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1. 发明专利

IL225975A Multi-axis magnetic immersion objective lens and apparatus comprising it 未知
公开(公告)号：IL225975A
公开(公告)日：2017-11-30
申请号：IL22597513
申请日：2013-04-25
申请人： HERMES MICROVISION INC , ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
发明人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
IPC分类号： G01N20060101
摘要： Multi-axis magnetic immersion objective lens, with a pair of magnetic pole plates 51,50 with aligned apertures and with a common coil 44 surrounding the pole plates. Each aperture in both plates contains a magnetic insert ring 311,312 , spaced from the respective aperture wall by a radial gap G1,G2 (formed by vacuum or a non-magnetic material), and each upper magnetic ring 311 extends downward through inside the corresponding lower magnetic ring 312 with a second radial gap G3.

2. 发明专利

IL226093A Multi-axis charged particle apparatus comprising multi-axis electromagnetic compound immersion objective lens 未知
公开(公告)号：IL226093A
公开(公告)日：2017-11-30
申请号：IL22609313
申请日：2013-04-30
申请人： ZHONGWEI CHEN , KENICHI KANAI , XUEDONG LIU , HERMES MICROVISION INC , WEIMING REN
发明人： ZHONGWEI CHEN , KENICHI KANAI , XUEDONG LIU , WEIMING REN
IPC分类号： G01N20060101
摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

3. 发明申请

WO2017095908A1 APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS 审中-公开
标题翻译：装有多颗粒的带电粒子束装置
公开(公告)号：WO2017095908A1
公开(公告)日：2017-06-08
申请号：PCT/US2016/064195
申请日：2016-11-30
申请人： HERMES MICROVISION INC. , WEIMING, Ren , XUEDONG, Liu , XUERANG, Hu , ZHONGWEI, Chen
发明人： WEIMING, Ren , XUEDONG, Liu , XUERANG, Hu , ZHONGWEI, Chen
IPC分类号： G01N23/225 , H01J37/10 , H01J37/153
CPC分类号： H01J37/28 , H01J37/14 , H01J37/141 , H01J37/153 , H01J37/20 , H01J37/244 , H01J37/292 , H01J2237/0453 , H01J2237/1532 , H01J2237/24465 , H01J2237/24592 , H01J2237/2806 , H01J2237/2817
摘要： A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross¬ talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti- scanning deflection unit performs the anti- scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.
摘要翻译：本文提出了一种多光束设备中的二次投影成像系统，该系统使二次电子检测具有较高的收集效率和较低的杂交能力，谈论。该系统采用一个变焦镜头，一个投影镜头和一个反扫描偏转单元。变焦镜头和投影镜头分别执行变焦功能和防旋转功能，以保持相对于多个一次子光束的着落能量和/或电流的总成像倍率和总图像旋转。防扫描偏转单元执行防扫描功能以消除由于多个主小射束的偏转扫描引起的动态图像位移。

4. 发明申请

US20130203681A1 Macrocyclic Compounds Useful as Inhibitors of Histone Deacetylases 有权
公开(公告)号：US20130203681A1
公开(公告)日：2013-08-08
申请号：US13700373
申请日：2011-05-26
申请人： Xuedong Liu , Andrew J. Phillips , Dana Ungermannova , Christopher G. Nasveschuk , Gan Zhang
发明人： Xuedong Liu , Andrew J. Phillips , Dana Ungermannova , Christopher G. Nasveschuk , Gan Zhang
IPC分类号： C07K11/02 , A61K45/06 , A61K38/00
CPC分类号： C07K11/02 , A61K31/425 , A61K38/005 , A61K38/15 , A61K39/3955 , A61K45/06 , C07K5/0821 , C07K11/00
摘要： The present invention provides a novel macrocyclic compound of general Formula (I) having histone deacetylase (HDAC) inhibitory activity, a pharmaceutical composition comprising the compound, and a method useful to treat diseases using the compound.

