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1. 发明授权

US07777160B2 Electrode tuning method and apparatus for a layered heater structure 有权
标题翻译：用于层状加热器结构的电极调谐方法和装置
公开(公告)号：US07777160B2
公开(公告)日：2010-08-17
申请号：US12002381
申请日：2007-12-17
申请人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, Jr. , Xiang Liu , John T. Mariner
发明人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, Jr. , Xiang Liu , John T. Mariner
IPC分类号： H05B3/68 , C23C16/00
CPC分类号： H01L21/68735 , H01L21/67103 , H05B3/143
摘要： A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.
摘要翻译：提供了包括电极层和用于高精度地调谐层状加热器结构的电极层的局部调谐方法的层状加热器结构。局部调谐方法将电极层调整到其适当的局部电阻以最小化加热器表面上的温度偏移，并因此提供期望的热分布，其与基于厚度修整实践的常规非局部电阻调谐方法形成鲜明对比，例如研磨或爆破，或电阻率调整，如局部热处理。

2. 发明申请

US20090152259A1 Electrode tuning method and apparatus for a layered heater structure 有权
标题翻译：用于层状加热器结构的电极调谐方法和装置
公开(公告)号：US20090152259A1
公开(公告)日：2009-06-18
申请号：US12002381
申请日：2007-12-17
申请人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, JR. , Xiang Liu , John T. Mariner
发明人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, JR. , Xiang Liu , John T. Mariner
IPC分类号： H05B3/68 , G06F17/50 , G06G7/62
CPC分类号： H01L21/68735 , H01L21/67103 , H05B3/143
摘要： A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.
摘要翻译：提供了包括电极层和用于高精度地调谐层状加热器结构的电极层的局部调谐方法的层状加热器结构。局部调谐方法将电极层调整到其适当的局部电阻以最小化加热器表面上的温度偏移，并因此提供期望的热分布，其与基于厚度修整实践的常规非局部电阻调谐方法形成鲜明对比，例如研磨或爆破，或电阻率调整，如局部热处理。

3. 发明申请

US20080016684A1 CORROSION RESISTANT WAFER PROCESSING APPARATUS AND METHOD FOR MAKING THEREOF 审中-公开
标题翻译：耐腐蚀波浪加工设备及其制造方法
公开(公告)号：US20080016684A1
公开(公告)日：2008-01-24
申请号：US11557905
申请日：2006-11-08
申请人： Benjamin J. Olechnowicz , David M. Rusinko , Wei Fan , Demetrius Sarigiannis , Marc Schaepkens , Douglas A. Longworth
发明人： Benjamin J. Olechnowicz , David M. Rusinko , Wei Fan , Demetrius Sarigiannis , Marc Schaepkens , Douglas A. Longworth
IPC分类号： H01R43/00
CPC分类号： H01L21/67103 , C03C3/062 , C03C4/20 , H01L21/6875 , H01L21/68757 , H01L21/68785 , Y10T29/53213
摘要： A wafer processing apparatus characterized by having corrosion resistant connections for its electrical connections, gas feed-through channels, recessed areas, raised areas, MESA, through-holes such as lift-pin holes, threaded bolt holes, blind holes, and the like, with the special configurations employing connectors and fillers having excellent chemical resistant properties and optimized CTEs, i.e., having a coefficient of thermal expansion (CTE) that closely matches the CTE of the base substrate layer, the electrode(s), as well as the CTE of coating layer. In one embodiment, a nickel plated molybdenum insert is employed.
摘要翻译：一种晶片处理装置，其特征在于具有用于其电连接，气体馈通通道，凹陷区域，凸起区域，MESA，诸如提升针孔，螺纹孔，盲孔等通孔的耐腐蚀连接，具有采用具有优异的耐化学性能和优化的CTE的连接器和填料的特殊构造，即具有与基底衬底层，电极以及CTE的CTE密切匹配的热膨胀系数（CTE）的涂层。在一个实施例中，使用镀镍的钼插入件。

