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1. 发明授权

US08607438B1 Method for fabricating a read sensor for a read transducer 失效
标题翻译：读取传感器的读取传感器的制造方法
公开(公告)号：US08607438B1
公开(公告)日：2013-12-17
申请号：US13309357
申请日：2011-12-01
申请人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
发明人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3903 , G01R33/093 , G11B5/3163
摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
摘要翻译：制造用于换能器的读取传感器。传感器具有对应于传感器的场区域和传感器区域。传感器堆叠被沉积。提供了包括硬掩模和磁场掩模的混合掩模。硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。场掩模覆盖硬掩模的场部分。场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。传感器从传感器堆叠在轨道宽度方向上定义。硬偏置层被沉积。硬偏置层的一部分位于场掩模上。邻近传感器区域的一部分硬偏压层被密封。场地面罩被提起。传感器平坦化。

2. 发明授权

US08711528B1 Tunnel magnetoresistance read head with narrow shield-to-shield spacing 有权
标题翻译：隧道磁阻读头，屏蔽间隔窄
公开(公告)号：US08711528B1
公开(公告)日：2014-04-29
申请号：US13538650
申请日：2012-06-29
申请人： Rongfu Xiao , Guanxiong Li , Zhihong Zhang , Ming Mao , Chen-Jung Chien
发明人： Rongfu Xiao , Guanxiong Li , Zhihong Zhang , Ming Mao , Chen-Jung Chien
IPC分类号： G11B5/39
CPC分类号： G11B5/3909 , G01R33/098 , G11B5/3163 , G11B5/3912 , G11B5/398 , H01L43/12 , Y10T29/49052
摘要： A tunnel magnetoresistance (TMR) read sensor having a tabbed AFM layer and an extended pinned layer and methods for making the same are provided. The TMR read sensor has an AFM layer recessed from the air bearing surface, providing a reduced shield-to-shield distance.
摘要翻译：提供具有带标签的AFM层和扩展的钉扎层的隧道磁阻（TMR）读取传感器及其制造方法。 TMR读取传感器具有从空气轴承表面凹入的AFM层，从而减少屏蔽与屏蔽距离。

3. 发明授权

US08343364B1 Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording 有权
标题翻译：制造用于能量辅助磁记录的近场换能器的双重硬掩模回磨方法
公开(公告)号：US08343364B1
公开(公告)日：2013-01-01
申请号：US12796585
申请日：2010-06-08
申请人： Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
发明人： Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/314 , G11B2005/0021 , Y10T29/49032
摘要： A method of forming a near field transducer (NFT) for energy assisted magnetic recording is disclosed. A structure comprising an NFT metal layer and a first hardmask layer over the NFT metal layer is provided A first patterned hardmask is formed from the first hardmask layer, the first patterned hardmask disposed over a disk section and a pin section of the NFT to be formed. An etch process is performed on the NFT metal layer via the first patterned hardmask, the etch process forming the NFT having the disk section and the pin section.
摘要翻译：公开了一种形成用于能量辅助磁记录的近场传感器（NFT）的方法。提供了包括在NFT金属层上的NFT金属层和第一硬掩模层的结构。第一图案化硬掩模由第一硬掩模层，设置在盘部分上的第一图案化硬掩模和待形成的NFT的销部分形成。通过第一图案化硬掩模在NFT金属层上进行蚀刻工艺，形成具有盘部分和销部分的NFT的蚀刻工艺。

