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    • 1. 发明授权
    • Displacement detecting apparatus and information recording apparatus
    • 位移检测装置和信息记录装置
    • US06618218B1
    • 2003-09-09
    • US09655342
    • 2000-09-05
    • Hidejiro KadowakiKo IshizukaYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • Hidejiro KadowakiKo IshizukaYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • G11B5596
    • G11B5/59633
    • An apparatus for detecting the relative displacement of a surface to be detected, and an apparatus and method for recording information on a hard disc of a hard disk drive using such a detecting apparatus, the detecting apparatus comprising an interference optical system for condensing a light beam on the surface to be detected, and making the reflected light from the surface to be detected interfere with the condensed light beam to thereby form an interference light beam, light receiving means for receiving the interference light beam and outputting bright and dark signals attributable to the relative displacement of the surface to be detected, and condensed light information supplying means for separating part of the reflected light from the surface to be detected from the optical path until the reflected light arrives at said light receiving means, and utilizing the separated light beam to detect the condensed state of the incident light beam onto the surface to be detected or make the condensed state observable.
    • 一种用于检测待检测表面的相对位移的装置,以及用于使用这种检测装置在硬盘驱动器的硬盘上记录信息的装置和方法,所述检测装置包括:干涉光学系统,用于将光束 在要检测的表面上,并且使来自被检测表面的反射光与聚光光束干涉,从而形成干涉光束;光接收装置,用于接收干涉光束并输出归因于 要被检测的表面的相对位移,以及聚光信息提供装置,用于从反射光到达所述光接收装置,将从所述光路的待检测表面反射的光的一部分分离,并将所分离的光束 将入射光束的凝聚状态检测到待检测或制作的表面上 浓缩态可观察。
    • 5. 发明申请
    • Interference measuring apparatus
    • 干涉测量仪
    • US20060114474A1
    • 2006-06-01
    • US11335565
    • 2006-01-20
    • Ko IshizukaHidejiro KadowakiYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • Ko IshizukaHidejiro KadowakiYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • G01B9/02
    • G01B9/02081G01B9/02057G01B2290/30G01B2290/70G01D5/344
    • An interference measuring apparatus has an optical system for dividing a coherent light beam into two light beams, causing the divided two light beams to pass along discrete optical paths and making them into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them, and again superposing the wave fronts of the linearly polarized light beams one upon the other, a light dividing member for dividing the light beams superposed one upon the other by the optical system into a plurality of light beams, a rock crystal plate formed with a predetermined level difference in conformity with the incidence positions of the plurality of light beams, a polarizing plate for taking out each light beam transmitted through the rock crystal plate with a 45° polarized component, and a plurality of light receiving elements for individually receiving the light beams taken out by the polarizing plate, a plurality of different interference phase signals being provided by the reception of lights of the light receiving elements.
    • 干涉测量装置具有用于将相干光束分成两束光束的光学系统,使得分离的两束光束沿着分离的光路通过并使它们成为彼此正交的线偏振光束,并且将相位调制到 它们中的至少一个的波前,并且一直彼此叠加线偏振光束的波阵面,用于将由光学系统彼此重叠的光束分成多个光的分光部件 梁,形成有与多个光束的入射位置一致的预定水平差的岩石晶体板,用于取出以45°偏振分量透射通过岩石晶体板的每个光束的偏振板,以及多个 的用于单独接收由偏振板取出的光束的光接收元件,具有多个不同的干涉 通过接收光接收元件的光提供nce相位信号。
    • 6. 发明授权
    • Encoder
    • 编码器
    • US06674066B1
    • 2004-01-06
    • US09550165
    • 2000-04-14
    • Yasushi KanedaHidejiro KadowakiKo IshizukaShigeki KatoTakayuki KadoshimaSakae Horyu
    • Yasushi KanedaHidejiro KadowakiKo IshizukaShigeki KatoTakayuki KadoshimaSakae Horyu
    • G01D534
    • G01D5/36
    • An optical type encoder includes a light-emitting element, a scale, a light receiving element for detecting light from the scale when a light beam from the light-emitting element is projected onto the scale, an incremental signal resulting from displacement of the scale being obtained by detection by the light receiving element, two or more mark portions for producing an origin signal formed on the scale, and an origin detecting system for detecting the mark portions for producing the origin signal. The rising position or the falling position of at least one pulse signal indicative of the origin is determined by the detection signals of the two or more mark portions for producing the origin signal by the origin detecting system.
    • 光学型编码器包括发光元件,刻度尺,用于当来自发光元件的光束投射到刻度上时用于检测来自刻度的光的光接收元件,由标尺的位移产生的增量信号 通过光接收元件的检测获得的两个或更多个用于产生在刻度上形成的原点信号的标记部分,以及用于检测用于产生原点信号的标记部分的原点检测系统。 指示原点的至少一个脉冲信号的上升位置或下降位置由用于由原点检测系统产生原点信号的两个或更多个标记部分的检测信号确定。
    • 7. 发明授权
    • Optical element used in compact interference measuring apparatus detecting plurality of phase difference signals
    • 用于检测多个相位差信号的紧凑干涉测量装置中使用的光学元件
    • US06657181B1
    • 2003-12-02
    • US09523312
    • 2000-03-10
    • Ko IshizukaHidejiro KadowakiYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • Ko IshizukaHidejiro KadowakiYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • G01J2126
    • G01B9/02081G01B9/02057G01B2290/30G01B2290/70G01D5/344
    • An interference measuring apparatus has an optical system for dividing a coherent light beam into two light beams, causing the divided two light beams to pass along discrete optical paths and making them into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them, and again superposing the wave fronts of the linearly polarized light beams one upon the other, a light dividing member for dividing the light beams superposed one upon the other by the optical system into a plurality of light beams, a rock crystal plate formed with a predetermined level difference in conformity with the incidence positions of the plurality of light beams, a polarizing plate for taking out each light beam transmitted through the rock crystal plate with a 45° polarized component, and a plurality of light receiving elements for individually receiving the light beams taken out by the polarizing plate, a plurality of different interference phase signals being provided by the reception of lights of the light receiving elements.
