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1. 发明授权

US07501600B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US07501600B2
公开(公告)日：2009-03-10
申请号：US11058620
申请日：2005-02-15
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

2. 发明授权

US06872909B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US06872909B2
公开(公告)日：2005-03-29
申请号：US10417408
申请日：2003-04-16
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
IPC分类号： H01J37/32 , B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

3. 发明授权

US07659489B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US07659489B2
公开(公告)日：2010-02-09
申请号：US11684916
申请日：2007-03-12
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

4. 发明授权

US5625259A Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube 失效
标题翻译：微波等离子体施加器，其中包括微波透明放电管的螺旋流体冷却通道
公开(公告)号：US5625259A
公开(公告)日：1997-04-29
申请号：US389243
申请日：1995-02-16
申请人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
发明人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
IPC分类号： H05H1/28 , H05H1/46
CPC分类号： H05H1/46 , H05H1/28
摘要： A fluid-cooled plasma applicator for microwave absorbing fluids is described. The applicator includes a discharge tube substantially transparent to microwave energy and a cooling member surrounding the tube defining a channel and a medium. The channel is formed along an inner surface of the member and it encircles an outer surface of the tube for transporting a microwave absorbing cooling fluid over the outer surface of the tube. The medium adjacent to the channel allows an electric field to enter the tube and sustain a plasma in the tube while the fluid is flowing through the channel.
摘要翻译：描述了用于微波吸收流体的流体冷却等离子体施加器。施加器包括对微波能量基本上透明的放电管和围绕限定通道和介质的管的冷却构件。通道沿着构件的内表面形成，并且其环绕管的外表面，用于将微波吸收冷却流体输送到管的外表面上。与通道相邻的介质允许电场进入管并且在流体流过通道时在管中维持等离子体。

5. 发明授权

US5568015A Fluid-cooled dielectric window for a plasma system 失效
标题翻译：用于等离子体系统的流体冷却介质窗
公开(公告)号：US5568015A
公开(公告)日：1996-10-22
申请号：US389250
申请日：1995-02-16
申请人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
发明人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
IPC分类号： H05H1/28 , H05H1/46 , H01P1/08 , H05H1/34
CPC分类号： H05H1/46 , H05H1/28
摘要： A fluid-cooled dielectric window for a microwave plasma system which uses microwave absorbing fluids is described. The window includes a dielectric window and a cooling member in contact with an outer surface of the window which defines a channel and a medium adjacent to the channel. The channel transports a microwave absorbing cooling fluid over the outer surface of the window. The medium allows an electric field to enter through the window and sustain a plasma in a chamber while the fluid is flowing through the channel.
摘要翻译：描述了一种使用微波吸收液体的微波等离子体系统的流体冷却介质窗。窗口包括介电窗口和与窗口的外表面接触的冷却构件，其限定通道和邻近通道的介质。通道将微波吸收冷却流体传送到窗口的外表面上。介质允许电场通过窗口进入并且在流体流过通道时在腔室中维持等离子体。

6. 发明授权

US08173986B2 Laser-heated infrared source 有权
标题翻译：激光加热红外线源
公开(公告)号：US08173986B2
公开(公告)日：2012-05-08
申请号：US12847468
申请日：2010-07-30
申请人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： G01N21/00 , G01N21/35 , G01J3/10
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译：描述了用于产生红外辐射的红外光源和方法。红外光源包括激光辐射源，靶和外壳。目标位于激光辐射源的输出区域的路径中。目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。外壳定义了包含目标的空腔。外壳包括在限定空腔的一侧的红外反射膜。

7. 发明申请

US20110127450A1 Laser-Heated Infrared Source 有权
标题翻译：激光加热红外源
公开(公告)号：US20110127450A1
公开(公告)日：2011-06-02
申请号：US12847468
申请日：2010-07-30
申请人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： G01J3/10
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译：描述了用于产生红外辐射的红外光源和方法。红外光源包括激光辐射源，靶和外壳。目标位于激光辐射源的输出区域的路径中。目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。外壳定义了包含目标的空腔。外壳包括在限定空腔的一侧的红外反射膜。

