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1. 发明授权

US08468471B2 Process aware metrology 有权
标题翻译：过程感知度量
公开(公告)号：US08468471B2
公开(公告)日：2013-06-18
申请号：US13411433
申请日：2012-03-02
申请人： Xuefeng Liu , Yung-Ho Alex Chuang , John Fielden , Bin-Ming Benjamin Tsai , Jingjing Zhang
发明人： Xuefeng Liu , Yung-Ho Alex Chuang , John Fielden , Bin-Ming Benjamin Tsai , Jingjing Zhang
IPC分类号： G06F19/00 , G06F17/50
CPC分类号： G06F17/5018 , G03F7/70625 , G06F17/10 , G06F17/5081 , G06F19/00 , G06F2217/12 , G06F2217/14 , G06F2217/16 , H01L22/12 , H01L22/20
摘要： Systems and methods for process aware metrology are provided.
摘要翻译：提供了流程感知度量的系统和方法。

2. 发明申请

US20130080984A1 PROCESS AWARE METROLOGY 有权
标题翻译：过程技巧
公开(公告)号：US20130080984A1
公开(公告)日：2013-03-28
申请号：US13411433
申请日：2012-03-02
申请人： Xuefeng Liu , Yung-Ho Alex Chuang , John Fielden , Bin-Ming Benjamin Tsai , Jingjing Zhang
发明人： Xuefeng Liu , Yung-Ho Alex Chuang , John Fielden , Bin-Ming Benjamin Tsai , Jingjing Zhang
IPC分类号： G06F17/50
CPC分类号： G06F17/5018 , G03F7/70625 , G06F17/10 , G06F17/5081 , G06F19/00 , G06F2217/12 , G06F2217/14 , G06F2217/16 , H01L22/12 , H01L22/20
摘要： Systems and methods for process aware metrology are provided.
摘要翻译：提供了流程感知度量的系统和方法。

3. 发明授权

US09080991B2 Illuminating a specimen for metrology or inspection 有权
标题翻译：照亮样本进行计量或检查
公开(公告)号：US09080991B2
公开(公告)日：2015-07-14
申请号：US13073986
申请日：2011-03-28
申请人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu , John Fielden
发明人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu , John Fielden
IPC分类号： G01N21/00 , G01N21/95 , G01N21/47
CPC分类号： G01N21/9501 , G01N2021/479
摘要： Illumination subsystems of a metrology or inspection system, metrology systems, inspection systems, and methods for illuminating a specimen for metrology measurements or for inspection are provided. One illumination subsystem includes a light source configured to generate coherent pulses of light and a dispersive element positioned in the path of the coherent pulses of light, which is configured to reduce coherence of the pulses of light by mixing spatial and temporal characteristics of light distribution in the pulses of light. The illumination subsystem also includes an electro-optic modulator positioned in the path of the pulses of light exiting the dispersive element and which is configured to reduce the coherence of the pulses of light by temporally modulating the light distribution in the pulses of light. The illumination subsystem is configured to direct the pulses of light from the electro-optic modulator to a specimen.
摘要翻译：提供了计量或检查系统的照明子系统，计量系统，检查系统和用于计量测量或检查的照明样本的方法。一个照明子系统包括被配置为产生相干的光脉冲的光源和位于相干脉冲光的路径中的色散元件，该色散元件被配置为通过将光分布的空间和时间特征混合在一起来减小光脉冲的相干性光的脉冲。照明子系统还包括位于离开色散元件的光的脉冲的路径中的电光调制器，其被配置为通过暂时调制光脉冲中的光分布来减小光脉冲的相干性。照明子系统被配置为将来自电光调制器的光脉冲引导到样本。

4. 发明申请

US20110228263A1 ILLUMINATING A SPECIMEN FOR METROLOGY OR INSPECTION 有权
标题翻译：照亮计量或检验样本
公开(公告)号：US20110228263A1
公开(公告)日：2011-09-22
申请号：US13073986
申请日：2011-03-28
申请人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu , John Fielden
发明人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu , John Fielden
IPC分类号： G01J3/00
CPC分类号： G01N21/9501 , G01N2021/479
摘要： Illumination subsystems of a metrology or inspection system, metrology systems, inspection systems, and methods for illuminating a specimen for metrology measurements or for inspection are provided.
摘要翻译：提供了计量或检查系统的照明子系统，计量系统，检查系统和用于计量测量或检查的照明样本的方法。

