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1. 发明授权

US5738799A Method and materials for fabricating an ink-jet printhead 失效
标题翻译：用于制造喷墨打印头的方法和材料
公开(公告)号：US5738799A
公开(公告)日：1998-04-14
申请号：US712761
申请日：1996-09-12
申请人： William G. Hawkins , Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson
发明人： William G. Hawkins , Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson
IPC分类号： B41J2/05 , B41J2/16 , B41J2/04 , B41J2/01 , B41J2/21
CPC分类号： B41J2/1639 , B41J2/1601 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2202/03
摘要： An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer is placed over the main surface of a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired ink channels. A permanent layer, comprising permanent material, is applied over the sacrificial layer, and, after polishing the two layers to form a uniform surface, the sacrificial layer is removed. Preferred materials for the sacrificial layer include polyimide while preferred materials for the permanent layer include polyarylene ether, although a variety of material combinations are possible.
摘要翻译：喷墨打印头制造技术使得用于液体油墨的毛细通道可以形成为方形或矩形横截面。将牺牲层放置在硅芯片的主表面上，牺牲层以由期望的墨水通道形成的空隙的形式构图。包括永久材料的永久层被施加在牺牲层上，并且在抛光两层以形成均匀的表面之后，去除牺牲层。用于牺牲层的优选材料包括聚酰亚胺，而用于永久层的优选材料包括聚亚芳基醚，尽管各种材料组合是可能的。

2. 发明授权

US5699094A Ink jet printing device 失效
标题翻译：喷墨打印装置
公开(公告)号：US5699094A
公开(公告)日：1997-12-16
申请号：US515180
申请日：1995-08-11
申请人： Cathie J. Burke , Almon P. Fisher , Diane Atkinson , Mildred Calistri-Yeh
发明人： Cathie J. Burke , Almon P. Fisher , Diane Atkinson , Mildred Calistri-Yeh
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16 , B41J2/178
CPC分类号： B41J2/1604 , B41J2/14129 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1635 , B41J2202/03
摘要： An ink jet printhead has improved resistance to the corrosive effects of ink by coating ink sensitive areas with a photo-imageable benzocyclobutene (BCB) polymer. The BCB can be patterned so as to provide a protective coating over selected areas while leaving other areas uncoated. In one described embodiment, a thermal ink jet printer is formed by bonding together a channel plate and a heater plate. Resistors and electrical connections are formed in the surface of the heater plate. A BCB layer is formed so as to overlie the heater plate to protect the electrical elements while providing pit structure for the heater and for ink flow bypass.
摘要翻译：通过用可光成像的苯并环丁烯（BCB）聚合物涂布油墨敏感区域，喷墨打印头改善了对油墨的腐蚀作用的抵抗力。 BCB可以被图案化，以便在选定区域上提供保护涂层，同时使其他区域未涂覆。在一个描述的实施例中，通过将通道板和加热器板接合在一起而形成热喷墨打印机。电阻器和电气连接形成在加热器板的表面。形成BCB层，以覆盖加热板，以保护电气元件，同时为加热器和墨水旁路提供凹坑结构。

3. 发明授权

US06440643B1 Method of making inkjet print head with patterned photoresist layer having features with high aspect ratios 有权
标题翻译：制造具有高纵横比特征的图案化光刻胶层的喷墨打印头的方法
公开(公告)号：US06440643B1
公开(公告)日：2002-08-27
申请号：US09921112
申请日：2001-08-02
申请人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
发明人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
IPC分类号： B41J2135
CPC分类号： B41J2/14129 , B41J2202/03
摘要： Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.
摘要翻译：形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。此外，光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。使用对比增强材料形成光致抗蚀剂层，其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。

4. 发明授权

US06294317B1 Patterned photoresist structures having features with high aspect ratios and method of forming such structures 有权
标题翻译：具有高纵横比特征的图案化光致抗蚀剂结构和形成这种结构的方法
公开(公告)号：US06294317B1
公开(公告)日：2001-09-25
申请号：US09352956
申请日：1999-07-14
申请人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
发明人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
IPC分类号： B41J2135
CPC分类号： B41J2/14129 , B41J2202/03
摘要： Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.
摘要翻译：形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。此外，光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。使用对比增强材料形成光致抗蚀剂层，其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。

