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1. 发明授权

US07198961B2 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope 失效
标题翻译：使用近场扫描光学显微镜修改现有微结构和纳米结构的方法
公开(公告)号：US07198961B2
公开(公告)日：2007-04-03
申请号：US10813372
申请日：2004-03-30
申请人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
发明人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
IPC分类号： H01L21/00
CPC分类号： B81C1/00492 , B81C99/0065 , G01Q60/22 , G01Q80/00 , Y10S977/851
摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.
摘要翻译：一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。提供微结构器件预制件。其顶表面的一部分与NSOM成型以形成地形图像。该分析部分被选择为包括现有特征。基于地形图像为顶面的成型部分定义图像坐标系。使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。

2. 发明申请

US20050221577A1 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope 失效
标题翻译：使用近场扫描光学显微镜修改现有微结构和纳米结构的方法
公开(公告)号：US20050221577A1
公开(公告)日：2005-10-06
申请号：US10813372
申请日：2004-03-30
申请人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
发明人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
IPC分类号： B23K26/06 , B81C1/00 , B81C99/00 , G01Q10/04 , G01Q40/00 , G01Q60/18 , G01Q60/22 , G01Q80/00 , H01L21/76
CPC分类号： B81C1/00492 , B81C99/0065 , G01Q60/22 , G01Q80/00 , Y10S977/851
摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.
摘要翻译：一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。提供微结构器件预制件。其顶表面的一部分与NSOM成型以形成地形图像。该分析部分被选择为包括现有特征。基于地形图像为顶面的成型部分定义图像坐标系。使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。

3. 发明授权

US07151244B2 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining 失效
公开(公告)号：US07151244B2
公开(公告)日：2006-12-19
申请号：US10932617
申请日：2004-09-02
申请人： Chen-Hsiung Cheng , Ming Li
发明人： Chen-Hsiung Cheng , Ming Li
IPC分类号： G02B7/04
CPC分类号： B23K26/04 , B23K26/0624 , G01Q40/00 , G01Q60/22
摘要： A system for measuring radiation at a peak wavelength that is radiated from a probe tip of a near-field scanning optical microscope (NSOM) probe used for laser machining, including: a laser source; the NSOM probe; a coupling substrate that is substantially transmissive to the peak wavelength; an NSOM mount to controllably hold the probe and the coupling substrate; an NSOM probe monitor coupled to the mount; an NSOM controller; and a photodetector optically coupled to the substrate. Light is coupled into the probe. The mount includes a Z motion stage. The probe monitor determines the distance between the probe tip and the coupling substrate. The controller is coupled to the probe monitor and the motion stage. It controls the distance between the probe tip and the coupling substrate such that radiation is coupled from the probe tip into the coupling substrate. The photodetector measures the power of this radiation.

