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1. 发明授权

US08791014B2 Methods of forming copper-based conductive structures on semiconductor devices 有权
标题翻译：在半导体器件上形成铜基导电结构的方法
公开(公告)号：US08791014B2
公开(公告)日：2014-07-29
申请号：US13422439
申请日：2012-03-16
申请人： Xunyuan Zhang , Hoon Kim , Chanro Park
发明人： Xunyuan Zhang , Hoon Kim , Chanro Park
IPC分类号： H01L21/768
CPC分类号： H01L21/76879 , H01L21/28556 , H01L21/28562 , H01L21/31144 , H01L21/32134 , H01L21/76805 , H01L21/76816
摘要： Disclosed herein are various methods of forming copper-based conductive structures on semiconductor devices, such as transistors. In one example, the method involves performing a first etching process through a patterned metal hard mask layer to define an opening in a layer of insulating material, performing a second etching process through the opening in the layer of insulating material that exposes a portion of an underlying copper-containing structure, performing a wet etching process to remove the patterned metal hard mask layer, performing a selective metal deposition process through the opening in the layer of insulating material to selectively form a metal region on the copper-containing structure and, after forming the metal region, forming a copper-containing structure in the opening above the metal region.
摘要翻译：本文公开了在诸如晶体管的半导体器件上形成铜基导电结构的各种方法。在一个示例中，该方法包括通过图案化的金属硬掩模层执行第一蚀刻工艺以限定绝缘材料层中的开口，通过绝缘材料层中的开口执行第二蚀刻工艺，该开口暴露一部分下面的含铜结构，进行湿蚀刻处理以去除图案化的金属硬掩模层，通过绝缘材料层中的开口进行选择性金属沉积工艺，以选择性地在含铜结构上形成金属区域，之后形成金属区域，在金属区域上方的开口中形成含铜结构体。

2. 发明申请

US20130244422A1 METHODS OF FORMING COPPER-BASED CONDUCTIVE STRUCTURES ON SEMICONDUCTOR DEVICES 有权
标题翻译：在半导体器件上形成基于铜的导电结构的方法
公开(公告)号：US20130244422A1
公开(公告)日：2013-09-19
申请号：US13422439
申请日：2012-03-16
申请人： Xunyuan Zhang , Hoon Kim , Chanro Park
发明人： Xunyuan Zhang , Hoon Kim , Chanro Park
IPC分类号： H01L21/768
CPC分类号： H01L21/76879 , H01L21/28556 , H01L21/28562 , H01L21/31144 , H01L21/32134 , H01L21/76805 , H01L21/76816
摘要： Disclosed herein are various methods of forming copper-based conductive structures on semiconductor devices, such as transistors. In one example, the method involves performing a first etching process through a patterned metal hard mask layer to define an opening in a layer of insulating material, performing a second etching process through the opening in the layer of insulating material that exposes a portion of an underlying copper-containing structure, performing a wet etching process to remove the patterned metal hard mask layer, performing a selective metal deposition process through the opening in the layer of insulating material to selectively form a metal region on the copper-containing structure and, after forming the metal region, forming a copper-containing structure in the opening above the metal region.
摘要翻译：本文公开了在诸如晶体管的半导体器件上形成铜基导电结构的各种方法。在一个示例中，该方法包括通过图案化的金属硬掩模层执行第一蚀刻工艺以限定绝缘材料层中的开口，通过绝缘材料层中的开口执行第二蚀刻工艺，该开口暴露一部分下面的含铜结构，进行湿蚀刻处理以去除图案化的金属硬掩模层，通过绝缘材料层中的开口进行选择性金属沉积工艺，以选择性地在含铜结构上形成金属区域，之后形成金属区域，在金属区域上方的开口中形成含铜结构体。

3. 发明授权

US09190323B2 Semiconductor devices with copper interconnects and methods for fabricating same 有权
标题翻译：具有铜互连的半导体器件及其制造方法
公开(公告)号：US09190323B2
公开(公告)日：2015-11-17
申请号：US13354070
申请日：2012-01-19
申请人： Xunyuan Zhang , Hoon Kim
发明人： Xunyuan Zhang , Hoon Kim
IPC分类号： H01L23/52 , H01L21/768 , H01L23/532
CPC分类号： H01L21/76885 , H01L21/76838 , H01L21/76849 , H01L21/76852 , H01L23/53238 , H01L2924/0002 , H01L2924/00
摘要： Semiconductor devices having copper interconnects and methods for their fabrication are provided. In one embodiment, a semiconductor device is fabricated with a copper interconnect on substrate such as an FEOL processed substrate. The method includes forming a copper layer on a substrate. The copper layer is formed from grains. The copper layer is modified such that the modified copper layer has an average grain size of larger than about 0.05 microns. In the method, the modified copper layer is etched to form a line along the substrate and a via extending upwards from the line.
摘要翻译：提供了具有铜互连的半导体器件及其制造方法。在一个实施例中，在诸如FEOL处理的衬底的衬底上用铜互连制造半导体器件。该方法包括在基板上形成铜层。铜层由晶粒形成。铜层被改性，使得改性铜层的平均粒度大于约0.05微米。在该方法中，蚀刻改性铜层以形成沿着衬底的线和从该线向上延伸的通孔。

