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1. 发明授权

US09134527B2 Pixel via and methods of forming the same 有权
标题翻译：像素通道和形成方法
公开(公告)号：US09134527B2
公开(公告)日：2015-09-15
申请号：US13079599
申请日：2011-04-04
申请人： Hojin Lee , Fan Zhong , Yi Tao
发明人： Hojin Lee , Fan Zhong , Yi Tao
IPC分类号： G02B26/00 , B81B7/00
CPC分类号： G02B26/001 , B81B7/0006 , B81B2201/047 , Y10T29/49002
摘要： This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners and along at least one edge region of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, and depositing a mechanical layer over the optical stack. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via disposed in the dielectric layer and electrically connecting the stationary electrode to the black mask, the via disposed in a position along an edge of the first pixel, spaced offset from the edge of the first pixel in a direction towards the center of the first pixel.
摘要翻译：本公开提供了用于像素通孔的系统，方法和装置。在一个方面，一种形成具有多个像素的机电装置的方法包括在四个角中的每一个并且沿着每个像素的至少一个边缘区域在基板上沉积导电黑色掩模，在黑色掩模上沉积介电层在电介质层上沉积包括固定电极的光学堆叠，并在光学堆叠上沉积机械层。所述方法还包括在所述多个像素的第一像素中提供导电通孔，所述通孔设置在所述电介质层中，并且将所述固定电极电连接到所述黑色掩模，所述通孔设置在沿着所述第一像素的边缘的位置，在朝向第一像素的中心的方向上偏离第一像素的边缘。

2. 发明授权

US08659816B2 Mechanical layer and methods of making the same 失效
标题翻译：机械层及其制作方法
公开(公告)号：US08659816B2
公开(公告)日：2014-02-25
申请号：US13093716
申请日：2011-04-25
申请人： Yi Tao , Hojin Lee , Fan Zhong
发明人： Yi Tao , Hojin Lee , Fan Zhong
IPC分类号： G02B26/00 , G09G3/34
CPC分类号： G02B26/001
摘要： This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.
摘要翻译：本公开提供了机械层及其形成方法。一方面，形成像素的方法包括在衬底上沉积黑色掩模，在黑色掩模上沉积光学堆叠，以及在光学堆叠上形成机械层。黑色掩模沿着像素的一侧的至少一部分设置，并且机械层在机械层和光学堆叠之间限定空腔。机械层包括反射层，电介质层和盖层，并且介电层设置在反射层和盖层之间。该方法还包括沿着像素的侧面在机械层的电介质层中形成凹口，以便沿像素的侧面减小电介质层与黑色掩模的重叠。

3. 发明申请

US20120248478A1 PIXEL VIA AND METHODS OF FORMING THE SAME 有权
标题翻译：像素及其形成方法
公开(公告)号：US20120248478A1
公开(公告)日：2012-10-04
申请号：US13079487
申请日：2011-04-04
申请人： Hojin Lee , Fan Zhong , Yi Tao
发明人： Hojin Lee , Fan Zhong , Yi Tao
IPC分类号： H01L33/44 , H01L33/60
CPC分类号： G02B26/001
摘要： This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, depositing a mechanical layer over the optical stack, and anchoring the mechanical layer over the optical stack at each corner of each pixel. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via in the dielectric layer electrically connecting the stationary electrode to the black mask, the via disposed at a corner of the first pixel, offset from where the mechanical layer is anchored over the optical stack in an optically non-active area of the first pixel.
摘要翻译：本公开提供了用于像素通孔的系统，方法和装置。一方面，一种形成具有多个像素的机电装置的方法包括：在每个像素的四个角中的每一个的基板上沉积导电黑色掩模，在黑色掩模上沉积介电层，沉积包括在电介质层上沉积固定电极，在光学堆叠上沉积机械层，并将机械层固定在每个像素的每个角落的光学堆叠上。所述方法还包括在所述多个像素的第一像素中提供导电通孔，所述电介质层中的所述通孔将所述固定电极电连接到所述黑色掩模，所述通孔设置在所述第一像素的拐角处，偏离所述机械层在第一像素的光学非有效区域中锚定在光学堆叠上。

