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    • 4. 发明授权
    • Inspecting method, inspecting apparatus, and defect correcting method
    • 检查方法,检查装置和缺陷修正方法
    • US5532615A
    • 1996-07-02
    • US158843
    • 1993-11-24
    • Naofumi KondoMikio KatayamaMasaya OkamotoMakoto MiyagoKiyoshi NakazawaYuzuru KanemoriMakoto Tachibana
    • Naofumi KondoMikio KatayamaMasaya OkamotoMakoto MiyagoKiyoshi NakazawaYuzuru KanemoriMakoto Tachibana
    • G09G3/00G01R31/02
    • G09G3/006G09G2330/10
    • This invention provides an inspecting method, an inspecting apparatus, and a defect correcting method, for an active matrix substrate including: a gate bus line; a source bus line; a pixel electrode; a switching element for driving the pixel electrode; and a pair of electrodes constituting an auxiliary capacitance. The inspecting method includes: a step of disposing a counter substrate having a face on which a counter electrode is formed so that the face faces the active matrix substrate with a liquid crystal layer interposed therebetween, and connecting signal supplying terminals to gate bus lines and source bus lines and the counter electrode; and a detection step of detecting a defect on the active matrix substrate by performing at least one of a first signal generating step, a second signal generating step, and a third signal generating step. The first, second, and third signal generating steps all include alternately applying an ON signal for turning on the switching element and an OFF signal for turning off the switching element to the gate bus line. The first signal generating step includes applying a first detecting signal having a voltage which changes before the ON signal is applied to the source bus line. The second signal generating step includes applying a second detecting signal having a voltage which changes before and after the ON signal is applied. The third signal generating step includes applying a third detecting signal having a voltage which changes after the ON signal is applied.
    • 本发明提供了一种用于有源矩阵基板的检查方法,检查装置和缺陷校正方法,包括:栅极总线; 源总线; 像素电极; 用于驱动像素电极的开关元件; 以及构成辅助电容的一对电极。 检查方法包括:将具有面对面的对置基板设置在其上形成有相对电极的步骤,使得面向有源矩阵基板的面朝向液晶层,并将信号提供端子连接到栅极总线和源极 总线和对电极; 以及检测步骤,通过执行第一信号产生步骤,第二信号产生步骤和第三信号产生步骤中的至少一个来检测有源矩阵衬底上的缺陷。 第一,第二和第三信号产生步骤都包括交替地施加用于接通开关元件的ON信号和用于将开关元件截止到栅极总线的OFF信号。 第一信号产生步骤包括将具有在ON信号被施加之前改变的电压的第一检测信号施加到源总线上。 第二信号产生步骤包括施加具有在ON信号被施加之前和之后变化的电压的第二检测信号。 第三信号产生步骤包括施加在施加ON信号之后改变的电压的第三检测信号。