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    • 8. 发明授权
    • Nonvolatile semiconductor memory
    • 非易失性半导体存储器
    • US07586786B2
    • 2009-09-08
    • US12106953
    • 2008-04-21
    • Yasuhiko MatsunagaFumitaka AraiMakoto SakumaTadashi IguchiHisashi WatanobeHiroaki Tsunoda
    • Yasuhiko MatsunagaFumitaka AraiMakoto SakumaTadashi IguchiHisashi WatanobeHiroaki Tsunoda
    • G11C11/34
    • H01L27/0207H01L27/115H01L27/11519H01L27/11521H01L27/11524
    • A method of reading out data from nonvolatile semiconductor memory including the steps of applying a first voltage to a bit line contact; applying a second voltage to a source line contact, wherein the second voltage is substantially smaller than the first voltage; applying a third voltage gates of third and fourth select gate transistors, the third voltage configured to bring the third and fourth select gate transistors into conduction; applying a fourth voltage to gates of the plurality of memory cell transistors of a second memory cell unit, the fourth voltage configured to bring the plurality of memory cell transistors of the second memory cell unit into conduction or not, depending on the data that is stored in the memory cell unit; and applying a fifth voltage to gates of the plurality of memory cell transistors of a first memory cell unit, the fifth voltage configured to bring the plurality of memory cell transistors of the first memory cell unit into conduction; wherein the fifth voltage is bigger than the fourth voltage.
    • 一种从非易失性半导体存储器读出数据的方法,包括对位线接触施加第一电压的步骤; 向源极线接触施加第二电压,其中所述第二电压基本上小于所述第一电压; 施加第三和第四选择栅极晶体管的第三电压栅极,所述第三电压被配置为使所述第三和第四选择栅极晶体管导通; 对第二存储单元单元的多个存储单元晶体管的栅极施加第四电压,第四电压被配置为使第二存储单元单元的多个存储单元晶体管导通,取决于存储的数据 在存储单元中; 对第一存储单元单元的多个存储单元晶体管的栅极施加第五电压,第五电压被配置为使第一存储单元单元的多个存储单元晶体管导通; 其中所述第五电压大于所述第四电压。
    • 10. 发明申请
    • Semiconductor device with double barrier film
    • 具有双阻挡膜的半导体器件
    • US20080061357A1
    • 2008-03-13
    • US11980561
    • 2007-10-31
    • Makoto SakumaYasuhiko MatsunagaFumitaka AraiKikuko Sugimae
    • Makoto SakumaYasuhiko MatsunagaFumitaka AraiKikuko Sugimae
    • H01L29/788
    • H01L27/115H01L27/105H01L27/11526H01L27/11529
    • A semiconductor device comprising a first insulation layer, a second insulation layer, a first barrier film, a second barrier film, a diffusion layer. The device further comprises an upper contact hole, a lower contact hole, and a contact plug. The upper contact hole penetrates the second insulation layer and has a bottom in the second barrier film. The bottom has a width greater than a trench made in the first insulation layer, as measured in a direction crossing the widthwise direction of the trench. The lower contact hole penetrates the first insulation layer and first barrier film, communicates with the first contact hole via the trench and is provided on the diffusion layer. The upper portion of the lower contact hole has the same width as the trench. The contact plug is provided in the upper contact hole and lower contact hole.
    • 一种半导体器件,包括第一绝缘层,第二绝缘层,第一阻挡膜,第二阻挡膜,扩散层。 该装置还包括上接触孔,下接触孔和接触塞。 上接触孔穿透第二绝缘层,并且在第二阻挡膜中具有底部。 底部的宽度大于在与沟槽宽度方向交叉的方向上测量的在第一绝缘层中形成的沟槽。 下接触孔穿过第一绝缘层和第一阻挡膜,经由沟槽与第一接触孔连通并设置在扩散层上。 下接触孔的上部具有与沟槽相同的宽度。 接触塞设置在上接触孔和下接触孔中。