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    • 1. 发明申请
    • ULTRASOUND PROBE AND ULTRASOUND DIAGNOSTIC DEVICE USING SAME
    • 超声探头和超声波诊断装置
    • US20130172750A1
    • 2013-07-04
    • US13817541
    • 2011-08-19
    • Yasuhiro YoshimuraTatsuya NagataAkifumi Sako
    • Yasuhiro YoshimuraTatsuya NagataAkifumi Sako
    • A61B8/00A61B8/14A61B8/08
    • A61B8/4494A61B8/0883A61B8/0891A61B8/14A61B8/4444B06B1/0292G01N29/2456G10K11/002
    • In order to obtain a high-resolution ultrasound diagnostic image while reducing the back side reflection of a ultrasound irradiated to the side opposite to the ultrasound transmission direction of an ultrasound transmission/reception device, disclosed is an ultrasound probe, wherein a substrate is provided thereon with a cavity, insulation layers having the cavity therebetween, and an upper layer electrode and a lower layer electrode having the cavity and the insulation layers therebetween, so as to form an ultrasound vibration element, the substrate is held by a backing with a low-modulus member therebetween, and a direct voltage and a alternating voltage are applied between the electrodes to vibrate the ultrasound vibration element, and wherein a mechanical impedance by the substrate and the low-modulus member has a substantially equal value as an acoustic impedance of the backing.
    • 为了获得高分辨率超声波诊断图像,同时减少了照射到与超声波发送/接收装置的超声波发送方向相反的一侧的超声波的背面反射,公开了一种超声波探头,其中在其上设置有基板 具有空腔,其间具有空腔的绝缘层,以及具有所述空腔和所述绝缘层之间的上层电极和下层电极,以形成超声波振动元件,所述基板由背衬保持, 模数构件之间,并且在电极之间施加直流电压和交流电压以振动超声波振动元件,并且其中由衬底和低模量构件的机械阻抗具有与背衬的声阻抗基本相等的值 。
    • 9. 发明申请
    • Ultrasonic transducer and manufacturing method thereof
    • 超声波换能器及其制造方法
    • US20070052093A1
    • 2007-03-08
    • US11489612
    • 2006-07-20
    • Shuntaro MachidaHiroyuki EnomotoYoshitaka TadakiTatsuya Nagata
    • Shuntaro MachidaHiroyuki EnomotoYoshitaka TadakiTatsuya Nagata
    • H01L23/48
    • B06B1/0292
    • Disclosed is an improved construction of an ultrasonic transducer, wherein a charge is not easily injected into an insulating film even when the bottom of a membrane comes in contact with a lower electrode, and a manufacturing method thereof without using the wafer laminating technique. The ultrasonic transducer includes a lower electrode; a cavity layer formed on the first electrode; an insulating film covering the cavity layer; and an upper electrode formed on the insulating film, wherein, the cavity layer includes projections formed into an insulating film protruded from the cavity layer. In addition, an opening is formed into the upper electrode, and this upper electrode having the opening formed therein is deposited at a position not being superposed with the projections of the insulating film when seen from the top.
    • 公开了一种超声换能器的改进结构,其中即使膜的底部与下电极接触,电荷也不容易注入到绝缘膜中,并且其制造方法不使用晶片层压技术。 超声波换能器包括下电极; 形成在所述第一电极上的空腔层; 覆盖空腔层的绝缘膜; 以及形成在绝缘膜上的上电极,其中,所述空腔层包括形成为从所述空腔层突出的绝缘膜的突起。 此外,在上部电极中形成开口,并且其上形成有开口的该上部电极沉积在从顶部观察时不与绝缘膜的突起重叠的位置。