8. 发明授权

US07238266B2 Method and apparatus for fluorine generation and recirculation 有权
标题翻译：用于氟发生和再循环的方法和装置
公开(公告)号：US07238266B2
公开(公告)日：2007-07-03
申请号：US10313516
申请日：2002-12-06
申请人： Donald K. Smith , Matthew M. Besen , William M. Holber , Stephen F. Horne
发明人： Donald K. Smith , Matthew M. Besen , William M. Holber , Stephen F. Horne
IPC分类号： C25B9/08 , B01D61/46 , C25B1/24 , B01D61/44
CPC分类号： B01J19/088 , B01J2219/00164 , B01J2219/0894 , C01B7/20
摘要： The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.
摘要翻译：本发明涉及氟的生成和再循环的设备和方法。申请人认识到，单独使用或与等离子体发生器组合使用的氟分离器可以在其用于薄膜处理的点处产生足够量的氟。氟分离器可以是冷凝器，膜分离装置，包含固体电解质的氟离子导体或其组合的形式。在一些实施方案中，包含氟的反应产物通过氟分离器。在其它实施方案中，分离的氟单独地或与另外的含氟原料结合使用到等离子体发生器。氟分离器允许氟被再循环并且废物从系统中消除。

9. 发明授权

US5688382A Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate 失效
标题翻译：微波等离子体沉积源和在衬底上填充高纵横比特征的方法
公开(公告)号：US5688382A
公开(公告)日：1997-11-18
申请号：US521958
申请日：1995-08-31
申请人： Matthew M. Besen , Lawrence Bourget , William M. Holber , Donald K. Smith , Richard S. Post
发明人： Matthew M. Besen , Lawrence Bourget , William M. Holber , Donald K. Smith , Richard S. Post
IPC分类号： H05H1/46 , C23C14/06 , C23C14/34 , C23C14/35 , C23C16/511 , C23F4/00 , H01J37/32
CPC分类号： H01J37/32229 , C23C14/34 , C23C14/357 , C23C16/511 , H01J37/32192 , H01J37/32678 , H01J37/34
摘要： A microwave plasma deposition source including a vacuum chamber for containing a substance to be energized in a plasma with microwave energy, a coaxial microwave feed ending in the chamber, a sputter target in the chamber and electrically isolated from the coaxial feed, and a second substrate spaced from the sputter target for defining a plasma volume between the substrates.
摘要翻译：一种微波等离子体沉积源，包括：用微波能量包含在等离子体中被通电的物质的真空室;在所述腔室中结束的同轴微波进料;所述腔室中的溅射靶，与所述同轴进料电隔离;以及第二基底与溅射靶间隔开以限定衬底之间的等离子体体积。

10. 发明授权

US06508631B1 Radial flow turbomolecular vacuum pump 有权
标题翻译：径向涡轮分子真空泵
公开(公告)号：US06508631B1
公开(公告)日：2003-01-21
申请号：US09442712
申请日：1999-11-18
申请人： Donald K. Smith , Matthew M. Besen
发明人： Donald K. Smith , Matthew M. Besen
IPC分类号： F04B4906
CPC分类号： F04D17/127 , F04D17/168 , F04D19/042
摘要： A radial flow turbomolecular vacuum pump includes a gas inlet, a gas outlet, a rotor, and a stator. The rotor includes a first rotor surface that is positioned in a substantially radial direction. A plurality of blades extends from the first rotor surface in a substantially axial direction. The stator includes a first stator surface that is positioned proximate to the first rotor surface in the substantially radial direction. A first and second plurality of vanes extend from the first stator surface and generally forms an annulus therebetween for receiving the first plurality of blades. A drive shaft is coupled to the rotor and positioned in the substantially axial direction. A motor is coupled to the drive shaft and rotates the rotor relative to the stator. The rotation of the rotor relative to the stator causes gas to be pumped from the gas inlet to the gas outlet in the substantially radial direction.
摘要翻译：径向涡轮分子真空泵包括气体入口，气体出口，转子和定子。转子包括位于大致径向的第一转子表面。多个叶片从大致轴向从第一转子表面延伸。定子包括在基本上径向方向上靠近第一转子表面定位的第一定子表面。第一和第二多个叶片从第一定子表面延伸并且通常在其间形成环形空间以接收第一多个叶片。驱动轴联接到转子并且在大致轴向方向上定位。电动机联接到驱动轴并使转子相对于定子旋转。转子相对于定子的旋转使得气体在大致径向方向从气体入口被泵送到气体出口。

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