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1. 发明申请

US20120206137A1 MONOLITHIC TRI-AXIS AMR SENSOR AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：单轴三轴传感器及其制造方法
公开(公告)号：US20120206137A1
公开(公告)日：2012-08-16
申请号：US13194329
申请日：2011-07-29
申请人： Yongyao Cai , Chongwon Byun , Yang Zhao , Leyue Jiang
发明人： Yongyao Cai , Chongwon Byun , Yang Zhao , Leyue Jiang
IPC分类号： G01R33/02
CPC分类号： G01R33/096 , G01R33/0206
摘要： A monolithic tri-axis anisotropic magnetoresistive (AMR) sensor and the method of manufacturing of the AMR sensor are presented. In one embodiment, the monolithic tri-axis AMR sensor includes (a) a substrate, (b) a first horizontal direction sensor disposed on the substrate, (c) a second horizontal direction sensor disposed on the substrate, (d) a third horizontal direction sensor disposed on the substrate, and (e) a flux concentrator disposed on the third horizontal direction sensor, wherein the flux concentrator is in cooperation with the third horizontal direction sensor to realize a function of a Z-axis sensor, such that the Z-axis direction can be effectively measured. The integration of the tri-axis AMR sensor is therefore accomplished. In addition, the integrated tri-axis AMR sensor has low production cost and improved reliability.
摘要翻译：介绍了一种单片三轴各向异性磁阻（AMR）传感器及其制造方法。在一个实施例中，单片三轴AMR传感器包括（a）基板，（b）设置在基板上的第一水平方向传感器，（c）设置在基板上的第二水平方向传感器，（d）第三水平设置在所述基板上的方向传感器，以及（e）设置在所述第三水平方向传感器上的集流器，其中所述集流器与所述第三水平方向传感器配合，以实现Z轴传感器的功能，使得Z 轴方向可以有效测量。因此实现了三轴AMR传感器的集成。另外，三轴AMR传感器的生产成本低，可靠性提高。

2. 发明申请

US20130249542A1 FOLDABLE SUBSTRATE 审中-公开
标题翻译：可折叠基板
公开(公告)号：US20130249542A1
公开(公告)日：2013-09-26
申请号：US13426341
申请日：2012-03-21
申请人： Yang Zhao , Haidong Liu , Yongyao Cai , Zongya Li , Noureddine Hawat , Jun Ma , Feng Zhang , Zhiwei Duan , Leyue Jiang
发明人： Yang Zhao , Haidong Liu , Yongyao Cai , Zongya Li , Noureddine Hawat , Jun Ma , Feng Zhang , Zhiwei Duan , Leyue Jiang
IPC分类号： G01R33/02 , H05K1/18 , B23P17/04 , B32B3/16 , B32B7/04
CPC分类号： B23P17/04 , B32B3/16 , B32B7/04 , G01R33/0005 , G01R33/0052 , G01R33/02 , H01L2224/48091 , H01L2224/73265 , H05K1/181 , H05K2201/10151 , H05K2201/10515 , H05K2201/1053 , H05K2201/10537 , H05K2201/2036 , Y02P70/611 , Y10T29/49796 , H01L2924/00014
摘要： A foldable substrate is provided that includes a first substrate portion with a first upper surface and a second substrate portion with a second upper surface. A foldable bridge portion couples the first substrate portion to the second substrate portion. The foldable bridge portion includes a coupling strip that extends from the first substrate portion to the second substrate portion with a gap corresponding to a portion of the coupling strip where the gap is defined between the first and second substrate portions by removing portions of a starting wafer substrate. The first and second portions, in one embodiment, include magnetic field sensors and the foldable bridge portion can be bent to arrange the two portions at a predetermined angle to one another. Once bent, the sensor package can be incorporated into a magnetic field sensor assembly to be integrated with other control circuitry.
摘要翻译：提供了一种可折叠基板，其包括具有第一上表面的第一基板部分和具有第二上表面的第二基板部分。可折叠桥接部分将第一基板部分耦合到第二基板部分。可折叠桥接部分包括一个从第一基底部分延伸到第二基底部分的连接条，其中间隙对应于连接条的一部分，其间通过去除起始晶片的部分在第一和第二基底部分之间限定间隙基质。在一个实施例中，第一和第二部分包括磁场传感器，并且可折叠的桥接部分可以被弯曲以将两个部分彼此预定的角度布置。一旦弯曲，传感器组件可以被结合到磁场传感器组件中以与其它控制电路集成。