4. 发明授权

US08963159B2 Pixel via and methods of forming the same 有权
标题翻译：像素通道和形成方法
公开(公告)号：US08963159B2
公开(公告)日：2015-02-24
申请号：US13079487
申请日：2011-04-04
申请人： Hojin Lee , Fan Zhong , Yi Tao
发明人： Hojin Lee , Fan Zhong , Yi Tao
IPC分类号： H01L29/04 , G02B26/00
CPC分类号： G02B26/001
摘要： This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, depositing a mechanical layer over the optical stack, and anchoring the mechanical layer over the optical stack at each corner of each pixel. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via in the dielectric layer electrically connecting the stationary electrode to the black mask, the via disposed at a corner of the first pixel, offset from where the mechanical layer is anchored over the optical stack in an optically non-active area of the first pixel.
摘要翻译：本公开提供了用于像素通孔的系统，方法和装置。一方面，一种形成具有多个像素的机电装置的方法包括：在每个像素的四个角中的每一个的基板上沉积导电黑色掩模，在黑色掩模上沉积介电层，沉积包括在电介质层上沉积固定电极，在光学堆叠上沉积机械层，并将机械层固定在每个像素的每个角落的光学堆叠上。所述方法还包括在所述多个像素的第一像素中提供导电通孔，所述电介质层中的所述通孔将所述固定电极电连接到所述黑色掩模，所述通孔设置在所述第一像素的拐角处，偏离所述机械层在第一像素的光学非有效区域中锚定在光学堆叠上。

5. 发明申请

US20120268430A1 MECHANICAL LAYER AND METHODS OF MAKING THE SAME 失效
标题翻译：机械层及其制造方法
公开(公告)号：US20120268430A1
公开(公告)日：2012-10-25
申请号：US13093716
申请日：2011-04-25
申请人： Yi Tao , Hojin Lee , Fan Zhong
发明人： Yi Tao , Hojin Lee , Fan Zhong
IPC分类号： G06F3/038 , H05K13/00 , G02B26/00
CPC分类号： G02B26/001
摘要： This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.
摘要翻译：本公开提供了机械层及其形成方法。一方面，形成像素的方法包括在衬底上沉积黑色掩模，在黑色掩模上沉积光学堆叠，以及在光学堆叠上形成机械层。黑色掩模沿着像素的一侧的至少一部分设置，并且机械层在机械层和光学堆叠之间限定空腔。机械层包括反射层，电介质层和盖层，并且介电层设置在反射层和盖层之间。该方法还包括沿着像素的侧面在机械层的电介质层中形成凹口，以便沿像素的侧面减小电介质层与黑色掩模的重叠。

6. 发明申请

US20120249558A1 PIXEL VIA AND METHODS OF FORMING THE SAME 有权
标题翻译：像素及其形成方法
公开(公告)号：US20120249558A1
公开(公告)日：2012-10-04
申请号：US13079599
申请日：2011-04-04
申请人： Hojin Lee , Fan Zhong , Yi Tao
发明人： Hojin Lee , Fan Zhong , Yi Tao
IPC分类号： G02B26/00 , H05K13/00 , G06T1/00
CPC分类号： G02B26/001 , B81B7/0006 , B81B2201/047 , Y10T29/49002
摘要： This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners and along at least one edge region of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, and depositing a mechanical layer over the optical stack. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via disposed in the dielectric layer and electrically connecting the stationary electrode to the black mask, the via disposed in a position along an edge of the first pixel, spaced offset from the edge of the first pixel in a direction towards the center of the first pixel.
摘要翻译：本公开提供了用于像素通孔的系统，方法和装置。在一个方面，一种形成具有多个像素的机电装置的方法包括在四个角中的每一个并且沿着每个像素的至少一个边缘区域在基板上沉积导电黑色掩模，在黑色掩模上沉积介电层在电介质层上沉积包括固定电极的光学堆叠，并在光学堆叠上沉积机械层。所述方法还包括在所述多个像素的第一像素中提供导电通孔，所述通孔设置在所述电介质层中，并且将所述固定电极电连接到所述黑色掩模，所述通孔设置在沿着所述第一像素的边缘的位置，在朝向第一像素的中心的方向上偏离第一像素的边缘。

7. 发明申请

US20140071139A1 IMOD PIXEL ARCHITECTURE FOR IMPROVED FILL FACTOR, FRAME RATE AND STICTION PERFORMANCE 审中-公开
标题翻译：改进填充因子，框架速率和姿态性能的IMOD像素架构
公开(公告)号：US20140071139A1
公开(公告)日：2014-03-13
申请号：US13614973
申请日：2012-09-13
申请人： Kostadin D. Djordjev , Alok Govil , Yi Tao , Fan Zhong
发明人： Kostadin D. Djordjev , Alok Govil , Yi Tao , Fan Zhong
IPC分类号： G06T1/00 , B05D5/12 , G02B26/00 , B05D5/06
CPC分类号： G02B26/001
摘要： Pixels that include display elements that are configured with different structural dimensions corresponding to the color of light they provide are disclosed. In one implementation, a display device includes an array having a plurality of electromechanical pixels disposed on a substrate, each pixel including at least a first display element and a second display element. Each of the first and second display elements interferometrically modulating light by moving a reflective element between a relaxed position spaced apart from the substrate to an actuated position further away from the substrate than the relaxed position by applying a voltage across the reflective element and a stationary electrode. The stationary electrode of each display element is sized to provide actuation of the movable reflective element using the same actuation voltage even though the electrical gap through which the reflective element moves is different within a pixel.
摘要翻译：公开了包括配置有不同结构尺寸的显示元件的像素，其对应于它们提供的光的颜色。在一个实施方式中，显示装置包括具有设置在基板上的多个机电像素的阵列，每个像素至少包括第一显示元件和第二显示元件。第一和第二显示元件中的每一个通过在反射元件和电极之间施加电压使反射元件在与基板间隔开的松弛位置与远离基板的致动位置之间移动而干涉地调制光，。每个显示元件的固定电极的尺寸设置成使用相同的致动电压来提供可移动反射元件的致动，即使反射元件移动的电隙在像素内是不同的。

