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    • 1. 发明授权
    • Virtual measuring device and method
    • 虚拟测量装置及方法
    • US08266080B2
    • 2012-09-11
    • US12354356
    • 2009-01-15
    • Won-Hyouk JangJoo-Hwa LeeDong-Hyun KimHyo-Jin HanKil-Ho OkSung-Hoon Kim
    • Won-Hyouk JangJoo-Hwa LeeDong-Hyun KimHyo-Jin HanKil-Ho OkSung-Hoon Kim
    • G06F15/18
    • G01B11/0641G01B11/0683H01L22/12H01L22/20
    • A virtual measuring device and a method for measuring the deposition thickness of amorphous silicon being deposited on a substrate is disclosed, where the method of measuring the deposition thickness of amorphous silicon includes predicting and adapting operations. In the predicting operation, during a process of depositing the amorphous silicon to a substrate, the deposition thickness is predicted by multiplying a predicted deposition speed to a deposition time by using a prediction model expressing a relationship between a deposition speed and a plurality of process factors that are correlated with the deposition speed obtained from the deposition thickness and the deposition time, and the predicted deposition thickness is compared with the measured deposition thickness, so that the relationship between the plurality of process factors and the deposition speed in the prediction model is compensated according to the comparison difference.
    • 公开了一种用于测量沉积在衬底上的非晶硅的沉积厚度的虚拟测量装置和方法,其中测量非晶硅的沉积厚度的方法包括预测和适应操作。 在预测操作中,在将非晶硅沉积到衬底的过程中,通过使用表示沉积速度和多个工艺因素之间的关系的预测模型将预测的沉积速度乘以沉积时间来预测沉积厚度 与从沉积厚度和沉积时间获得的沉积速度相关联,并将预测的沉积厚度与测量的沉积厚度进行比较,使得多个工艺因素之间的关系和预测模型中的沉积速度被补偿 根据比较差异。
    • 2. 发明申请
    • VIRTUAL MEASURING DEVICE AND METHOD
    • 虚拟测量装置和方法
    • US20090307163A1
    • 2009-12-10
    • US12354356
    • 2009-01-15
    • Won-Hyouk JANGJoo-Hwa LeeDong-Hyun KimHyo-Jin HanKil-Ho OkSung-Hoon Kim
    • Won-Hyouk JANGJoo-Hwa LeeDong-Hyun KimHyo-Jin HanKil-Ho OkSung-Hoon Kim
    • G06F15/18H01L21/66G01B21/08G06N5/02G06F17/10
    • G01B11/0641G01B11/0683H01L22/12H01L22/20
    • A virtual measuring device and a method for measuring the deposition thickness of amorphous silicon being deposited on a substrate is disclosed, where the method of measuring the deposition thickness of amorphous silicon includes predicting and adapting operations. In the predicting operation, during a process of depositing the amorphous silicon to a substrate, the deposition thickness is predicted by multiplying a predicted deposition speed to a deposition time by using a prediction model expressing a relationship between a deposition speed and a plurality of process factors that are correlated with the deposition speed obtained from the deposition thickness and the deposition time, and the predicted deposition thickness is compared with the measured deposition thickness, so that the relationship between the plurality of process factors and the deposition speed in the prediction model is compensated according to the comparison difference.
