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    • 2. 发明授权
    • Method of safely preparing graphite fluoride
    • 安全地制备氟化石墨的方法
    • US4590316A
    • 1986-05-20
    • US650986
    • 1984-09-14
    • Yasushi KitaHisaji NakanoShiro MoroiAkira Sakanoue
    • Yasushi KitaHisaji NakanoShiro MoroiAkira Sakanoue
    • C01B31/00C01B31/04C07C17/00
    • C01B31/005
    • A method of preparing graphite fluoride such as (CF).sub.n or (C.sub.2 F).sub.n by heterogeneous contact reaction between a carbon material such as graphite or petroleum coke and fluorine gas at about 200.degree.-550.degree. C. In the gas phase of the reaction system, the total concentration of higher fluorocarbons having more than four carbon atoms formed by side reactions is controlled so as not to become above 3% by volume by, for example, condensation or catalytic decomposition of at least a portion of the higher fluorocarbons in the gas flowed out of the reaction chamber for recirculation. Such control is highly effective for prevention of rapid and violent decomposition of the graphite fluoride existing in the solid phase of the reaction system induced by sudden decomposition of the higher fluorocarbons in the reaction system to lower fluorocarbons.
    • 一种在约200〜-550℃之间的碳材料如石墨或石油焦炭与氟气之间的非均相接触反应制备(CF)n或(C 2 F)n的氟化石墨的方法。在反应的气相 通过副反应形成的具有多于四个碳原子的高级碳氟化合物的总浓度被控制为通过例如至少一部分较高碳氟化合物的冷凝或催化分解而不会变成高于3体积% 气体从反应室流出,用于再循环。 这种控制对于防止由反应体系中的较高碳氟化合物突然分解成低碳氟化合物引起的反应体系固相中存在的氟化石墨的快速和剧烈分解是非常有效的。
    • 4. 发明授权
    • Method of refining rare gas fluoride excimer laser gas
    • 精炼稀有气体氟化物准分子激光气体的方法
    • US4964137A
    • 1990-10-16
    • US466930
    • 1990-01-18
    • Minoru AramakiShinsuke NakagawaHisaji NakanoHiroshi IchimuraMasahiro Tainaka
    • Minoru AramakiShinsuke NakagawaHisaji NakanoHiroshi IchimuraMasahiro Tainaka
    • H01S3/097H01S3/036H01S3/223H01S3/225
    • H01S3/036H01S3/225
    • A laser gas used in a rare gas fluoride excimer laser is efficiently refined with little loss of the principal rare gas such as Ar, Kr or Xe by sequential contact of the laser gas first with a reactive metal, e.g. Si or Fe, for conversion of the fluorine source gas such as F.sub.2 or NF.sub.3 to a metal fluoride, then with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of gaseous fluorides to solid metal fluorides, next with zeolite which is adsorbent of most of the remaining impurities and finally with an alkaline metal, e.g. Ca or Na, for decomposition of CF.sub.4 to form a solid metal fluoride and carbon. CF.sub.4 is formed during operation of the excimer laser by reaction of fluorine with a fluororesin used as electrical insulator in the laser apparatus, and accumulation of CF.sub.4 in the laser gas caused significal lowering of the laser output power.
    • 在稀有气体氟化物准分子激光器中使用的激光气体通过先将激光气体与活性金属例如反应性金属顺序接触而有效地精制而不损失诸如Ar,Kr或Xe的主要稀有气体。 Si或Fe,用于将氟源气体如F2或NF3转化为金属氟化物,然后用固体碱性化合物,例如, Ca(OH)2,用于将气态氟化物转化为固体金属氟化物,接下来是沸石,其是大部分剩余杂质的吸附剂,最后是碱金属,例如碱金属。 Ca或Na,用于分解CF4以形成固体金属氟化物和碳。 在激光装置中通过氟与用作电绝缘体的氟树脂反应而在准分子激光器的操作期间形成CF4,并且CF4在激光气体中的积聚导致激光输出功率的显着降低。
    • 5. 发明授权
    • Method for decomposing halide-containing gas
    • 分解含卤化物气体的方法
    • US5817284A
    • 1998-10-06
    • US738588
    • 1996-10-29
    • Hisaji NakanoNobuhiko MatsuokaTetsuo UedaShinsuke Nakagawa
    • Hisaji NakanoNobuhiko MatsuokaTetsuo UedaShinsuke Nakagawa
    • B01D53/68B01D53/70
    • B01D53/70B01D53/68B01D2251/306B01D2251/604Y02C20/30
    • The present invention relates to a method for decomposing any of chlorocarbons, chlorofluorocarbons, perfluorocarbons and SF.sub.6 contained in a gas. This method includes the step of bringing the gas into contact, at a temperature of at least 300.degree. C., with a first mixture consisting essentially of 0.05-40 wt % of potassium hydroxide and at least one compound selected from the group consisting of alkali-earth-metal oxides and alkali-earth-metal hydroxides, for decomposing the at least one halide compound. When the halide compound-containing gas further contains oxygen, this gas may be brought into contact, at a temperature of at least 500.degree. C., with at least one first substance selected from the group consisting of active carbon, iron powder and nickel powder, for removing the oxygen from the gas, prior to the halide compound decomposition. When the halide compound-containing gas still further contains a strong oxidizing gas (e.g., fluorine), this gas may be brought into contact, at a temperature of at least 300.degree. C., with at least one second substance selected from the group consisting of Si, Ti, Ge, W, Mo, Fe, Mn, Co, Zn, Sn, B, Zr and compounds of these elements, except oxides of these elements, such that the oxidizing gas turns into a compound that is not reactive with the at least one first substance. According to this method, it is possible to decompose halide compounds contained within a gas, using a smaller equipment, at a lower temperature, as compared with conventional methods.
    • 本发明涉及分解气体中所含的氯碳烃,氯氟烃,全氟化碳和SF 6中的任何一种的方法。 该方法包括在至少300℃的温度下使气体与基本上由0.05-40重量%的氢氧化钾和至少一种选自碱金属的化合物组成的第一混合物接触的步骤 - 金属氧化物和碱土金属氢氧化物,用于分解至少一种卤化物。 当含卤化物的气体还含有氧气时,该气体可以在至少500℃的温度下与至少一种选自活性炭,铁粉和镍粉末的第一物质接触 用于在卤化物分解之前从气体中除去氧气。 当含卤化物的气体还含有强氧化气体(例如氟)时,该气体可以在至少300℃的温度下与至少一种选自以下的第二物质接触: Si,Ti,Ge,W,Mo,Fe,Mn,Co,Zn,Sn,B,Zr和这些元素的化合物,除了这些元素的氧化物以外,使得氧化气体变成与 所述至少一种第一物质。 根据该方法,与常规方法相比,可以使用较小的设备在较低温度下分解包含在气体中的卤化物化合物。