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1. 发明申请

US20060002174A1 Driving method of variable resistance element and memory device 有权
标题翻译：可变电阻元件和存储器件的驱动方法
公开(公告)号：US20060002174A1
公开(公告)日：2006-01-05
申请号：US11169535
申请日：2005-06-28
申请人： Yasunari Hosoi , Yukio Tamai , Kazuya Ishihara , Shinji Kobayashi , Nobuyoshi Awaya
发明人： Yasunari Hosoi , Yukio Tamai , Kazuya Ishihara , Shinji Kobayashi , Nobuyoshi Awaya
IPC分类号： G11C11/00
CPC分类号： G11C29/50 , G11C13/0007 , G11C13/0069 , G11C29/50008 , G11C2013/009 , G11C2213/31
摘要： A variable resistance element is configured to be provided with a perovskite-type oxide between a first electrode and a second electrode, of which electric resistance between the first electrode and the second electrode is changed by applying a voltage pulse of a predetermined polarity between the first electrode and the second electrode, and the variable resistance element has a resistance hysteresis characteristic, in which a changing rate of a resistance value is changed from positive to negative with respect to increase of a cumulative pulse applying time in the application of the voltage pulse. The voltage pulse is applied to the variable resistance element so that the cumulative pulse applying time is not longer than a specific cumulative pulse applying time, in which the changing rate of the, resistance value is changed from positive to negative with respect to increase of the cumulative pulse applying time in the resistance hysteresis characteristic.
摘要翻译：可变电阻元件被配置为在第一电极和第二电极之间设置有钙钛矿型氧化物，其中通过在第一电极和第二电极之间施加预定极性的电压脉冲来改变第一电极和第二电极之间的电阻电极和第二电极，并且可变电阻元件具有电阻滞后特性，其中电阻值的变化率相对于施加电压脉冲的累积脉冲施加时间的增加而从正变化到负。电压脉冲被施加到可变电阻元件，使得累积脉冲施加时间不长于特定的累积脉冲施加时间，其中电阻值的变化率相对于增加的电阻值从正变化到负累积脉冲施加时间在电阻滞后特性。

2. 发明授权

US07236388B2 Driving method of variable resistance element and memory device 有权
标题翻译：可变电阻元件和存储器件的驱动方法
公开(公告)号：US07236388B2
公开(公告)日：2007-06-26
申请号：US11169535
申请日：2005-06-28
申请人： Yasunari Hosoi , Yukio Tamai , Kazuya Ishihara , Shinji Kobayashi , Nobuyoshi Awaya
发明人： Yasunari Hosoi , Yukio Tamai , Kazuya Ishihara , Shinji Kobayashi , Nobuyoshi Awaya
IPC分类号： G11C11/00
CPC分类号： G11C29/50 , G11C13/0007 , G11C13/0069 , G11C29/50008 , G11C2013/009 , G11C2213/31
摘要： A variable resistance element is configured to be provided with a perovskite-type oxide between a first electrode and a second electrode, of which electric resistance between the first electrode and the second electrode is changed by applying a voltage pulse of a predetermined polarity between the first electrode and the second electrode, and the variable resistance element has a resistance hysteresis characteristic, in which a changing rate of a resistance value is changed from positive to negative with respect to increase of a cumulative pulse applying time in the application of the voltage pulse. The voltage pulse is applied to the variable resistance element so that the cumulative pulse applying time is not longer than a specific cumulative pulse applying time, in which the changing rate of the, resistance value is changed from positive to negative with respect to increase of the cumulative pulse applying time in the resistance hysteresis characteristic.
摘要翻译：可变电阻元件被配置为在第一电极和第二电极之间设置有钙钛矿型氧化物，其中通过在第一电极和第二电极之间施加预定极性的电压脉冲来改变第一电极和第二电极之间的电阻电极和第二电极，并且可变电阻元件具有电阻滞后特性，其中电阻值的变化率相对于施加电压脉冲的累积脉冲施加时间的增加而从正变化到负。电压脉冲被施加到可变电阻元件，使得累积脉冲施加时间不长于特定的累积脉冲施加时间，其中电阻值的变化率相对于增加的电阻值从正变化到负累积脉冲施加时间在电阻滞后特性。