5. 发明申请

US20110139996A1 MULTI-AXIS MAGNETIC LENS 有权
标题翻译：多轴磁性镜片
公开(公告)号：US20110139996A1
公开(公告)日：2011-06-16
申请号：US12636007
申请日：2009-12-11
申请人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
发明人： ZHONGWEI CHEN , WEIMING REN , KENICHI KANAI , XUEDONG LIU
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/1405
摘要： The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
摘要翻译：本发明涉及带电粒子束系统的多轴磁透镜。该装置从由公共的励磁线圈产生的磁场中消除不期望的非轴对称的横向磁场分量，并且留下用于聚焦在系统内采用的每个粒子束的期望的轴对称场。

6. 发明申请

US20100150429A1 E-BEAM DEFECT REVIEW SYSTEM 有权
标题翻译：电子束缺陷评估系统
公开(公告)号：US20100150429A1
公开(公告)日：2010-06-17
申请号：US12335458
申请日：2008-12-15
申请人： Jack JAU , Zhongwei CHEN , Yi Xiang WANG , Chung-Shih PAN , Joe WANG , Xuedong LIU , Weiming REN , Wei FANG
发明人： Jack JAU , Zhongwei CHEN , Yi Xiang WANG , Chung-Shih PAN , Joe WANG , Xuedong LIU , Weiming REN , Wei FANG
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N23/04 , G01N2223/102 , G01N2223/426 , G01N2223/611 , G06T2207/10061 , G06T2207/30148
摘要： The present invention relates to a defect review system, and/or particularly, to an apparatus and method of defect review sampling, review method and classification on a semiconductor wafer or a pattern lithography reticle during integrated circuit fabrication. These objects are achieved in comparing a reviewed image with a reference image pick-up through a smart sampling filter. A clustering computer system base on high speed network will provide data cache and save operation time and memory. A smart review sampling filter automatically relocate abnormal pattern or defects and classify the device location extracted from design database and/or from golden die image on the same substrate. The column of the present defect review system is comprised of the modified SORIL type objective lens. This column provides solution of improving throughput during sample review, material identification better image quality, and topography image of defect. One embodiment of the present invent adopts an optical auto focusing system to compromise micro height variation due wafer surface topography. And another embodiment adopts surface charge control system to regulate the charge accumulation due to electron irradiation during the review process.
摘要翻译：本发明涉及一种缺陷评估系统，和/或特别涉及在集成电路制造期间对半导体晶片或图案光刻掩模版进行缺陷评估抽样，评估方法和分类的装置和方法。通过智能采样滤波器将经检查的图像与参考图像拾取进行比较，实现了这些目的。基于高速网络的集群计算机系统将提供数据缓存，节省操作时间和内存。智能检查采样过滤器自动重新定位异常模式或缺陷，并将从设计数据库中提取的设备位置和/或从相同基板上的金色模具图像分类。本缺陷检查系统的列由改进的SORIL型物镜组成。该栏提供了在样本审查期间提高吞吐量，材料识别更好的图像质量和缺陷的地形图像的解决方案。本发明的一个实施例采用光学自动聚焦系统来破坏由晶片表面形貌引起的微高度变化。另一个实施例采用表面电荷控制系统来调节在检查过程中由电子辐射引起的电荷累积。

7. 发明申请

US20080006771A1 ELECTRON BEAM APPARATUS TO COLLECT SIDE-VIEW AND/OR PLANE-VIEW IMAGE WITH IN-LENS SECTIONAL DETECTOR 有权
标题翻译：用电子束装置收集侧视图和/或平面视图与内窥镜部分检测器
公开(公告)号：US20080006771A1
公开(公告)日：2008-01-10
申请号：US11755705
申请日：2007-05-30
申请人： Chi-Hua Tseng , Zhong-Wei Chen , Xuedong Liu
发明人： Chi-Hua Tseng , Zhong-Wei Chen , Xuedong Liu
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , H01J37/244 , H01J37/28 , H01J2237/24465 , H01J2237/2449
摘要： An electron beam apparatus and method are presented for collecting side-view and plane-view SEM imagery. The electron beam apparatus includes an electron source, some intermediate lenses if needed, an objective lens and an in-lens sectional detector. The electron source will provide an electron beam. The intermediate lenses focus the electron beam further. The objective lens is a combination of an immersion magnetic lens and a retarding electrostatic lens focuses the electron beam onto the specimen surface. The in-lens detector will be divided into two or more sections to collect secondary electrons emanating from the specimen with different azimuth and polar angle so that side-view SEM imagery can be obtained.
摘要翻译：提出了一种用于收集侧视图和平面视图SEM图像的电子束装置和方法。电子束装置包括电子源，如果需要的话，一些中间透镜，物镜和透镜内部分检测器。电子源将提供电子束。中间透镜进一步聚焦电子束。物镜是浸没式磁透镜和阻滞静电透镜的组合，将电子束聚焦在样品表面上。镜片内检测器将被分为两个或多个部分，以收集具有不同方位角和极角的样品发出的二次电子，从而可以获得侧视SEM图像。

