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    • 2. 发明申请
    • Apparatus for viewing and analyzing ultraviolet beams
    • 用于观察和分析紫外线的装置
    • US20050254122A1
    • 2005-11-17
    • US10847548
    • 2004-05-17
    • William Fricke
    • William Fricke
    • G02B13/14G02B13/16G03F7/20
    • G03F7/70133G02B13/143G02B13/16
    • An imaging apparatus for DUV beams is provided which includes a lens for receiving a DUV beam and producing an image of the DUV beam, wherein the lens has an aplanatic surface and a hemispheric surface, and wherein at least the aplanatic surface is made from or otherwise has a down-converting medium for producing a down-converted beam; an image sensing member for viewing an image of the down-converted beam; and optics for relaying the image of the down-converted beam from the lens to the image sensing member. A processor can be communicated with the image sensing member for analyzing the image of the DUV beam.
    • 提供了一种用于DUV光束的成像装置,其包括用于接收DUV光束并产生DUV光束的图像的透镜,其中所述透镜具有平坦表面和半球面,并且其中至少所述平行表面由或以其他方式制成 具有用于产生下变频束的下变频介质; 用于观看下变频束的图像的图像感测构件; 以及用于将下转换的光束的图像从透镜中继到图像感测部件的光学装置。 处理器可以与图像感测构件通信,用于分析DUV光束的图像。