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    • 4. 发明授权
    • Method of manufacturing spacers on sidewalls of titanium polycide gate
    • 在多晶硅化钛栅极的侧壁上制造间隔物的方法
    • US07037796B1
    • 2006-05-02
    • US09598673
    • 2000-06-20
    • Se Aug JangTae Kyun Kim
    • Se Aug JangTae Kyun Kim
    • H01L21/336
    • H01L21/28061H01L29/6656H01L29/6659H01L29/7833
    • Disclosed is a method for manufacturing a semiconductor device, more particularly to a method of forming a spacer on side-walls of a titanium polycide gate. The method for manufacturing the semiconductor device is as follows. There is provided a semiconductor substrate in which a gate oxide layer, a polysilicon layer, a titanium silicide layer and a patterned hard mask layer are sequentially formed. Herein, the titanium polycide gate is fabricated by an etching step employing the patterned hard mask. Afterward, the substrate is thermal-treated at temperature of 700˜750° C. according to a gate re-oxidation process, thereby forming a re-oxidation layer on side-walls of the gate and on the substrate surface. Next, an oxide layer for spacer is deposited on the resultant at process temperature of 350˜750 C., and a nitride layer is deposited on the oxide layer. Thereafter, a spacer is formed on side-walls of the gate and the hard mask layer by blanket-etching the nitride layer, the oxide layer and the re-oxidation layer.
    • 公开了半导体器件的制造方法,更具体地说,涉及在多晶硅化钛栅极的侧壁上形成间隔物的方法。 半导体器件的制造方法如下。 提供了其中顺序地形成栅氧化层,多晶硅层,硅化钛层和图案化硬掩模层的半导体衬底。 这里,通过使用图案化硬掩模的蚀刻步骤制造多晶硅化钛栅极。 然后,根据栅极再氧化工艺,在700〜750℃的温度下对衬底进行热处理,从而在栅极的侧壁和衬底表面上形成再氧化层。 接下来,在350〜750℃的工艺温度下,在所得物上沉积用于间隔物的氧化物层,并且在氧化物层上沉积氮化物层。 此后,通过对氮化物层,氧化物层和再氧化层进行毯式蚀刻,在栅极和硬掩模层的侧壁上形成间隔物。
    • 5. 发明授权
    • Method for fabricating a MOSFET device
    • 制造MOSFET器件的方法
    • US06534352B1
    • 2003-03-18
    • US09885083
    • 2001-06-21
    • Tae Kyun Kim
    • Tae Kyun Kim
    • H01L21336
    • H01L29/518H01L21/2652H01L21/28167H01L29/66537H01L29/66545H01L29/66621
    • Disclosed is a MOSFET fabrication method capable of forming an ultra shallow junction while ensuring stability in controlling threshold voltage. The disclosed method relies on the use of a sacrificial gate structure to form LDD regions and the addition of side wall spacers to form source/drain regions, followed by the deposition of an interlayer insulating film. The sacrificial gate structure is then removed to form a groove in the interlayer insulating film that exposes a portion of the silicon substrate. A sacrificial oxide is grown on the exposed silicon substrate and impurity ions are implanted through the oxide to adjust the threshold voltage. The sacrificial oxide is then removed and replaced by a high quality gate insulating film. A metal gate electrode is then formed in the groove above the gate insulating film, thereby forming a MOSFET device having a metal gate.
    • 公开了一种能够形成超浅结的MOSFET制造方法,同时确保控制阈值电压的稳定性。 所公开的方法依赖于使用牺牲栅极结构来形成LDD区域以及添加侧壁间隔物以形成源极/漏极区域,然后沉积层间绝缘膜。 然后去除牺牲栅极结构以在层间绝缘膜中形成暴露硅衬底的一部分的凹槽。 在暴露的硅衬底上生长牺牲氧化物,并且通过氧化物注入杂质离子以调节阈值电压。 然后去除牺牲氧化物并用高质量的栅极绝缘膜代替。 然后在栅极绝缘膜上方的沟槽中形成金属栅电极,从而形成具有金属栅极的MOSFET器件。
    • 6. 发明授权
    • Method for forming gate electrode for a semiconductor device
    • 用于形成半导体器件的栅电极的方法
    • US06417055B2
    • 2002-07-09
    • US09895295
    • 2001-07-02
    • Se Aug JangTae Kyun KimIn Seok Yeo
    • Se Aug JangTae Kyun KimIn Seok Yeo
    • H01L21336
    • H01L21/76897H01L29/665
    • The present invention relates to a method for forming a gate electrode in a semiconductor device that is more tolerant of misalignment during contact formation processing. The improved gate structure reduces the formation of shorts between the gate electrode and subsequently formed conductors such as DRAM bit lines and storage lines. The gate electrode is formed from a damascene metal gate electrode having adjacent insulating spacers by partially etching the metal gate electrode to form a trench; depositing a nitride film; and etching the nitride film to form additional protective insulators above outer portions of the gate electrodes. With these protective insulators in place, subsequent contact processing becomes more tolerant of misalignment, reducing rework and improving yield.