8. 发明申请

US20130088498A1 ELECTROMECHANICAL SYSTEMS DEVICE WITH NON-UNIFORM GAP UNDER MOVABLE ELEMENT 审中-公开
标题翻译：机电系统装置与可移动元件下的非均匀接缝
公开(公告)号：US20130088498A1
公开(公告)日：2013-04-11
申请号：US13269285
申请日：2011-10-07
申请人： Yi Tao , Kostadin Djordjev , Fan Zhong
发明人： Yi Tao , Kostadin Djordjev , Fan Zhong
IPC分类号： G06T1/00 , G02B26/00 , H01L21/30
CPC分类号： G02B26/001
摘要： Systems, methods and apparatus are provided for electromechanical systems devices having a non-uniform gap under a mechanical layer. An electromechanical systems device includes a movable element supported at its edges over a substrate by at least two support structures. The movable element can be spaced from the substrate by a gap having two or more different heights in two or more corresponding distinct regions. The gap has a first height in a first region below the gap, such as an active area of the device, and a second height in a second region adjacent the support structure. In an interferometric modulator implementation, the second region can be encompasses within an anchor region with a black mask.
摘要翻译：为在机械层下具有不均匀间隙的机电系统装置提供系统，方法和装置。机电系统装置包括通过至少两个支撑结构在其衬底上的边缘处支撑的可移动元件。可移动元件可以在两个或更多个相应的不同区域中与衬底间隔开具有两个或更多个不同高度的间隙。间隙在间隙下方的第一区域中具有第一高度，例如装置的有效面积，以及与支撑结构相邻的第二区域中的第二高度。在干涉式调制器实现中，第二区域可以包围在具有黑色掩模的锚定区域内。

9. 发明授权

US08270056B2 Display device with openings between sub-pixels and method of making same 有权
标题翻译：具有子像素之间的开口的显示装置及其制造方法
公开(公告)号：US08270056B2
公开(公告)日：2012-09-18
申请号：US12409425
申请日：2009-03-23
申请人： Yi Tao , Fan Zhong , Marc Mignard
发明人： Yi Tao , Fan Zhong , Marc Mignard
IPC分类号： G02B26/08 , G02B7/188
CPC分类号： G02B26/001 , B81B3/0086 , B81B2201/047 , B81B2203/053 , B81B2207/053
摘要： An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.
摘要翻译：机电系统装置包括设置在基板上的多个支撑件和设置在多个支撑件上的可变形反射层。可变形反射层包括沿第一方向延伸的多个大致平行的列。每列具有一个或多个槽，其大致垂直于第一方向在第二方向上延伸。可以在列的子部分的边界边缘处创建槽，以便部分地机械地分离子部分而不断开它们。制造机电装置的方法包括在衬底上沉积导电的可变形反射层，去除可变形层的一个或多个部分以形成多个电隔离的柱，并且在至少一个列。

10. 发明授权

US08817357B2 Mechanical layer and methods of forming the same 有权
标题翻译：机械层及其形成方法
公开(公告)号：US08817357B2
公开(公告)日：2014-08-26
申请号：US13082955
申请日：2011-04-08
申请人： Yi Tao , Fan Zhong , Wilhelmus A. de Groot
发明人： Yi Tao , Fan Zhong , Wilhelmus A. de Groot
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： This disclosure provides mechanical layers and methods of forming the same. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer having an actuated position and a relaxed position. The mechanical layer is spaced from the substrate to define a collapsible gap. The gap is in a collapsed condition when the mechanical layer is in the actuated position and in a non-collapsed condition when the mechanical layer is in the relaxed position. The mechanical layer includes a reflective layer, a conductive layer, and a supporting layer. The supporting layer is positioned between the reflective layer and the conductive layer and is configured to support the mechanical layer.
摘要翻译：本公开提供了机械层及其形成方法。一方面，机电系统装置包括基板和具有致动位置和松弛位置的机械层。机械层与衬底间隔开以限定可折叠间隙。当机械层处于松弛位置时，机械层处于致动位置并处于非塌陷状态时，间隙处于折叠状态。机械层包括反射层，导电层和支撑层。支撑层位于反射层和导电层之间，并被构造成支撑机械层。

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