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1. 发明授权

US5945685A Glass substrate inspection tool having a telecentric lens assembly 失效
标题翻译：具有远心透镜组件的玻璃基板检查工具
公开(公告)号：US5945685A
公开(公告)日：1999-08-31
申请号：US974272
申请日：1997-11-19
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles Cheng-Hsing Lee , Wai Cheung Leung , Hal Jervis Rosen
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles Cheng-Hsing Lee , Wai Cheung Leung , Hal Jervis Rosen
IPC分类号： G01N21/94 , G01N21/86
CPC分类号： G01N21/94
摘要： A glass disk substrate inspection tool uses a polarized laser beam that is directed to the first surface of the disk substrate at Brewster's angle and is then transmitted through the disk substrate to a light detector that generates a signal representative of the intensity of the light received. Because the light polarized parallel to the plane of incidence, i.e., the plane formed by the line of the incident beam and a line perpendicular to the surface of the disk substrate, is completely transmitted, there is no surface reflection at either the first or second surfaces of the disk substrate. The polarized beam is directed by a first rotating scanner to the input of a telecentric lens assembly that provides an output beam parallel to its optical axis as the beam is being scanned. The beam is then directed by a first fixed mirror to strike the first surface of the disk substrate at Brewster's angle as the beam is scanned along a line across the first disk surface. The beam is then transmitted through the substrate to the second surface of the disk substrate to a second fixed mirror that redirects the beam to a second telecentric lens assembly. The light passes through the second telecentric lens assembly in the direction reverse to the direction of passage through the first telecentric lens assembly so that the output beam from the second telecentric lens assembly is directed to its focal point. This focal point coincides with the point of contact of a second rotating scanner synchronized for rotation with the first scanner. The second scanner directs the transmitted beam to the light detector.
摘要翻译：玻璃盘基板检查工具使用以布鲁斯特角度指向盘基片的第一表面的偏振激光束，然后通过盘基片传输到产生表示所接收光的强度的信号的光检测器。因为平行于入射平面的光，即由入射光束的线形成的平面和垂直于盘基片的表面的一条线被完全透射，所以在第一或第二处没有表面反射盘基片的表面。偏振光束由第一旋转扫描器引导到远心透镜组件的输入端，当远射镜被扫描时，其提供平行于其光轴的输出光束。然后，当沿着穿过第一盘表面的线扫描光束时，光束由第一固定镜引导以以布鲁斯特角冲击盘基片的第一表面。然后将光束通过基板传送到盘基板的第二表面，到第二固定反射镜，其将光束重定向到第二远心透镜组件。光穿过第二远心透镜组件的方向与穿过第一远心透镜组件的通过方向相反，使得来自第二远心透镜组件的输出光束被引导到其焦点。该焦点与第一旋转扫描器的接触点重合，该第二旋转扫描器与第一扫描器旋转同步。第二扫描器将透射光束引导到光检测器。

