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    • 7. 发明授权
    • Method of producing polishing material comprising diamond clusters
    • 制造包含金刚石簇的抛光材料的方法
    • US07857876B2
    • 2010-12-28
    • US12420557
    • 2009-04-08
    • Noriyuki KumasakaYuji HorieMitsuru SaitoKazuei Yamaguchi
    • Noriyuki KumasakaYuji HorieMitsuru SaitoKazuei Yamaguchi
    • B24D3/02C09C1/68C09K3/14H01L21/302C09G1/02B24B1/00B24B7/19
    • G11B5/8404B24D11/00C01B32/25C09K3/1436C09K3/1463
    • Diamond clusters are used as a polishing material of free abrading particles, each being a combination of artificial diamond particles having primary particle diameters of 20 nm or less and impurities that are attached around these diamond particles. The density of non-diamond carbon contained in the impurities is in the range of 95% or more and 99% or less, and the density of chlorine contained in other than non-diamond carbon in the impurities is 0.5% or more and preferably 3.5% or less. The diameters of these diamond clusters are in the range of 30 nm or more and 500 nm or less, and their average diameter is in the range of 30 nm or more and 200 nm or less. Such polishing material is produced first by an explosion shock method to obtain diamond clusters and then removing the impurities such that density of non-diamond carbon contained in the impurities and density of chlorine contained in other than non-diamond carbon in the impurities become adjusted.
    • 金刚石簇用作自由研磨颗粒的抛光材料,每个颗粒是一次粒径为20nm以下的人造金刚石颗粒和附着在这些金刚石颗粒周围的杂质的组合。 杂质中含有的非金刚石碳的密度在95%以上且99%以下的范围,杂质以外的非金刚石碳以外的氯的密度为0.5%以上,优选为3.5 % 或更少。 这些金刚石簇的直径在30nm以上且500nm以下的范围内,其平均直径为30nm以上且200nm以下的范围。 首先通过爆炸冲击法制造这种抛光材料,以获得金刚石簇,然后除去杂质,从而调节杂质中包含的非金刚石碳的密度和杂质中除非金刚石碳以外的其它的密度。