8. 发明申请

US20130112889A1 WIEN FILTER 有权
公开(公告)号：US20130112889A1
公开(公告)日：2013-05-09
申请号：US13292455
申请日：2011-11-09
申请人： Zhongwei Chen , Xuedong Liu , Weiming Ren
发明人： Zhongwei Chen , Xuedong Liu , Weiming Ren
IPC分类号： H01J3/26
CPC分类号： H01J37/05 , H01J49/288 , H01J2237/057
摘要： This invention provides a multi-pole type Wien filter, which acts more purely approaching its fundamentally expected performance. A 12-electrode electric device acts as an electric deflector,or acts as an electric deflector and an electric stigmator together. A cylindrical 4-coil magnetic device with a magnetic core acts as a magnetic deflector. Both can produce a dipole field while only incurring a negligibly-small 3rd order field harmonic. The magnetic core enhances the strength and more preciously regulates the distribution of the magnetic field originally generated by the coils. Then two ways to construct a Wien filter are proposed. One way is based on both of the foregoing electric and magnetic devices, and the other way is based on the foregoing electric device and a conventional magnetic deflector. The astigmatism in each of such Wien filters can be compensated by the electric stigmator of the electric device.
摘要翻译：本发明提供了一种多极型Wien滤波器，其更加纯粹地接近其根本预期的性能。 12电极电气装置用作电导向器，或者用作电导向器和电极连接器。具有磁芯的圆柱形4线圈磁性装置用作磁导流器。两者都可以产生偶极场，同时只产生一个可忽略的小三阶场谐波。磁芯增强了强度，更加珍贵地调节了最初由线圈产生的磁场的分布。然后提出构建维恩滤波器的两种方法。一种方法是基于上述电气和磁性装置两者，另一种方法是基于前述的电气装置和常规的磁导向装置。每个这样的维恩滤波器中的像散可以通过电气设备的电极来补偿。

9. 发明授权

US08294095B2 Apparatus of plural charged particle beams with multi-axis magnetic lens 有权
标题翻译：具有多轴磁性透镜的多个带电粒子束的装置
公开(公告)号：US08294095B2
公开(公告)日：2012-10-23
申请号：US12968201
申请日：2010-12-14
申请人： Zhongwei Chen , Weiming Ren , Kenichi Kanai , Xuedong Liu
发明人： Zhongwei Chen , Weiming Ren , Kenichi Kanai , Xuedong Liu
IPC分类号： H01J29/56 , G01N23/225
CPC分类号： G01N23/2251 , G01N2223/6116 , G01N2223/646 , H01J37/141 , H01J2237/2817
摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.
摘要翻译：设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场每个子透镜到样品表面。

10. 发明授权

US08164060B2 System and method for a charged particle beam 有权
标题翻译：带电粒子束的系统和方法
公开(公告)号：US08164060B2
公开(公告)日：2012-04-24
申请号：US12832127
申请日：2010-07-08
申请人： Xuedong Liu , Xu Zhang , Joe Wang , Edward Tseng , Zhongwei Chen
发明人： Xuedong Liu , Xu Zhang , Joe Wang , Edward Tseng , Zhongwei Chen
IPC分类号： H01J37/244 , H01J37/145
CPC分类号： H01J37/145 , H01J37/28 , H01J2237/0475 , H01J2237/12 , H01J2237/14 , H01J2237/24485 , H01J2237/2807
摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.
摘要翻译：带电粒子束的系统和方法。根据实施例，本发明提供一种带电粒子束装置。该装置包括用于产生初级带电粒子束的带电粒子源。该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。样品包括样品表面。复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

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