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1. 发明授权

US07737469B2 Semiconductor device having superjunction structure formed of p-type and n-type pillar regions 失效
标题翻译：具有由p型和n型柱状区域形成的超结构结构的半导体装置
公开(公告)号：US07737469B2
公开(公告)日：2010-06-15
申请号：US11748869
申请日：2007-05-15
申请人： Wataru Saito , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta , Wataru Sekine
发明人： Wataru Saito , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta , Wataru Sekine
IPC分类号： H01L29/74
CPC分类号： H01L29/872 , H01L29/0619 , H01L29/0623 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/402 , H01L29/404 , H01L29/41741 , H01L29/7395 , H01L29/7397 , H01L29/7722 , H01L29/7806 , H01L29/7811 , H01L29/8611
摘要： A semiconductor device includes: a semiconductor layer of a first conductivity type; a first semiconductor pillar region of the first conductivity type provided on a major surface of the semiconductor layer; a second semiconductor pillar region of a second conductivity type provided adjacent to the first semiconductor pillar region on the major surface of the semiconductor layer, the second semiconductor pillar region forming a periodic arrangement structure substantially parallel to the major surface of the semiconductor layer together with the first semiconductor pillar region; a first main electrode; a first semiconductor region of the second conductivity type; a second semiconductor region of the first conductivity type; a second main electrode; a control electrode; and a high-resistance semiconductor layer provided on the semiconductor layer in an edge termination section surrounding the first semiconductor pillar region and the second semiconductor pillar region. The high-resistance semiconductor layer has a lower dopant concentration than the first semiconductor pillar region. A boundary region is provided between a device central region and the edge termination section. The first semiconductor pillar region and the second semiconductor pillar region adjacent to the high-resistance semiconductor layer in the boundary region have a depth decreasing stepwise toward the edge termination section.
摘要翻译：半导体器件包括：第一导电类型的半导体层; 设置在半导体层的主表面上的第一导电类型的第一半导体柱区域; 第二导电类型的第二半导体柱区域，与半导体层的主表面上的第一半导体柱区域相邻设置，第二半导体柱区域形成基本上平行于半导体层的主表面的周期性排列结构以及第一半导体柱区域; 第一主电极; 第二导电类型的第一半导体区域; 第一导电类型的第二半导体区域; 第二主电极; 控制电极; 以及设置在包围第一半导体柱区域和第二半导体柱区域的边缘终端部分的半导体层上的高电阻半导体层。高电阻半导体层的掺杂浓度低于第一半导体柱区域。边界区域设置在设备中心区域和边缘终端部分之间。边界区域中与高电阻半导体层相邻的第一半导体柱区域和第二半导体柱区域具有沿着边缘终止部分逐步减小的深度。

2. 发明申请

US20100230750A1 POWER SEMICONDUCTOR DEVICE 有权
标题翻译：功率半导体器件
公开(公告)号：US20100230750A1
公开(公告)日：2010-09-16
申请号：US12789008
申请日：2010-05-27
申请人： Wataru SAITO , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
发明人： Wataru SAITO , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
IPC分类号： H01L29/78
CPC分类号： H01L29/7811 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/1095 , H01L29/66712 , H01L2924/0002 , H01L2924/00
摘要： A power semiconductor device includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer of the first conductivity type and a third semiconductor layer of a second conductivity type formed on the first semiconductor layer and alternately arranged along at least one direction parallel to a surface of the first semiconductor layer; a first main electrode; a fourth semiconductor layer of the second conductivity type selectively formed in a surface of the second semiconductor layer and a surface of the third semiconductor layer; a fifth semiconductor layer of the first conductivity type selectively formed in a surface of the fourth semiconductor layer; a second main electrode; and a control electrode. At least one of the second and the third semiconductor layers has a dopant concentration profile along the one direction, the dopant concentration profile having a local minimum at a position except both ends thereof.
摘要翻译：功率半导体器件包括：第一导电类型的第一半导体层; 第一导电类型的第二半导体层和形成在第一半导体层上的第二导电类型的第三半导体层，并且沿着平行于第一半导体层的表面的至少一个方向交替布置; 第一主电极; 选择性地形成在第二半导体层的表面和第三半导体层的表面上的第二导电类型的第四半导体层; 选择性地形成在第四半导体层的表面中的第一导电类型的第五半导体层; 第二主电极; 和控制电极。第二和第三半导体层中的至少一个具有沿着一个方向的掺杂剂浓度分布，掺杂剂浓度分布在其两端以外的位置处具有局部最小值。

