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1. 发明授权

US08322023B1 Method for providing a wrap-around shield for a magnetic recording transducer 有权
标题翻译：提供用于磁记录传感器的环绕屏蔽的方法
公开(公告)号：US08322023B1
公开(公告)日：2012-12-04
申请号：US12615544
申请日：2009-11-10
申请人： Xianzhong Zeng , Yunhe Huang , Ling Wang , Hai Sun
发明人： Xianzhong Zeng , Yunhe Huang , Ling Wang , Hai Sun
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for fabricating a magnetic transducer is described. The magnetic transducer includes a pole having a pole tip and a flared region. The method Includes providing a first mask layer on the pole and providing a second mask layer on the first mask layer. The first mask layer is soluble in a predetermined solution and has a first thickness. The second mask layer has a second thickness greater than the first thickness. The method also includes forming a mask from the first mask layer and the second mask layer. The step of forming the mask layer includes using the predetermined solution. The mask has a pattern that exposes a portion of the pole tip and covers a portion of the flared region. The method also includes providing a wrap-around shield on at least the pole tip.
摘要翻译：描述了用于制造磁换能器的方法。磁换能器包括具有极尖和扩口区域的极。该方法包括在极点上提供第一掩模层，并在第一掩模层上提供第二掩模层。第一掩模层可溶于预定溶液并具有第一厚度。第二掩模层具有大于第一厚度的第二厚度。该方法还包括从第一掩模层和第二掩模层形成掩模。形成掩模层的步骤包括使用预定的溶液。掩模具有暴露极尖的一部分并覆盖扩张区域的一部分的图案。该方法还包括在至少极尖上提供环绕屏蔽。

2. 发明授权

US08518832B1 Process for masking and removal of residue from complex shapes 失效
标题翻译：从复杂形状掩盖和去除残留物的方法
公开(公告)号：US08518832B1
公开(公告)日：2013-08-27
申请号：US13169588
申请日：2011-06-27
申请人： Xiaoyu Yang , Xianzhong Zeng , Yan Chen , Yunhe Huang , Jinqiu Zhang , Yang Xiang , Ching-Huang Lu
发明人： Xiaoyu Yang , Xianzhong Zeng , Yan Chen , Yunhe Huang , Jinqiu Zhang , Yang Xiang , Ching-Huang Lu
IPC分类号： H01L21/311 , H01L21/461
CPC分类号： B81C1/00849 , B81B2203/0118 , B81C1/0015 , B81C2201/0132 , G03F7/40 , H01L21/31133
摘要： A process is provided for etching a mask layer and removal of residue from a structure having an area sheltered from directional etching. The structure has a shape that forms a silhouette area obstructed from being etched by anisotropic bombardment originating from a first direction, and a mask formed over the mask layer over the structure; A first etch process removes at least a part of the mask layer and retains at least a part of mask layer in the sheltered area. A second etch process removes at least a part of the mask layer in the sheltered area by hydrogen based microwave plasma etching.
摘要翻译：提供了一种用于蚀刻掩模层并从具有从定向蚀刻遮蔽的区域的结构中除去残余物的方法。该结构具有形成通过来自第一方向的各向异性轰击而被阻挡而不被蚀刻的轮廓区域的形状，以及在该结构上形成在掩模层上的掩模; 第一蚀刻工艺去除掩模层的至少一部分并且将掩模层的至少一部分保留在遮蔽区域中。第二蚀刻工艺通过基于氢的微波等离子体蚀刻去除遮蔽区域中的掩模层的至少一部分。

3. 发明授权

US08628672B1 Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel 失效
标题翻译：制造具有非磁性斜面的垂直磁记录刻录机的方法
公开(公告)号：US08628672B1
公开(公告)日：2014-01-14
申请号：US13535091
申请日：2012-06-27
申请人： Weimin Si , Ying Hong , Zhigang Bai , Yunhe Huang , Fenglin Liu , Hong Zhang , Jikou Zhou , Xiaoyu Yang , Yuan Yao , Iulica Zana , Feng Liu , Ling Wang
发明人： Weimin Si , Ying Hong , Zhigang Bai , Yunhe Huang , Fenglin Liu , Hong Zhang , Jikou Zhou , Xiaoyu Yang , Yuan Yao , Iulica Zana , Feng Liu , Ling Wang
IPC分类号： B44C1/22
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A method for fabricating a magnetic recording transducer having a magnetic writer pole with a short effective throat height is provided. In an embodiment, a writer structure comprising a magnetic writer pole having a trailing bevel and a nonmagnetic stack on the top surface of the writer pole is provided. A dielectric write gap layer comprising alumina is deposited over the trailing bevel section and the nonmagnetic stack; and at least one etch stop layer is deposited over the dielectric write gap layer. A layer of nonmagnetic fill material is deposited over the etch stop layer and to form a nonmagnetic bevel by performing a dry etch process. The etch stop layer(s) are removed from the short throat section; and a trailing shield is deposited over the short throat section, nonmagnetic bevel, and nonmagnetic stack top surface.
摘要翻译：提供一种制造具有具有短的有效喉部高度的磁性写入极的磁记录换能器的方法。在一个实施例中，提供了一种写入器结构，其包括在写入器极的顶表面上具有后斜面和非磁性堆叠的磁性写入极。包含氧化铝的电介质写入间隙层沉积在后斜面部分和非磁性层上; 并且至少一个蚀刻停止层沉积在电介质写间隙层上。一层非磁性填充材料沉积在蚀刻停止层上并通过执行干法蚀刻工艺形成非磁性斜面。蚀刻停止层从短喉部分移除; 并且尾部屏蔽层沉积在短喉部分，非磁性斜面和非磁性堆叠顶表面上。

4. 发明授权

US08341826B1 Method for fabricating a magnetic recording transducer using a split seed layer 有权
标题翻译：使用分裂种子层制造磁记录换能器的方法
公开(公告)号：US08341826B1
公开(公告)日：2013-01-01
申请号：US12758469
申请日：2010-04-12
申请人： Hai Jiang , Yunhe Huang , Jinwen Wang , Yun-Fei Li , Ying Hong
发明人： Hai Jiang , Yunhe Huang , Jinwen Wang , Yun-Fei Li , Ying Hong
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A method and system for fabricating magnetic transducer are described.The method and system include providing a main pole having a bottom, a top wider than the bottom, and a top bevel. A nonmagnetic gap covering the main pole is provided. A portion of the nonmagnetic gap resides on the top of the main pole. A first seed layer is provided. At least a portion of the first seed layer covers the portion of the nonmagnetic gap on top of the main pole. A portion of the nonmagnetic gap on the magnetic recording transducer is removed after the first seed layer is provided. A second seed layer is provided after the portion of the nonmagnetic gap is removed. The second seed layer covers at least the portion of the first seed layer. A wrap-around shield layer is provided on the second seed layer.
摘要翻译：描述了用于制造磁换能器的方法和系统。该方法和系统包括提供具有底部，比底部宽的顶部和顶部斜面的主极。提供覆盖主极的非磁性间隙。非磁性间隙的一部分位于主极的顶部。提供第一种子层。第一种子层的至少一部分覆盖主极顶部的非磁性间隙的部分。在提供第一种子层之后，去除磁记录传感器上的非磁性间隙的一部分。在去除非磁性间隙的部分之后提供第二种子层。第二种子层覆盖至少第一种子层的部分。在第二籽晶层上设置环绕屏蔽层。

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