4. 发明授权

US08343319B1 Method and system for providing an improved hard bias structure 有权
标题翻译：提供改进的硬偏置结构的方法和系统
公开(公告)号：US08343319B1
公开(公告)日：2013-01-01
申请号：US12238156
申请日：2008-09-25
申请人： Guanxiong Li , Xiaohai Xiang , Ming Mao , Mahendra Pakala
发明人： Guanxiong Li , Xiaohai Xiang , Ming Mao , Mahendra Pakala
IPC分类号： C23C14/34
CPC分类号： G11B5/3932 , G11B5/3163
摘要： A method and system for providing a magnetic transducer is described. The method and system define a magnetoresistive sensor in a track width direction, provide hard bias material(s) adjacent to the sensor in the track width direction, and provide sacrificial capping layer(s) on a portion of the hard bias material(s). The sacrificial capping layer(s) have a first height in a stripe height direction. The method and system also provide a mask for defining a stripe height of the sensor. The mask covers at least part of the sensor and has a second height in the stripe height direction. The second height is less than the first height. The method and system define the stripe height of the sensor while the mask covers the sensor. The sacrificial capping layer(s) are configured to prevent removal of the portion of the hard bias material(s) while the stripe height is defined.
摘要翻译：描述了一种用于提供磁换能器的方法和系统。该方法和系统在磁道宽度方向上限定磁阻传感器，在磁道宽度方向上提供与传感器相邻的硬偏置材料，并在硬偏置材料的一部分上提供牺牲性覆盖层，。牺牲覆盖层具有条纹高度方向上的第一高度。该方法和系统还提供用于定义传感器的条纹高度的掩模。掩模覆盖传感器的至少一部分，并且在条纹高度方向上具有第二高度。第二个高度小于第一个高度。该方法和系统定义传感器的条纹高度，同时掩模覆盖传感器。牺牲覆盖层被构造成在限定条纹高度的同时防止去除硬偏移材料的一部分。

5. 发明授权

US09431040B1 Magnetic recording transducer 有权
标题翻译：磁记录传感器
公开(公告)号：US09431040B1
公开(公告)日：2016-08-30
申请号：US13535828
申请日：2012-06-28
申请人： Guanxiong Li , Wei Zhang , Ming Mao
发明人： Guanxiong Li , Wei Zhang , Ming Mao
IPC分类号： G11B5/39
CPC分类号： G11B5/398 , G01R33/098 , G11B5/3163 , G11B5/3932 , H01L43/12 , Y10T29/49041 , Y10T29/49046 , Y10T29/49052
摘要： A magnetic recording transducer comprises a magnetoresistive sensor having a left side, a right side opposite to the left side, a left junction angle at the left side, a right junction angle at the right side, and a track width. The right junction angle and the left junction angle are characterized by a junction angle difference of not more than six degrees. The track width is less than one hundred nanometers. The magnetic recording transducer further comprises a left hard bias structure residing adjacent to the left side of the magnetoresistive sensor, and a right hard bias structure residing adjacent to the right side of the magnetoresistive sensor.
摘要翻译：磁记录传感器包括磁阻传感器，其具有左侧，与左侧相对的右侧，左侧的左结合角，右侧的右结合角和轨道宽度。右结合角和左结合角的特征在于不超过六度的结合角差。轨道宽度小于一百纳米。磁记录传感器还包括邻近磁阻传感器左侧的左硬偏置结构和与磁阻传感器的右侧相邻的右硬偏置结构。

6. 发明授权

US08233248B1 Method and system for providing a magnetic recording transducer using a line hard mask 有权
标题翻译：使用线硬掩模提供磁记录传感器的方法和系统
公开(公告)号：US08233248B1
公开(公告)日：2012-07-31
申请号：US12560669
申请日：2009-09-16
申请人： Guanxiong Li , Wei Zhang , Ming Mao
发明人： Guanxiong Li , Wei Zhang , Ming Mao
IPC分类号： G11B5/39 , B44C1/22
CPC分类号： G11B5/398 , G01R33/098 , G11B5/3163 , G11B5/3932 , H01L43/12 , Y10T29/49041 , Y10T29/49046 , Y10T29/49052
摘要： A method and system for fabricating a magnetic transducer is described. The transducer has a device region, a field region, and a magnetoresistive stack. The method and system include providing a hard mask on the magnetoresistive stack. The hard mask is inorganic and includes a sensor portion and a line frame. The sensor portion covers a first portion of the magnetoresistive stack corresponding to a magnetoresistive structure. The line frame covers a second portion of the magnetoresistive stack in the device region. The method and system include defining the magnetoresistive structure in a track width direction using the hard mask and providing at least one hard bias material after the magnetoresistive structure is defined. A first portion of the hard bias material(s) is substantially adjacent to the magnetoresistive structure in the track width direction. The method and system also include removing a second portion of the hard bias material(s).
摘要翻译：描述了用于制造磁换能器的方法和系统。换能器具有器件区域，场区域和磁阻堆叠。该方法和系统包括在磁阻堆叠上提供硬掩模。硬掩模是无机的，并且包括传感器部分和线框架。传感器部分覆盖对应于磁阻结构的磁阻堆叠的第一部分。线框架覆盖器件区域中的磁阻堆叠的第二部分。该方法和系统包括使用硬掩模限定磁道宽度方向上的磁阻结构，并且在限定了磁阻结构之后提供至少一种硬偏置材料。硬偏压材料的第一部分在磁道宽度方向上基本上与磁阻结构相邻。该方法和系统还包括去除硬偏压材料的第二部分。