    • 公开了一种用于测量沉积在衬底上的非晶硅的沉积厚度的虚拟测量装置和方法,其中测量非晶硅的沉积厚度的方法包括预测和适应操作。 在预测操作中,在将非晶硅沉积到衬底的过程中,通过使用表示沉积速度和多个工艺因素之间的关系的预测模型将预测的沉积速度乘以沉积时间来预测沉积厚度 与从沉积厚度和沉积时间获得的沉积速度相关联,并将预测的沉积厚度与测量的沉积厚度进行比较,使得多个工艺因素之间的关系和预测模型中的沉积速度被补偿 根据比较差异。
    • 6. 发明授权
    • Fuel cell system and driving method of the same
    • 燃料电池系统及其驱动方法相同
    • US08883359B2
    • 2014-11-11
    • US12939022
    • 2010-11-03
    • Woong-Ho ChoMing-Zi HongDong-Hyun KimDong-Rak KimHyun Kim
    • Woong-Ho ChoMing-Zi HongDong-Hyun KimDong-Rak KimHyun Kim
    • H01M8/06H01M8/10
    • H01M8/0631H01M2008/1095Y02E60/50
    • A method of driving a fuel cell system is disclosed. The method of driving the fuel cell system may include supplying water to a reformer by pressing a pump pipe to pressing members to move the pressing members in a first direction, stopping power generation including stopping a supply of fuel and oxidant to the reformer, and discharging water in the reformer by moving the pressing members in a second direction opposite to the first direction while pressing the pump pipe with the pressing members. A fuel cell system is also disclosed. The fuel cell system includes a reformer, a fuel cell stack and a water transferring pump. The water transferring pump includes pressing members and a pump pipe. The pump pipe is in fluid communication with a water transferring pipe.
    • 公开了一种驱动燃料电池系统的方法。 驱动燃料电池系统的方法可以包括通过将泵管按压到按压部件上来向重整器供给水,以沿第一方向移动按压部件,停止发电,包括停止向重整器供应燃料和氧化剂,并且排出 通过在与所述按压部件一起按压所述泵管的同时沿与所述第一方向相反的第二方向移动所述按压部件而将所述重整器中的水排出。 还公开了一种燃料电池系统。 燃料电池系统包括重整器,燃料电池堆和输水泵。 输水泵包括按压构件和泵管。 泵管与输水管道流体连通。
    • 7. 发明授权
    • Fuel cell system having a reformer
    • 具有重整器的燃料电池系统
    • US08785069B2
    • 2014-07-22
    • US12971437
    • 2010-12-17
    • Hyun KimDong-Rak KimDong-Hyun KimMing-Zi HongWoong-Ho Cho
    • Hyun KimDong-Rak KimDong-Hyun KimMing-Zi HongWoong-Ho Cho
    • H01M8/06
    • C01B3/384C01B3/323C01B2203/0233C01B2203/0283C01B2203/044C01B2203/0445C01B2203/047C01B2203/066C01B2203/0811C01B2203/1223C01B2203/1235H01M8/04007H01M8/04201H01M8/04253H01M8/0612H01M8/0668
    • A fuel cell system includes a fuel cell stack, an oxidizer supply unit, a reformer, a fuel tank, and a water tank. The reformer generates a hydrogen-containing reformed gas reformed from hydrocarbon-based fuel and supplies it to the fuel cell stack. The fuel tank supplies the hydrocarbon-based fuel to the reformer. The water tank supplies water to the reformer. The reformer includes a reforming unit configured to have a reforming reaction generated therein, a combustion unit configured to supply heat energy to the reforming unit, and a carbon monoxide reduction unit configured to reduce the concentration of carbon monoxide in a reformed gas discharged from the reforming unit. A combustion gas pipe is connected to the combustion unit. A reformed gas pipe is disposed between the reforming unit and the carbon monoxide reduction unit. At least one of the combustion gas pipe and the reformed gas pipe is configured to pass through the inside of the water tank or to raise a temperature of the water tank through contact with the water tank, thereby preventing the freezing of the water tank.
    • 燃料电池系统包括燃料电池堆,氧化剂供应单元,重整器,燃料箱和水箱。 重整器产生从烃类燃料重整而成的含氢重整气体,并将其供给到燃料电池堆。 燃料箱向重整器供应烃类燃料。 水箱向改性机供水。 重整器包括:重整单元,其被配置为具有在其中产生的重整反应;燃烧单元,被配置为向重整单元供应热能;以及一氧化碳还原单元,被配置为减少从重整器排出的重整气体中的一氧化碳浓度 单元。 燃烧气体管道连接到燃烧单元。 重整气体管道设置在重整单元和一氧化碳减少单元之间。 燃烧气体管道和重整气体管道中的至少一个构造成通过水箱的内部,或者通过与水箱接触来提高水箱的温度,从而防止水箱的冻结。