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1. 发明授权

US07659489B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US07659489B2
公开(公告)日：2010-02-09
申请号：US11684916
申请日：2007-03-12
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

2. 发明授权

US07501600B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US07501600B2
公开(公告)日：2009-03-10
申请号：US11058620
申请日：2005-02-15
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

3. 发明授权

US06872909B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US06872909B2
公开(公告)日：2005-03-29
申请号：US10417408
申请日：2003-04-16
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
IPC分类号： H01J37/32 , B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

4. 发明授权

US07073771B2 Porous valve assembly 有权
标题翻译：多孔阀组件
公开(公告)号：US07073771B2
公开(公告)日：2006-07-11
申请号：US10814973
申请日：2004-03-30
申请人： Ali Shajii , Ronald W. Collins, Jr. , Matthew Besen
发明人： Ali Shajii , Ronald W. Collins, Jr. , Matthew Besen
IPC分类号： F16K7/00
CPC分类号： F16K31/0665 , F16K31/0675 , F16K37/0041 , Y10S251/905
摘要： A valve assembly for controlling the flow of a predetermined fluid, including a tube having an open end forming an outlet port, and wherein the tube is made of a material that is porous with respect to the predetermined fluid, an outer wall forming a fluid chamber coaxially surrounding the porous tube and including an inlet port, and a valve member made of non-porous material received for sliding movement within the porous tube. Sliding movement of the valve member within the tube and towards the open end of the tube reduces the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly, while sliding movement of the valve member within the tube and away from the open end of the tube increases the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly.
摘要翻译：一种用于控制预定流体流动的阀组件，包括具有形成出口的开口端的管，并且其中管由相对于预定流体多孔的材料制成，外壁形成流体室同轴地围绕多孔管并且包括入口端口，以及由多孔材料制成的阀构件，用于在多孔管内滑动运动。阀构件在管内并且朝向管的开口端的滑动运动通过多孔管和通过阀组件的出口减少了预定流体从流体室的流动，同时阀构件的滑动运动管并且远离管的开口端增加了预定流体从流体室通过多孔管并通过阀组件的出口的流动。

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