4. 发明授权

US06621045B1 Workpiece stabilization with gas flow 失效
标题翻译：工件稳定与气流
公开(公告)号：US06621045B1
公开(公告)日：2003-09-16
申请号：US10266936
申请日：2002-10-08
申请人： Xinbing Liu , Ming Li , Chen-Hsiung Cheng
发明人： Xinbing Liu , Ming Li , Chen-Hsiung Cheng
IPC分类号： B23K2638
CPC分类号： B23K26/38 , B23K26/0624 , B23K26/142 , B23K26/1435 , B23K26/1436 , B23K26/1437 , B23K26/1438 , B23K26/147
摘要： A method is provided for maintaining a workpiece in a focal plane of a laser drilling system. The method includes: providing a workpiece holder that is adapted to releasably retain a workpiece on a planar surface thereof, the planar surface having a recess extending therein; positioning the workpiece onto a planar surface of a workpiece holder, such that the workpiece extends across the recess formed in the workpiece holder and an exposed surface of the workpiece aligns with a focal plane of a laser drilling system; projecting a laser beam from the laser drilling system onto the exposed surface of the workpiece, thereby forming an ablation on the exposed surface of the workpiece; and directing a flow of gas onto the exposed surface of the workpiece substantially concurrent with the step of projecting a laser beam, such that the flow of gas substantially impinges on an area of the exposed surface that extends across the recess formed in the workpiece holder, thereby maintaining the exposed surface of the workpiece in the focal plane of the laser drilling system during the laser drilling operation.
摘要翻译：提供了一种用于将工件保持在激光钻孔系统的焦平面中的方法。该方法包括：提供适于将工件可释放地保持在其平坦表面上的工件保持器，该平坦表面具有在其中延伸的凹部; 将工件定位在工件保持器的平坦表面上，使得工件延伸穿过形成在工件保持器中的凹部，并且工件的暴露表面与激光钻孔系统的焦平面对齐; 将来自激光钻孔系统的激光束投射到工件的暴露表面上，从而在工件的暴露表面上形成消融; 并且在投射激光束的步骤的基础上同时将气体流引导到工件的暴露表面上，使得气体流基本上撞击暴露表面的延伸穿过形成在工件保持器中的凹部的区域，从而在激光钻孔操作期间将工件的暴露表面保持在激光钻孔系统的焦平面内。

5. 发明申请

US20060043257A1 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining 失效
标题翻译：用于校准激光加工的近场扫描光学显微镜尖端的方法和装置
公开(公告)号：US20060043257A1
公开(公告)日：2006-03-02
申请号：US10932617
申请日：2004-09-02
申请人： Chen-Hsiung Cheng , Ming Li
发明人： Chen-Hsiung Cheng , Ming Li
IPC分类号： H01J40/14
CPC分类号： B23K26/04 , B23K26/0624 , G01Q40/00 , G01Q60/22
摘要： A system for measuring radiation at a peak wavelength that is radiated from a probe tip of a near-field scanning optical microscope (NSOM) probe used for laser machining, including: a laser source; the NSOM probe; a coupling substrate that is substantially transmissive to the peak wavelength; an NSOM mount to controllably hold the probe and the coupling substrate; an NSOM probe monitor coupled to the mount; an NSOM controller; and a photodetector optically coupled to the substrate. Light is coupled into the probe. The mount includes a Z motion stage. The probe monitor determines the distance between the probe tip and the coupling substrate. The controller is coupled to the probe monitor and the motion stage. It controls the distance between the probe tip and the coupling substrate such that radiation is coupled from the probe tip into the coupling substrate. The photodetector measures the power of this radiation.
摘要翻译：一种用于测量从用于激光加工的近场扫描光学显微镜（NSOM）探针的探针尖端辐射的峰值波长处的辐射的系统，包括：激光源; NSOM探针; 基本上对峰值波长透射的耦合衬底; NSOM安装座，用于可控制地保持探头和耦合衬底; 耦合到安装座的NSOM探针监视器; 一个NSOM控制器以及与该基板光耦合的光电检测器。光耦合到探头中。底座包括一个Z运动台。探针监测器确定探针尖端和耦合衬底之间的距离。控制器耦合到探头监视器和运动台。它控制探针尖端和耦合衬底之间的距离，使得辐射从探针尖端耦合到耦合衬底中。光电检测器测量这种辐射的功率。