3. 发明授权

US07424826B2 Single chip tri-axis accelerometer 有权
标题翻译：单片三轴加速度计
公开(公告)号：US07424826B2
公开(公告)日：2008-09-16
申请号：US11271035
申请日：2005-11-10
申请人： Yaping Hua , Leyue Jiang , Yongyao Cai , Albert Leung , Yang Zhao
发明人： Yaping Hua , Leyue Jiang , Yongyao Cai , Albert Leung , Yang Zhao
IPC分类号： G01P15/00
CPC分类号： G01P15/18 , G01P15/006
摘要： Single chip 3-axis thermal accelerometer devices include a substrate, at least one cavity etched in the substrate, a fluid disposed in the cavity, a bridge structure suspended over an opening of the cavity, and a plurality of heater elements and temperature sensing elements disposed on the bridge structure. The substrate has a substantially planar surface defined by X and Y coordinate axes, and the bridge structure is suspended over the opening of the cavity in the X-Y plane. In one embodiment, the bridge structure is configured to position at least two of the temperature sensing elements out of the X-Y plane. The heater and temperature sensing elements are disposed on the bridge structure in optimized arrangements for providing reduced temperature coefficients and for producing output voltages having reduced DC offset and drift.
摘要翻译：单芯片3轴热加速度计装置包括衬底，在衬底中蚀刻的至少一个腔，设置在空腔中的流体，悬挂在空腔的开口上的桥结构，以及多个加热器元件和温度感测元件，在桥梁结构上。衬底具有由X和Y坐标轴限定的基本平坦的表面，并且桥结构悬挂在X-Y平面中的空腔的开口上。在一个实施例中，桥结构被配置为将至少两个温度感测元件定位在X-Y平面之外。加热器和温度感测元件以优化的布置设置在桥结构上，以提供降低的温度系数并且用于产生具有降低的DC偏移和漂移的输出电压。

4. 发明申请

US20070101813A1 Single chip tri-axis accelerometer 有权
标题翻译：单片三轴加速度计
公开(公告)号：US20070101813A1
公开(公告)日：2007-05-10
申请号：US11271035
申请日：2005-11-10
申请人： Yaping Hua , Leyue Jiang , Yongyao Cai , Albert Leung , Yang Zhao
发明人： Yaping Hua , Leyue Jiang , Yongyao Cai , Albert Leung , Yang Zhao
IPC分类号： G01P15/00
CPC分类号： G01P15/18 , G01P15/006
摘要： Single chip 3-axis thermal accelerometer devices include a substrate, at least one cavity etched in the substrate, a fluid disposed in the cavity, a bridge structure suspended over an opening of the cavity, and a plurality of heater elements and temperature sensing elements disposed on the bridge structure. The substrate has a substantially planar surface defined by X and Y coordinate axes, and the bridge structure is suspended over the opening of the cavity in the X-Y plane. In one embodiment, the bridge structure is configured to position at least two of the temperature sensing elements out of the X-Y plane. The heater and temperature sensing elements are disposed on the bridge structure in optimized arrangements for providing reduced temperature coefficients and for producing output voltages having reduced DC offset and drift.
摘要翻译：单芯片3轴热加速度计装置包括衬底，在衬底中蚀刻的至少一个腔，设置在空腔中的流体，悬挂在空腔的开口上的桥结构，以及多个加热器元件和温度感测元件，在桥梁结构上。衬底具有由X和Y坐标轴限定的基本平坦的表面，并且桥结构悬挂在X-Y平面中的空腔的开口上。在一个实施例中，桥结构被配置为将至少两个温度感测元件定位在X-Y平面之外。加热器和温度感测元件以优化的布置设置在桥结构上，以提供降低的温度系数并且用于产生具有降低的DC偏移和漂移的输出电压。

5. 发明授权

US08146423B2 Ion discharge gyroscope 有权
标题翻译：离子放电陀螺仪
公开(公告)号：US08146423B2
公开(公告)日：2012-04-03
申请号：US12778258
申请日：2010-05-12
申请人： Yongyao Cai , Yang Zhao
发明人： Yongyao Cai , Yang Zhao
IPC分类号： G01P9/00
CPC分类号： G01P15/008 , G01C19/58 , G01P15/14
摘要： An ion discharge gyroscope measures rotational motion and linear acceleration by generating symmetrical ion jet streams and measuring respective amounts of the jet streams impinging on detectors located so as to intercept the ion jet streams. The ion jet streams will be diverted by operation of the Coriolis effect and the differences in the amount of each ion jet stream impinging on the detectors is an indication of rotational motion and linear acceleration. In one embodiment, the ion jet streams are heated and the respective temperatures of the detectors are measured. In another embodiment, the amounts of current flowing through each detector, as contributed by the ion jet streams, are measured and used to determine rotation and acceleration.
摘要翻译：离子放电陀螺仪通过产生对称的离子射流测量旋转运动和线性加速度，并测量冲击在被定位成拦截离子射流的检测器上的各种喷射流量。离子射流将通过科里奥利效应的转移而转移，并且撞击在检测器上的每个离子射流的量的差异是旋转运动和线性加速度的指示。在一个实施例中，加热离子射流并测量检测器的相应温度。在另一个实施例中，由离子射流贡献的流过每个检测器的电流量被测量并用于确定旋转和加速度。

