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    • 1. 发明授权
    • Exposure apparatus
    • 曝光装置
    • US5028955A
    • 1991-07-02
    • US480005
    • 1990-02-14
    • Yasushi HayashidaNoriyuki AnaiOsamu HirakawaMasami AkimotoYasuhiro SakamotoKeisuke ShigakiMasashi Moriyama
    • Yasushi HayashidaNoriyuki AnaiOsamu HirakawaMasami AkimotoYasuhiro SakamotoKeisuke ShigakiMasashi Moriyama
    • G03F7/20
    • G03F7/70725G03F7/2051
    • An exposure apparatus of this invention is used in an exposure process of semiconductor and LCD devices. The exposure apparatus includes a stage on which a semiconductor wafer is placed, a rotating mechanism for rotating the stage, a radiation unit arranged to oppose a support surface of the stage, a slider mechanism for reciprocating the radiation unit along a straight line passing through the center of the support surface of the stage, an exposure range input unit for inputting a desired exposure range of the wafer, an exposure range memory unit for storing the input exposure range, a CCD image sensor for detecting a reference position of the wafer, a relative position detector for detecting a relative position between the detected reference position and the radiation unit, a controller for controlling the sliding mechanism in correspondence with the relative position and the exposure range, and a light amount control mechanism for controlling an amount of light radiated from the irradiation mechanism to the wafer in correspondence with the relative position and the exposure range.
    • 本发明的曝光装置用于半导体和LCD装置的曝光处理。 曝光装置包括其上放置有半导体晶片的台,用于旋转台的旋转机构,布置成与舞台的支撑表面相对的辐射单元,用于使辐射单元沿着穿过 舞台的支撑表面的中心,用于输入晶片的期望曝光范围的曝光范围输入单元,用于存储输入曝光范围的曝光范围存储单元,用于检测晶片的参考位置的CCD图像传感器, 相对位置检测器,用于检测检测到的基准位置和辐射单元之间的相对位置,控制器,用于根据相对位置和曝光范围来控制滑动机构;以及光量控制机构,用于控制从 对应于相对位置和曝光范围的到晶片的照射机构。
    • 3. 发明授权
    • Method of and apparatus for optimizing transference of supplementary
paper money in automatic teller machine by monitoring the paper money
processing operation
    • 通过监控纸币处理操作优化自动取款机中补充纸币的转移方法和装置
    • US5135212A
    • 1992-08-04
    • US478634
    • 1990-02-12
    • Itsunori UtsumiRyozo NakamuraMasashi Moriyama
    • Itsunori UtsumiRyozo NakamuraMasashi Moriyama
    • G07D9/00G07D11/00
    • G07D11/0057G07D11/0051
    • In a method of and an apparatus for transferring supplementary paper money in an automatic teller machine that includes a paper-money processing mechanism that has a plurality of transport routes formed among the paper-money that provide a path between a plurality of paper-money containers, a cassette storing a supplementary money supply and a paper-money discriminator part for transporting paper money. A plurality of changeover gates are provided at the forks of the transport routes for changing the destination of paper money, and a control part for controlling the transportation routes and the changeover gates. The method and apparatus optimize the transfer of supplementary paper-money, and a control part for controlling the transport routes and the changeover gates. The method and apparatus optimize the transfer of supplementary paper-money by checking for times in which the paper-money processing mechanism, especially the transport routes, are not in use.
    • 一种用于在自动提款机中传送补充纸币的方法和装置,该自动提款机包括一个纸币处理机构,该纸币处理机构具有在纸币之间形成的多条运输路线,该纸币提供多个纸币容器之间的路径 ,存储补充货币供应的盒子和用于运送纸币的纸币鉴别器部件。 在用于改变纸币的目的地的运输路线的叉子处设置有多个转换门,以及用于控制运输路线和转换门的控制部分。 该方法和装置优化补充纸币的转移,以及用于控制运输路线和转换门的控制部分。 该方法和装置通过检查纸币处理机制,特别是运输路线未被使用的时间来优化补充纸币的转移。