6. 发明授权

US07053351B2 Near-field scanning optical microscope for laser machining of micro- and nano- structures 失效
标题翻译：用于微结构和纳米结构激光加工的近场扫描光学显微镜
公开(公告)号：US07053351B2
公开(公告)日：2006-05-30
申请号：US10813503
申请日：2004-03-30
申请人： Ming Li , Chen-Hsiung Cheng
发明人： Ming Li , Chen-Hsiung Cheng
IPC分类号： G02B7/04
CPC分类号： B23K26/0665 , B23K26/064 , B23K26/0648
摘要： A near-field scanning optical microscope (NSOM) laser micromachining system for laser machining features on surfaces using an ultrafast laser source and a method of laser machining such features. The system includes: the ultrafast laser source to generate pulses of laser light having pulse durations less than 1 ns and a peak wavelength; an NSOM probe having a substantially cylindrical shape; an NSOM mount to controllably hold the NSOM probe and the microstructure workpiece to be machined; an NSOM probe monitor coupled to the NSOM mount for determining the distance between the probe tip of the NSOM probe and the surface; and an NSOM controller coupled to the NSOM probe monitor, and motion stages in the NSOM mount. The NSOM mount includes an XY motion stage and a Z motion stage. These motion stages are couple to either the NSOM probe or the microstructure workpiece, or one motion stage to each.
摘要翻译：使用超快激光源的激光加工特征的近场扫描光学显微镜（NSOM）激光微加工系统和激光加工这种特征的方法。该系统包括：超快激光源，产生具有小于1ns的脉冲持续时间和峰值波长的激光脉冲; 具有大致圆柱形形状的NSOM探针; NSOM安装座可控制地固定NSOM探针和要加工的微结构工件; 耦合到NSOM安装座的NSOM探针监测器，用于确定NSOM探针的探针末端与表面之间的距离; 以及耦合到NSOM探针监视器的NSOM控制器以及NSOM安装中的运动级。 NSOM安装座包括XY运动台和Z运动台。这些运动阶段耦合到NSOM探针或微结构工件，或者连接到每个运动阶段。

7. 发明申请

US20050218315A1 Near-field scanning optical microscope for laser machining of micro- and nano- structures 失效
标题翻译：用于微结构和纳米结构激光加工的近场扫描光学显微镜
公开(公告)号：US20050218315A1
公开(公告)日：2005-10-06
申请号：US10813503
申请日：2004-03-30
申请人： Ming Li , Chen-Hsiung Cheng
发明人： Ming Li , Chen-Hsiung Cheng
IPC分类号： G01Q70/02 , B23K26/06 , H01J3/14
CPC分类号： B23K26/0665 , B23K26/064 , B23K26/0648
摘要： A near-field scanning optical microscope (NSOM) laser micromachining system for laser machining features on surfaces using an ultrafast laser source and a method of laser machining such features. The system includes: the ultrafast laser source to generate pulses of laser light having pulse durations less than 1 ns and a peak wavelength; an NSOM probe having a substantially cylindrical shape; an NSOM mount to controllably hold the NSOM probe and the microstructure workpiece to be machined; an NSOM probe monitor coupled to the NSOM mount for determining the distance between the probe tip of the NSOM probe and the surface; and an NSOM controller coupled to the NSOM probe monitor, and motion stages in the NSOM mount. The NSOM mount includes an XY motion stage and a Z motion stage. These motion stages are couple to either the NSOM probe or the microstructure workpiece, or one motion stage to each.
摘要翻译：使用超快激光源的激光加工特征的近场扫描光学显微镜（NSOM）激光微加工系统和激光加工这种特征的方法。该系统包括：超快激光源，产生具有小于1ns的脉冲持续时间和峰值波长的激光脉冲; 具有大致圆柱形形状的NSOM探针; NSOM安装座可控制地固定NSOM探针和要加工的微结构工件; 耦合到NSOM安装座的NSOM探针监测器，用于确定NSOM探针的探针末端与表面之间的距离; 以及耦合到NSOM探针监视器的NSOM控制器以及NSOM安装中的运动级。 NSOM安装座包括XY运动台和Z运动台。这些运动阶段耦合到NSOM探针或微结构工件，或者连接到每个运动阶段。