4. 发明申请

US20130187273A1 SEMICONDUCTOR DEVICES WITH COPPER INTERCONNECTS AND METHODS FOR FABRICATING SAME 有权
标题翻译：具有铜互连的半导体器件及其制造方法
公开(公告)号：US20130187273A1
公开(公告)日：2013-07-25
申请号：US13354070
申请日：2012-01-19
申请人： Xunyuan Zhang , Hoon Kim
发明人： Xunyuan Zhang , Hoon Kim
IPC分类号： H01L23/532 , H01L21/768
CPC分类号： H01L21/76885 , H01L21/76838 , H01L21/76849 , H01L21/76852 , H01L23/53238 , H01L2924/0002 , H01L2924/00
摘要： Semiconductor devices having copper interconnects and methods for their fabrication are provided. In one embodiment, a semiconductor device is fabricated with a copper interconnect on substrate such as an FEOL processed substrate. The method includes forming a copper layer on a substrate. The copper layer is formed from grains. The copper layer is modified such that the modified copper layer has an average grain size of larger than about 0.05 microns. In the method, the modified copper layer is etched to form a line along the substrate and a via extending upwards from the line.
摘要翻译：提供了具有铜互连的半导体器件及其制造方法。在一个实施例中，在诸如FEOL处理的衬底的衬底上用铜互连制造半导体器件。该方法包括在基板上形成铜层。铜层由晶粒形成。铜层被改性，使得改性铜层的平均粒度大于约0.05微米。在该方法中，蚀刻改性铜层以形成沿着衬底的线和从该线向上延伸的通孔。

5. 发明授权

US08722534B2 Method for reducing wettability of interconnect material at corner interface and device incorporating same 有权
标题翻译：用于降低角接合处的互连材料的润湿性和结合其的装置的方法
公开(公告)号：US08722534B2
公开(公告)日：2014-05-13
申请号：US13561195
申请日：2012-07-30
申请人： Xunyuan Zhang , Hoon Kim , Vivian W. Ryan
发明人： Xunyuan Zhang , Hoon Kim , Vivian W. Ryan
IPC分类号： H01L21/4763
CPC分类号： H01L23/53238 , H01L21/76846 , H01L21/76858 , H01L21/76883 , H01L2924/0002 , H01L2924/00
摘要： A method for forming an interconnect structure includes forming a recess in a dielectric layer of a substrate, forming a first transition metal layer in the recess on corner portions of the recess, and forming a second transition metal layer in the recess over the first transition metal layer to line the recess. The method further includes filling the recess with a fill layer and annealing the substrate so that the first transition metal layer and the second transition metal layer form an alloy portion proximate the corner portions during the annealing, the alloy portion having a reduced wettability for a material of the fill layer than the second transition metal. Additionally, the method includes polishing the substrate to remove portions of the fill layer extending above the recess.
摘要翻译：形成互连结构的方法包括在基板的电介质层中形成凹部，在凹部的凹部中的凹部中形成第一过渡金属层，并在第一过渡金属的凹部中形成第二过渡金属层层到凹槽。该方法还包括用填充层填充凹槽并退火基板，使得第一过渡金属层和第二过渡金属层在退火期间在拐角部分附近形成合金部分，合金部分对于材料的润湿性降低的填充层比第二过渡金属。另外，该方法包括抛光衬底以去除在凹部上方延伸的填充层的部分。

