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    • 2. 发明授权
    • Method and apparatus for determining the thickness and index of
refraction of a film using low coherence reflectometry and a reference
surfaces
    • 使用低相干反射计和参考表面确定膜的厚度和折射率的方法和装置
    • US5633712A
    • 1997-05-27
    • US520198
    • 1995-08-28
    • Shalini VenkateshWayne V. SorinBrian L. Heffner
    • Shalini VenkateshWayne V. SorinBrian L. Heffner
    • G01B11/06G01N21/41G01B9/02
    • G01N21/41G01B11/0675
    • An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes low coherence light source that generates a probe light signal. The film is positioned between first and second reference reflectors, the first reference reflector being partially reflecting. The probe light signal is applied to the film after passing through the first reference reflector. Part of the portion of the probe light signal leaving the film is reflected back toward the first reference reflector by the second reference reflector. The light exiting through the first reference reflector is collected to form the input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film as well as the change in optical path length between said first and second reflectors resulting from the introduction of said film between said first and second reflectors. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the combined light signal. Embodiments in which only one of the reference reflectors is utilized provide a means for simplifying the output spectrum from the receiver when multi-layer films are utilized.
    • 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括产生探测光信号的低相干光源。 薄膜位于第一和第二参考反射器之间,第一参考反射器被部分地反射。 探针光信号通过第一参考反射器后施加到膜。 离开膜的探测光信号的一部分的一部分被第二参考反射器反射回第一参考反射器。 收集通过第一参考反射器射出的光以形成接收器的输入,该接收器确定从膜的顶表面和底表面反射的光之间的时间延迟以及所述第一和第二反射器之间的光程长度的变化,从而得到 从所述第一和第二反射器之间的所述膜的引入。 在本发明的优选实施例中,接收机由光学自相关器或光谱分析仪构成,光谱分析仪包括用于提供从组合的光信号测量的频域频谱的傅里叶变换的电路。 其中仅使用一个参考反射器的实施例提供了当使用多层膜时简化来自接收器的输出光谱的装置。
    • 4. 发明授权
    • Roller assembly having pre-aligned for on-line thickness measurements
    • 辊组件具有预对准的在线厚度测量
    • US5850287A
    • 1998-12-15
    • US893432
    • 1997-07-11
    • Wayne V. SorinShalini VenkateshBrian L. Heffner
    • Wayne V. SorinShalini VenkateshBrian L. Heffner
    • G01B11/06G01N21/45G01B9/02
    • G01B11/0691
    • An apparatus for measuring the thickness of a film on a production line or the like. The apparatus includes a moveable member in contact with the film. The moveable member rotates about a fixed member and includes a transparent region. The apparatus also includes an optical probe attached to the fixed member. The optical probe has an optical fiber for coupling a light signal to the film through the transparent region of the moveable member and for returning light reflected from the film to a receiver for determining the thickness of the film. The optical probe may also include a lens assembly for imaging the light signal onto the film and imaging the reflected light signals back into the optical probe. The optical probe may also include a partially reflecting reference reflector for simplifying the analysis of multi-layer films.
    • 一种用于测量生产线上的薄膜厚度的装置。 该装置包括与薄膜接触的可移动部件。 可移动构件围绕固定构件旋转并且包括透明区域。 该装置还包括附接到固定构件的光学探头。 光学探针具有用于通过可移动部件的透明区域将光信号耦合到膜的光纤,并且用于将从膜反射的光返回到接收器以确定膜的厚度。 光学探针还可以包括用于将光信号成像到胶片上并将反射光信号成像回到光学探针中的透镜组件。 光学探针还可以包括用于简化多层膜的分析的部分反射的参考反射器。
    • 6. 发明授权
    • Method and apparatus for independently measuring the thickness and index
of refraction of films using low coherence reflectometry
    • 用于使用低相干反射测量法独立测量膜的折射厚度和折射率的方法和装置
    • US5646734A
    • 1997-07-08
    • US520200
    • 1995-08-28
    • Shalini VenkateshWayne V. Sorin
    • Shalini VenkateshWayne V. Sorin
    • G01B11/06G01N21/45G01B9/02
    • G01B11/06
    • An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes a first coupler for generating a first probe light signal and a second probe light signal from a low coherence light source. The first probe light signal is directed toward the top surface of the film at a first angle of incidence and the light leaving the top surface of the film is collected. Similarly, the second probe light signal is directed toward the top surface of the film at a second angle of incidence different from said first angle of incidence and the light leaving the top surface of the film is also collected. The collected light is combined to form a collected light signal which is input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the combined light signal.
    • 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括用于产生第一探针光信号的第一耦合器和来自低相干光源的第二探测光信号。 第一探针光信号以第一入射角指向膜的顶表面,并且收集离开膜的顶表面的光。 类似地,第二探测光信号以不同于所述第一入射角的第二入射角指向膜的顶表面,并且还收集离开膜顶表面的光。 收集的光被组合以形成收集的光信号,其被输入到确定从膜的顶表面和底表面反射的光之间的时间延迟的接收器。 在本发明的优选实施例中,接收机由光学自相关器或光谱分析仪构成,光谱分析仪包括用于提供从组合的光信号测量的频域频谱的傅里叶变换的电路。