6. 发明申请

US20110227569A1 MAGNETOMETER 有权
标题翻译：磁力计
公开(公告)号：US20110227569A1
公开(公告)日：2011-09-22
申请号：US12727616
申请日：2010-03-19
申请人： Yongyao Cai , Jerome S. Marcelino , Yang Zhao , Mark Laich , Haidong Liu , Zongya Li
发明人： Yongyao Cai , Jerome S. Marcelino , Yang Zhao , Mark Laich , Haidong Liu , Zongya Li
IPC分类号： G01R33/18
CPC分类号： G01R33/18 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetometer with only a SET operation for initiating a magnetic orientation within a magnetic field sensor based on anisotropic magnetoresistive (AMR) technology. Within the magnetometer, the relative orientations of the respective X, Y and Z axes detectors are maintained by a package in which all detectors are mounted on a single assembly with the Z axis sensor displaced and held orthogonal to the other two sensors by potting material. Shorting bars on respective barber pole structures are provided with a geometry that allows for closer placement of adjacent barber poles to one another. The barber pole structures are deposited in a nested orientation which provides for balanced resistance legs in a Wheatstone bridge construction.
摘要翻译：磁力计只有一个基于各向异性磁阻（AMR）技术在磁场传感器内启动磁性取向的SET操作。在磁力计内，相应的X，Y和Z轴检测器的相对取向由一个封装保持，其中所有检测器安装在单个组件上，Z轴传感器通过灌封材料移位并保持与其他两个传感器正交。相应理发杆结构上的短棒设置有允许相邻的理发杆彼此更靠近放置的几何形状。理发杆结构以嵌套方向沉积，这在惠斯通电桥结构中提供平衡的电阻支腿。

7. 发明申请

US20050274187A1 Z-axis thermal accelerometer 有权
标题翻译： Z轴热加速度计
公开(公告)号：US20050274187A1
公开(公告)日：2005-12-15
申请号：US11125759
申请日：2005-05-10
申请人： Yang Zhao , Yongyao Cai
发明人： Yang Zhao , Yongyao Cai
IPC分类号： G01P15/08 , G01P15/00
CPC分类号： G01P15/18 , G01P15/008
摘要： A thermal accelerometer device that allows up to three axes of acceleration sensing. The thermal accelerometer includes a substantially planar substrate, a cavity formed in the substrate, a heater element, and at least first and second temperature sensing elements. The heater element is suspended over the cavity, and the first and second temperature sensing elements are disposed along the X or Y axis in the substrate plane on opposite sides of and at equal distances from the heater element. The thermal accelerometer employs differential temperatures detected by the temperature sensing elements to provide indications of acceleration in the X or Y directions. Further, the thermal accelerometer employs a common mode temperature detected by the temperature sensing elements to provide an indication of acceleration along a Z axis perpendicular to the X and Y axes.
摘要翻译：一种允许三个加速度感测轴的热加速度计装置。热加速度计包括基本平坦的基板，形成在基板中的空腔，加热器元件以及至少第一和第二温度感测元件。加热器元件悬挂在空腔上，并且第一和第二温度感测元件沿着基板平面中的X或Y轴设置在与加热器元件相对的相对侧并且距离加热器元件等距离处。热加速度计采用由温度感测元件检测的差分温度来提供X或Y方向上的加速度指示。此外，热加速度计采用由温度感测元件检测的共模温度来提供沿着与X轴和Y轴垂直的Z轴的加速度的指示。

