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1. 发明申请

US20050090095A1 Method to fabricate aligned dual damascene openings 有权
公开(公告)号：US20050090095A1
公开(公告)日：2005-04-28
申请号：US10690998
申请日：2003-10-22
申请人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Tan , Alan Cuthbertson , Chin Neo
发明人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Tan , Alan Cuthbertson , Chin Neo
IPC分类号： H01L21/4763 , H01L21/768 , H01L29/06
CPC分类号： H01L21/76807 , H01L21/76829 , H01L21/76834
摘要： A method of forming an aligned dual damascene opening, comprising including the following sequential steps. A structure having a metal structure formed thereover is provided. A layer stack is formed over the metal structure. The layer stack comprises, in ascending order: a bottom etch stop layer; a lower dielectric material layer; a middle etch stop layer; a middle dielectric material layer; and an upper dielectric layer. The upper dielectric layer is patterned to form an opening exposing a portion of the underlying middle dielectric material layer. The opening having a width. A patterned mask layer is formed over the patterned upper dielectric layer leaving exposed opposing portions of the patterned upper dielectric layer. The middle dielectric material layer is patterned to form an opening therein using the patterned mask layer and the exposed portions of the upper dielectric layer as masks. The middle dielectric material layer opening exposing a portion of the middle etch stop layer. The middle etch stop layer is removed at its exposed portion to form a patterned middle etch stop layer having an opening exposing a portion of the lower dielectric material layer. Simultaneously patterning: the patterned middle dielectric material layer using the patterned upper dielectric layer as a mask to form an inchoate upper trench opening; and the lower dielectric material layer using the patterned mask layer and the patterned middle etch stop layer as masks to form an inchoate lower via opening aligned with the inchoate upper trench opening. The inchoate lower via opening exposing a portion of the underlying bottom etch stop layer. The patterned mask layer is removed. The patterned upper dielectric material layer, the exposed portions of the patterned middle etch stop layer and the exposed portion of the bottom etch stop layer are removed to convert: the inchoate upper trench opening into a final upper trench opening; and the inchoate lower via opening into a final lower via opening to form the dual damascene opening.

2. 发明申请

US20060003573A1 Method to fabricate aligned dual damacene openings 有权
标题翻译：制造对齐双重断裂孔的方法
公开(公告)号：US20060003573A1
公开(公告)日：2006-01-05
申请号：US11174805
申请日：2005-07-05
申请人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Boon Tan , Alan Cuthbertson , Chin Neo
发明人： Yeow Lim , Wuping Liu , Tae Lee , Bei Zhang , Juan Boon Tan , Alan Cuthbertson , Chin Neo
IPC分类号： H01L21/4763
CPC分类号： H01L21/76807 , H01L21/76829 , H01L21/76834
摘要： An aligned dual damascene opening structure, comprising the following. A structure having a metal structure formed thereover. A patterned layer stack over the metal structure; the layer stack comprising, in ascending order: a patterned bottom etch stop layer; a patterned lower dielectric material layer; a patterned middle etch stop layer; and a patterned middle dielectric material layer; the lower and middle dielectric layers being comprised of the same material. An upper trench opening in the patterned bottom etch stop layer and the patterned lower dielectric material layer; and a lower via opening in the patterned middle etch stop layer and the patterned middle dielectric material layer. The lower via opening being in communication with the upper trench opening. Wherein the upper trench opening and the lower via opening comprise an aligned dual damascene opening.
摘要翻译：对准的双镶嵌开口结构，包括以下。具有形成在其上的金属结构的结构。金属结构上的图案层叠层; 所述层堆叠按升序包括：图案化的底部蚀刻停止层; 图案化的下介电材料层; 图案化的中间蚀刻停止层; 和图案化的中间介电材料层; 下部和中间介电层由相同的材料组成。在图案化的底部蚀刻停止层和图案化的下部介电材料层中的上部沟槽开口; 以及图案化的中间蚀刻停止层和图案化的中间介电材料层中的下通孔开口。下通道开口与上沟槽开口连通。其中上沟槽开口和下通孔开口包括对准的双镶嵌开口。

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