6. 发明申请

US20140027910A1 METHOD FOR REDUCING WETTABILITY OF INTERCONNECT MATERIAL AT CORNER INTERFACE AND DEVICE INCORPORATING SAME 有权
标题翻译：用于降低角接触面上的互连材料的湿度的方法和包含其的装置
公开(公告)号：US20140027910A1
公开(公告)日：2014-01-30
申请号：US13561195
申请日：2012-07-30
申请人： Xunyuan Zhang , Hoon Kim , Vivian W. Ryan
发明人： Xunyuan Zhang , Hoon Kim , Vivian W. Ryan
IPC分类号： H01L23/532 , H01L21/321
CPC分类号： H01L23/53238 , H01L21/76846 , H01L21/76858 , H01L21/76883 , H01L2924/0002 , H01L2924/00
摘要： A method for forming an interconnect structure includes forming a recess in a dielectric layer of a substrate, forming a first transition metal layer in the recess on corner portions of the recess, and forming a second transition metal layer in the recess over the first transition metal layer to line the recess. The method further includes filling the recess with a fill layer and annealing the substrate so that the first transition metal layer and the second transition metal layer form an alloy portion proximate the corner portions during the annealing, the alloy portion having a reduced wettability for a material of the fill layer than the second transition metal. Additionally, the method includes polishing the substrate to remove portions of the fill layer extending above the recess.
摘要翻译：形成互连结构的方法包括在基板的电介质层中形成凹部，在凹部的凹部中的凹部中形成第一过渡金属层，并在第一过渡金属的凹部中形成第二过渡金属层层到凹槽。该方法还包括用填充层填充凹槽并退火基板，使得第一过渡金属层和第二过渡金属层在退火期间在拐角部分附近形成合金部分，合金部分对于材料的润湿性降低的填充层比第二过渡金属。另外，该方法包括抛光衬底以去除在凹部上方延伸的填充层的部分。

7. 发明授权

US08431482B1 Integrated circuits and methods for processing integrated circuits with embedded features 有权
标题翻译：用于处理具有嵌入式功能的集成电路的集成电路和方法
公开(公告)号：US08431482B1
公开(公告)日：2013-04-30
申请号：US13362981
申请日：2012-01-31
申请人： Errol T. Ryan , Xunyuan Zhang
发明人： Errol T. Ryan , Xunyuan Zhang
IPC分类号： H01L21/4763
CPC分类号： H01L23/535 , H01L21/76832 , H01L21/76834 , H01L21/76883 , H01L21/76886 , H01L2924/0002 , H01L2924/00
摘要： Integrated circuits, a process for recessing an embedded copper feature within a substrate, and a process for recessing an embedded copper interconnect within an interlayer dielectric substrate of an integrated circuit are provided. In an embodiment, a process for recessing an embedded copper feature, such as an embedded copper interconnect, within a substrate, such as an interlayer dielectric substrate, includes providing a substrate having an embedded copper feature disposed therein. The embedded copper feature has an exposed surface and the substrate has a substrate surface adjacent to the exposed surface of the embedded copper feature. The exposed surface of the embedded copper feature is nitrided to form a layer of copper nitride in the embedded copper feature. Copper nitride is selectively etched from the embedded copper feature to recess the embedded copper feature within the substrate.
摘要翻译：提供集成电路，用于凹入衬底内的嵌入式铜特征的工艺，以及用于使集成电路的层间电介质衬底内的嵌入式铜互连凹陷的工艺。在一个实施例中，在诸如层间电介质基板的衬底内嵌入诸如嵌入式铜互连的嵌入式铜特征的方法包括提供其中布置有嵌入式铜特征的衬底。嵌入的铜特征具有暴露的表面，并且衬底具有与嵌入的铜特征的暴露表面相邻的衬底表面。嵌入的铜特征的暴露表面被氮化以在嵌入的铜特征中形成一层氮化铜。从嵌入的铜特征中选择性地蚀刻氮化铜以将嵌入的铜特征凹入到衬底内。

8. 发明申请

US20140024212A1 MULTI-LAYER BARRIER LAYER FOR INTERCONNECT STRUCTURE 有权
标题翻译：用于互连结构的多层障碍层
公开(公告)号：US20140024212A1
公开(公告)日：2014-01-23
申请号：US13554020
申请日：2012-07-20
申请人： Vivian W. Ryan , Xunyuan Zhang , Paul R. Besser
发明人： Vivian W. Ryan , Xunyuan Zhang , Paul R. Besser
IPC分类号： H01L21/768
CPC分类号： H01L21/76873 , H01L21/76846 , H01L21/76858 , H01L21/76883 , H01L23/53238 , H01L2221/1089 , H01L2924/0002 , H01L2924/00
摘要： A method for forming an interconnect structure includes forming a recess in a dielectric layer of a substrate. An adhesion barrier layer is formed to line the recess. A first stress level is present across a first interface between the adhesion barrier layer and the dielectric layer. A stress-reducing barrier layer is formed over the adhesion barrier layer. The stress-reducing barrier layer reduces the first stress level to provide a second stress level, less than the first stress level, across a second interface between the adhesion barrier layer, the stress-reducing barrier layer, and the dielectric layer. The recess is filled with a fill layer.
摘要翻译：形成互连结构的方法包括在基板的电介质层中形成凹部。形成粘合阻挡层以使凹部成线。第一应力水平存在于粘合阻挡层和电介质层之间的第一界面上。在粘合阻挡层上方形成有应力降低阻挡层。所述减小应力的阻挡层减小所述第一应力水平以提供小于所述第一应力水平的第二应力水平，所述第二应力水平穿过所述粘合阻挡层，所述减小应力阻挡层和所述介电层之间的第二界面。该凹部填充有填充层。

