形成高介电常数膜的垂直热处理装置及其组件
公开(公告)号：US20100186667A1
公开(公告)日：2010-07-29
申请号：US12684321
申请日：2010-01-08
申请人： Katsutoshi ISHII , Yoshihiro Ishida , Katsushige Harada , Haruhiko Furuya
发明人： Katsutoshi ISHII , Yoshihiro Ishida , Katsushige Harada , Haruhiko Furuya
IPC分类号： C23C16/54
CPC分类号： C23C16/45578 , C23C16/46 , H01L21/67109
摘要： A vertical heat processing apparatus for forming a high dielectric constant film of a metal oxide by deposition includes a reaction container configured to accommodate a plurality of target substrates at intervals in a vertical direction; a support member configured to support the target substrates inside the reaction container; a heater configured to heat the target substrates inside the reaction container; an exhaust system configured to exhaust gas from inside the reaction container; and a gas supply system configured to supply a metal source gas and an oxidizing gas into the reaction container, wherein the gas supply system includes a gas nozzle disposed inside the reaction container, and the gas nozzle is made of a metal consisting mainly of titanium.
摘要翻译：用于通过沉积形成金属氧化物的高介电常数膜的垂直热处理装置包括：反应容器，其构造成在垂直方向上间隔地容纳多个目标基板; 支撑构件，其构造成在所述反应容器内部支撑所述目标基板; 加热器，其构造成加热反应容器内的目标基板; 构造成从反应容器内排出气体的排气系统; 以及气体供给系统，其构造成将金属源气体和氧化气体供给到所述反应容器中，所述气体供给系统包括设置在所述反应容器内的气体喷嘴，所述气体喷嘴由主要由钛构成的金属构成。

5. 发明授权

US08582921B2 Figure processing apparatus, figure processing method, and storage medium 有权
标题翻译：图形处理装置，图形处理方法和存储介质
公开(公告)号：US08582921B2
公开(公告)日：2013-11-12
申请号：US13278544
申请日：2011-10-21
申请人： Yoshihiro Ishida
发明人： Yoshihiro Ishida
IPC分类号： G06K9/32
CPC分类号： G06T9/20
摘要： When an image including a composite figure made of a predefined figure and a free-form figure is scanned, the position and shape of the free-form figure and the predefined figure are appropriately adjusted. The composite figure is separated into a predefined figure and a free-form figure. With respect to the separated predefined figure, a representative point is set at a predetermined position according to the type of the predefined figure and a representative point is set for the free-form figure based on a criterion according to a type of the free-form figure. If the representative point of a predefined figure is in the vicinity of the representative point of the free-form figure, the free-form figure is corrected based on the position of the representative point of the free-form figure and the position of the representative point of the predefined figure.
摘要翻译：当扫描包括由预定义图形和自由形状图形构成的复合图形的图像时，适当地调整自由形状图形和预定义图形的位置和形状。复合图被分成预定义的图形和自由形状的图形。对于分离的预定义图形，根据预定义图形的类型将代表点设置在预定位置，并且基于根据自由形式的类型的标准为自由形状图设置代表点数字。如果预定义数字的代表点在自由形式数字的代表点附近，则自由形式数字将根据自由形式数字的代表点的位置和代表的位置进行更正点的预定义图。

6. 发明授权

US08417029B2 Image processing apparatus and method, including fill-up processing 有权
标题翻译：图像处理装置和方法，包括填充处理
公开(公告)号：US08417029B2
公开(公告)日：2013-04-09
申请号：US12489986
申请日：2009-06-23
申请人： Yoshihiro Ishida , Tomotoshi Kanatsu , Taeko Yamazaki , Naoki Ito
发明人： Yoshihiro Ishida , Tomotoshi Kanatsu , Taeko Yamazaki , Naoki Ito
IPC分类号： G06K9/00 , G06K9/36
CPC分类号： H04N1/41 , G06K9/00456 , G06T7/11 , G06T2207/10008
摘要： An image in which at least one color component among a plurality of color components in an input color image has a resolution lower than that of the other color components is held as a base image. A rectangular region that includes an object image is extracted, a region of the object image and a region of a background image are specified in the rectangular region, and fill-up processing of the specified object image is executed in the base image. Fill-up processing executed at a boundary between the object image and the base image differs from fill-up processing executed at a boundary between the object image and the background image.
摘要翻译：其中输入彩色图像中的多个颜色分量中的至少一个颜色分量的分辨率低于其它颜色分量的分辨率的图像被保持为基本图像。提取包括对象图像的矩形区域，在矩形区域中指定对象图像的区域和背景图像的区域，并且在基本图像中执行指定对象图像的填充处理。在对象图像和基本图像之间的边界处执行的填充处理不同于在对象图像和背景图像之间的边界处执行的填充处理。