    • 干涉测量装置具有用于将相干光束分成两束光束的光学系统,使得分离的两束光束沿着分离的光路通过并使它们成为彼此正交的线偏振光束,并且将相位调制到 它们中的至少一个的波前,并且一直彼此叠加线偏振光束的波阵面,用于将由光学系统彼此重叠的光束分成多个光的分光部件 梁,形成有与多个光束的入射位置一致的预定水平差的岩石晶体板,用于取出以45°偏振分量透射通过岩石晶体板的每个光束的偏振板,以及多个 的用于单独接收由偏振板取出的光束的光接收元件,具有多个不同的干涉 通过接收光接收元件的光提供nce相位信号。
    • 9. 发明授权
    • Optical detection apparatus for detecting information relating to
relative displacement of an object on whch a diffraction grating is
formed
    • 用于检测与其上形成有衍射光栅的物体的相对位移有关的信息的光学检测装置
    • US5666196A
    • 1997-09-09
    • US560511
    • 1995-11-17
    • Satoshi IshiiKo IshizukaHiroshi KondoYasushi Kaneda
    • Satoshi IshiiKo IshizukaHiroshi KondoYasushi Kaneda
    • B23Q17/24G01B11/00G01D5/38
    • G01D5/38
    • An apparatus for optically detecting information relating to the relative displacement of an object on which a diffraction grating, arranged in two axial directions with a predetermined pitch. The apparatus includes a light-emitting device configured to emit a light beam, and a first optical element configured to divide the light beam from the light-emitting device into a plurality of light beams directed in each of the two axial directions to the diffraction grating on the object which produces a plurality of diffracted light beams for each of the two axial directions. The apparatus also includes a second optical element positioned and configured to receive and combine a plurality of diffracted light beams for each of the two axial directions from the diffraction grating on the object, and a plurality of detection units, each configured to receive and detect the combined plurality of diffracted light beams for one of the two axial directions, thereby detecting information relating to the relative displacement of the object in each of the two axial directions.
    • 一种用于光学检测与其上以预定间距沿两个轴向布置的衍射光栅的物体的相对位移有关的信息的装置。 该装置包括被配置为发射光束的发光装置和被构造成将来自发光装置的光束分成在两个轴向方向中的每一个中的多个光束到衍射光栅的第一光学元件 在产生用于两个轴向方向中的每一个的多个衍射光束的物体上。 该装置还包括一个第二光学元件,其定位和配置为从物体上的衍射光栅接收和组合两个轴向方向中的每一个的多个衍射光束,以及多个检测单元,每个检测单元被配置为接收和检测 将多个衍射光束组合成两个轴向中的一个,从而检测与两个轴向方向中的每一个中的物体的相对位移有关的信息。
    • 10. 发明授权
    • Optical apparatus and displacement-information measuring apparatus using
the same
    • 光学装置及其位移信息测量装置
    • US5448358A
    • 1995-09-05
    • US187869
    • 1994-01-28
    • Ko IshizukaHiroshi KondoSatoshi IshiiYasushi Kaneda
    • Ko IshizukaHiroshi KondoSatoshi IshiiYasushi Kaneda
    • G01B11/00G01D5/36G01D5/38
    • G01D5/38
    • In an optical apparatus, a light beam from a light-emitting device is divided into a plurality of light beams by a first diffraction grating provided on a transparent substrate. The plurality of light beams are guided to a diffraction-grating scale which moves together with an object whose relative displacement is to be measured. Two light beams emanated from the diffraction-grating scale are combined by a second diffraction grating provided on the transparent substrate. A resultant light beam from the second diffraction grating is guided to photosensors. Relative displacement between the transparent substrate and the object is measured using signals from the photosensors. Indices for displaying positional information of a condenser lens provided on the transparent substrate and/or the first and second diffraction gratings are also provided on the transparent substrate. The optical apparatus is used within displacement-information measuring apparatus.
    • 在光学装置中,通过设置在透明基板上的第一衍射光栅将来自发光装置的光束分割为多个光束。 多个光束被引导到与要测量相对位移的物体一起移动的衍射光栅标尺。 通过设置在透明基板上的第二衍射光栅将从衍射光栅尺发出的两束光束组合。 来自第二衍射光栅的合成光束被引导到光电传感器。 使用来自光电传感器的信号测量透明基板和物体之间的相对位移。 用于显示设置在透明基板和/或第一和第二衍射光栅上的聚光透镜的位置信息的指示也设置在透明基板上。 光学装置用于位移信息测量装置。