7. 发明授权

US07906345B2 Magnetic nanoparticles, magnetic detector arrays, and methods for their use in detecting biological molecules 有权
标题翻译：磁性纳米颗粒，磁性检测器阵列及其用于检测生物分子的方法
公开(公告)号：US07906345B2
公开(公告)日：2011-03-15
申请号：US10829505
申请日：2004-04-22
申请人： Shan X Wang , Robert L White , Chris D Webb , Guanxiong Li
发明人： Shan X Wang , Robert L White , Chris D Webb , Guanxiong Li
IPC分类号： G01N33/553 , G01N33/53
CPC分类号： H01F10/3272 , B01J2219/00378 , B01J2219/00497 , B01J2219/00563 , B01J2219/00585 , B01J2219/00596 , B01J2219/00653 , B01J2219/00655 , B01J2219/00677 , B01J2219/00722 , B01J2219/00725 , B01J2219/00734 , B01L3/5027 , B82Y5/00 , B82Y15/00 , B82Y25/00 , B82Y30/00 , C12Q1/6834 , C40B40/06 , C40B40/10 , C40B40/14 , C40B60/14 , C40B70/00 , G01N33/54326 , G01N33/5434 , G01N33/553 , G01N2446/10 , H01F1/0054 , H01F10/3254 , Y10T428/2991 , C12Q2563/143
摘要： Magnetic nanoparticles and methods for their use in detecting biological molecules are disclosed. The magnetic nanoparticles can be attached to nucleic acid molecules, which are then captured by a complementary sequence attached to a detector, such as a spin valve detector or a magnetic tunnel junction detector. The detection of the bound magnetic nanoparticle can be achieved with high specificity and sensitivity.
摘要翻译：公开了磁性纳米颗粒及其用于检测生物分子的方法。磁性纳米颗粒可以连接到核酸分子，然后通过与检测器（例如自旋阀检测器或磁性隧道结检测器）连接的互补序列捕获。可以以高特异性和灵敏度实现结合的磁性纳米颗粒的检测。

8. 发明授权

US08334093B2 Method and system for providing a perpendicular magnetic recording head 有权
标题翻译：用于提供垂直磁记录头的方法和系统
公开(公告)号：US08334093B2
公开(公告)日：2012-12-18
申请号：US12262572
申请日：2008-10-31
申请人： Jinqiu Zhang , Hai Sun , Hongping Yuan , Tsung Yuan Chen , Guanxiong Li
发明人： Jinqiu Zhang , Hai Sun , Hongping Yuan , Tsung Yuan Chen , Guanxiong Li
IPC分类号： H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49041
摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask on the intermediate layer. The mask includes a line having at least one side. A hard mask layer is provided on the mask. At least a portion of the hard mask layer resides on the side(s) of the line. At least part of the hard mask layer on the side(s) of the line is removed. Thus, at least a portion of the line is exposed. The line is then removed, providing an aperture in the hard mask corresponding to the line. The method also includes forming a trench in the intermediate layer under the aperture. The trench top is wider than its bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
摘要翻译：公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。该方法和系统包括在中间层上提供掩模。掩模包括具有至少一个侧面的线。在掩模上设置硬掩模层。硬掩模层的至少一部分位于线的一侧。除去线的侧面上的硬掩模层的至少一部分。因此，线的至少一部分被暴露。然后去除线，在对应于线的硬掩模中提供孔。该方法还包括在孔下方的中间层中形成沟槽。沟槽顶部比底部宽。该方法还包括提供PMR极，其至少一部分位于沟槽中。