7. 发明授权

US07940965B2 Image processing apparatus and method and program storage medium 有权
标题翻译：图像处理装置及方法及程序存储介质
公开(公告)号：US07940965B2
公开(公告)日：2011-05-10
申请号：US12349139
申请日：2009-01-06
申请人： Yoshihiro Ishida
发明人： Yoshihiro Ishida
IPC分类号： G06K9/00 , G06K9/36 , G06K9/32 , G06F3/033 , G09G5/00
CPC分类号： H04N5/232 , G06K9/00228 , H04N5/23219
摘要： According to the present invention, the face of a subject person can be rapidly detected. An image input unit inputs an image to be processed. A photographing-position input unit inputs photographing-position information attached to the processed image. An angle-range information determination unit determines an angle range, where face detection should be performed to the processed image, on the basis of the information obtained by the photographing-position information input unit. On the basis of information indicating the determined angle range, under the control of a process control unit, a face detection unit performs face detection to the processed image input by the image input unit in predetermined angle increments. A face integration unit integrates all of face data detected by a basic-angle-range face detection unit into face information and then outputs the information.
摘要翻译：根据本发明，可以快速地检测被摄体的脸部。图像输入单元输入要处理的图像。拍摄位置输入单元输入附加到处理图像的拍摄位置信息。角度范围信息确定单元基于由拍摄位置信息输入单元获得的信息来确定对处理后的图像进行面部检测的角度范围。基于指示确定的角度范围的信息，在处理控制单元的控制下，面部检测单元以预定的角度增量对由图像输入单元输入的处理图像执行面部检测。面部积分单元将由基准角度范围面部检测单元检测出的全部面部数据整合到面部信息中，然后输出该信息。

8. 发明申请

US20100167507A1 PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD 审中-公开
标题翻译：等离子喷涂装置和等离子喷涂方法
公开(公告)号：US20100167507A1
公开(公告)日：2010-07-01
申请号：US12601993
申请日：2008-05-13
申请人： Masahiro Horigome , Yoshihiro Ishida
发明人： Masahiro Horigome , Yoshihiro Ishida
IPC分类号： H01L21/306 , C23C16/513 , C23C16/511 , C23C16/52
CPC分类号： H01L21/2236 , H01J37/32412
摘要： A plasma doping apparatus implants an impurity element into a surface of a processing target object W by using plasma. The apparatus includes a high frequency power supply 72 configured to supply a high frequency bias power to a mounting table 34 installed within a processing chamber 32; a gas feed unit 96 configured to supply a doping gas containing an impurity element into the processing chamber 32; and a plasma generation unit 78 configured to generate the plasma within the processing chamber 32. In accordance with this apparatus, a portion doped with the impurity element can be made very thin, and the impurity element can be rapidly doped in a high concentration.
摘要翻译：等离子体掺杂装置通过使用等离子体将杂质元素植入处理对象物W的表面。该装置包括被配置为向安装在处理室32内的安装台34提供高频偏置功率的高频电源72; 气体供给单元96，被配置为将含有杂质元素的掺杂气体供给到处理室32中; 以及等离子体生成单元78，其被配置为在处理室32内产生等离子体。根据该装置，可以使掺杂有杂质元素的部分非常薄，并且可以以高浓度快速掺杂杂质元素。

9. 发明申请

US20090324065A1 IMAGE PROCESSING APPARATUS AND METHOD 有权
标题翻译：图像处理装置和方法
公开(公告)号：US20090324065A1
公开(公告)日：2009-12-31
申请号：US12489986
申请日：2009-06-23
申请人： Yoshihiro Ishida , Tomotoshi Kanatsu , Taeko Yamazaki , Naoki Ito
发明人： Yoshihiro Ishida , Tomotoshi Kanatsu , Taeko Yamazaki , Naoki Ito
IPC分类号： G06K9/00
CPC分类号： H04N1/41 , G06K9/00456 , G06T7/11 , G06T2207/10008
摘要： An image in which at least one color component among a plurality of color components in an input color image has a resolution lower than that of the other color components is held as a base image. A rectangular region that includes an object image is extracted, a region of the object image and a region of a background image are specified in the rectangular region, and fill-up processing of the specified object image is executed in the base image. Fill-up processing executed at a boundary between the object image and the base image differs from fill-up processing executed at a boundary between the object image and the background image.
摘要翻译：其中输入彩色图像中的多个颜色分量中的至少一个颜色分量的分辨率低于其它颜色分量的分辨率的图像被保持为基本图像。提取包括对象图像的矩形区域，在矩形区域中指定对象图像的区域和背景图像的区域，并且在基本图像中执行指定对象图像的填充处理。在对象图像和基本图像之间的边界处执行的填充处理不同于在对象图像和背景图像之间的边界处执行的填充处理。

10. 发明申请

US20090285481A1 IMAGE PROCESSING APPARATUS AND METHOD THEREFOR 有权
标题翻译：图像处理装置及其方法
公开(公告)号：US20090285481A1
公开(公告)日：2009-11-19
申请号：US12508751
申请日：2009-07-24
申请人： Yoshihiro Ishida
发明人： Yoshihiro Ishida
IPC分类号： G06K9/46 , G06K9/00
CPC分类号： G06T5/001 , G06T2207/20008 , G06T2207/30201
摘要： To provide adaptive image processing for a portrait, face information about the face of a person contained in an image is acquired, and it is determined on the basis of the face information whether a significant personal face is contained in the image. If there is face information representing the presence of a significant personal face, adaptive processing adjustment information which adjusts the contents of high quality processing for a portrait, which should be executed for the process target image, is generated from the face information about the face of the person contained in the image. The high quality processing adjusted on the basis of the adaptive processing adjustment information is executed for the image.
摘要翻译：为了提供对于肖像的自适应图像处理，获取关于包含在图像中的人的面部的面部信息，并且基于面部信息确定在图像中是否包含重要的个人面部。如果存在表示存在重要个人面部的面部信息，则从面部信息生成针对处理目标图像执行的用于调整用于肖像的高品质处理的内容的自适应处理调整信息人物包含在图像中。对于图像执行基于自适应处理调整信息调整的高质量处理。

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