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1. 发明申请

US20090152259A1 Electrode tuning method and apparatus for a layered heater structure 有权
标题翻译：用于层状加热器结构的电极调谐方法和装置
公开(公告)号：US20090152259A1
公开(公告)日：2009-06-18
申请号：US12002381
申请日：2007-12-17
申请人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, JR. , Xiang Liu , John T. Mariner
发明人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, JR. , Xiang Liu , John T. Mariner
IPC分类号： H05B3/68 , G06F17/50 , G06G7/62
CPC分类号： H01L21/68735 , H01L21/67103 , H05B3/143
摘要： A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.
摘要翻译：提供了包括电极层和用于高精度地调谐层状加热器结构的电极层的局部调谐方法的层状加热器结构。局部调谐方法将电极层调整到其适当的局部电阻以最小化加热器表面上的温度偏移，并因此提供期望的热分布，其与基于厚度修整实践的常规非局部电阻调谐方法形成鲜明对比，例如研磨或爆破，或电阻率调整，如局部热处理。

2. 发明授权

US07777160B2 Electrode tuning method and apparatus for a layered heater structure 有权
标题翻译：用于层状加热器结构的电极调谐方法和装置
公开(公告)号：US07777160B2
公开(公告)日：2010-08-17
申请号：US12002381
申请日：2007-12-17
申请人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, Jr. , Xiang Liu , John T. Mariner
发明人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, Jr. , Xiang Liu , John T. Mariner
IPC分类号： H05B3/68 , C23C16/00
CPC分类号： H01L21/68735 , H01L21/67103 , H05B3/143
摘要： A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.
摘要翻译：提供了包括电极层和用于高精度地调谐层状加热器结构的电极层的局部调谐方法的层状加热器结构。局部调谐方法将电极层调整到其适当的局部电阻以最小化加热器表面上的温度偏移，并因此提供期望的热分布，其与基于厚度修整实践的常规非局部电阻调谐方法形成鲜明对比，例如研磨或爆破，或电阻率调整，如局部热处理。

3. 发明授权

US07259358B2 Encapsulated graphite heater and process 有权
标题翻译：密封石墨加热器和工艺
公开(公告)号：US07259358B2
公开(公告)日：2007-08-21
申请号：US10687212
申请日：2003-10-16
申请人： John T. Mariner , Timothy Hejl
发明人： John T. Mariner , Timothy Hejl
IPC分类号： H05B3/68 , C23C14/00
CPC分类号： H01L21/68757 , H01L21/67103 , H05B3/145
摘要： A graphite heater and method of forming a graphite heater comprising a graphite body configured to form an electrical heating circuit for at least one heating zone through the graphite encapsulated in a continuous overcoat layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof, wherein prior to being configured to form the electrical heating circuit path, the graphite body is coated with a layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof.
摘要翻译：一种石墨加热器和形成石墨加热器的方法，所述石墨加热器包括石墨体，所述石墨加热器被构造成通过所述石墨形成用于至少一个加热区的电加热回路，所述石墨包封在包含氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的连续外涂层中选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属的元素，或其复合物和/或其组合，其中在构造成形成电加热电路路径之前，石墨主体涂覆有包含选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属或复合物的元素的氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的层，以及 /或其组合。

4. 发明授权

US5395180A Boron nitride vaporization vessel 失效
标题翻译：氮化硼蒸发容器
公开(公告)号：US5395180A
公开(公告)日：1995-03-07
申请号：US166470
申请日：1993-12-14
申请人： John T. Mariner
发明人： John T. Mariner
IPC分类号： C23C14/24 , C23C14/26
CPC分类号： C23C14/26 , C23C14/243
摘要： The vaporization vessel includes a body of substantially rectangular configuration having an upper relatively flat surface and a recessed cavity formed in the body with said cavity having a lateral cross sectional geometry which forms an included angle at the intersection with said substantially flat upper surface of greater than 120 degrees.
摘要翻译：蒸发容器包括具有上部相对平坦的表面的基本上矩形构造的主体和形成在主体中的凹腔，其中所述空腔具有侧向横截面几何形状，其在与所述基本上平坦的上表面的交叉处形成大于 120度。