5. 发明授权

US09080990B2 Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements 有权
标题翻译：计量系统的照明子系统，计量系统以及用于计量测量的照明样本的方法
公开(公告)号：US09080990B2
公开(公告)日：2015-07-14
申请号：US13061936
申请日：2009-09-29
申请人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu
发明人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu
IPC分类号： G01N21/55 , G01N21/95 , G01N21/47
CPC分类号： G01N21/9501 , G01N2021/479
摘要： Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements are provided. One illumination subsystem includes a light source configured to generate coherent pulses of light and a dispersive element positioned in the path of the coherent pulses of light, which is configured to reduce coherence of the pulses of light by mixing spatial and temporal characteristics of light distribution in the pulses of light. The illumination subsystem also includes an electro-optic modulator positioned in the path of the pulses of light exiting the dispersive element and which is configured to reduce the coherence of the pulses of light by temporally modulating the light distribution in the pulses of light. The illumination subsystem is configured to direct the pulses of light from the electro-optic modulator to a specimen positioned in the metrology system.
摘要翻译：提供了计量系统的照明子系统，计量系统和用于度量测量的照明样本的方法。一个照明子系统包括被配置为产生相干的光脉冲的光源和位于相干脉冲光的路径中的色散元件，该色散元件被配置为通过将光分布的空间和时间特征混合在一起来减小光脉冲的相干性光的脉冲。照明子系统还包括位于离开色散元件的光的脉冲的路径中的电光调制器，其被配置为通过暂时调制光脉冲中的光分布来减小光脉冲的相干性。照明子系统被配置为将来自电光调制器的光的脉冲引导到位于计量系统中的样本。

6. 发明申请

US20110279819A1 ILLUMINATION SUBSYSTEMS OF A METROLOGY SYSTEM, METROLOGY SYSTEMS, AND METHODS FOR ILLUMINATING A SPECIMEN FOR METROLOGY MEASUREMENTS 有权
标题翻译：计量系统的照明子系统，计量系统和用于量化测量样本的方法
公开(公告)号：US20110279819A1
公开(公告)日：2011-11-17
申请号：US13061936
申请日：2009-09-29
申请人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu
发明人： Yung-Ho (Alex) Chuang , Vladimir Levinski , Xuefeng Liu
IPC分类号： G02F1/03 , G01B11/00
CPC分类号： G01N21/9501 , G01N2021/479
摘要： Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements are provided.
摘要翻译：提供了计量系统的照明子系统，计量系统和用于度量测量的照明样本的方法。

7. 发明申请

US20120323356A1 METHOD OF OPTIMIZING AN OPTICAL PARAMETRIC MODEL FOR STRUCTURAL ANALYSIS USING OPTICAL CRITICAL DIMENSION (OCD) METROLOGY 有权
标题翻译：使用光学关键尺寸（OCD）方法优化结构分析的光学参数模型的方法
公开(公告)号：US20120323356A1
公开(公告)日：2012-12-20
申请号：US13164398
申请日：2011-06-20
申请人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-Ming Benjamin Tsai , Xuefeng Liu , John J. Hench
发明人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-Ming Benjamin Tsai , Xuefeng Liu , John J. Hench
IPC分类号： G06F19/00 , G06F17/50
CPC分类号： G01B11/24 , G01B2210/56 , G01N21/47 , G01N21/956 , G01N2021/95615 , G03F7/70625 , G06F17/5009
摘要： Optimization of optical parametric models for structural analysis using optical critical dimension metrology is described. A method includes determining a first optical model fit for a parameter of a structure. The first optical model fit is based on a domain of quantities for a first model of the structure. A first near optical field response is determined for a first quantity of the domain of quantities and a second near optical field response is determined for a second, different quantity of the domain of quantities. The first and second near optical field responses are compared to locate a common region of high optical field intensity for the parameter of the structure. The first model of the structure is modified to provide a second, different model of the structure. A second, different optical model fit is determined for the parameter of the structure based on the second model of the structure.
摘要翻译：描述了使用光学关键尺寸度量结构分析的光学参数模型的优化。一种方法包括确定适合结构参数的第一光学模型。第一个光学模型拟合是基于结构的第一个模型的数量域。对于第一量的量域确定第一近场光响应，并且针对量的第二个不同数量的量确定第二近场光响应。比较第一和第二近场光响应，以定位用于结构参数的高光场强度的公共区域。该结构的第一个模型被修改以提供第二个不同的结构模型。基于结构的第二个模型，确定结构参数的第二个不同的光学模型拟合。

8. 发明授权

US10325004B1 Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology 有权
公开(公告)号：US10325004B1
公开(公告)日：2019-06-18
申请号：US15058826
申请日：2016-03-02
申请人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-Ming Benjamin Tsai , Xuefeng Liu , John J. Hench
发明人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-Ming Benjamin Tsai , Xuefeng Liu , John J. Hench
IPC分类号： H01L21/66 , G01R31/26 , G01B11/14 , G01B11/27 , G06F17/11 , G01N21/47 , G01N21/956 , G01B11/06 , G06F17/50
摘要： Optimization of optical parametric models for structural analysis using optical critical dimension metrology is described. A method includes determining a first optical model fit for a parameter of a structure. The first optical model fit is based on a domain of quantities for a first model of the structure. A first near optical field response is determined for a first quantity of the domain of quantities and a second near optical field response is determined for a second, different quantity of the domain of quantities. The first and second near optical field responses are compared to locate a common region of high optical field intensity for the parameter of the structure. The first model of the structure is modified to provide a second, different model of the structure. A second, different optical model fit is determined for the parameter of the structure based on the second model of the structure.