2. 发明授权

US5986761A Laser-based inspection tool for disk defects and curvature 失效
标题翻译：用于磁盘缺陷和曲率的基于激光的检测工具
公开(公告)号：US5986761A
公开(公告)日：1999-11-16
申请号：US110925
申请日：1998-07-06
申请人： Linden Crawforth , Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Hal Jervis Rosen
发明人： Linden Crawforth , Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Hal Jervis Rosen
IPC分类号： G01B11/30 , G01N21/88
CPC分类号： G01B11/306 , G01N21/88
摘要： A laser-based inspection tool (LIT) for disks that allows simultaneous inspection of disk surfaces for defects and curvature. The laser beam is directed by a rotating scanner, such as a rotating polygon mirror, to the input of a telecentric lens assembly that provides an output beam parallel to its optical axis as the beam is being scanned. The output beam from the telecentric lens strikes the disk surface substantially perpendicularly. The beam is then reflected from the disk surface and passes back through a collection lens to the sensing surface of an optical detector. The detector outputs analog signals that represent the X and Y positions on the sensing surface where the reflected light beam is incident, which thus correspond to the slope of the disk surface at the point where the laser beam was incident. A mechanical disk lifter moves the disk in a plane parallel to the disk surface so that different scan lines can be generated on the disk surface. A processor, such as a personal computer, receives the output signals from the detector and calculates the slope values, and from the slope values, the curvature of the disk surface. A large number of points on each scan line are sampled, and a large number of scan lines are generated, so that the disk surface curvature can be calculated at various locations and over various ranges of the disk surface. The large number of sample points and the rapid calculation of slope values enables the shape of disk surface defects to be determined, which allows the disk defects to be classified as pits or bumps.
摘要翻译：用于磁盘的基于激光的检测工具（LIT），允许同时检查磁盘表面的缺陷和曲率。激光束由诸如旋转多面镜的旋转扫描器引导到远心透镜组件的输入端，当远射镜被扫描时，其提供平行于其光轴的输出光束。来自远心透镜的输出光束大致垂直地撞击盘表面。光束然后从盘表面反射并通过收集透镜返回到光学检测器的感测表面。检测器输出表示反射光束入射的感测表面上的X和Y位置的模拟信号，其因此对应于激光束入射点处的盘表面的斜率。机械盘式升降机使盘在平行于盘表面的平面内移动，从而可以在盘表面上产生不同的扫描线。诸如个人计算机的处理器从检测器接收输出信号并计算斜率值，并从斜率值计算出盘表面的曲率。对每个扫描线上的点数进行采样，并产生大量的扫描线，从而可以在各种位置和盘表面的各种范围内计算盘表面曲率。大量采样点和斜率值的快速计算可以确定磁盘表面缺陷的形状，从而可以将磁盘缺陷分类为凹坑或凸块。

3. 发明授权

US06624884B1 Surface inspection tool 失效
标题翻译：表面检测工具
公开(公告)号：US06624884B1
公开(公告)日：2003-09-23
申请号：US08840351
申请日：1997-04-28
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , Steven Meeks , Richard Sonningfeld
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , Steven Meeks , Richard Sonningfeld
IPC分类号： G01N2188
CPC分类号： G01N21/88
摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, light reflected from the surface at an angle slightly offset from perpendicular is routed through a telecentric lens to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration system periodically reflects the scanning beam back to a detector to form a reference signal for use in absolute reflectivity measurements.
摘要翻译：描述了一种用于检查平面的激光检测工具（LIT）。在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。在本发明的一个实施例中，从表面以从垂直方向稍微偏离的角度反射的光通过远心透镜被路由到检测器，该检测器将反射光束的强度转换为模拟信号。模拟信号被采样并数字化以产生像素数据。数据采集系统将像素数据顺序存储在缓冲器中。中值滤波器和导数分析可以应用于像素数据，以检测指示缺陷的偏差。可选的校准系统周期性地将扫描光束反射回检测器以形成用于绝对反射率测量的参考信号。

4. 发明授权

US5917589A Surface inspection tool 失效
标题翻译：表面检测工具
公开(公告)号：US5917589A
公开(公告)日：1999-06-29
申请号：US840339
申请日：1997-04-28
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
IPC分类号： G01N21/94 , G01N21/88
CPC分类号： G01N21/94
摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects.
摘要翻译：描述了一种用于检查平面的激光检测工具（LIT）。在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器，其将盘移动通过激光扫描线（即垂直于扫描线），以允许扫描盘的每一侧上的整个表面。从表面反射的光被路由到检测器，其将反射光束的强度转换成模拟信号。模拟信号被采样并数字化以产生像素数据。数据采集系统将像素数据顺序存储在缓冲器中。在进行数据采集的同时，为每个扫描行确定像素数据中的平面的边缘。应用掩码将缺陷检测仅指向磁盘的有意义的区域，同时数据采集正在进行。中值滤波器和导数分析可以应用于像素数据，以检测指示缺陷的偏差。