3. 发明申请

US20080135929A1 POWER SEMICONDUCTOR DEVICE 有权
标题翻译：功率半导体器件
公开(公告)号：US20080135929A1
公开(公告)日：2008-06-12
申请号：US11933869
申请日：2007-11-01
申请人： Wataru SAITO , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
发明人： Wataru SAITO , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
IPC分类号： H01L29/78
CPC分类号： H01L29/7802 , H01L29/0634 , H01L29/0696 , H01L29/1095 , H01L29/402 , H01L29/41741 , H01L29/41766 , H01L29/7806 , H01L29/7811 , H01L29/7813
摘要： A power semiconductor device includes: a semiconductor substrate; a gate insulating film; a control electrode insulated from the semiconductor substrate by the gate insulating film; a first main electrode provided on a lower surface side of the semiconductor substrate; and a second main electrode provided on an upper surface side of the semiconductor substrate. The semiconductor substrate includes: a first first-conductivity-type semiconductor layer with its lower surface connected to the first main electrode; a second first-conductivity-type semiconductor layer and a third second-conductivity-type semiconductor layer formed on the first first-conductivity-type semiconductor layer and alternately arranged parallel to the upper surface of the semiconductor substrate; a trench formed in a directly overlying region of the third second-conductivity-type semiconductor layer, with part of the second main electrode buried in the trench; a fourth second-conductivity-type semiconductor layer selectively formed in a surface of the second first-conductivity-type semiconductor layer and connected to the second main electrode; a fifth first-conductivity-type semiconductor layer selectively formed in a surface of the fourth second-conductivity-type semiconductor layer and connected to the second main electrode; and a sixth second-conductivity-type semiconductor layer formed at a bottom of the trench and connected to the second main electrode. Impurity concentration in the sixth second-conductivity-type semiconductor layer is higher than impurity concentration in the fourth second-conductivity-type semiconductor layer, and lower surface of the sixth second-conductivity-type semiconductor layer is located below lower surface of the fourth second-conductivity-type semiconductor layer.
摘要翻译：功率半导体器件包括：半导体衬底; 栅极绝缘膜; 通过栅极绝缘膜与半导体衬底绝缘的控制电极; 设置在所述半导体基板的下表面侧的第一主电极; 以及设置在半导体衬底的上表面侧的第二主电极。半导体衬底包括：第一第一导电型半导体层，其下表面连接到第一主电极; 形成在第一第一导电型半导体层上的第二第一导电型半导体层和第三第二导电型半导体层，并且交替地平行于半导体基板的上表面布置; 形成在所述第三第二导电型半导体层的直接覆盖区域中的沟槽，其中所述第二主电极的一部分埋在所述沟槽中; 选择性地形成在所述第二第一导电型半导体层的表面并连接到所述第二主电极的第四第二导电型半导体层; 第五第一导电型半导体层，选择性地形成在所述第四第二导电型半导体层的表面上，并连接到所述第二主电极; 以及形成在所述沟槽的底部并连接到所述第二主电极的第六第二导电型半导体层。第六第二导电型半导体层中的杂质浓度高于第四第二导电型半导体层中的杂质浓度，第六第二导电型半导体层的下表面位于第四第二导电型半导体层的下表面下方导电型半导体层。