9. 发明申请

US20130309868A1 METHODS FOR FORMING AN INTEGRATED CIRCUIT WITH STRAIGHTENED RECESS PROFILE 有权
标题翻译：用于形成具有连续记录轮廓的集成电路的方法
公开(公告)号：US20130309868A1
公开(公告)日：2013-11-21
申请号：US13476860
申请日：2012-05-21
申请人： Xiuyu Cai , Xunyuan Zhang , Ruilong Xie , Errol T. Ryan , John A. Iacoponi
发明人： Xiuyu Cai , Xunyuan Zhang , Ruilong Xie , Errol T. Ryan , John A. Iacoponi
IPC分类号： H01L21/311
CPC分类号： H01L21/311 , H01L21/3105 , H01L21/31116 , H01L21/76801 , H01L21/76816 , H01L21/76828 , H01L21/76831 , H01L29/66545
摘要： Methods are provided for forming an integrated circuit. In an embodiment, the method includes forming a sacrificial mandrel overlying a base substrate. Sidewall spacers are formed adjacent sidewalls of the sacrificial mandrel. The sidewall spacers have a lower portion that is proximal to the base substrate, and the lower portion has a substantially perpendicular outer surface relative to the base substrate. The sidewall spacers also have an upper portion that is spaced from the base substrate. The upper portion has a sloped outer surface. A first dielectric layer is formed overlying the base substrate and is conformal to at least a portion of the upper portion of the sidewall spacers. The upper portion of the sidewall spacers is removed after forming the first dielectric layer to form a recess having a re-entrant profile in the first dielectric layer. The re-entrant profile of the recess is straightened.
摘要翻译：为形成集成电路提供了方法。在一个实施例中，该方法包括形成覆盖在基底衬底上的牺牲心轴。侧壁间隔件形成在牺牲心轴的相邻侧壁处。侧壁间隔件具有靠近基底基底的下部，并且下部具有相对于基底的基本垂直的外表面。侧壁间隔物还具有与基底基板间隔开的上部。上部具有倾斜的外表面。第一电介质层形成在基底衬底上，并且与侧壁间隔物的上部的至少一部分共形。在形成第一介电层之后去除侧壁间隔物的上部，以在第一介电层中形成具有凹入轮廓的凹部。凹槽的重新设计简洁直观。

10. 发明申请

US20130309863A1 METHODS OF FORMING COPPER-BASED CONDUCTIVE STRUCTURES BY FORMING A COPPER-BASED SEED LAYER HAVING AN AS-DEPOSITED THICKNESS PROFILE AND THEREAFTER PERFORMING AN ETCHING PROCESS AND ELECTROLESS COPPER DEPOSITION 有权
标题翻译：通过形成具有沉积厚度剖面的铜基层和形成蚀刻过程和电沉积铜沉积的形成铜基导电结构的方法
公开(公告)号：US20130309863A1
公开(公告)日：2013-11-21
申请号：US13476692
申请日：2012-05-21
申请人： Sean X. Lin , Ming He , Xunyuan Zhang , Larry Zhao
发明人： Sean X. Lin , Ming He , Xunyuan Zhang , Larry Zhao
IPC分类号： H01L21/768
CPC分类号： H01L21/76874 , H01L21/76843 , H01L21/76865 , H01L21/76879
摘要： Disclosed herein are various methods of forming copper-based conductive structures on integrated circuit devices. In one example, the method includes forming a trench/via in a layer of insulating material, performing a deposition process to form an as-deposited copper-based seed layer above the layer of insulating material in the trench/via, wherein the copper-based seed layer has a first portion that is positioned above a bottom of the trench/via that is thicker than second portions of the copper seed layer that are positioned above sidewalls of the trench/via, performing an etching process on the as-deposited copper-based seed layer to substantially remove portions of the second portions of the as-deposited copper-based seed layer and performing an electroless deposition process to fill the trench/via with a copper-based material.
摘要翻译：这里公开了在集成电路器件上形成铜基导电结构的各种方法。在一个示例中，该方法包括在绝缘材料层中形成沟槽/通孔，执行沉积工艺以在沟槽/通孔中的绝缘材料层上形成沉积的基于铜的种子层，其中铜 - 基于晶种的层具有位于沟槽/通孔的底部之上的第一部分，其比位于沟槽/通孔侧壁上方的铜籽晶层的第二部分更厚，对沉积的铜进行蚀刻工艺基本种子层，以基本上去除沉积的铜基种子层的第二部分的部分，并执行无电沉积工艺以用铜基材料填充沟槽/通孔。

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