9. 发明授权

US08416540B1 Method for defining a magnetoresistive junction using multiple mills at a plurality of angles 失效
标题翻译：用多个角度定义多个轧机的磁阻结的方法
公开(公告)号：US08416540B1
公开(公告)日：2013-04-09
申请号：US12147450
申请日：2008-06-26
申请人： Guanxiong Li , Xiaozhong Dang , Mahendra Pakala , Yong Shen
发明人： Guanxiong Li , Xiaozhong Dang , Mahendra Pakala , Yong Shen
IPC分类号： G11B5/39
CPC分类号： G11B5/3909 , G01R33/093 , G11B5/3906 , G11B5/398 , Y10T29/49044 , Y10T29/49046 , Y10T428/1114
摘要： A method and system define a magnetoresistive junction in a magnetic recording transducer. The method and system include performing a first mill at a first angle from a normal to the surface of the magnetic recording transducer. A second mill is performed at a second angle from the normal to the surface. The second angle is larger than the first angle. A third mill is performed at a third angle from the normal to the surface. The third angle is not larger than the first angle.
摘要翻译：一种方法和系统在磁记录传感器中定义磁阻结。该方法和系统包括从磁记录换能器的表面的法线到第一角度执行第一磨机。从法线到表面的第二角度进行第二磨。第二角度大于第一角度。第三磨机从法线到表面的第三角度进行。第三角度不大于第一角度。

10. 发明授权

US08318093B2 Magnetic nanoparticles, magnetic detector arrays, and methods for their use in detecting biological molecules 有权
标题翻译：磁性纳米颗粒，磁性检测器阵列及其用于检测生物分子的方法
公开(公告)号：US08318093B2
公开(公告)日：2012-11-27
申请号：US11804583
申请日：2007-05-17
申请人： Shan X. Wang , Robert L. White , Chris D. Webb , Guanxiong Li
发明人： Shan X. Wang , Robert L. White , Chris D. Webb , Guanxiong Li
IPC分类号： G01N1/36
CPC分类号： H01F10/3272 , B01J2219/00378 , B01J2219/00497 , B01J2219/00563 , B01J2219/00585 , B01J2219/00596 , B01J2219/00653 , B01J2219/00655 , B01J2219/00677 , B01J2219/00722 , B01J2219/00725 , B01J2219/00734 , B01L3/5027 , B82Y5/00 , B82Y15/00 , B82Y25/00 , B82Y30/00 , C12Q1/6834 , C40B40/06 , C40B40/10 , C40B40/14 , C40B60/14 , C40B70/00 , G01N33/54326 , G01N33/5434 , G01N33/553 , G01N2446/10 , H01F1/0054 , H01F10/3254 , Y10T428/2991 , C12Q2563/143
摘要： Magnetic nanoparticles and methods for their use in detecting biological molecules are disclosed. The magnetic nanoparticles can be attached to nucleic acid molecules, which are then captured by a complementary sequence attached to a detector, such as a spin valve detector or a magnetic tunnel junction detector. The detection of the bound magnetic nanoparticle can be achieved with high specificity and sensitivity.
摘要翻译：公开了磁性纳米颗粒及其用于检测生物分子的方法。磁性纳米颗粒可以连接到核酸分子，然后通过与检测器（例如自旋阀检测器或磁性隧道结检测器）连接的互补序列捕获。可以以高特异性和灵敏度实现结合的磁性纳米颗粒的检测。

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