4. 发明申请

US20070272979A1 SEMICONDUCTOR DEVICE 失效
标题翻译：半导体器件
公开(公告)号：US20070272979A1
公开(公告)日：2007-11-29
申请号：US11748869
申请日：2007-05-15
申请人： Wataru SAITO , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta , Wataru Sekine
发明人： Wataru SAITO , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta , Wataru Sekine
IPC分类号： H01L29/76
CPC分类号： H01L29/872 , H01L29/0619 , H01L29/0623 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/402 , H01L29/404 , H01L29/41741 , H01L29/7395 , H01L29/7397 , H01L29/7722 , H01L29/7806 , H01L29/7811 , H01L29/8611
摘要： A semiconductor device includes: a semiconductor layer of a first conductivity type; a first semiconductor pillar region of the first conductivity type provided on a major surface of the semiconductor layer; a second semiconductor pillar region of a second conductivity type provided adjacent to the first semiconductor pillar region on the major surface of the semiconductor layer, the second semiconductor pillar region forming a periodic arrangement structure substantially parallel to the major surface of the semiconductor layer together with the first semiconductor pillar region; a first main electrode; a first semiconductor region of the second conductivity type; a second semiconductor region of the first conductivity type; a second main electrode; a control electrode; and a high-resistance semiconductor layer provided on the semiconductor layer in an edge termination section surrounding the first semiconductor pillar region and the second semiconductor pillar region. The high-resistance semiconductor layer has a lower dopant concentration than the first semiconductor pillar region. A boundary region is provided between a device central region and the edge termination section. The first semiconductor pillar region and the second semiconductor pillar region adjacent to the high-resistance semiconductor layer in the boundary region have a depth decreasing stepwise toward the edge termination section.
摘要翻译：半导体器件包括：第一导电类型的半导体层; 设置在半导体层的主表面上的第一导电类型的第一半导体柱区域; 第二导电类型的第二半导体柱区域，与半导体层的主表面上的第一半导体柱区域相邻设置，第二半导体柱区域形成基本上平行于半导体层的主表面的周期性排列结构以及第一半导体柱区域; 第一主电极; 第二导电类型的第一半导体区域; 第一导电类型的第二半导体区域; 第二主电极; 控制电极; 以及设置在包围第一半导体柱区域和第二半导体柱区域的边缘终端部分的半导体层上的高电阻半导体层。高电阻半导体层的掺杂浓度低于第一半导体柱区域。边界区域设置在设备中心区域和边缘终端部分之间。边界区域中与高电阻半导体层相邻的第一半导体柱区域和第二半导体柱区域具有沿着边缘终止部分逐步减小的深度。

5. 发明授权

US08907420B2 Power semiconductor device 有权
标题翻译：功率半导体器件
公开(公告)号：US08907420B2
公开(公告)日：2014-12-09
申请号：US12789008
申请日：2010-05-27
申请人： Wataru Saito , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
发明人： Wataru Saito , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
IPC分类号： H01L29/66 , H01L29/78 , H01L29/94 , H01L29/10 , H01L29/08 , H01L29/06
CPC分类号： H01L29/7811 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/1095 , H01L29/66712 , H01L2924/0002 , H01L2924/00
摘要： A power semiconductor device includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer of the first conductivity type and a third semiconductor layer of a second conductivity type formed on the first semiconductor layer and alternately arranged along at least one direction parallel to a surface of the first semiconductor layer; a first main electrode; a fourth semiconductor layer of the second conductivity type selectively formed in a surface of the second semiconductor layer and a surface of the third semiconductor layer; a fifth semiconductor layer of the first conductivity type selectively formed in a surface of the fourth semiconductor layer; a second main electrode; and a control electrode. At least one of the second and the third semiconductor layers has a dopant concentration profile along the one direction, the dopant concentration profile having a local minimum at a position except both ends thereof.
摘要翻译：功率半导体器件包括：第一导电类型的第一半导体层; 第一导电类型的第二半导体层和形成在第一半导体层上的第二导电类型的第三半导体层，并且沿着平行于第一半导体层的表面的至少一个方向交替布置; 第一主电极; 选择性地形成在第二半导体层的表面和第三半导体层的表面上的第二导电类型的第四半导体层; 选择性地形成在第四半导体层的表面中的第一导电类型的第五半导体层; 第二主电极; 和控制电极。第二和第三半导体层中的至少一个具有沿着一个方向的掺杂剂浓度分布，掺杂剂浓度分布在其两端以外的位置处具有局部最小值。

