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1. 发明授权

US09109935B2 MEMS utility meters with integrated mass flow sensors 有权
标题翻译：具有集成质量流量传感器的MEMS功率表
公开(公告)号：US09109935B2
公开(公告)日：2015-08-18
申请号：US13662523
申请日：2012-10-28
申请人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F1/68 , G01F1/684 , G01F25/00 , G01F15/00
CPC分类号： G01F1/6845 , G01F1/6842 , G01F15/00 , G01F25/0007
摘要： This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electro-mechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied for custody transfer or tariff in utility industry as well.
摘要翻译：本发明涉及一种装置，该装置包括微制硅质量流量传感器，用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。微型质量流量传感器是所谓的微机电系统（微机电系统）设备。由于MEMS质量流量传感器的微尺度特征尺寸小，本发明装置具有功耗低，封装紧凑，可靠性高，扩展动态测量范围等优点。该装置还具有稳定的流动调节以实现期望的动态范围能力。此外，由于具有高精度特性，本发明的装置也可应用于公用事业行业的托管转让或关税。

2. 发明申请

US20140116129A1 MEMS Utility Meters with Integrated Mass Flow Sensors 有权
标题翻译：具有集成质量流量传感器的MEMS实用仪表
公开(公告)号：US20140116129A1
公开(公告)日：2014-05-01
申请号：US13662523
申请日：2012-10-28
申请人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F1/684
CPC分类号： G01F1/6845 , G01F1/6842 , G01F15/00 , G01F25/0007
摘要： This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electromechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied tot custody transfer or tariff in utility industry as well.
摘要翻译：本发明涉及一种装置，该装置包括微制硅质量流量传感器，用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。微型质量流量传感器是所谓的微机电系统（微机电系统）设备。由于MEMS质量流量传感器的微尺度特征尺寸小，本发明装置具有功耗低，封装紧凑，可靠性高，扩展动态测量范围等优点。该装置还具有稳定的流动调节以实现期望的动态范围能力。此外，由于具有高精度特性，本发明的装置也可应用于公用事业行业的保管转让或关税。

3. 发明授权

US08994552B2 MEMS utility meters with exchangeable metrology unit 有权
标题翻译：具有可更换计量单元的MEMS功率表
公开(公告)号：US08994552B2
公开(公告)日：2015-03-31
申请号：US13662520
申请日：2012-10-28
申请人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F5/00 , G08C15/06 , H04Q9/00
CPC分类号： H04Q9/00 , H04Q2209/43 , H04Q2209/60
摘要： An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
摘要翻译：在本发明中公开了一种使用微机械（即微机电MEMS机电系统）硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气体计量器。仪表有两个独立的计量单位。其中一个单元位于具有插入探测配置的主流道中，而另一个被配置为与主计量单元的旁路单元组件。旁路计量单元可以执行独立的计量任务，并可在维修，维护或维修期间进行现场交换，而无需将仪表从服务管道拆除。旁路计量单元还可用于比较不时测量的数据和性能自我诊断，这将有助于仪表现场服务期间的性能和数据认证。这两个单元可以由电池或外部来源供电。这些单元可以连接到网络，并提供用于数据传输和安全的内部多个存储。

4. 发明申请

US20140118161A1 MEMS UTILITY METERS WITH EXCHANGEABLE METROLOGY UNIT 有权
标题翻译：具有可交换计量单位的MEMS实用程序
公开(公告)号：US20140118161A1
公开(公告)日：2014-05-01
申请号：US13662520
申请日：2012-10-28
申请人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F5/00 , G08C15/06
CPC分类号： H04Q9/00 , H04Q2209/43 , H04Q2209/60
摘要： An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
摘要翻译：在本发明中公开了一种使用微机械（即微机电MEMS机电系统）硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气量计。仪表有两个独立的计量单位。其中一个单元位于具有插入探测配置的主流道中，而另一个被配置为与主计量单元的旁路单元组件。旁路计量单元可以执行独立的计量任务，并可在维修，维护或维修期间进行现场交换，而无需将仪表从服务管道拆除。旁路计量单元还可用于比较不时测量的数据和性能自我诊断，这将有助于仪表现场服务期间的性能和数据认证。这两个单元可以由电池或外部来源供电。这些单元可以连接到网络，并提供用于数据传输和安全的内部多个存储。

