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    • 1. 发明申请
    • ELECTROMECHANICAL SYSTEMS DEVICE WITH NON-UNIFORM GAP UNDER MOVABLE ELEMENT
    • 机电系统装置与可移动元件下的非均匀接缝
    • US20130088498A1
    • 2013-04-11
    • US13269285
    • 2011-10-07
    • Yi TaoKostadin DjordjevFan Zhong
    • Yi TaoKostadin DjordjevFan Zhong
    • G06T1/00G02B26/00H01L21/30
    • G02B26/001
    • Systems, methods and apparatus are provided for electromechanical systems devices having a non-uniform gap under a mechanical layer. An electromechanical systems device includes a movable element supported at its edges over a substrate by at least two support structures. The movable element can be spaced from the substrate by a gap having two or more different heights in two or more corresponding distinct regions. The gap has a first height in a first region below the gap, such as an active area of the device, and a second height in a second region adjacent the support structure. In an interferometric modulator implementation, the second region can be encompasses within an anchor region with a black mask.
    • 为在机械层下具有不均匀间隙的机电系统装置提供系统,方法和装置。 机电系统装置包括通过至少两个支撑结构在其衬底上的边缘处支撑的可移动元件。 可移动元件可以在两个或更多个相应的不同区域中与衬底间隔开具有两个或更多个不同高度的间隙。 间隙在间隙下方的第一区域中具有第一高度,例如装置的有效面积,以及与支撑结构相邻的第二区域中的第二高度。 在干涉式调制器实现中,第二区域可以包围在具有黑色掩模的锚定区域内。