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    • 1. 发明申请
    • Method to fabricate aligned dual damacene openings
    • 制造对齐双重断裂孔的方法
    • US20060003573A1
    • 2006-01-05
    • US11174805
    • 2005-07-05
    • Yeow LimWuping LiuTae LeeBei ZhangJuan Boon TanAlan CuthbertsonChin Neo
    • Yeow LimWuping LiuTae LeeBei ZhangJuan Boon TanAlan CuthbertsonChin Neo
    • H01L21/4763
    • H01L21/76807H01L21/76829H01L21/76834
    • An aligned dual damascene opening structure, comprising the following. A structure having a metal structure formed thereover. A patterned layer stack over the metal structure; the layer stack comprising, in ascending order: a patterned bottom etch stop layer; a patterned lower dielectric material layer; a patterned middle etch stop layer; and a patterned middle dielectric material layer; the lower and middle dielectric layers being comprised of the same material. An upper trench opening in the patterned bottom etch stop layer and the patterned lower dielectric material layer; and a lower via opening in the patterned middle etch stop layer and the patterned middle dielectric material layer. The lower via opening being in communication with the upper trench opening. Wherein the upper trench opening and the lower via opening comprise an aligned dual damascene opening.
    • 对准的双镶嵌开口结构,包括以下。 具有形成在其上的金属结构的结构。 金属结构上的图案层叠层; 所述层堆叠按升序包括:图案化的底部蚀刻停止层; 图案化的下介电材料层; 图案化的中间蚀刻停止层; 和图案化的中间介电材料层; 下部和中间介电层由相同的材料组成。 在图案化的底部蚀刻停止层和图案化的下部介电材料层中的上部沟槽开口; 以及图案化的中间蚀刻停止层和图案化的中间介电材料层中的下通孔开口。 下通道开口与上沟槽开口连通。 其中上沟槽开口和下通孔开口包括对准的双镶嵌开口。
    • 2. 发明申请
    • Method to fabricate aligned dual damascene openings
    • US20050090095A1
    • 2005-04-28
    • US10690998
    • 2003-10-22
    • Yeow LimWuping LiuTae LeeBei ZhangJuan TanAlan CuthbertsonChin Neo
    • Yeow LimWuping LiuTae LeeBei ZhangJuan TanAlan CuthbertsonChin Neo
    • H01L21/4763H01L21/768H01L29/06
    • H01L21/76807H01L21/76829H01L21/76834
    • A method of forming an aligned dual damascene opening, comprising including the following sequential steps. A structure having a metal structure formed thereover is provided. A layer stack is formed over the metal structure. The layer stack comprises, in ascending order: a bottom etch stop layer; a lower dielectric material layer; a middle etch stop layer; a middle dielectric material layer; and an upper dielectric layer. The upper dielectric layer is patterned to form an opening exposing a portion of the underlying middle dielectric material layer. The opening having a width. A patterned mask layer is formed over the patterned upper dielectric layer leaving exposed opposing portions of the patterned upper dielectric layer. The middle dielectric material layer is patterned to form an opening therein using the patterned mask layer and the exposed portions of the upper dielectric layer as masks. The middle dielectric material layer opening exposing a portion of the middle etch stop layer. The middle etch stop layer is removed at its exposed portion to form a patterned middle etch stop layer having an opening exposing a portion of the lower dielectric material layer. Simultaneously patterning: the patterned middle dielectric material layer using the patterned upper dielectric layer as a mask to form an inchoate upper trench opening; and the lower dielectric material layer using the patterned mask layer and the patterned middle etch stop layer as masks to form an inchoate lower via opening aligned with the inchoate upper trench opening. The inchoate lower via opening exposing a portion of the underlying bottom etch stop layer. The patterned mask layer is removed. The patterned upper dielectric material layer, the exposed portions of the patterned middle etch stop layer and the exposed portion of the bottom etch stop layer are removed to convert: the inchoate upper trench opening into a final upper trench opening; and the inchoate lower via opening into a final lower via opening to form the dual damascene opening.
    • 8. 发明授权
    • Apparatus, systems and methods for facilitating signal excitation and/or reception in a magnetic resonance system
    • 用于在磁共振系统中促进信号激发和/或接收的装置,系统和方法
    • US09423476B2
    • 2016-08-23
    • US13446689
    • 2012-04-13
    • Graham C. WigginsBei ZhangDaniel K. Sodickson
    • Graham C. WigginsBei ZhangDaniel K. Sodickson
    • G01R33/345G01R33/48
    • G01R33/345G01R33/4802
    • In accordance with certain exemplary embodiments of the present disclosure, provided herein are apparatus, systems and methods for, e.g., facilitating signal excitation and/or reception in a magnetic resonance system, such as, e.g., a system configured for magnetic resonance imaging (MRI) and/or spectroscopy. For example, exemplary embodiments of a method for traveling wave imaging in an MRI system can include, e.g., a circular conductive structure lying in a transverse plane within the scanner bore. The exemplary structure can be concentric with the center of the scanner RF shield. The structure can be arranged to have a resonant mode at the MR frequency characterized by a current pattern which can be configured to excite and receive an exemplary waveguide mode. The exemplary current pattern can be further configured to facilitate traveling wave imaging, for example.
    • 根据本公开的某些示例性实施例,本文提供了用于例如在磁共振系统中促进信号激发和/或接收的装置,系统和方法,例如,被配置用于磁共振成像(MRI) )和/或光谱学。 例如,在MRI系统中用于行波成像的方法的示例性实施例可以包括例如位于扫描器孔内的横向平面内的圆形导电结构。 示例性结构可以与扫描器RF屏蔽的中心同心。 该结构可以被布置成在MR频率处具有谐振模式,其特征在于可以配置为激发和接收示例性波导模式的电流模式。 例如,该示例性电流模式可进一步配置成便于行波成像。
    • 10. 发明授权
    • Manual bread-toaster, with lid
    • 手动面包机,带盖
    • US08631737B2
    • 2014-01-21
    • US12737717
    • 2009-03-26
    • George Mohan ZhangBei ZhangHuajin Chen
    • George Mohan ZhangBei ZhangHuajin Chen
    • A47J37/08
    • A47J37/08A47J37/0842
    • The bread toaster includes a toaster frame defining at least one toaster slot for selectively receiving the bread slice, a heating device, and a lid arrangement. The lid arrangement includes a front and a rear sliding member, a plurality of sliding guiders, and at least one toaster lid. The toaster lid is coupled with the front and the rear sliding members in such a manner that the toaster lid is arranged to move between a closed position and an opened position, wherein in the closed position, the toaster lid is moved by the front and the rear sliding members to close the toaster slot, wherein in the opened position, the toaster lid is moved by the front and the rear sliding members to expose the toaster slot to an exterior of the toaster frame.
    • 面包烤面包机包括定义至少一个烤面包机插槽的烤箱框架,用于选择性地接收面包片,加热装置和盖子装置。 盖装置包括前滑动件和后滑动件,多个滑动导向件和至少一个烤面包机盖。 烤面包机盖以前后滑动部件的方式配合,使得烤面包机盖布置成在关闭位置和打开位置之间移动,其中,在关闭位置,烤面包机盖由前部和 后部滑动构件以关闭烤面包机槽,其中在打开位置,烤面包机盖由前部和后部滑动构件移动,以将烤面包机插槽暴露于烤面包机框架的外部。