3. 发明授权

US07894239B2 Variable resistance element, method for producing the same, and nonvolatile semiconductor storage device 有权
标题翻译：可变电阻元件及其制造方法以及非易失性半导体存储器件
公开(公告)号：US07894239B2
公开(公告)日：2011-02-22
申请号：US12328648
申请日：2008-12-04
申请人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Fumiyoshi Takano , Hiroyuki Akinaga
发明人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Fumiyoshi Takano , Hiroyuki Akinaga
IPC分类号： G11C7/00
CPC分类号： G11C8/08 , G11C13/0007 , G11C13/0028 , G11C2013/0083 , G11C2213/32 , G11C2213/56 , G11C2213/77 , H01C7/108 , H01L45/04 , H01L45/1233 , H01L45/1246 , H01L45/146 , H01L45/1658 , Y10T29/49082
摘要： The variable resistance element of the present invention is a variable resistance element having an electrode, the other electrode, and a metal oxide material sandwiched between the electrodes and having an electrical resistance, between the electrodes, changing reversibly in response to a voltage applied between the electrodes. The variable resistance element further includes, inside the metal oxide material, a low resistance material having a lower electrical resistance than the metal oxide material and being out of contact with at least either one of the electrodes. This makes it possible to reduce a forming voltage for providing a conductive section inside the metal oxide material, without causing a leakage current to increase.
摘要翻译：本发明的可变电阻元件是具有电极，另一个电极和夹在电极之间并具有电阻的金属氧化物材料的可变电阻元件，在电极之间，响应于施加在电极之间的电压而可逆地改变电极。可变电阻元件还包括在金属氧化物材料内部的具有比金属氧化物材料低的电阻并且与至少任一个电极不接触的低电阻材料。这使得可以降低用于在金属氧化物材料内部提供导电部分的形成电压，而不会导致泄漏电流增加。

4. 发明申请

US20090147558A1 VARIABLE RESISTANCE ELEMENT, METHOD FOR PRODUCING THE SAME, AND NONVOLATILE SEMICONDUCTOR STORAGE DEVICE 有权
标题翻译：可变电阻元件，其制造方法和非易失性半导体存储器件
公开(公告)号：US20090147558A1
公开(公告)日：2009-06-11
申请号：US12328648
申请日：2008-12-04
申请人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Fumiyoshi Takano , Hiroyuki Akinaga
发明人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Fumiyoshi Takano , Hiroyuki Akinaga
IPC分类号： G11C11/21 , H01C7/10 , H01C17/00
CPC分类号： G11C8/08 , G11C13/0007 , G11C13/0028 , G11C2013/0083 , G11C2213/32 , G11C2213/56 , G11C2213/77 , H01C7/108 , H01L45/04 , H01L45/1233 , H01L45/1246 , H01L45/146 , H01L45/1658 , Y10T29/49082
摘要： The variable resistance element of the present invention is a variable resistance element having an electrode, the other electrode, and a metal oxide material sandwiched between the electrodes and having an electrical resistance, between the electrodes, changing reversibly in response to a voltage applied between the electrodes. The variable resistance element further includes, inside the metal oxide material, a low resistance material having a lower electrical resistance than the metal oxide material and being out of contact with at least either one of the electrodes. This makes it possible to reduce a forming voltage for providing a conductive section inside the metal oxide material, without causing a leakage current to increase.
摘要翻译：本发明的可变电阻元件是具有电极，另一个电极和夹在电极之间并具有电阻的金属氧化物材料的可变电阻元件，在电极之间，响应于施加在电极之间的电压而可逆地改变电极。可变电阻元件还包括在金属氧化物材料内部的具有比金属氧化物材料低的电阻并且与至少任一个电极不接触的低电阻材料。这使得可以降低用于在金属氧化物材料内部提供导电部分的形成电压，而不会导致泄漏电流增加。