5. 发明授权

US11927555B2 Micromachined thermal time-of-flight fluidic concentration metering device 有权
公开(公告)号：US11927555B2
公开(公告)日：2024-03-12
申请号：US17330269
申请日：2021-05-25
申请人： Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
发明人： Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
IPC分类号： G01N25/18 , G01F1/68 , G01F1/684 , G01F1/69 , G01F1/692 , G01F1/699 , G01F15/14
CPC分类号： G01N25/18 , G01F1/6845 , G01F1/6847 , G01F1/69 , G01F1/692 , G01F1/699 , G01F15/14
摘要： The design and structure of a fluidic concentration metering device with a full dynamic range utilizing micro-machined thermal time-of-flight sensing elements is exhibited in this disclosure. With an additional identical sensing chip but packaged at the different locations in the measurement fluidic chamber with a closed conduit, the device can simultaneously measure the fluidic concentration and the fluidic flowrate. With a temperature thermistor integrated on the same micro-machined thermal sensing chip, the disclosed device will be able to provide the key processing parameters for the fluidic applications.

6. 发明授权

US10837814B1 Smart gas cylinder cap 有权
公开(公告)号：US10837814B1
公开(公告)日：2020-11-17
申请号：US16572951
申请日：2019-09-17
申请人： Liji Huang , Alok Batra , Venkata Sai Tejeswar Pokkuluri , Chih-Chang Chen
发明人： Liji Huang , Alok Batra , Venkata Sai Tejeswar Pokkuluri , Chih-Chang Chen
IPC分类号： G01F1/68 , G01F1/696 , G01N33/00 , G01F1/684 , F17C13/06 , F17C13/02
CPC分类号： G01F1/696 , F17C13/02 , F17C13/06 , G01F1/6845 , G01N33/0004 , F17C2205/0329 , F17C2250/0443 , F17C2250/0447 , F17C2250/0486
摘要： The design and structure of a smart gas cylinder valve cap coupled with a smart MEMS mass flow meter, an embedded iBeacon or RFID reader and a remote data transmission module, which is capable of formulating an Internet of Things (IoT) system, is demonstrated in the disclosure. The smart gas cylinder cap(s) can be directly used to replace the mechanical valve handwheel or directly attached to the top of the existing mechanical handwheel as a smart data relay, and the cap(s) can either be applied to a single or plural numbers of gas cylinders while the smart gas flow meter shall communicate with the smart gas cap as well as to relay gas consumption data to a designated data center or a “cloud” which can further interface with the users and suppliers of the gas cylinders. The system is beneficial for many of the existing gas cylinder applications such as construction gas process, medical gas racks, gas cylinders for food and beverage, and gas racks for electronics fabrication, where the gas cylinder status, gas consumption as well as cylinder logistics are critical for the applications.

7. 发明授权

US10240723B2 Digital regulated gas dispensing apparatus with a MEMS mass flow meter 有权
公开(公告)号：US10240723B2
公开(公告)日：2019-03-26
申请号：US15609518
申请日：2017-05-31
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： F17C13/02 , F17C13/04 , G01F1/684 , G01F1/696 , A61M16/10 , A61M16/16 , A61M16/00
摘要： The design and structure of a regulated digital gas dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.

8. 发明授权

US10209156B2 Micromachined pressure sensor and method of making the same 有权
公开(公告)号：US10209156B2
公开(公告)日：2019-02-19
申请号：US15380035
申请日：2016-12-15
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L9/00
摘要： The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

9. 发明授权

US10066976B2 Vortex flow meter with micromachined sensing elements 有权
公开(公告)号：US10066976B2
公开(公告)日：2018-09-04
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/32 , G01F1/684
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.

10. 发明申请

US20170356772A1 VORTEX FLOW METER WITH MICROMACHINED SENSING ELEMENTS 审中-公开
公开(公告)号：US20170356772A1
公开(公告)日：2017-12-14
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/32 , G01F1/684
CPC分类号： G01F1/3218 , G01F1/6845
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.

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