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1. 发明申请

US20090108199A1 SYSTEM AND METHOD TO DETERMINE FOCUS PARAMETERS DURING AN ELECTRON BEAM INSPECTION 有权
标题翻译：在电子束检测中确定焦点参数的系统和方法
公开(公告)号：US20090108199A1
公开(公告)日：2009-04-30
申请号：US11939530
申请日：2007-11-13
申请人： Xuedong LIU , Zhonghua DONG , Wei FANG , Zhong-Wei CHEN
发明人： Xuedong LIU , Zhonghua DONG , Wei FANG , Zhong-Wei CHEN
IPC分类号： H01J3/14 , H01J37/21
CPC分类号： H01J37/28 , H01J37/21 , H01J2237/14 , H01J2237/216 , H01J2237/2817
摘要： This invention relates to apparatus and method to fast determine focus parameters in one pre-scan during an e-beam inspection practice. More specifically, embodiments of the present invention provide an apparatus and method that provide accurate focus tuning after primary focusing has been done.
摘要翻译：本发明涉及在电子束检查实践期间快速确定一次预扫描中的焦点参数的装置和方法。更具体地，本发明的实施例提供了一种在进行主要聚焦之后提供精确聚焦调谐的装置和方法。

2. 发明申请

US20100019462A1 APPARATUS FOR INCREASING ELECTRIC CONDUCTIVITY TO A SEMICONDUCTOR WAFER SUBSTRATE WHEN EXPOSURE TO ELECTRON BEAM 有权
标题翻译：当电子束接触时，将电导率提高到半导体基底的装置
公开(公告)号：US20100019462A1
公开(公告)日：2010-01-28
申请号：US12179560
申请日：2008-07-24
申请人： Zhong-Wei CHEN , Yi Xiang Wang , Juying Dou
发明人： Zhong-Wei CHEN , Yi Xiang Wang , Juying Dou
IPC分类号： B23B31/28
CPC分类号： H01J37/026 , B82Y10/00 , B82Y40/00 , H01J37/20 , H01J37/3174 , H01J2237/0044 , H01J2237/2817 , Y10T279/17923 , Y10T279/23
摘要： An apparatus for increasing electric conductivity to a wafer substrate when exposures to electron beam irradiation is disclosed. More specifically, a more free mechanical contact between a wafer and electric contact pins (within an electrostatic chuck) is provided to significantly reduce the scratch and damage on the wafer backside.
摘要翻译：公开了当暴露于电子束照射时增加晶片衬底的导电性的装置。更具体地，提供晶片和电接触销（在静电卡盘内）之间更自由的机械接触，以显着减少晶片背面的划痕和损伤。

3. 发明申请

US20090090866A1 CHARGED PARTICLE DETECTION DEVICES 失效
标题翻译：充电颗粒检测装置
公开(公告)号：US20090090866A1
公开(公告)日：2009-04-09
申请号：US11668846
申请日：2007-01-30
申请人： Xu ZHANG , Joe WANG , Zhong-Wei CHEN
发明人： Xu ZHANG , Joe WANG , Zhong-Wei CHEN
IPC分类号： G01T1/20 , G01N23/00 , H01J3/14
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/24435 , H01J2237/2445 , H01J2237/24465
摘要： A charged particle detector consists of four independent light guide modules assembled together to form a segmented on-axis annular detector, with a center opening for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.
摘要翻译：带电粒子检测器由四个独立的光导模块组成，组合在一起以形成分段的轴上环形探测器，其中心开口允许初级带电粒子束通过。面向样品的组件的一侧作为带电粒子检测表面涂覆或结合到闪烁体材料。每个光导模块耦合到光电倍增管，以允许通过每个光导模块传输的光信号被单独放大和处理。带电粒子检测器由一块光导材料制成，被处理成具有从一个面的锥形圆形切口，终止在与开口相对的面上以允许初级带电粒子束通过。相反的面被涂覆或与闪烁体材料结合，作为带电粒子检测表面。导光块的外部区域被成形为四个分开的光导输出通道，并且每个光导输出通道耦合到光电倍增管，以允许来自每个通道的光信号输出被单独放大和处理。

4. 发明申请

US20110084591A1 THERMAL FIELD EMISSION CATHODE 审中-公开
标题翻译：热场发射阴极
公开(公告)号：US20110084591A1
公开(公告)日：2011-04-14
申请号：US12972299
申请日：2010-12-17
申请人： Zhong-Wei CHEN , Juying Dou
发明人： Zhong-Wei CHEN , Juying Dou
IPC分类号： H01J1/20
CPC分类号： H01J37/063 , H01J1/16 , H01J3/027 , H01J37/065 , H01J2237/06316 , H01J2237/06375
摘要： A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.
摘要翻译：公开了一种在电子显微镜中使用的热场发射阴极，临界尺寸检查工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源。实施例公开了改变涂层形状，涂层位置和缩短发射极长度以延长场致发射阴极的寿命。

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