8. 发明授权

US06951627B2 Method of drilling holes with precision laser micromachining 有权
标题翻译：用精密激光微加工钻孔的方法
公开(公告)号：US06951627B2
公开(公告)日：2005-10-04
申请号：US10329036
申请日：2002-12-24
申请人： Ming Li , Makoto Ishizuka , Xinbing Liu
发明人： Ming Li , Makoto Ishizuka , Xinbing Liu
IPC分类号： B23K26/00 , B23K26/04 , B23K26/06 , B23K26/38 , B23K26/03
CPC分类号： B23K26/066 , B23K26/04 , B23K26/043 , B23K26/382 , B23K26/40 , B23K2103/50
摘要： The invention is an apparatus and a method for drilling holes in a work piece with a laser. A laser beam is received by the optical system and directed along an optical path. The system directs the laser beam through a moveable mask aperture creating a sub-beam, that is reduced in size by a lens system as it is imaged onto a work piece. Multiple features are formed in the work piece by moving the mask.
摘要翻译：本发明是用于在具有激光的工件上钻孔的装置和方法。激光束被光学系统接收并沿着光路引导。系统将激光束引导通过可移动的掩模孔，产生子光束，当透镜系统被成像到工件上时，其被减小。通过移动掩模在工件中形成多个特征。

9. 发明授权

US06819837B2 Method of temporarily adjusting the index of refraction of ring resonator with precision laser micromachining 失效
$Method of temporarily adjusting the index of refraction of ring resonator with precision laser micromachining$
标题翻译：利用精密激光微加工临时调整环形谐振器的折射率的方法
公开(公告)号：US06819837B2
公开(公告)日：2004-11-16
申请号：US10396030
申请日：2003-03-25
申请人： Ming Li , Daniel Hogan , Xinbing Liu , Makoto Ishizuka
发明人： Ming Li , Daniel Hogan , Xinbing Liu , Makoto Ishizuka
IPC分类号： G02B626
CPC分类号： G02B6/12007
摘要： A tuned optical resonator having a substrate and an input waveguide and an optical resonator waveguide formed on the substrate. The optical resonator waveguide has a resonant frequency, exhibits a first index of refraction, temporarily exhibits a second index of refraction responsive to application of laser energy, and temporarily resonates at the resonant frequency while the laser energy is being applied.
摘要翻译：一种调谐光学谐振器，其具有基板和形成在基板上的输入波导和光学谐振波导。光谐振器波导具有谐振频率，呈现第一折射率，响应于施加激光能量暂时呈现第二折射率，并且在施加激光能量时暂时谐振在谐振频率。

10. 发明授权

US06898358B2 Adjustable photonic crystal and method of adjusting the index of refraction of photonic crystals to reversibly tune transmissions within the bandgap 失效
$Adjustable photonic crystal and method of adjusting the index of refraction of photonic crystals to reversibly tune transmissions within the bandgap$
标题翻译：可调光子晶体和调整光子晶体折射率的方法可逆地调谐带隙内的传输
公开(公告)号：US06898358B2
公开(公告)日：2005-05-24
申请号：US10328841
申请日：2002-12-24
申请人： Ming Li , Makoto Ishizuka , Daniel Hogan , Xinbing Liu
发明人： Ming Li , Makoto Ishizuka , Daniel Hogan , Xinbing Liu
IPC分类号： G02B6/12 , G02B6/122 , G02F1/01 , G02B6/00 , H04J14/02
CPC分类号： B82Y20/00 , G02B6/12007 , G02B6/1225
摘要： A photonic crystal comprising a waveguide made of material. The waveguide has a periodic set of holes. The material proximate to at least one of the holes in the periodic set of holes exhibits an index of refraction that has been modified by the application of laser energy relative to the material proximate to other holes in the periodic set of holes. The photonic crystal is tuned to temporarily transmit a specific wavelength of light to create an on-off switch for the specific wavelength. Multiple photonic crystals are used to form a multiplexer and a demultiplexer.
摘要翻译：包括由材料制成的波导的光子晶体。波导具有周期性的一组孔。靠近周期性孔组中的至少一个孔的材料表现出折射率，该折射率已经通过相对于靠近周期性孔组中的其它孔的材料施加激光能量来改变。调整光子晶体以临时传输特定波长的光以产生用于特定波长的开 - 关开关。使用多个光子晶体来形成多路复用器和解复用器。

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