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    • 1. 发明授权
    • Method for vaporization of liquid organic feedstock and method for growth of insulation film
    • 液体有机原料汽化方法及绝缘膜生长方法
    • US06784118B2
    • 2004-08-31
    • US09838343
    • 2001-04-20
    • Yoshihiro HayashiJun KawaharaHirofumi Ono
    • Yoshihiro HayashiJun KawaharaHirofumi Ono
    • H01L2131
    • B05D1/62C23C16/4481
    • In order to vaporize an organic monomer at a high temperature and a high saturated vapor pressure in good efficiency and to grow an organic polymer film at a high rate in high vacuum by a plasma polymerization reaction of the resulting organic monomer gas, a liquid divinylsiloxanebisbenzocyclobutene (DVS-BCB) monomer is mixed with a carrier gas, and the mixture is then sprayed on a vaporization vacuum chamber held at a high temperature to form an aerosol made of liquid fine particles of the organic monomer, and a BCB monomer (organic monomer) is instantaneously vaporized via the aerosol to generate a BCB monomer gas (organic monomer gas). Consequently, the aerosol having a large specific surface area has a large vaporization area, and vaporization occurs by heating at a high temperature before a polymerization reaction occurs. Thus, 0.1 g/min or more of the BCB monomer gas can be formed at 200° C. and a high saturated vapor pressure, and a plasma polymerization BCB film can be formed at a high rate which is at least 5 times higher than in the ordinary film formation.
    • 为了在高温和高饱和蒸气压下以高效率汽化有机单体,并通过所得有机单体气体的等离子体聚合反应在高真空中高效率地生长有机聚合物膜,液体二乙烯基硅氧烷双苯并环丁烯( DVS-BCB)单体与载气混合,然后将该混合物喷在保持在高温下的蒸发真空室中,形成由有机单体的液体细颗粒制成的气溶胶,以及BCB单体(有机单体) 通过气溶胶瞬间蒸发以产生BCB单体气体(有机单体气体)。 因此,具有大的比表面积的气溶胶具有大的蒸发面积,并且在聚合反应发生之前在高温下加热发生蒸发。 因此,可以在200℃,高饱和蒸气压下形成0.1g /分钟以上的BCB单体气体,能够以比率高至少高5倍的高速度形成等离子体聚合BCB膜 普通电影形成。
    • 2. 发明授权
    • Cellulose dispersion
    • 纤维素分散体
    • US06541627B1
    • 2003-04-01
    • US09555639
    • 2000-06-01
    • Hirofumi OnoToshihiko MatsuiIkuya Miyamoto
    • Hirofumi OnoToshihiko MatsuiIkuya Miyamoto
    • C08B1600
    • C08J3/03C08J3/09C08J3/122C08J2301/02C08L1/02C09D101/02D21H19/42C08L2666/02
    • A cellulose dispersion which is a dispersion comprising a dispersing medium and a cellulose having a fraction of cellulose I type crystal component of not more than 0.1 and a fraction of cellulose II type crystal component of not more than 0.4 and in which the average particle diameter of the constitutive cellulose is not more than 5 &mgr;m. A cellulose particulate and a cellulose composite particulate which have an average particle diameter of 0.2 to 20 &mgr;m, a ratio of long diameter (L) to short diameter (D) observed through a scanning electron microscope (L/D) of not more than 1.2 and a coefficient of aggregation of 1.0 to 3.0. The present invention provides a cellulose dispersion which has an excellent effect such as dispersion stability or the like and is high in transparency. Moreover, it provides a cellulose particulate and a cellulose composite particulate which have such performances as no rough feel, excellent rolling properties, high dispersibility and the like.
    • 纤维素分散体,其是包含分散介质和纤维素的分散体,所述分散介质和纤维素的纤维素I型结晶组分的分数不大于0.1,纤维素II型结晶组分的分数不大于0.4,并且其中平均粒径 组成纤维素不超过5毫米。 平均粒径为0.2〜20μm的纤维素颗粒和纤维素复合颗粒,通过扫描电子显微镜(L / D)观察到的长径比(L)与短径(D)之比不大于1.2 并且聚集系数为1.0至3.0。 本发明提供了具有优异的分散稳定性等效果,透明性高的纤维素分散体。 此外,其提供具有无粗糙感,优异的滚动性,高分散性等性能的纤维素颗粒和纤维素复合颗粒。
    • 9. 发明申请
    • METHOD FOR VAPORIZING LIQUID MATERIAL CAPABLE OF VAPORIZING LIQUID MATERIAL AT LOW TEMPERATURE AND VAPORIZER USING THE SAME
    • 使用低温蒸发液体物质的液体材料蒸发方法和使用该方法
    • US20090065066A1
    • 2009-03-12
    • US11577634
    • 2006-09-06
    • Hirofumi Ono
    • Hirofumi Ono
    • F17D1/18C23C16/453
    • C23C16/4486Y10S261/65Y10T137/0391
    • A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.
    • 蒸发器具有由加热器加热的蒸发室; 位于蒸发室的底端部分并被加热器加热的初级过滤器; 液体材料供应部分,用于将流动控制的液体材料从蒸发室的上部朝向初级过滤器落下; 载气引导通道,用于将载气引导到初级过滤器的下侧; 以及用于从蒸发室的顶部排出包括载气和蒸发的液体材料的混合气体的材料输送通道。 落下到初级过滤器上的液体材料被部分蒸发,而其余部分通过经受从下面流动的载气提供的起泡效应而雾化。