    • 本发明涉及在接触形成处理中更容忍未对准的半导体器件中形成栅电极的方法。 改进的栅极结构减少了栅电极和随后形成的导体(例如DRAM位线和存储线)之间的短路的形成。 栅电极由具有相邻绝缘间隔物的镶嵌金属栅电极形成,部分蚀刻金属栅电极以形成沟槽; 沉积氮化物膜; 并蚀刻氮化物膜以在栅电极的外部部分上形成附加的保护绝缘体。 通过这些保护绝缘子到位,随后的接触处理变得更加容忍不对准,减少返工和提高产量。
    • 7. 发明授权
    • Monitoring system using real-time simulator
    • 使用实时模拟器的监控系统
    • US08249851B2
    • 2012-08-21
    • US12351525
    • 2009-01-09
    • Su Chul NamJae Gul LeeSeung Tae ChaJeong Hoon ShinTae Kyun Kim
    • Su Chul NamJae Gul LeeSeung Tae ChaJeong Hoon ShinTae Kyun Kim
    • G06F17/50
    • G01R31/088
    • A monitoring system using a real-time simulator, providing a simulation environment of a real electric power system that enables testing of a new electric power system control facility. The operation of the new electric power system control facility and effects thereof on a real electric power system can be evaluated before actual installation. The monitoring system includes a test piece installed in an electric power system; a simulator connected to the test piece, and deriving electric power system simulation data by simulating the electric power system with respect to the test piece; a multimedia interface (MMI) platform interworking with the simulator, providing the simulator with electric power system status data for simulating the electric power system, and receiving the electric power system simulation data from the simulator; and an MMI client interworking with the MMI platform to display the electric power system simulation data from the MMI platform.
    • 一种使用实时模拟器的监控系统,提供实时电力系统的仿真环境,能够测试新的电力系统控制设施。 可以在实际安装之前对新电力系统控制设施的运行及其对真实电力系统的影响进行评估。 监控系统包括安装在电力系统中的试件; 连接到试件的模拟器,通过相对于试件模拟电力系统得出电力系统模拟数据; 与模拟器互通的多媒体接口(MMI)平台,为模拟器提供用于模拟电力系统的电力系统状态数据,并从模拟器接收电力系统仿真数据; 以及与MMI平台互通的MMI客户端,以显示MMI平台的电力系统仿真数据。
    • 8. 发明授权
    • Fluorinated polyethers having perfluorinated aliphatic group and optical waveguide using the same
    • 具有全氟化脂族基团的氟化聚醚和使用其的光波导
    • US06946534B2
    • 2005-09-20
    • US09964653
    • 2001-09-28
    • Tae Kyun KimJi Hyang Kim
    • Tae Kyun KimJi Hyang Kim
    • C08G65/323G02B6/12G02B6/122G02B6/132G02B6/136C07C41/22
    • G02B6/136G02B6/1221G02B6/132G02B2006/12176
    • The present invention relates to fluorinated polyethers having a fluorinated aliphatic group at a main chain as represented by the formula (1), as well as a waveguide fabricated using the same: where RF represents OCH2(CF2)nCH2O, or OCH2CF2O(CF2CF2O)nCF2CH2O, where n is a natural number ranging from 1 to 12; Ar1 represents  where B is not present or a C═O group, or Ar1 represents  where Hal is one selected from F, Cl, Br and I; Ar2 represents  where D is one selected from —C(CF3)2, —C(CH3)2, —CO—, —SO2—, —O— and —S—, or Ar2 represents  where R1 and R2 are the same or different and each independently represents a halogen atom selected from F, Cl, Br and I, and m is a natural number of 1-3, or Ar2 represents E represents H, or  where P is H or a substituted or unsubstituted phenyl group; x is a number ranging from 0.1 to 1.0; y is 1.0−x.
    • 本发明涉及在式(1)表示的主链上具有氟化脂肪族基团的氟化聚醚,以及使用其制造的波导管,其中R 1表示OCH (CF 2)2 CH 2 O 2或OCH 2 2 CF 2(CH 2)2 CH 2 O(CF 2 CF 2 O)O 2 CF 2 CH 2, SUB> O,其中n是1至12的自然数; Ar 1表示不存在B或C-O基团,或Ar 1表示Hal为选自F,Cl,Br和I中的一个; Ar 2表示其中D是选自-C(CF 3)2)2,-C(CH 3)3, )-SO 2 - , - CO - , - SO 2 - , - O-和-S-或Ar 2表示其中R 1, 1和R 2相同或不同,并且各自独立地表示选自F,Cl,Br和I的卤素原子,m是1-3的自然数,或Ar 2表示E表示H,或其中P为H或取代或未取代的苯基; x为0.1〜1.0的数; y为1.0-x。