4. 发明申请

US20080006204A1 CORROSION RESISTANT WAFER PROCESSING APPARATUS AND METHOD FOR MAKING THEREOF 审中-公开
标题翻译：耐腐蚀波浪加工设备及其制造方法
公开(公告)号：US20080006204A1
公开(公告)日：2008-01-10
申请号：US11554590
申请日：2006-10-31
申请人： David M. Rusinko , Xiang Liu , Benjamin J. Olechnowicz , Victor L. Lou , Jennifer Klug
发明人： David M. Rusinko , Xiang Liu , Benjamin J. Olechnowicz , Victor L. Lou , Jennifer Klug
IPC分类号： C23C14/00 , C23C16/00
CPC分类号： C23C16/4586 , C23C16/4581
摘要： A wafer processing apparatus characterized by having corrosion resistant connections for its electrical connections, gas feed-through channels, recessed areas, raised areas, MESA, through-holes such as lift-pin holes, threaded bolt holes, blind holes, and the like, with the special configurations employing connectors and fillers having excellent chemical resistant properties and optimized CTEs, i.e., having a coefficient of thermal expansion (CTE) that closely matches the CTE of the base substrate layer, the electrode(s), as well as the CTE of coating layer. In one embodiment, a filler composition comprising a glass-ceramic material is employed.
摘要翻译：一种晶片处理装置，其特征在于具有用于其电连接，气体馈通通道，凹陷区域，凸起区域，MESA，诸如提升针孔，螺纹孔，盲孔等通孔的耐腐蚀连接，具有采用具有优异的耐化学性能和优化的CTE的连接器和填料的特殊构造，即具有与基底衬底层，电极以及CTE的CTE密切匹配的热膨胀系数（CTE）的涂层。在一个实施方案中，使用包含玻璃 - 陶瓷材料的填料组合物。

5. 发明授权

US06629546B2 Modular surface mount manifold assemblies 有权
公开(公告)号：US06629546B2
公开(公告)日：2003-10-07
申请号：US09544020
申请日：2000-04-06
申请人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
发明人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
IPC分类号： F16K1110
CPC分类号： F16K27/003 , Y10T137/87885
摘要： A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. Additionally, the bridge fittings may be stacked to form multiple layers where bridge fittings of one layer may be in fluid communication with bridge fittings of another layer. The invention may further comprise seals provided in a recess between the fluid ports and the mating bridge fittings ends.

6. 发明授权

US07207605B2 Tube coupling 失效
标题翻译：管接头
公开(公告)号：US07207605B2
公开(公告)日：2007-04-24
申请号：US10604700
申请日：2003-08-11
申请人： Benjamin J. Olechnowicz , Gerald A. Babuder , Timothy A. Barney , Ronald K. Fisher
发明人： Benjamin J. Olechnowicz , Gerald A. Babuder , Timothy A. Barney , Ronald K. Fisher
IPC分类号： F16L19/00
CPC分类号： F16L19/0218 , F16L17/06 , F16L19/005 , Y10S277/939 , Y10S285/917
摘要： Coupling components which prevent relative rotation between tubular members when break away torque forces are applied to the tubular members. In one embodiment, the invention is a locking ring for preventing relative axial rotation between two generally tubular members. The ring is shaped to receive a sealing gasket and has two side faces wherein each side face is shaped to frictionally engage one of the tubular members to thereby prevent relative axial rotation between the tubular members. The invention is also directed to a coupling including a locking ring. The tubular members are generally coaxially arranged such that the sealing faces face each other. The coupling comprises a sealing gasket captured between the sealing beads for sealing the coupling, wherein the frictional surfaces engage the sealing gasket to prevent relative rotation between the tubular members.
摘要翻译：当断开扭矩力时，防止管状构件之间的相对旋转的联接部件被施加到管状构件。在一个实施例中，本发明是用于防止两个大致管状构件之间的相对轴向旋转的锁定环。环被成形为接收密封垫圈并且具有两个侧面，其中每个侧面成形为摩擦地接合管状构件中的一个，从而防止管状构件之间的相对轴向旋转。本发明还涉及包括锁定环的联轴器。管状构件大致同轴地布置成使得密封面彼此面对。联接器包括：密封垫圈，其被密封在密封珠之间，用于密封联接件，其中摩擦表面接合密封垫圈以防止管状构件之间的相对旋转。

7. 发明授权

US06502601B2 Modular surface mount manifold assemblies 失效
公开(公告)号：US06502601B2
公开(公告)日：2003-01-07
申请号：US10154113
申请日：2002-05-23
申请人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
发明人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
IPC分类号： F16K2700
CPC分类号： F15B13/0814 , F15B13/0825 , F15B13/086 , F15B13/0892 , F16K27/003 , Y10S285/905 , Y10T137/87885
摘要： A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. Additionally, the bridge fittings may be stacked to form multiple layers where bridge fittings of one layer may be in fluid communication with bridge fittings of another layer. The invention may further comprise seals provided in a recess between the fluid ports and the mating bridge fittings ends.