5. 发明授权

US06183069B2 Ink jet printhead having a patternable ink channel structure 失效
标题翻译：喷墨打印头具有可图案化的墨水通道结构
公开(公告)号：US06183069B2
公开(公告)日：2001-02-06
申请号：US09004765
申请日：1998-01-08
申请人： Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson , Almon P. Fisher
发明人： Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson , Almon P. Fisher
IPC分类号： B41J205
CPC分类号： B41J2/1623 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642
摘要： An ink jet printhead is disclosed which has a heater plate containing the heating elements and driving circuitry means monolithographically formed on one surface thereof and the ink flow directing channel structure is formed on the heater plate using a layer of patternable material, so that all critical alignments are done directly on the heater plate. In one embodiment, the patternable material is a photosensitive polymer which is exposed using a mask to define the channel and reservoir pattern, which is then developed and cured. After curing, the patterned channel structure is polished to provide a smooth coplanar surface and a cover plate with an aperture therein is aligned with a loose tolerance to the channel structure and bonded thereto to complete the printhead. The aperture serves as both ink inlet and a portion of the ink reservoir. The channels are open at one end and serve as the droplet ejecting nozzles, while the other ends are connected to the reservoir. In one embodiment, the cover plate is transparent and the channel structure material is polyimide or polyarylene ether ketone.
摘要翻译：公开了一种喷墨打印头，其具有包含加热元件的加热器板和在其一个表面上以光学方式形成的驱动电路装置，并且使用可图案化材料层在加热器板上形成墨流动引导通道结构，使得所有关键对准直接在加热器板上完成。在一个实施方案中，可图案材料是使用掩模曝光以限定通道和储存器图案的光敏聚合物，其然后显影和固化。固化后，对图案化的沟道结构进行抛光以提供平滑的共面表面，并且其中具有孔的盖板对准通道结构的松动公差并与其结合以完成打印头。该孔用作墨水入口和墨水储存器的一部分。通道在一端开口并用作液滴喷嘴，而另一端连接到储存器。在一个实施例中，盖板是透明的，并且通道结构材料是聚酰亚胺或聚亚芳基醚酮。

6. 发明授权

US06790598B2 Methods of patterning resists and structures including the patterned resists 失效
标题翻译：图案化抗蚀剂和包括图案化抗蚀剂的结构的方法
公开(公告)号：US06790598B2
公开(公告)日：2004-09-14
申请号：US10046245
申请日：2002-01-16
申请人： Cathie J. Burke , Diane Atkinson , Mildred Calistri-Yeh
发明人： Cathie J. Burke , Diane Atkinson , Mildred Calistri-Yeh
IPC分类号： G03F722
CPC分类号： B41J2/1631 , B41J2/1604 , G03F1/50
摘要： Methods of patterning resists and structures including the patterned resists are disclosed. A patterned, multi-transmissive mask is used during patterning of resists to control exposure at areas of the resist at which features having different detail are desired. Exposure is varied in more finely patterned and more grossly patterned areas of the resist. The patterned resists have a high degree of topographical uniformity.
摘要翻译：公开了图案化抗蚀剂和包括图案化抗蚀剂的结构的方法。在图案化抗蚀剂期间使用图案化的多透射掩模，以控制在需要具有不同细节的特征的抗蚀剂的区域处的曝光。曝光在抗蚀剂的更精细图案和更严格图案的区域中变化。图案化的抗蚀剂具有高度的形貌均匀性。

7. 发明授权

US5010355A Ink jet printhead having ionic passivation of electrical circuitry 失效
标题翻译：喷墨打印头具有电路的离子钝化
公开(公告)号：US5010355A
公开(公告)日：1991-04-23
申请号：US456431
申请日：1989-12-26
申请人： William G. Hawkins , Cathie J. Burke , Daniel O. Roll , Pamela J. Hartman , Diane Atkinson
发明人： William G. Hawkins , Cathie J. Burke , Daniel O. Roll , Pamela J. Hartman , Diane Atkinson
IPC分类号： B41J2/05 , B41J2/16 , H01L23/29 , H01L23/31
CPC分类号： B41J2/14129 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1646 , H01L23/291 , H01L23/3157 , B41J2202/13 , H01L2924/0002
摘要： An improved ink jet printhead is disclosed of the type having a plurality of parallel ink flow channels which terminate with an ink droplet emitting nozzle, a heating element with a cavitational protective layer thereover located in each channel, and MOS electronic circuitry monolithically integrated within the printhead for applying electrical pulses to the heating elements. The pulsed heating elements produce bubbles momentarily on the protective layer of the heating elements which expel ink droplets from the nozzles. The improvement is obtained by providing multi-layer ionic passivation of the MOS electronic circuitry which is exposable to the ink. This is accomplished through the deposition of a multi-layered, thin film insulative coating thereon consisting of a first layer of doped or undoped silicon dioxide having a thickness of 200 .ANG. to 2 .mu.m followed by a second layer of plasma nitride having a thickness of 1000 .ANG. to 3 .mu.m. The silicon nitride is etched from the protective layers of the heating elements and electrical contact pads for external connection to electrical power so that the first layer of silicon oxide is exposed, followed by etching of the silicon oxide to remove it from the protective layer and contact pads. Thus, the MOS circuitry is protected from mobile ions in the ink while the cost effective fabrication of a printhead is maintained. In an alternate embodiment, the multi-layered ionic passivation comprises three thin film layers comprising polyimide interfacing with the ink, followed by silicon nitride, and doped or undoped silicon dioxide directly interfacing with the metallization.

