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    • 2. 发明申请
    • Liquid phase deposition of contacts in programmable resistance and switching devices
    • 可编程电阻和开关器件中触点的液相沉积
    • US20090029534A1
    • 2009-01-29
    • US11880587
    • 2007-07-23
    • Wolodymyr CzubatyiTyler LowreyEd Spall
    • Wolodymyr CzubatyiTyler LowreyEd Spall
    • H01L21/208
    • H01L45/06H01L21/76879H01L45/1233H01L45/126H01L45/144H01L45/16
    • A programmable resistance, chalcogenide, switching or phase-change material device includes a substrate with a plurality of stacked layers including a conducting bottom composite electrode layer, an insulative layer having an opening formed therein, an active material layer deposited over both the insulative layer and the bottom composite electrode, and a top electrode layer deposited over the active material layer. The device uses a chemical or electrochemical liquid phase deposition process to selectively and conformally fill the insulative layer opening with the conductive bottom composite electrode layer. Conformally filling the conductive material within the opening reduces structural irregularities within the opening thereby increasing material density and resistivity within the device and thereby improving device performance and reducing programming current.
    • 可编程电阻,硫族化物,开关或相变材料器件包括具有多个堆叠层的衬底,其包括导电底部复合电极层,其中形成有开口的绝缘层,沉积在绝缘层上的活性材料层和 底部复合电极和沉积在活性材料层上的顶部电极层。 该装置使用化学或电化学液相沉积工艺来选择性地并保形地用导电底层复合电极层填充绝缘层开口。 将导电材料一致地填充在开口内减小开口内的结构不规则性,从而增加器件内的材料密度和电阻率,从而提高器件性能并减少编程电流。