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    • 9. 发明申请
    • Ultrafast laser direct writing method for modifying existing microstructures on a submicron scale
    • 用于在亚微米尺度上修改现有微结构的超快激光直写方法
    • US20070062918A1
    • 2007-03-22
    • US11602812
    • 2006-11-21
    • Ming LiMakoto Ishizuka
    • Ming LiMakoto Ishizuka
    • B23K26/38
    • B23K26/042B23K26/0613B23K26/0624B23K26/067B23K26/382B23K26/384B23K26/40B23K2101/35
    • A method for pre-calibration of a laser micro-machining system to achieve alignment tolerances greater than the diffraction limit of an illumination wavelength. A blank is mounted in the system, such that the beam spot is incident on its top surface. Two marks are ablated in the blank. The centers of the marks are a predetermined distance apart. The blank is illuminated with light and imaged with a digital camera. The resulting image is scaled such that each pixel has a width corresponding to a distance on the imaged surface, which is less than half of the illumination wavelength. The number of pixels between the centers of the marks determines this distance. The locations of the marks in the image are determined and a coordinate system is defined for surfaces imaged by the digital camera. Coordinates of the beam spot in this coordinate system are also determined using the second mark.
    • 一种用于预激光微加工系统的方法,以实现大于照明波长的衍射极限的对准公差。 在系统中安装有坯料,使得束斑入射在其顶表面上。 两个标记在空白处被烧蚀。 标记的中心是预定的距离。 空白用光照亮,并用数码相机成像。 所得到的图像被缩放,使得每个像素具有对应于成像表面上的距离的宽度,其小于照明波长的一半。 标记中心之间的像素数确定此距离。 确定图像中标记的位置,并为由数字照相机成像的表面定义坐标系。 该坐标系中的光点的坐标也使用第二标记来确定。
    • 10. 发明授权
    • Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope
    • 使用近场扫描光学显微镜修改现有微结构和纳米结构的方法
    • US07198961B2
    • 2007-04-03
    • US10813372
    • 2004-03-30
    • Ming LiMakoto IshizukaChen-Hsiung Cheng
    • Ming LiMakoto IshizukaChen-Hsiung Cheng
    • H01L21/00
    • B81C1/00492B81C99/0065G01Q60/22G01Q80/00Y10S977/851
    • A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.
    • 一种使用NSOM激光微加工系统制造微结构的方法,其包括现有特征上的至少一个精细特征。 提供微结构器件预制件。 其顶表面的一部分与NSOM成型以形成地形图像。 该分析部分被选择为包括现有特征。 基于地形图像为顶面的成型部分定义图像坐标系。 使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。 使用确定的参考点的坐标和现有特征的方向,使NSOM的探针尖端对准现有特征的一部分。 用微型加工激光加工微结构器件预制件的上表面,以形成现有特征的精细特征。