6. 发明申请

US20080135926A1 SEMICONDUCTOR DEVICE 有权
标题翻译：半导体器件
公开(公告)号：US20080135926A1
公开(公告)日：2008-06-12
申请号：US11936412
申请日：2007-11-07
申请人： Syotaro Ono , Wataru Saito , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
发明人： Syotaro Ono , Wataru Saito , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
IPC分类号： H01L27/06
CPC分类号： H01L29/7811 , H01L29/0615 , H01L29/0634 , H01L29/0696 , H01L29/1095
摘要： A semiconductor device includes: a drift layer having a superjunction structure; a semiconductor base layer selectively formed in a part of one surface of the drift layer; a first RESURF layer formed around a region having the semiconductor base layer formed thereon; a second semiconductor RESURF layer of a conductivity type which is opposite to a conductivity type of the first semiconductor RESURF layer; a first main electrode connected to a first surface of the drift layer; and a second main electrode connected to a second surface of the drift layer. The first RESURF layer is connected to the semiconductor base layer. The second semiconductor RESURF layer is in contact with the first semiconductor RESURF layer.
摘要翻译：一种半导体器件包括：具有超结构结构的漂移层; 选择性地形成在所述漂移层的一个表面的一部分中的半导体基层; 在其上形成有半导体基底层的区域周围形成的第一RESURF层; 与第一半导体RESURF层的导电类型相反的导电类型的第二半导体RESURF层; 连接到所述漂移层的第一表面的第一主电极; 以及连接到漂移层的第二表面的第二主电极。第一RESURF层连接到半导体基层。第二半导体RESURF层与第一半导体RESURF层接触。

7. 发明申请

US20070267664A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：半导体器件及其制造方法
公开(公告)号：US20070267664A1
公开(公告)日：2007-11-22
申请号：US11751244
申请日：2007-05-21
申请人： Yasuto SUMI , Masakatsu Takashita , Masaru Izumisawa , Hiroshi Ohta , Wataru Saito , Syotaro Ono
发明人： Yasuto SUMI , Masakatsu Takashita , Masaru Izumisawa , Hiroshi Ohta , Wataru Saito , Syotaro Ono
IPC分类号： H01L29/76
CPC分类号： H01L29/7802 , H01L21/26586 , H01L23/544 , H01L29/0615 , H01L29/0634 , H01L29/0878 , H01L29/1095 , H01L29/402 , H01L29/41741 , H01L29/7811 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device according to the present invention comprises a first semiconductor layer of the first conductivity type. A pillar layer includes first semiconductor pillars of the first conductivity type and second semiconductor pillars of the second conductivity type arranged periodically and alternately on the first semiconductor layer. The first and second semiconductor pillar layer have a cross section in the shape of stripes in a planar direction. There is a semiconductor base layer of the second conductivity type selectively formed in a surface of the second semiconductor pillar, and a semiconductor diffusion layer of the first conductivity type selectively formed in a surface of the semiconductor base layer. The longitudinal direction of the shape of stripes is made almost same as the direction of pattern shift caused in the first semiconductor layer.
摘要翻译：根据本发明的半导体器件包括第一导电类型的第一半导体层。柱层包括第一导电类型的第一半导体柱和第二导电类型的第二半导体柱，其周期性和交替地布置在第一半导体层上。第一和第二半导体柱层在平面方向上具有条状的横截面。存在选择性地形成在第二半导体柱的表面中的第二导电类型的半导体基底层和选择性地形成在半导体基底层的表面中的第一导电类型的半导体扩散层。条纹形状的纵向方向与第一半导体层中引起的图案偏移的方向几乎相同。

8. 发明授权

US07622771B2 Semiconductor apparatus 失效
标题翻译：半导体装置
公开(公告)号：US07622771B2
公开(公告)日：2009-11-24
申请号：US12123072
申请日：2008-05-19
申请人： Syotaro Ono , Wataru Saito , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta , Wataru Sekine
发明人： Syotaro Ono , Wataru Saito , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta , Wataru Sekine
IPC分类号： H01L31/119 , H01L21/336
CPC分类号： H01L29/7811 , H01L29/0634 , H01L29/0638 , H01L29/0878 , H01L29/7395 , H01L29/861 , H01L29/868 , H01L29/872
摘要： A semiconductor apparatus includes a first semiconductor layer, a second semiconductor layer provided on a major surface of the first semiconductor layer, a third semiconductor layer provided on the major surface and being adjacent to the second semiconductor layer, a termination semiconductor layer provided on the major surface of the first semiconductor layer in a termination region outside the device region, a channel stop layer, and a channel stop electrode. The channel stop layer is provided in contact with the termination semiconductor layer on the major surface of the first semiconductor layer in an outermost peripheral portion outside the termination semiconductor layer and has a higher impurity concentration than the termination semiconductor layer. The channel stop electrode is provided on at least part of a surface of the channel stop layer and projects toward the termination semiconductor layer beyond at least a superficial portion of the channel stop layer.
摘要翻译：半导体装置包括第一半导体层，设置在第一半导体层的主表面上的第二半导体层，设置在主表面上并与第二半导体层相邻的第三半导体层，设置在主体上的端接半导体层在器件区域外的终端区域中的第一半导体层的表面，沟道阻挡层和沟道停止电极。沟道阻挡层设置成与终端半导体层外部的最外周部分中的第一半导体层的主表面上的端接半导体层接触，并且具有比端接半导体层更高的杂质浓度。通道阻挡电极设置在通道阻挡层的表面的至少一部分上，并且朝向端子半导体层突出超过通道阻挡层的至少表面部分。