5. 发明授权

US5867261A Surface inspection tool 失效
标题翻译：表面检测工具
公开(公告)号：US5867261A
公开(公告)日：1999-02-02
申请号：US840352
申请日：1997-04-28
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
IPC分类号： G01N21/95 , G01N21/88
CPC分类号： G01N21/9506
摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration mirror is taught which is positioned to reflect substantially all of the incident beam during a segment of the scan line as the reflected calibration beam which is converted to an analog signal, sampled and digitized similarly to the reflected beam from the surface being inspected. By comparing the intensity of the calibration beam to the reflected beam the reflectivity of the surface can be measured.
摘要翻译：描述了一种用于检查平面的激光检测工具（LIT）。在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器，其将盘移动通过激光扫描线（即垂直于扫描线），以允许扫描盘的每一侧上的整个表面。从表面反射的光被路由到检测器，其将反射光束的强度转换成模拟信号。模拟信号被采样并数字化以产生像素数据。数据采集系统将像素数据顺序存储在缓冲器中。在进行数据采集的同时，为每个扫描行确定像素数据中的平面的边缘。应用掩码将缺陷检测仅指向磁盘的有意义的区域，同时数据采集正在进行。中值滤波器和导数分析可以应用于像素数据，以检测指示缺陷的偏差。可选的校准反射镜被定位成在扫描线的一段期间基本上反射所有入射光束，作为被反射的校准光束，该反射校准光束被转换成模拟信号，与来自被检测表面的反射光束类似地进行采样和数字化。通过比较校准光束与反射光束的强度，可以测量表面的反射率。

6. 发明授权

US6117620A Method of producing a calibration disk 失效
标题翻译：校准盘的制作方法
公开(公告)号：US6117620A
公开(公告)日：2000-09-12
申请号：US205667
申请日：1998-12-04
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , James Hammond Brannon
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , James Hammond Brannon
IPC分类号： G01N21/93 , G01N21/95 , G11B7/0037 , G11B7/26 , G03C5/16
CPC分类号： G01N21/93 , G01N21/9506 , G11B7/00375 , G11B7/26 , Y10S430/146
摘要： A method of making a calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results. The ring of overlapping bumps is preferably formed by rotating a disk substrate under a stationary pulsing laser beam.
摘要翻译：描述了一种制造用于检查平面的激光检测工具（LIT）的校准盘的方法。校准盘具有形成具有一个凸块的宽度的圆环的多个重叠凸块。凸起的圆形环形成了盘上已知宽度和位置的特征，其可用于调节一个或多个LIT以产生校准结果。优选地，通过在静止的脉冲激光束下旋转盘基片来形成重叠凸块的环。

7. 发明授权

US5969370A Surface inspection tool 失效
标题翻译：表面检测工具
公开(公告)号：US5969370A
公开(公告)日：1999-10-19
申请号：US840358
申请日：1997-04-28
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
IPC分类号： G01N21/88 , G11B7/0037 , G11B7/26
CPC分类号： G01N21/88 , G11B7/00375 , G11B7/26
摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, a disk is moved into an inspection subcompartment between a pair of air knives which blow partially ionized air onto the planar sides of the disk to remove loose particles adhering thereto. After the disk moves through the air knife streams, the two laser beams scan the two sides of the disk. Preferably the scan occurs after the air knives have been turned off and as the disk moves out of the inspection subcompartment. The subcompartment may optionally have an air source which forces air to flow out of the subcompartment to aid in maintaining a clean environment for inspection.
摘要翻译：描述了一种用于检查平面的激光检测工具（LIT）。在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。在本发明的一个实施例中，盘被移动到一对气刀之间的检查子舱中，所述气刀将部分电离空气吹送到盘的平面侧以除去附着在其上的松散颗粒。在磁盘移动通过气刀流之后，两个激光束扫描磁盘的两侧。优选地，扫描发生在气刀已经关闭之后并且当盘移出检查子舱室时。子舱可以可选地具有迫使空气流出子舱的空气源，以帮助保持清洁的环境以供检查。