5. 发明申请

US20100172170A1 VARIABLE RESISTIVE ELEMENT, MANUFACTURING METHOD FOR SAME, AND NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE 有权
标题翻译：可变电阻元件，其制造方法和非易失性半导体存储器件
公开(公告)号：US20100172170A1
公开(公告)日：2010-07-08
申请号：US12598642
申请日：2008-04-07
申请人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Hiroyuki Akinaga , Fumiyoshi Takano
发明人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Hiroyuki Akinaga , Fumiyoshi Takano
IPC分类号： G11C11/56 , H01L29/22 , H01L21/44
CPC分类号： G11C13/0011 , G11C11/5614 , G11C11/5685 , G11C13/0007 , G11C13/0069 , G11C2013/0073 , G11C2013/0083 , G11C2013/009 , G11C2213/32 , G11C2213/34 , G11C2213/51 , G11C2213/56 , G11C2213/77 , H01L27/101 , H01L45/08 , H01L45/1233 , H01L45/146
摘要： Provided is a variable resistive element which performs high speed and low power consumption operation. The variable resistive element comprises a metal oxide layer between first and second electrodes wherein electrical resistance between the first and second electrodes reversibly changes in accordance with application of electrical stress across the first and second electrodes. The metal oxide layer has a filament, which is a current path where the density of a current flowing between the first and second electrodes locally increases. A portion including at least the vicinity of an interface between the certain electrode, which is one or both of the first and second electrodes, and the filament, on an interface between the certain electrode and the metal oxide layer is provided with an interface oxide which is an oxide of at least one element included in the certain electrode and different from the oxide of the metal oxide layer.
摘要翻译：提供一种执行高速和低功耗操作的可变电阻元件。可变电阻元件包括在第一和第二电极之间的金属氧化物层，其中第一和第二电极之间的电阻根据跨越第一和第二电极的电应力的应用而可逆地改变。金属氧化物层具有灯丝，其是在第一和第二电极之间流动的电流的密度局部增加的电流路径。在特定电极和金属氧化物层之间的界面上至少包括作为第一和第二电极中的一个或两个的特定电极和灯丝之间的界面附近的部分设置有界面氧化物，其界面氧化物是包含在该特定电极中并且与金属氧化物层的氧化物不同的至少一种元素的氧化物。

6. 发明授权

US08054674B2 Variable resistive element, manufacturing method for same, and non-volatile semiconductor memory device 有权
标题翻译：可变电阻元件，相同的制造方法和非易失性半导体存储器件
公开(公告)号：US08054674B2
公开(公告)日：2011-11-08
申请号：US12598642
申请日：2008-04-07
申请人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Hiroyuki Akinaga , Fumiyoshi Takano
发明人： Yukio Tamai , Yasunari Hosoi , Nobuyoshi Awaya , Shigeo Ohnishi , Kazuya Ishihara , Hisashi Shima , Hiroyuki Akinaga , Fumiyoshi Takano
IPC分类号： G11C11/00
CPC分类号： G11C13/0011 , G11C11/5614 , G11C11/5685 , G11C13/0007 , G11C13/0069 , G11C2013/0073 , G11C2013/0083 , G11C2013/009 , G11C2213/32 , G11C2213/34 , G11C2213/51 , G11C2213/56 , G11C2213/77 , H01L27/101 , H01L45/08 , H01L45/1233 , H01L45/146
摘要： Provided is a variable resistive element which performs high speed and low power consumption operation. The variable resistive element comprises a metal oxide layer between first and second electrodes wherein electrical resistance between the first and second electrodes reversibly changes in accordance with application of electrical stress across the first and second electrodes. The metal oxide layer has a filament, which is a current path where the density of a current flowing between the first and second electrodes locally increases. A portion including at least the vicinity of an interface between the certain electrode, which is one or both of the first and second electrodes, and the filament, on an interface between the certain electrode and the metal oxide layer is provided with an interface oxide which is an oxide of at least one element included in the certain electrode and different from the oxide of the metal oxide layer.
摘要翻译：提供一种执行高速和低功耗操作的可变电阻元件。可变电阻元件包括在第一和第二电极之间的金属氧化物层，其中第一和第二电极之间的电阻根据跨越第一和第二电极的电应力的应用而可逆地改变。金属氧化物层具有灯丝，其是在第一和第二电极之间流动的电流的密度局部增加的电流路径。在特定电极和金属氧化物层之间的界面上至少包括作为第一和第二电极中的一个或两个的特定电极和灯丝之间的界面附近的部分设置有界面氧化物，其界面氧化物是包含在该特定电极中并且与金属氧化物层的氧化物不同的至少一种元素的氧化物。

