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    • 1. 发明授权
    • Specimen distance measuring system
    • 标本测距系统
    • US4788431A
    • 1988-11-29
    • US36731
    • 1987-04-10
    • William A. EckesLee VeneklasenGlen E. HowardDonald J. McCarthyAllen M. CarrollDaniel L. Cavan
    • William A. EckesLee VeneklasenGlen E. HowardDonald J. McCarthyAllen M. CarrollDaniel L. Cavan
    • G01B15/00G01Q20/04G01Q30/02H01J37/20H01J37/244H01J37/304H01L21/027
    • H01J37/244H01J37/20H01J37/304H01J2237/2441H01J2237/2446H01J2237/24475H01J2237/24578
    • A specimen distance measuring system uses a plate (36) to obstruct the flux of backscattered electrons produced by an electron beam (18), and to cast a shadow across a measurement detector (32) which is sensitive to the position of the shadow. The shadow plate (36) and measurement detector (32) are aligned at an angle of approximately 45 degrees with a substrate (14) in order to allow calibration of the distance measuring system by scanning the electron beam (18). The measuring system is particularly useful as a height sensor (10) in an electron beam lithography apparatus (12) for sensing the height of a substrate (14). The distance measuring system may also include a reference detector (34) which is positioned in order to receive backscattered electron flux without obstruction from the shadow plate (36). The use of such a reference detector (32) is advantageous in allowing compensation of the signals obtained by the measurement detector, in order to allow the height sensor to operate independently of variations in electron beam current, and variations in substrate backscatter coefficient. The reference and measurement detectors (34,32) may be aligned in a vertical or horizontal plane to be either parallel to or perpendicular to the bombardment electron beam (18). Active feedback may be provided from the height sensor (10) to a vertical stage actuator for adjusting the height of the substrate (14).
    • 样本距离测量系统使用板(36)来阻挡由电子束(18)产生的背向散射电子的通量,并且跨越对阴影位置敏感的测量检测器(32)投射阴影。 阴影板(36)和测量检测器(32)以大约45度的角度与衬底(14)对准,以便允许通过扫描电子束(18)校准距离测量系统。 该测量系统特别适用于用于感测衬底(14)的高度的电子束光刻设备(12)中的高度传感器(10)。 距离测量系统还可以包括参考检测器(34),其被定位以便接收反向散射的电子通量而不受到遮挡板(36)的阻碍。 使用这种参考检测器(32)有利于允许补偿由测量检测器获得的信号,以便允许高度传感器独立于电子束电流的变化以及衬底反向散射系数的变化而工作。 参考和测量检测器(34,32)可以在垂直或水平平面中对准以与轰击电子束(18)平行或垂直于轰击电子束(18)。 主动反馈可以从高度传感器(10)提供到用于调节基板(14)的高度的垂直级致动器。
    • 5. 发明授权
    • Rocker brake assembly with hydraulic lock
    • 摇臂刹车总成带液压锁
    • US5975251A
    • 1999-11-02
    • US165291
    • 1998-10-02
    • Donald J. McCarthy
    • Donald J. McCarthy
    • F01L1/18F01L13/06F02D13/04
    • F01L1/2411F01L1/18F01L13/06F01L2105/00
    • The present invention is directed to a locking assembly for use in a rocker arm assembly for an engine brake assembly. The rocker arm assembly includes a rocker arm pivotally mounted on a shaft. The rocker arm has a first end and a second end, wherein the first end includes a cam follower and the second end includes an actuator assembly for operating at least one valve during a braking operation. The improved rocker arm includes a locking assembly for releasably securing the rocker arm to the shaft to prevent pivoting of the rocker arm during a positive power operation. The locking assembly includes a releasable latching assembly located on one of the rocker arm and the shaft. The locking assembly also includes a latch receiving recess located on another of the rocker arm and the shaft. The releasable latching assembly engages the latch receiving recess during a positive power operation. The releasable latching assembly disengaging the latch receiving recess during an engine braking operation such that the rocker arm can pivot about the shaft.
    • 本发明涉及一种用于发动机制动组件的摇臂组件中的锁定组件。 摇臂组件包括可枢转地安装在轴上的摇臂。 摇臂具有第一端和第二端,其中第一端包括凸轮从动件,并且第二端包括用于在制动操作期间操作至少一个阀的致动器组件。 改进的摇臂包括用于将摇臂可释放地固定到轴的锁定组件,以防止在正功率操作期间摇臂的枢转。 锁定组件包括位于摇臂和轴之一上的可释放闩锁组件。 锁定组件还包括位于摇臂和轴的另一个上的闩锁接收凹部。 可释放的闩锁组件在正功率操作期间接合闩锁接收凹部。 可释放的闩锁组件在发动机制动操作期间使闩锁容纳凹槽脱离接合,使得摇臂可绕轴枢转。