8. 发明授权

US5933230A Surface inspection tool 失效
标题翻译：表面检测工具
公开(公告)号：US5933230A
公开(公告)日：1999-08-03
申请号：US840354
申请日：1997-04-28
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
IPC分类号： G01N21/88 , G01N21/94 , G01N21/00
CPC分类号： G01N21/94 , G01N21/8806
摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The choice of a polygon scanner is preferred, but other scanning means such as a galvonometer mirror could be used. A separate polygon scanner is used for each side of the disk. The polygons are arranged in a common plane, but rotate in opposite directions to reduce the inteference which might otherwise result when the beams pass through the central hole in the disk and impinge on the detection channel for the other side. Preferably the rotation of the polygons is synchonized and angularly offset so that the two beams are synchonized and offset. The rotating polygons may conveniently be included in a system which scans each of the two laser beams through a telecentric lens assembly onto the surface and which routes the reflected light which passes back through the telecentric lens and is reflected from the polygons to the detection component.
摘要翻译：描述了一种用于检查平面的激光检测工具（LIT）。在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。多边形扫描器的选择是优选的，但是可以使用诸如电流计镜之类的其它扫描装置。磁盘的每一侧都使用单独的多边形扫描器。多边形布置在公共平面中，但是沿相反方向旋转以减小当光束通过盘中的中心孔并且撞击到另一侧的检测通道时可能导致的干涉。优选地，多边形的旋转被同步并且成角度地偏移，使得两个光束被同步和偏移。旋转的多边形可以方便地包括在将两个激光束中的每一个通过远心透镜组件扫描到表面上并且将穿过远心透镜返回的反射光路由并从多边形反射到检测部件的系统中。

9. 发明授权

US6100971A Surface inspection tool 失效
标题翻译：表面检测工具
公开(公告)号：US6100971A
公开(公告)日：2000-08-08
申请号：US841037
申请日：1997-04-28
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
IPC分类号： G01N21/95 , G01N21/88
CPC分类号： G01N21/9506
摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. Although slightly offset the reflected beam is routed back through the telecentric lens and scanner which are used for the incident beam. Preferably an aperture mask is placed in the path of the reflected beam and the incident beam to limit the cone of scattered light. Since the incident and reflected beams are physically separated, there may be an aperture for each beam, but the two masks may be physically connected. The aperture masks may also be used for alignment adjustments of the beams.
摘要翻译：描述了一种用于检查平面的激光检测工具（LIT）。在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。在本发明的实施例中，入射光束以与垂直稍微偏移的角度被引导到要检查的表面上，使得反射光束与入射光束物理分离。虽然稍微偏移，但是反射光束通过用于入射光束的远心透镜和扫描仪返回。优选地，孔径掩模被放置在反射光束和入射光束的路径中以限制散射光的锥体。由于事件和反射光束在物理上是分开的，所以每个光束可能有孔径，但是两个掩模可以物理连接。光圈掩模也可用于光束的对准调整。

10. 发明授权

US5847823A Surface inspection tool 失效
标题翻译：表面检测工具
公开(公告)号：US5847823A
公开(公告)日：1998-12-08
申请号：US840355
申请日：1997-04-28
申请人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , James Hammond Brannon
发明人： Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen , James Hammond Brannon
IPC分类号： G01N21/93 , G01N21/95 , G11B7/0037 , G11B7/26 , G02B5/00 , G01N21/88
CPC分类号： G01N21/93 , G01N21/9506 , G11B7/00375 , G11B7/26 , Y10S430/146
摘要： A calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results.
摘要翻译：描述了用于检查平面的激光检测工具（LIT）的校准盘。校准盘具有形成具有一个凸块的宽度的圆环的多个重叠凸块。凸起的圆形环形成了盘上已知宽度和位置的特征，其可用于调节一个或多个LIT以产生校正结果。

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