7. 发明授权

US07796416B2 Variable resistance element, its manufacturing method and semiconductor memory device comprising the same 有权
标题翻译：可变电阻元件，其制造方法和包括该可变电阻元件的半导体存储器件
公开(公告)号：US07796416B2
公开(公告)日：2010-09-14
申请号：US12092766
申请日：2006-12-13
申请人： Kazuya Ishihara , Yasunari Hosoi , Shinji Kobayashi
发明人： Kazuya Ishihara , Yasunari Hosoi , Shinji Kobayashi
IPC分类号： G11C11/00
CPC分类号： H01L27/101 , H01L27/2436 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1625 , H01L45/1633 , Y10T29/49082
摘要： Provided is a variable resistance element capable of performing a stable resistance switching operation and having a favorable resistance value retention characteristics, comprising a variable resistor 2 sandwiched between a upper electrode 1 and lower electrode 3 and formed of titanium oxide or titanium oxynitride having a crystal grain diameter of 30 nm or less. When the variable resistance 2 is formed under the substrate temperature of 150° C. to 500° C., an anatase-type crystal having a crystal grain diameter of 30 nm or less is formed. Since the crystalline state of the variable resistor changes by applying a voltage pulse and the resistance value changes, no forming process is required. Moreover, it is possible to perform a stable resistance switching operation and obtain an excellent effect that the resistance fluctuation is small even if the switching is repeated, or the variable resistance element is stored for a long time under a high temperature.
摘要翻译：提供一种能够进行稳定的电阻切换操作并具有良好的电阻值保持特性的可变电阻元件，包括夹在上电极1和下电极3之间并由具有晶粒的氧化钛或氮氧化钛形成的可变电阻器2 直径30nm以下。当在150℃至500℃的衬底温度下形成可变电阻2时，形成晶粒直径为30nm以下的锐钛矿型晶体。由于可变电阻器的结晶状态通过施加电压脉冲而变化，并且电阻值改变，因此不需要形成工艺。此外，即使重复切换，或者可变电阻元件在高温下长时间存储，也可以进行稳定的电阻切换操作，并获得优异的电阻波动小的效果。

8. 发明申请

US20090097300A1 VARIABLE RESISTANCE ELEMENT, ITS MANUFACTURING METHOD AND SEMICONDUCTOR MEMORY DEVICE COMPRISING THE SAME 有权
标题翻译：可变电阻元件及其制造方法和包含其的半导体存储器件
公开(公告)号：US20090097300A1
公开(公告)日：2009-04-16
申请号：US12092766
申请日：2006-12-13
申请人： Kazuya Ishihara , Yasunari Hosoi , Shinji Kobayashi
发明人： Kazuya Ishihara , Yasunari Hosoi , Shinji Kobayashi
IPC分类号： H01C7/10 , H01C17/075 , G11C11/21
CPC分类号： H01L27/101 , H01L27/2436 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1625 , H01L45/1633 , Y10T29/49082
摘要： Provided is a variable resistance element capable of performing a stable resistance switching operation and having a favorable resistance value retention characteristics, comprising a variable resistor 2 sandwiched between a upper electrode 1 and lower electrode 3 and formed of titanium oxide or titanium oxynitride having a crystal grain diameter of 30 nm or less. When the variable resistance 2 is formed under the substrate temperature of 150° C. to 500° C., an anatase-type crystal having a crystal grain diameter of 30 nm or less is formed. Since the crystalline state of the variable resistor changes by applying a voltage pulse and the resistance value changes, no forming process is required. Moreover, it is possible to perform a stable resistance switching operation and obtain an excellent effect that the resistance fluctuation is small even if the switching is repeated, or the variable resistance element is stored for a long time under a high temperature.
摘要翻译：提供一种能够进行稳定的电阻切换操作并具有良好的电阻值保持特性的可变电阻元件，包括夹在上电极1和下电极3之间并由具有晶粒的氧化钛或氮氧化钛形成的可变电阻器2 直径30nm以下。当在150℃至500℃的衬底温度下形成可变电阻2时，形成晶粒直径为30nm以下的锐钛矿型晶体。由于可变电阻器的结晶状态通过施加电压脉冲而变化，并且电阻值改变，因此不需要形成工艺。此外，即使重复切换，或者可变电阻元件在高温下长时间存储，也可以进行稳定的电阻切换操作，并获得优异的电阻波动小的效果。

