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    • 2. 发明授权
    • Thin film resistor and dummy fill structure and method to improve stability and reduce self-heating
    • 薄膜电阻和虚拟填充结构和方法,以提高稳定性和减少自热
    • US07403094B2
    • 2008-07-22
    • US11103203
    • 2005-04-11
    • Eric W. BeachWalter B. MeinelPhilipp Steinmann
    • Eric W. BeachWalter B. MeinelPhilipp Steinmann
    • H01C1/012
    • H01L27/016H01L23/5228H01L28/20H01L2924/0002H01L2924/00
    • An integrated circuit thin film resistor structure includes a first dielectric layer (18A) disposed on a semiconductor layer (16), a first dummy fill layer (9A) disposed on the first dielectric layer (18B), a second dielectric layer (18C) disposed on the first dummy fill layer (9A), the second dielectric layer (18B) having a first planar surface (18-3), a first thin film resistor (2) disposed on the first planar surface (18-3) over the first dummy fill layer (9A). A first metal interconnect layer (22A,B) includes a first portion (22A) contacting a first head portion of the thin film resistor (2). A third dielectric layer (21) is disposed on the thin film resistor (2) and the first metal interconnect layer (22A,B). Preferably, the first thin film resistor (2) is symmetrically aligned with the first dummy fill layer (9A). In the described embodiments, the first dummy fill layer is composed of metal (integrated circuit metallization).
    • 一种集成电路薄膜电阻器结构,包括设置在半导体层(16)上的第一介电层(18A),设置在第一介电层(18B)上的第一虚拟填充层(9A)),第二介电层 18A),所述第二电介质层(18B)具有第一平坦表面(18-3),第一薄膜电阻器(2)设置在所述第一平坦表面(18)上,所述第一平坦表面 3)在第一虚拟填充层(9A)上。 第一金属互连层(22A,B)包括接触薄膜电阻器(2)的第一头部的第一部分(22A)。 第三电介质层(21)设置在薄膜电阻器(2)和第一金属互连层(22A,B)上。 优选地,第一薄膜电阻器(2)与第一虚拟填充层(9A)对称地对准。 在所描述的实施例中,第一虚拟填充层由金属(集成电路金属化)组成。
    • 3. 发明申请
    • ON-CHIP CALIBRATION SYSTEM AND METHOD FOR INFRARED SENSOR
    • 用于红外传感器的片上校准系统和方法
    • US20120138800A1
    • 2012-06-07
    • US13396408
    • 2012-02-14
    • Walter B. MeinelKalin V. Lazarov
    • Walter B. MeinelKalin V. Lazarov
    • G01J5/22H01L21/66
    • G01J5/12G01J5/22G01J2005/0048
    • A radiation sensor includes an integrated circuit radiation sensor chip (1A) including first (7) and second (8) thermopile junctions connected in series to form a thermopile (7,8) within a dielectric stack (3). The first thermopile junction (7) is insulated from a substrate (2) of the chip. A resistive heater (6) in the dielectric stack for heating the first thermopile junction is coupled to a calibration circuit (67) for calibrating responsivity of the thermopile (7,8). The calibration circuit causes a current flow in the heater and multiplies the current by a resulting voltage across the heater to determine power dissipation. A resulting thermoelectric voltage (Vout) of the thermopile (7,8) is divided by the power to provide the responsivity of the sensor.
    • 辐射传感器包括集成电路辐射传感器芯片(1A),其包括串联连接的第一(7)和第二(8)热电堆接头,以在电介质叠层(3)内形成热电堆(7,8)。 第一热电堆结(7)与芯片的基片(2)绝缘。 用于加热第一热电堆结的电介质堆叠中的电阻加热器(6)耦合到用于校准热电堆(7,8)的响应度的校准电路(67)。 校准电路导致加热器中的电流流动,并将电流乘以加热器两端的所得电压,以确定功率耗散。 热电堆(7,8)的所得热电电压(Vout)除以功率以提供传感器的响应度。
    • 5. 发明授权
    • CMOS comparator output stage and method
    • CMOS比较器输出级和方法
    • US06819148B2
    • 2004-11-16
    • US10201816
    • 2002-07-23
    • Vadim V. IvanovShoubao YanWalter B. Meinel
    • Vadim V. IvanovShoubao YanWalter B. Meinel
    • H03K300
    • H03K17/08122H03K19/0013H03K2217/0036
    • A CMOS circuit including a P-channel pull-up transistor (MP) and an N-channel pull-down transistor (MN) includes a first feedback circuit (6) producing a first delayed signal, (V7) on the gate of the pull-down transistor (MN) to turn on the pull-down transistor (MN) a first predetermined amount of time after the pull-up transistor (MP) is turned completely off so as to prevent any shoot-through current from flowing through the pull-up transistor (MP) and the pull-down transistor (MN) and a second feedback circuit (4) producing a second delayed signal (V5) on the gate of the pull-up transistor (MP) to turn on the pull-up transistor (MP) a second predetermined amount of time after the pull-down transistor (MN) is turned completely off so as to prevent any shoot-through current from flowing through the pull-up transistor (MP) and the pull-down transistor (MN).