9. 发明授权

US09310296B2 Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology 有权
标题翻译：使用光学关键尺寸（OCD）计量优化用于结构分析的光学参数模型
公开(公告)号：US09310296B2
公开(公告)日：2016-04-12
申请号：US13164398
申请日：2011-06-20
申请人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-ming Benjamin Tsai , Xuefeng Liu , John J. Hench
发明人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-ming Benjamin Tsai , Xuefeng Liu , John J. Hench
IPC分类号： G05B13/00 , G01N21/47 , G01B11/24 , G03F7/20 , G01N21/956 , G06F17/50
CPC分类号： G01B11/24 , G01B2210/56 , G01N21/47 , G01N21/956 , G01N2021/95615 , G03F7/70625 , G06F17/5009
摘要： Optimization of optical parametric models for structural analysis using optical critical dimension metrology is described. A method includes determining a first optical model fit for a parameter of a structure. The first optical model fit is based on a domain of quantities for a first model of the structure. A first near optical field response is determined for a first quantity of the domain of quantities and a second near optical field response is determined for a second, different quantity of the domain of quantities. The first and second near optical field responses are compared to locate a common region of high optical field intensity for the parameter of the structure. The first model of the structure is modified to provide a second, different model of the structure. A second, different optical model fit is determined for the parameter of the structure based on the second model of the structure.
摘要翻译：描述了使用光学关键尺寸度量结构分析的光学参数模型的优化。一种方法包括确定适合结构参数的第一光学模型。第一个光学模型拟合是基于结构的第一个模型的数量域。对于第一量的量域确定第一近场光响应，并且针对量的第二个不同数量的量确定第二近场光响应。比较第一和第二近场光响应，以定位用于结构参数的高光场强度的公共区域。该结构的第一个模型被修改以提供第二个不同的结构模型。基于结构的第二个模型，确定结构参数的第二个不同的光学模型拟合。

10. 发明授权

US09448162B2 Time-resolved single-photon or ultra-weak light multi-dimensional imaging spectrum system and method 有权
标题翻译：时间分辨单光子或超弱光多维成像光谱系统及方法
公开(公告)号：US09448162B2
公开(公告)日：2016-09-20
申请号：US14351028
申请日：2012-05-14
申请人： Guangjie Zhai , Wenkai Yu , Xuefeng Liu , Xuri Yao , Chao Wang , Zhibin Sun
发明人： Guangjie Zhai , Wenkai Yu , Xuefeng Liu , Xuri Yao , Chao Wang , Zhibin Sun
IPC分类号： G01N21/25 , G01N21/64 , G01N21/17 , H03K21/38 , G01J1/04 , G01J1/42 , G01S17/89 , G01S7/481 , G01S7/486 , G02B26/08
CPC分类号： G01N21/255 , G01J1/0414 , G01J1/4228 , G01N21/17 , G01N21/6456 , G01S7/4816 , G01S7/486 , G01S17/89 , G02B26/0833 , H03K21/38
摘要： A single-photon or ultra-weak light multi-D imaging spectral system and method. In order to realize rough time resolution, a time-resolved single-photon counting 2D imaging system for forming color or grey imaging is provided. Moreover, in order to realize high-precision time resolution, the system comprises a light source, an imaging spectral measurement unit, an electric detection unit, a system control unit and an algorithm unit. The light carrying information of an object is imaged on a spatial light modulator and randomly modulated according to compressed sensing theory, emergent light of a grating is collected using a point or array single-photon detector, the number of photons and photon arrival time are recorded, and reconstruction is carried out using the compressed sensing algorithm and related algorithm of the spectral imaging. The system provides single-photon detection sensitivity, high time resolution and wide spectral range, and can be applied in numerous new high-tech industries.
摘要翻译：单光子或超弱光多D成像光谱系统及方法。为了实现粗糙的时间分辨率，提供了用于形成彩色或灰度成像的时间分辨的单光子计数2D成像系统。此外，为了实现高精度时间分辨率，该系统包括光源，成像光谱测量单元，电检测单元，系统控制单元和算法单元。物体的光携带信息在空间光调制器上成像，并且根据压缩感测理论随机调制，使用点或阵列单光子检测器收集光栅的出射光，记录光子数和光子到达时间，并利用压缩感知算法和相关的光谱成像算法进行重建。该系统提供单光子检测灵敏度高，时间分辨率高，光谱范围广，可应用于众多新兴高科技行业。

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