5. 发明授权

US5493630A Pyrolytic boron nitride coated flash evaporator 失效
标题翻译：热解氮化硼涂层闪蒸器
公开(公告)号：US5493630A
公开(公告)日：1996-02-20
申请号：US314313
申请日：1994-09-28
申请人： John T. Mariner , Timothy J. Hejl
发明人： John T. Mariner , Timothy J. Hejl
IPC分类号： C23C14/24 , C23C14/26
CPC分类号： C23C14/243 , C23C14/26
摘要： A resistance heated evaporator includes a body of graphite having a generally rectangular geometry with opposite ends each of which has four sides. A coating of pyrolytic boron nitride covers substantially the entire surface of three of the sides at each end so as to form a channel which provides structural support at each end. At least one side at each end remains open for electrical contact to a power supply.
摘要翻译：电阻加热蒸发器包括具有大致矩形几何形状的石墨体，其相对端各自具有四个侧面。热解氮化硼的涂层基本上在每个端部覆盖三个侧面的整个表面，以形成在每个端部提供结构支撑的通道。每一端的至少一侧保持开放，以与电源电接触。

6. 发明授权

US5410631A Clamp assembly for a vaporization boat 失效
标题翻译：用于蒸发船的夹具
公开(公告)号：US5410631A
公开(公告)日：1995-04-25
申请号：US119996
申请日：1993-09-10
申请人： John T. Mariner
发明人： John T. Mariner
IPC分类号： C23C14/26
CPC分类号： C23C14/26
摘要： A clamp assembly includes a clamp body of conductive material having a channel along one surface to receive the end of a vaporization boat. The channel has a depth which is greater than the thickness of the end of the vaporization boat such that a gap is formed between the end of the boat and the top of the channel. A metal member is fastened to the clamp body across the open top of the channel to form an enclosure for the end of the boat. Flexible graphite fills the gap and forms a compression fit upon fastening of the metal member to the clamp body.
摘要翻译：夹具组件包括导电材料的夹具本体，其具有沿着一个表面的通道以接收蒸发船的端部。通道的深度大于蒸发船的端部的厚度，使得在船的端部和通道的顶部之间形成间隙。金属构件穿过通道的敞开的顶部紧固到夹具体以形成用于船的端部的外壳。柔性石墨填充间隙并在将金属构件紧固到夹具主体上时形成压缩配合。

7. 发明授权

US5537507A Coated flash evaporator heater 失效
标题翻译：镀膜闪蒸器加热器
公开(公告)号：US5537507A
公开(公告)日：1996-07-16
申请号：US314411
申请日：1994-09-28
申请人： John T. Mariner , Timothy J. Hejl , Douglas A. Longworth , Lawrence E. Finley
发明人： John T. Mariner , Timothy J. Hejl , Douglas A. Longworth , Lawrence E. Finley
IPC分类号： B01D1/00 , C23C14/24 , B01D7/00 , C23C16/00
CPC分类号： B01D1/0011 , C23C14/243
摘要： A flash evaporator heater including a substrate formed of an intermetallic compound or of graphite and having an outer coating composed of pyrolytic boron nitride or pyrolytic graphite. The substrate has a substantially rectangular configuration with a substantially flat upper surface and a recessed cavity. The cavity has a longitudinal cross sectional geometry which forms a slope intersecting the substantially flat upper surface of the substrate at an angle .alpha. of less than 60 degrees.
摘要翻译：一种闪蒸器加热器，包括由金属间化合物或石墨形成的基底，并具有由热解氮化硼或热解石墨组成的外涂层。衬底具有基本上矩形的构造，具有基本平坦的上表面和凹腔。空腔具有纵向截面几何形状，其形成与基板的基本上平坦的上表面相交的倾斜角度小于60度的角度。

8. 发明授权

US5495550A Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating 失效
标题翻译：具有至少一个中间层和热解氮化硼涂层的石墨闪蒸器
公开(公告)号：US5495550A
公开(公告)日：1996-02-27
申请号：US314314
申请日：1994-09-28
申请人： John T. Mariner , Douglas A. Longworth
发明人： John T. Mariner , Douglas A. Longworth
IPC分类号： C04B41/89 , C23C14/24 , C23C14/26
CPC分类号： C23C14/243 , C23C14/26
摘要： A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body, an outer layer of pyrolytic boron nitride and an intermediate layer of a material selected from the group consisting of pyrolytic graphite, boron carbide (B.sub.4 C), tantalum carbide, and silicon carbide and having a thickness of no greater than about 0,002 inches.
摘要翻译：一种闪蒸蒸发器蒸发容器，用于在具有石墨体，热解氮化硼外层和选自热解石墨，碳化硼（B4C），钽碳化物和碳化硅，并且具有不大于约0.002英寸的厚度。

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