8. 发明授权

US5665249A Micro-electromechanical die module with planarized thick film layer 失效
标题翻译：具有平面化厚膜层的微机电模具模块
公开(公告)号：US5665249A
公开(公告)日：1997-09-09
申请号：US330146
申请日：1994-10-17
申请人： Cathie J. Burke , William G. Hawkins , Herman A. Hermanson , Michael C. Ferringer , Almon P. Fisher , Diane Atkinson
发明人： Cathie J. Burke , William G. Hawkins , Herman A. Hermanson , Michael C. Ferringer , Almon P. Fisher , Diane Atkinson
IPC分类号： B41J2/05 , B24B37/04 , B41J2/16 , B24B1/00 , B41J2/04
CPC分类号： B41J2/1623 , B24B37/04 , B41J2/1604 , B41J2/1626 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2202/03 , Y10T29/49401
摘要： An improved microelectromechanical device, such as a thermal ink jet die or printhead, is formed by the alignment of two planar substrates bonded together by an intermediate thick film layer of patterned polymeric material, such as polyimide. The improved device has a fully cured, patterned thick film layer which is planarized by chemical-mechanical polishing-to improve the bonding strength between the substrates. The planarization removes topographical formations generated during the deposition of the thick film layer and/or during the patterning of the recesses therein.
摘要翻译：通过由诸如聚酰亚胺的图案化聚合物材料的中间厚膜层粘合在一起的两个平面基板的对准来形成改进的微电子机械装置，例如热喷墨模头或打印头。改进的装置具有完全固化的图案化的厚膜层，其通过化学机械抛光进行平面化，以提高基板之间的结合强度。平坦化消除了在沉积厚膜层期间和/或在其中凹陷图案化期间产生的形貌结构。

9. 发明授权

US4999077A Method of fabricating full width scanning or imaging arrays from subunits 失效
标题翻译：从子单元制作全幅扫描或成像阵列的方法
公开(公告)号：US4999077A
公开(公告)日：1991-03-12
申请号：US401379
申请日：1989-08-31
申请人： Donald J. Drake , Michael R. Campanelli , Cathie J. Burke , Diane Atkinson
发明人： Donald J. Drake , Michael R. Campanelli , Cathie J. Burke , Diane Atkinson
IPC分类号： H01L27/14 , H01L25/04 , H01L27/148 , H04N1/024
CPC分类号： H01L27/148 , H01L25/042 , H04N1/024 , H01L2924/0002 , H04N2201/02402 , Y10T156/1077 , Y10T156/1092 , Y10T29/49133 , Y10T29/49895
摘要： A method for fabricating a coplanar full width scanning array from a plurality of relatively short scanning subunits for reading and writing images. The subunits are fixedly mounted in an end-to-end relationship on a flat structural member with the subunit surfaces containing the scanning elements all being coplanar even though at least some of the subunits have varying thickness. This is accomplished by forming from a photopatternable thick film layer one or more keys on the subunit surface having the scanning elements and associated circuitry and positioning the keys into keyways produced from a photopatternable thick film layer on a flat surface of an alignment fixture. A conformal adhesive bonds a structural member to the assembled subunits to form the full width scanning array.

10. 发明授权

US5450108A Ink jet printhead which avoids effects of unwanted formations developed during fabrication 失效
标题翻译：喷墨打印头避免了在制造过程中产生的不希望的结构的影响
公开(公告)号：US5450108A
公开(公告)日：1995-09-12
申请号：US126962
申请日：1993-09-27
申请人： Donald J. Drake , Diane Atkinson
发明人： Donald J. Drake , Diane Atkinson
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16 , B41J2/34
CPC分类号： B41J2/1623 , B41J2/14024 , B41J2/14129 , B41J2/1604 , B41J2/1626 , B41J2/1635 , B41J2/1645
摘要： An improved thermal ink jet printhead is formed by the alignment and bonding of an anisotropically etched silicon wafer channel plate, containing a plurality of channel grooves, to a silicon wafer heater plate, containing a plurality of heating and addressing elements which are covered by a patterned thin and thick film insulating layer. The printhead enables better bonding of the two plates by sequentially patterning each layer of a two layer thick film layer to compensate for topographical features formed in the last thick film layer. The relative thickness and geometrical shapes of the recesses in the two layers are selected, so that topographic formations are varied to prevent standoff between bonded heater and channel plates, thereby insuring that the adhesive applied between the bonded plates will have the greatest propensity to bond.
摘要翻译：改进的热喷墨打印头通过将含有多个通道槽的各向异性蚀刻的硅晶片通道板对准和结合到硅晶片加热板上而形成，该硅晶片加热器板包含多个加热和寻址元件，薄膜和厚膜绝缘层。打印头通过顺序地图案化两层厚膜层的每一层以补偿在最后的厚膜层中形成的形貌特征，从而能够更好地粘结两块板。选择两层中的凹部的相对厚度和几何形状，使得地形结构变化以防止结合的加热器和通道板之间的间隔，从而确保施加在粘合板之间的粘合剂将具有最大的粘结倾向。

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