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    • 5. 发明授权
    • Heating system of batch type reaction chamber and method thereof
    • 分批式反应室加热系统及其方法
    • US07525068B2
    • 2009-04-28
    • US11513732
    • 2006-08-31
    • Taek Yong JangByoung Il LeeYoung Ho Lee
    • Taek Yong JangByoung Il LeeYoung Ho Lee
    • F27B5/14F26B19/00
    • F27B17/0025F27B5/04F27D3/0084H01L21/67109H01L21/67115
    • A heating system of a batch type reaction chamber for semiconductor device and a method thereof are disclosed. Each heat unit of heating groups has different height and caloric value at right angles according to the divided areas, thereby it can control an uniform temperature incline of the entire process space of the reaction chamber. Also, the reflecting plates are formed by each heating unit, so that the change of the heating unit can be simple. Furthermore, the divided reflecting blocks are adjacently connected to another reflecting block through the radiant wave shielding slit between them, so that the leakage of the radiant wave can be prevented and the reflecting blocks can be separately attached and deattached to each other. Also, the turning member is formed at the lower portion of the reflecting blocks, so that it can be easily attached and deattached.
    • 公开了一种用于半导体器件的间歇式反应室的加热系统及其方法。 加热组的每个加热单元根据分割区域具有不同的高度和直角热值,从而可以控制反应室整个工艺空间的均匀温度倾斜。 此外,反射板由每个加热单元形成,使得加热单元的变化可以简单。 此外,分割的反射块通过它们之间的辐射波屏蔽狭缝相邻地连接到另一个反射块,从而可以防止辐射波的泄漏,并且可以将反射块分开地附接和脱附。 此外,转动构件形成在反射块的下部,使得其可以容易地附接和脱附。
    • 6. 发明申请
    • Liquid lens
    • 液体镜片
    • US20070217023A1
    • 2007-09-20
    • US11715371
    • 2007-03-08
    • Sung Chan KimHa Yong JungJin Hyuck YangYoung Ho Lee
    • Sung Chan KimHa Yong JungJin Hyuck YangYoung Ho Lee
    • G02B3/12
    • G02B3/14G02B13/0045G02B13/006G02B13/0075G02B13/009G02B26/005
    • A liquid lens comprises a cylindrical body having a pair of glass lenses which are coupled to upper and lower openings of the body, respectively; an aspheric transmitting partition lens inserted and fixed in the central portion of the body; an auto-focus lens section composed of a first insulating liquid layer and a first electrolyte layer which are filled under the transmitting partition lens so as to form an interface therebetween; an optical zoom lens section composed of a second insulating liquid layer and a second electrolyte layer which are filled above the transmitting partition lens so as to form an interface therebetween; and a minute auto-focus lens section composed of a third insulating liquid layer of which the upper surface comes in contact with the lower surface of the transmitting partition lens and of which the lower surface forms an interface with the first electrolyte layer such that the third insulating liquid layer is not mixed with the first electrolyte layer.
    • 液体透镜包括具有一对玻璃透镜的圆柱体,所述玻璃透镜分别联接到主体的上部和下部开口; 插入并固定在主体的中心部分的非球面透射分隔透镜; 一个由第一绝缘液体层和第一电解质层构成的自动对焦透镜部分,其被填充在发射分隔透镜下面以形成它们之间的界面; 由第二绝缘液体层和第二电解质层组成的光学变焦透镜部分,其被填充在发射分隔透镜的上方以形成它们之间的界面; 以及由上表面与发射分隔透镜的下表面接触并且其下表面与第一电解质层形成界面的第三绝缘液体层组成的分钟自动对焦透镜部分,使得第三绝缘液体层 绝缘液体层不与第一电解质层混合。
    • 7. 发明申请
    • Heating system of batch type reaction chamber and method thereof
    • 分批式反应室加热系统及其方法
    • US20070166656A1
    • 2007-07-19
    • US11513732
    • 2006-08-31
    • Taek Yong JangByoung Il LeeYoung Ho Lee
    • Taek Yong JangByoung Il LeeYoung Ho Lee
    • F27D1/00
    • F27B17/0025F27B5/04F27D3/0084H01L21/67109H01L21/67115
    • A heating system of a batch type reaction chamber for semiconductor device and a method thereof are disclosed. Each heat unit of heating groups has different height and caloric value at right angles according to the divided areas, thereby it can control an uniform temperature incline of the entire process space of the reaction chamber. Also, the reflecting plates are formed by each heating unit, so that the change of the heating unit can be simple. Furthermore, the divided reflecting blocks are adjacently connected to another reflecting block through the radiant wave shielding slit between them, so that the leakage of the radiant wave can be prevented and the reflecting blocks can be separately attached and deattached to each other. Also, the turning member is formed at the lower portion of the reflecting blocks, so that it can be easily attached and deattached.
    • 公开了一种用于半导体器件的间歇式反应室的加热系统及其方法。 加热组的每个加热单元根据分割区域具有不同的高度和直角热值,从而可以控制反应室整个工艺空间的均匀温度倾斜。 此外,反射板由每个加热单元形成,使得加热单元的变化可以简单。 此外,分割的反射块通过它们之间的辐射波屏蔽狭缝相邻地连接到另一个反射块,从而可以防止辐射波的泄漏,并且可以将反射块分开地附接和脱附。 此外,转动构件形成在反射块的下部,使得其可以容易地附接和脱附。
    • 10. 发明申请
    • FLUX-LOCKED LOOP CIRCUIT, FLUX-LOCKED LOOP METHOD, AND SQUID MEASURING APPARATUS
    • FLUX-LOCKED LOOP CIRCUIT,FLUX-LOCKED LOOP METHOD,和SQUID MEASURING APPARATUS
    • US20120206136A1
    • 2012-08-16
    • US13457130
    • 2012-04-26
    • Jin Mok KimYoung Ho LeeHyukchan KwonKi Woong KimKwon Kyu Yu
    • Jin Mok KimYoung Ho LeeHyukchan KwonKi Woong KimKwon Kyu Yu
    • G01R33/02
    • G01R33/0354G01R33/035
    • Provided are a flux-locked loop circuit, a flux-locked loop method and a superconducting quantum interference device (SQUID) measuring apparatus. The flux-locked loop circuit includes a pre-amplifier configured to amplify a signal output of a SQUID, an integrator configured to integrate a signal output from the pre-amplifier and output the integrated signal, an operating range expanding unit configured to initialize the integrator by comparing an output signal of the integrator with a positive or negative reference reset voltage corresponding to an external flux of a predetermined integral multiple of flux quantum, and a feedback circuit configured to supply current to eliminate a difference between the external flux applied to the SQUID and a magnetic flux corresponding to an integral multiple of the reference reset voltage according to the output signal of the integrator.
    • 提供了一种磁通锁定环路电路,一个磁通锁定环路方法和一种超导量子干涉装置(SQUID)测量装置。 磁通锁定环电路包括:前置放大器,被配置为放大SQUID的信号输出;积分器,被配置为积分从前置放大器输出的信号并输出​​积分信号;工作范围扩展单元,被配置为初始化积分器 通过将积分器的输出信号与对应于预定的通量量子的整数倍的外部通量的正或负参考复位电压进行比较,以及反馈电路,被配置为提供电流以消除施加到SQUID的外部通量之间的差 以及根据积分器的输出信号对应于基准复位电压的整数倍的磁通量。