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    • 9. 发明授权
    • Ion-trap mass spectrometer driven by a monolithic photodiode array
    • 离子阱质谱仪由单片光电二极管阵列驱动
    • US08203118B2
    • 2012-06-19
    • US12816875
    • 2010-06-16
    • Wei YangAlex Gu
    • Wei YangAlex Gu
    • G01N33/00G01N33/48G08B5/00G01B9/00
    • H01J49/0018H01J49/022H01J49/424H01L27/1446
    • A chip-scale ion-trap mass spectrometer driven by a monolithic photodiode array and a method of fabricating the same. A high-voltage photovoltaic source is located in proximity to the ion-trap mass spectrometer structure. The high-voltage photovoltaic source includes monolithically fabricated and serially connected photodiodes. An external light source illuminates the photodiodes to generate a high voltage across the photodiode array. An RF voltage modulation is attained by modulating the light source at a desired RF frequency. The high-voltage photodiode array may be monolithically fabricated in association with the ion-trap mass spectrometer. The photodiode array requires a small area compared to the ion-trap mass spectrometer size as the spectrometer typically possess a very small capacitance and a low power consumption.
    • 由单片光电二极管阵列驱动的芯片级离子阱质谱仪及其制造方法。 高压光伏源位于离子阱质谱仪结构附近。 高压光伏源包括单片制造和串联连接的光电二极管。 外部光源照亮光电二极管以在光电二极管阵列上产生高电压。 通过以期望的RF频率调制光源来获得RF电压调制。 高压光电二极管阵列可以与离子阱质谱仪联合地整体制造。 与离子阱质谱仪尺寸相比,光电二极管阵列需要小的面积,因为光谱仪通常具有非常小的电容和低功耗。