9. 发明申请

US20070272977A1 POWER SEMICONDUCTOR DEVICE 失效
标题翻译：功率半导体器件
公开(公告)号：US20070272977A1
公开(公告)日：2007-11-29
申请号：US11680912
申请日：2007-03-01
申请人： Wataru Saito , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
发明人： Wataru Saito , Syotaro Ono , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
IPC分类号： H01L29/78
CPC分类号： H01L29/7811 , H01L29/0634 , H01L29/0696 , H01L29/0878 , H01L29/1095 , H01L29/66712 , H01L2924/0002 , H01L2924/00
摘要： A power semiconductor device includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer of the first conductivity type and a third semiconductor layer of a second conductivity type formed on the first semiconductor layer and alternately arranged along at least one direction parallel to a surface of the first semiconductor layer; a first main electrode; a fourth semiconductor layer of the second conductivity type selectively formed in a surface of the second semiconductor layer and a surface of the third semiconductor layer; a fifth semiconductor layer of the first conductivity type selectively formed in a surface of the fourth semiconductor layer; a second main electrode; and a control electrode. At least one of the second and the third semiconductor layers has a dopant concentration profile along the one direction, the dopant concentration profile having a local minimum at a position except both ends thereof.
摘要翻译：功率半导体器件包括：第一导电类型的第一半导体层; 第一导电类型的第二半导体层和形成在第一半导体层上的第二导电类型的第三半导体层，并且沿着平行于第一半导体层的表面的至少一个方向交替布置; 第一主电极; 选择性地形成在第二半导体层的表面和第三半导体层的表面上的第二导电类型的第四半导体层; 选择性地形成在第四半导体层的表面中的第一导电类型的第五半导体层; 第二主电极; 和控制电极。第二和第三半导体层中的至少一个具有沿着一个方向的掺杂剂浓度分布，掺杂剂浓度分布在其两端以外的位置处具有局部最小值。

10. 发明授权

US08227854B2 Semiconductor device having first and second resurf layers 有权
标题翻译：具有第一和第二复层的半导体器件
公开(公告)号：US08227854B2
公开(公告)日：2012-07-24
申请号：US11936412
申请日：2007-11-07
申请人： Syotaro Ono , Wataru Saito , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
发明人： Syotaro Ono , Wataru Saito , Masakatsu Takashita , Yasuto Sumi , Masaru Izumisawa , Hiroshi Ohta
IPC分类号： H01L29/66
CPC分类号： H01L29/7811 , H01L29/0615 , H01L29/0634 , H01L29/0696 , H01L29/1095
摘要： A semiconductor device includes: a drift layer having a superjunction structure; a semiconductor base layer selectively formed in a part of one surface of the drift layer; a first RESURF layer formed around a region having the semiconductor base layer formed thereon; a second semiconductor RESURF layer of a conductivity type which is opposite to a conductivity type of the first semiconductor RESURF layer; a first main electrode connected to a first surface of the drift layer; and a second main electrode connected to a second surface of the drift layer. The first RESURF layer is connected to the semiconductor base layer. The second semiconductor RESURF layer is in contact with the first semiconductor RESURF layer.
摘要翻译：一种半导体器件包括：具有超结构结构的漂移层; 选择性地形成在所述漂移层的一个表面的一部分中的半导体基层; 在其上形成有半导体基底层的区域周围形成的第一RESURF层; 与第一半导体RESURF层的导电类型相反的导电类型的第二半导体RESURF层; 连接到所述漂移层的第一表面的第一主电极; 以及连接到漂移层的第二表面的第二主电极。第一RESURF层连接到半导体基层。第二半导体RESURF层与第一半导体RESURF层接触。

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