9. 发明申请

US20090273964A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE 有权
标题翻译：非易失性半导体存储器件
公开(公告)号：US20090273964A1
公开(公告)日：2009-11-05
申请号：US12515286
申请日：2007-11-05
申请人： Shinobu Yamazaki , Yasunari Hosoi , Nobuyoshi Awaya , Shinichi Sato , Kenichi Tanaka
发明人： Shinobu Yamazaki , Yasunari Hosoi , Nobuyoshi Awaya , Shinichi Sato , Kenichi Tanaka
IPC分类号： G11C11/00 , G11C7/00 , H01L29/47
CPC分类号： H01L27/101 , G11C13/0007 , G11C13/003 , G11C2213/15 , G11C2213/32 , G11C2213/34 , G11C2213/71 , G11C2213/72 , G11C2213/76 , G11C2213/77 , G11C2213/79 , H01L27/2409 , H01L27/2463 , H01L27/2481 , H01L45/04 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1633
摘要： A nonvolatile semiconductor memory device comprises: a two terminal structured variable resistive element, wherein resistive characteristics defined by current-voltage characteristics at both ends transit between low and high resistance states stably by applying a voltage satisfying predetermined conditions to the both ends, a transition from the low resistance state to the high resistance state occurs by applying a voltage of a first polarity whose absolute value is at or higher than a first threshold voltage, and the reverse transition occurs by applying a voltage of a second polarity whose absolute value is at or higher than a second threshold voltage; a load circuit connected to the variable resistive element in series having an adjustable load resistance; and a voltage generation circuit for applying a voltage to both ends of a serial circuit; wherein the variable resistive element can transit between the states by adjusting a resistance of the load circuit.
摘要翻译：非易失性半导体存储器件包括：二端结构可变电阻元件，其中由两端的电流 - 电压特性限定的电阻特性通过向两端施加满足预定条件的电压来稳定地在低电阻状态和高电阻状态之间转变，通过施加绝对值等于或高于第一阈值电压的第一极性的电压而发生到高电阻状态的低电阻状态，并且通过施加绝对值为或等于或等于或等于或等于或等于或等于高于第二阈值电压; 连接到具有可调负载电阻的串联可变电阻元件的负载电路; 以及用于向串联电路的两端施加电压的电压产生电路; 其中可变电阻元件可以通过调节负载电路的电阻在状态之间转变。

10. 发明授权

US07433222B2 Nonvolatile semiconductor memory device 有权
标题翻译：非易失性半导体存储器件
公开(公告)号：US07433222B2
公开(公告)日：2008-10-07
申请号：US11647329
申请日：2006-12-29
申请人： Yasunari Hosoi , Nobuyoshi Awaya , Isao Inoue
发明人： Yasunari Hosoi , Nobuyoshi Awaya , Isao Inoue
IPC分类号： G11C11/00
CPC分类号： G11C13/0069 , G11C13/0007 , G11C13/003 , G11C2013/009 , G11C2213/31 , G11C2213/32 , G11C2213/72 , G11C2213/76 , G11C2213/79
摘要： A nonvolatile semiconductor device is configured so that a load circuit applying voltage to a variable resistive element is provided electrically connecting in series to the variable resistive element, a load resistive characteristic of the load circuit can be switched between two different characteristics. The two load resistive characteristics are selectively switched depending on whether a resistive characteristic of the variable resistive element transits from low resistance state to high resistance state, or vice versa, voltage necessary for transition from one of the two resistive characteristics to the other is applied by applying writing voltage to a serial circuit of the variable resistive element and load circuit. After the resistive characteristic of the variable resistive element transits from one to the other, voltage applied to the variable resistive element does not allow a resistive characteristic to return from the other to one depending on the selected load resistive characteristic.
摘要翻译：非易失性半导体器件被配置为使得向可变电阻元件施加电压的负载电路被提供为电连接到可变电阻元件，负载电路的负载电阻特性可以在两个不同特性之间切换。根据可变电阻元件的电阻特性是否从低电阻状态转变为高电阻状态，反之亦然，两个负载电阻特性被选择性地切换，或者反过来，通过两个电阻特性之一转换到另一个电阻特性所需的电压被施加对可变电阻元件和负载电路的串联电路施加写入电压。在可变电阻元件的电阻特性从一个转变到另一个之后，施加到可变电阻元件的电压根据所选择的负载电阻特性不允许电阻特性从另一个返回到一个。

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