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    • 4. 发明授权
    • Surface inspection tool
    • 表面检测工具
    • US5917589A
    • 1999-06-29
    • US840339
    • 1997-04-28
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • G01N21/94G01N21/88
    • G01N21/94
    • A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects.
    • 描述了一种用于检查平面的激光检测工具(LIT)。 在优选实施例中,LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器,其将盘移动通过激光扫描线(即垂直于扫描线),以允许扫描盘的每一侧上的整个表面。 从表面反射的光被路由到检测器,其将反射光束的强度转换成模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 在进行数据采集的同时,为每个扫描行确定像素数据中的平面的边缘。 应用掩码将缺陷检测仅指向磁盘的有意义的区域,同时数据采集正在进行。 中值滤波器和导数分析可以应用于像素数据,以检测指示缺陷的偏差。
    • 5. 发明授权
    • Surface inspection tool
    • 表面检测工具
    • US5867261A
    • 1999-02-02
    • US840352
    • 1997-04-28
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • G01N21/95G01N21/88
    • G01N21/9506
    • A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The LIT uses a mechanical lifter which moves the disk through the laser scan lines (i.e. perpendicular to the scan lines) to allow the entire surface on each side of the disk to be scanned. The light reflected from the surface is routed to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. The edges of the planar surface in the pixel data are determined for each scan line while data acquisition is in progress. A mask is applied to direct the defect detection only to meaningful areas of the disk while data acquisition is in progress. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration mirror is taught which is positioned to reflect substantially all of the incident beam during a segment of the scan line as the reflected calibration beam which is converted to an analog signal, sampled and digitized similarly to the reflected beam from the surface being inspected. By comparing the intensity of the calibration beam to the reflected beam the reflectivity of the surface can be measured.
    • 描述了一种用于检查平面的激光检测工具(LIT)。 在优选实施例中,LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 LIT使用机械升降器,其将盘移动通过激光扫描线(即垂直于扫描线),以允许扫描盘的每一侧上的整个表面。 从表面反射的光被路由到检测器,其将反射光束的强度转换成模拟信号。 模拟信号被采样并数字化以产生像素数据。 数据采集​​系统将像素数据顺序存储在缓冲器中。 在进行数据采集的同时,为每个扫描行确定像素数据中的平面的边缘。 应用掩码将缺陷检测仅指向磁盘的有意义的区域,同时数据采集正在进行。 中值滤波器和导数分析可以应用于像素数据,以检测指示缺陷的偏差。 可选的校准反射镜被定位成在扫描线的一段期间基本上反射所有入射光束,作为被反射的校准光束,该反射校准光束被转换成模拟信号,与来自被检测表面的反射光束类似地进行采样和数字化 。 通过比较校准光束与反射光束的强度,可以测量表面的反射率。
    • 7. 发明授权
    • Surface inspection tool
    • 表面检测工具
    • US5933230A
    • 1999-08-03
    • US840354
    • 1997-04-28
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • G01N21/88G01N21/94G01N21/00
    • G01N21/94G01N21/8806
    • A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. The choice of a polygon scanner is preferred, but other scanning means such as a galvonometer mirror could be used. A separate polygon scanner is used for each side of the disk. The polygons are arranged in a common plane, but rotate in opposite directions to reduce the inteference which might otherwise result when the beams pass through the central hole in the disk and impinge on the detection channel for the other side. Preferably the rotation of the polygons is synchonized and angularly offset so that the two beams are synchonized and offset. The rotating polygons may conveniently be included in a system which scans each of the two laser beams through a telecentric lens assembly onto the surface and which routes the reflected light which passes back through the telecentric lens and is reflected from the polygons to the detection component.
    • 描述了一种用于检查平面的激光检测工具(LIT)。 在优选实施例中,LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 多边形扫描器的选择是优选的,但是可以使用诸如电流计镜之类的其它扫描装置。 磁盘的每一侧都使用单独的多边形扫描器。 多边形布置在公共平面中,但是沿相反方向旋转以减小当光束通过盘中的中心孔并且撞击到另一侧的检测通道时可能导致的干涉。 优选地,多边形的旋转被同步并且成角度地偏移,使得两个光束被同步和偏移。 旋转的多边形可以方便地包括在将两个激光束中的每一个通过远心透镜组件扫描到表面上并且将穿过远心透镜返回的反射光路由并从多边形反射到检测部件的系统中。
    • 8. 发明授权
    • Surface inspection tool
    • 表面检测工具
    • US6100971A
    • 2000-08-08
    • US841037
    • 1997-04-28
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • Wayne Isami ImainoAnthony Juliana, Jr.Milton Russell LattaCharles H. LeeWai Cheung LeungHal J. Rosen
    • G01N21/95G01N21/88
    • G01N21/9506
    • A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. Although slightly offset the reflected beam is routed back through the telecentric lens and scanner which are used for the incident beam. Preferably an aperture mask is placed in the path of the reflected beam and the incident beam to limit the cone of scattered light. Since the incident and reflected beams are physically separated, there may be an aperture for each beam, but the two masks may be physically connected. The aperture masks may also be used for alignment adjustments of the beams.
    • 描述了一种用于检查平面的激光检测工具(LIT)。 在优选实施例中,LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的实施例中,入射光束以与垂直稍微偏移的角度被引导到要检查的表面上,使得反射光束与入射光束物理分离。 虽然稍微偏移,但是反射光束通过用于入射光束的远心透镜和扫描仪返回。 优选地,孔径掩模被放置在反射光束和入射光束的路径中以限制散射光的锥体。 由于事件和反射光束在物理上是分开的,所以每个光束可能有孔径,但是两个掩模可以物理连接。 光圈掩模也可用于光束的对准调整。