8. 发明授权

US5860676A Modular block assembly using angled fasteners for interconnecting fluid components 失效
标题翻译：用于连接流体部件的角度紧固件的模块化组件
公开(公告)号：US5860676A
公开(公告)日：1999-01-19
申请号：US874601
申请日：1997-06-13
申请人： Joseph M. Brzezicki , Thomas E. DiBiase , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Richard T. Papa , Brian K. Sprafka , Daniel E. Zeiler
发明人： Joseph M. Brzezicki , Thomas E. DiBiase , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Richard T. Papa , Brian K. Sprafka , Daniel E. Zeiler
IPC分类号： F15B13/00 , F15B13/08 , F16K27/00 , F16L39/00
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0821 , F15B13/0892 , F16K27/003 , Y10T137/87885
摘要： A modular block assembly is provided for interconnecting fluid components of a fluid system in a reduced area. The system includes a base block having angularly disposed passages that receive fasteners in opposite, parallel end faces of the block. The fasteners allow adjacent base blocks to be connected in end-to-end fashion. The first passage extends through one of the end faces and communicates with an upper face of the block. Fluid components are selectively secured to the upper face of the base block to control or regulate fluid flow through the system as desired. Additional angle openings and fasteners, as well as additional fluid passages, may be provided in side wall faces of the base blocks. These additional passages permit transfer of fluid from one adjacent flow line to another. Each fluid passage end includes face seals allowing abutting engagement between the modular components to provide a sealed, continuous flow passage.
摘要翻译：提供了一种模块化组件，用于将减少区域中的流体系统的流体部件相互连接。该系统包括具有角度设置的通道的基座，该通道在块的相对的平行端面中接收紧固件。紧固件允许相邻的基座以端对端的方式连接。第一通道延伸穿过其中一个端面并与块的上表面连通。流体组件选择性地固定到基座的上表面，以根据需要控制或调节通过系统的流体流动。附加的角度开口和紧固件以及附加的流体通道可以设置在基座的侧壁面上。这些附加通道允许流体从一个相邻的流动管线传递到另一个。每个流体通道端包括允许模块化组件之间的邻接接合以提供密封的连续流动通道的面密封件。

9. 发明授权

US07036528B2 Modular surface mount manifold assemblies 失效
标题翻译：模块化表面安装歧管组件
公开(公告)号：US07036528B2
公开(公告)日：2006-05-02
申请号：US10605266
申请日：2003-09-18
申请人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
发明人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
IPC分类号： F16K11/10
CPC分类号： F16K27/003 , Y10T137/87885
摘要： A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. The bridge fittings may be stacked to form multiple layers.
摘要翻译：提供了一种模块化歧管系统，用于将减少区域中的流体系统的流体部件相互连接。该系统包括具有内部流体通道的一个或多个桥接件，该内部流体通道具有与第一流体部件的出口流体连通的入口端，以及与第二流体部件的入口流体连通的出口端。桥接件可以另外包括两个或更多个端口，所述端口中的一个可以与另一基板级上的歧管流体连通。桥接件可以安装在用于结构支撑的背板的通道内或安装在不同尺寸的通道块中。桥接件也可以在形成多个流动路径的多个方向上安装到定位板。桥接件可以堆叠形成多层。

10. 发明授权

US07686041B2 Modular surface mount manifold assemblies 失效
标题翻译：模块化表面安装歧管组件
公开(公告)号：US07686041B2
公开(公告)日：2010-03-30
申请号：US11378198
申请日：2006-03-17
申请人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
发明人： Paul G. Eidsmore , Michael J. Mohlenkamp , Benjamin J. Olechnowicz , Christine M. Schilt Deines , Douglas Nordstrom , James McCoy
IPC分类号： F16K11/10
CPC分类号： F15B13/0814 , F15B13/0825 , F15B13/086 , F15B13/0892 , F16K27/003 , Y10S285/905 , Y10T137/87885
摘要： A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. Additionally, the bridge fittings may be stacked to form multiple layers where bridge fittings of one layer may be in fluid communication with bridge fittings of another layer. The invention may further comprise seals provided in a recess between the fluid ports and the mating bridge fittings ends.
摘要翻译：提供了一种模块化歧管系统，用于将减少区域中的流体系统的流体部件相互连接。该系统包括具有内部流体通道的一个或多个桥接件，该内部流体通道具有与第一流体部件的出口流体连通的入口端，以及与第二流体部件的入口流体连通的出口端。桥接件可以另外包括两个或更多个端口，所述端口中的一个可以与另一基板级上的歧管流体连通。桥接件可以安装在用于结构支撑的背板的通道内或安装在不同尺寸的通道块中。可以使用可选的定位板，其安装在桥接件的端部上，以便使流体部件的入口端口和出口端口与桥接件的入口端和出口端对齐。桥接件也可以在形成多个流动路径的多个方向上安装到定位板。此外，桥接件可以堆叠形成多层，其中一层的桥接件可以与另一层的桥接件流体连通。本发明还可以包括设置在流体端口和匹配桥接件端部之间的凹部中的密封件。

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