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    • 8. 发明授权
    • Process and apparatus for the formation of a functional deposited film
on a cylindrical substrate by means of microwave plasma chemical vapor
deposition
    • 通过微波等离子体化学气相沉积在圆柱形基底上形成功能沉积膜的方法和装置
    • US5030476A
    • 1991-07-09
    • US526536
    • 1990-05-21
    • Ryuji OkamuraHirokazu OtoshiTetsuya Takei
    • Ryuji OkamuraHirokazu OtoshiTetsuya Takei
    • C23C16/50C23C16/46C23C16/511
    • C23C16/511C23C16/46
    • A process for forming a functional deposited film which is adapted for use in an apparatus which comprises a substantially enclosed reaction chamber, a plurality of cylindrical substrates arranged to surround a discharge space and a microwave introduction means provided at least at one end of each cylindrical substrate and wherein microwave energy is introduced so that a glow discharge plasma containing reactant gases derived from starting gases is formed in the discharge space thereby forming a deposited film on each cylindrical substrate is described. The process is characterized in that a temperature control means is provided in the inside of each of said plurality of cylindrical substrates and simultaneous with the introduction of a thermally conductive gas, the thermally conductive gas is exhausted from the one end of each cylindrical substrate in the vicinity of the microwave introduction means. The process enables the deposited film of good quality to be formed stably at high speed and the deposited film is useful as an element member for semiconductive devices, photosensitive devices for electrophotography, photovoltaic devices, other electronic elements and optical elements.
    • 一种用于形成功能性沉积膜的方法,其适用于包括基本封闭的反应室的设备,布置成围绕放电空间的多个圆柱形基板和设置在每个圆柱形基板的至少一端的微波引入装置 并且其中引入微波能量,使得在放电空间中形成含有源自起始气体的反应气体的辉光放电等离子体,从而在每个圆柱形基板上形成沉积膜。 该方法的特征在于,在所述多个圆柱形基板的每一个的内部设置有温度控制装置,并且与引入导热气体同时,导热气体从每个圆柱形基板的一端排出 微波引入装置附近。 该方法能够以高速稳定地形成高质量的沉积膜,并且沉积膜可用作半导体器件的元件部件,电子照相用光敏器件,光电器件,其它电子元件和光学元件。
    • 9. 发明授权
    • Process and apparatus for microwave plasma chemical vapor deposition
    • 微波等离子体化学气相沉积的工艺和装置
    • US5439715A
    • 1995-08-08
    • US165868
    • 1993-12-14
    • Ryuji OkamuraHirokazu OtoshiTetsuya Takei
    • Ryuji OkamuraHirokazu OtoshiTetsuya Takei
    • C23C16/50C23C16/46C23C16/511B05D3/06
    • C23C16/511C23C16/46
    • A process for forming a functional deposited film which is adapted for use in an apparatus which comprises a substantially enclosed reaction chamber, a plurality of cylindrical substrates arranged to surround a discharge space and a microwave introduction means provided at least at one end of each cylindrical substrate and wherein microwave energy is introduced so that a glow discharge plasma containing reactant gases derived from starting gases is formed in the discharge space thereby forming a deposited film on each cylindrical substrate is described. The process is characterized in that a temperature control means is provided in the inside of each of said plurality of cylindrical substrates and simultaneous with the introduction of a thermally conductive gas, the thermally conductive gas is exhausted from the one end of each cylindrical substrate in the vicinity of the microwave introduction means. The process enables the deposited film of good quality to be formed stably at high speed and the deposited film is useful as an element member for semiconductive devices, photosensitive devices for electrophotography, photovoltaic devices, other electronic elements and optical elements.
    • 一种用于形成功能性沉积膜的方法,其适用于包括基本封闭的反应室的设备,布置成围绕放电空间的多个圆柱形基板和设置在每个圆柱形基板的至少一端的微波引入装置 并且其中引入微波能量,使得在放电空间中形成含有源自起始气体的反应气体的辉光放电等离子体,从而在每个圆柱形基板上形成沉积膜。 该方法的特征在于,在所述多个圆柱形基板的每一个的内部设置有温度控制装置,并且与引入导热气体同时,导热气体从每个圆柱形基板的一端排出 微波引入装置附近。 该方法能够以高速稳定地形成高质量的沉积膜,并且沉积膜可用作半导体器件的元件部件,电子照相用光敏器件,光电器件,其它电子元件和光学元件。