8. 发明申请

US20050274180A1 Method and circuitry for thermal accelerometer signal conditioning 有权
标题翻译：用于热加速度计信号调理的方法和电路
公开(公告)号：US20050274180A1
公开(公告)日：2005-12-15
申请号：US11146993
申请日：2005-06-07
申请人： Yang Zhao , Albert Leung , Michael Rebeschini , Gregory Pucci , Alexander Dribinsky , Yongyao Cai
发明人： Yang Zhao , Albert Leung , Michael Rebeschini , Gregory Pucci , Alexander Dribinsky , Yongyao Cai
IPC分类号： G01P15/00
CPC分类号： G01P15/008
摘要： A thermal accelerometer device that provides a compensation for sensitivity variations over temperature. The thermal accelerometer includes signal conditioning circuitry operative to receive analog signals representing a differential temperature is indicative of a sensed acceleration. The signal conditioning circuitry includes serially connected A-to-D and D-to-A converters, which implement a temperature dependent function and process the received signals to provide a compensation for sensitivity variations over a range of ambient temperature. To provide a ratiometric compensation for variations in power supply voltage, a buffered voltage proportional to the supply voltage is provided as a reference voltage to the D-to-A converter. The thermal accelerometer includes a self-test circuit for verifying the integrity of a heater, temperature sensors, and circuitry included within the device.
摘要翻译：一种热敏加速度计装置，可提供对温度敏感度变化的补偿。热加速度计包括信号调节电路，其操作以接收表示差分温度的模拟信号，其指示感测到的加速度。信号调理电路包括串行连接的A到D和D到A转换器，其实现温度依赖功能并处理接收到的信号以提供在环境温度范围内的灵敏度变化的补偿。为了提供电源电压变化的比例补偿，将与电源电压成比例的缓冲电压作为参考电压提供给D转换器。热加速度计包括用于验证加热器，温度传感器和包括在装置内的电路的完整性的自检电路。

9. 发明授权

US08525514B2 Magnetometer 有权
标题翻译：磁力计
公开(公告)号：US08525514B2
公开(公告)日：2013-09-03
申请号：US12727616
申请日：2010-03-19
申请人： Yongyao Cai , Jerome S. Marcelino , Yang Zhao , Mark Laich , Haidong Liu , Zongya Li
发明人： Yongyao Cai , Jerome S. Marcelino , Yang Zhao , Mark Laich , Haidong Liu , Zongya Li
IPC分类号： G01R33/02
CPC分类号： G01R33/18 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetometer with only a SET operation for initiating a magnetic orientation within a magnetic field sensor based on anisotropic magnetoresistive (AMR) technology. Within the magnetometer, the relative orientations of the respective X, Y and Z axes detectors are maintained by a package in which all detectors are mounted on a single assembly with the Z axis sensor displaced and held orthogonal to the other two sensors by potting material. Shorting bars on respective barber pole structures are provided with a geometry that allows for closer placement of adjacent barber poles to one another. The barber pole structures are deposited in a nested orientation which provides for balanced resistance legs in a Wheatstone bridge construction.
摘要翻译：磁力计只有一个基于各向异性磁阻（AMR）技术在磁场传感器内启动磁性取向的SET操作。在磁力计内，相应的X，Y和Z轴检测器的相对取向由一个封装保持，其中所有检测器安装在单个组件上，Z轴传感器通过灌封材料移位并保持与其他两个传感器正交。相应理发杆结构上的短棒设置有允许相邻的理发杆彼此更靠近放置的几何形状。理发杆结构以嵌套方向沉积，这在惠斯通电桥结构中提供平衡的电阻支腿。

10. 发明申请

US20110005314A1 ION DISCHARGE GYROSCOPE 有权
标题翻译：离子放电陀螺仪
公开(公告)号：US20110005314A1
公开(公告)日：2011-01-13
申请号：US12778258
申请日：2010-05-12
申请人： Yongyao Cai , Yang Zhao
发明人： Yongyao Cai , Yang Zhao
IPC分类号： G01P9/00
CPC分类号： G01P15/008 , G01C19/58 , G01P15/14
摘要： An ion discharge gyroscope measures rotational motion and linear acceleration by generating symmetrical ion jet streams and measuring respective amounts of the jet streams impinging on detectors located so as to intercept the ion jet streams. The ion jet streams will be diverted by operation of the Coriolis effect and the differences in the amount of each ion jet stream impinging on the detectors is an indication of rotational motion and linear acceleration. In one embodiment, the ion jet streams are heated and the respective temperatures of the detectors are measured. In another embodiment, the amounts of current flowing through each detector, as contributed by the ion jet streams, are measured and used to determine rotation and acceleration.
摘要翻译：离子放电陀螺仪通过产生对称的离子射流测量旋转运动和线性加速度，并测量冲击在被定位成拦截离子射流的检测器上的各种喷射流量。离子射流将通过科里奥利效应的转移而转移，并且撞击在检测器上的每个离子射流的量的差异是旋转运动和线性加速度的指示。在一个实施例中，加热离子射流并测量检测器的相应温度。在另一个实施例中，由离子射流贡献的流过每个检测器的电流量被测量并用于确定旋转和加速度。

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