    • 包括P沟道上拉晶体管(MP)和N沟道下拉晶体管(MN)的CMOS电路包括产生第一延迟信号的第一反馈电路(6),在栅极的栅极上产生(V7) 降低晶体管(MN),以在上拉晶体管(MP)完全关断之后,将下拉晶体管(MN)导通第一预定量的时间,以防止任何直通电流流过拉 (MP)和下拉晶体管(MN)和第二反馈电路(4),在上拉晶体管(MP)的栅极上产生第二延迟信号(V5),以接通上拉电阻 晶体管(MP)在下拉晶体管(MN)完全关断之后的第二预定量的时间,以防止任何直通电流流过上拉晶体管(MP)和下拉晶体管( MN)。
    • 6. 发明授权
    • Integrated photodiode/transimpedance amplifier
    • 集成光电二极管/跨阻放大器
    • US5592124A
    • 1997-01-07
    • US494413
    • 1995-06-26
    • Edward MullinsRodney T. BurtWalter B. MeinelR. Mark Stitt, II
    • Edward MullinsRodney T. BurtWalter B. MeinelR. Mark Stitt, II
    • H03F1/08H03F3/08
    • H03F1/08H03F3/08
    • An integrated circuit photodetector includes a transimpedance amplifier including a differential amplifier stage with PNP emitter-coupled transistors and a PNP input transistor which are biased only by base currents of the emitter-coupled transistors, to achieve low input bias current. Low noise operation is achieved by bypass capacitors coupled between the bases and emitters of the input transistors, respectively. A constant current source supplies a current which develops a small pedestal voltage across a resistor to bias the non-inverting input of the transimpedance amplifier so as to avoid nonlinear amplification of low level light signals. A positively biased N-type guard tub surrounds the photodetector, which is formed in a junction-isolated N region on a P substrate, to collect electrons generated in the substrate by deep-penetrating IR light to prevent them from causing amplification errors. In one embodiment, a feedback network includes a resistor connected between the output of a buffer driven by the transimpedance amplifier and an inverting input thereof, and a capacitor connected between the output and inverting input of the transimpedance amplifier to provide low noise, fast settling operation.
    • 集成电路光电检测器包括跨阻抗放大器,其包括具有PNP发射极耦合晶体管的差分放大器级和仅由发射极耦合晶体管的基极电流偏置的PNP输入晶体管,以实现低输入偏置电流。 分别通过耦合在输入晶体管的基极和发射极之间的旁路电容来实现低噪声操作。 恒流源提供电流,该电流在电阻器两端产生小的基座电压,以偏置跨阻放大器的非反相输入,以避免低电平光信号的非线性放大。 正偏置N型保护桶围绕形成在P基板上的结隔离N区域中的光电检测器,以通过深穿透IR光收集在衬底中产生的电子,以防止它们引起放大误差。 在一个实施例中,反馈网络包括连接在由跨阻抗放大器驱动的缓冲器的输出与其反相输入之间的电阻器,以及连接在跨阻放大器的输出和反相输入端之间以提供低噪声,快速稳定操作 。
    • 9. 发明授权
    • Heated air mass WCSP package and method for accelerometer
    • 加热空气质量WCSP封装及加速度计方法
    • US08607631B2
    • 2013-12-17
    • US13066746
    • 2011-04-22
    • Walter B. MeinelKalin V. Lazarov
    • Walter B. MeinelKalin V. Lazarov
    • G01P15/00G01P15/08
    • G01P15/008G01P5/18
    • An inertial sensor (16) includes a differential thermocouple (13) including first (4A) and second (4B) metal traces, a poly trace (6) with a first end connected to a first end of the first metal trace to form a first (−) thermocouple junction and a second end connected to a first end of the second metal trace to form a second (+) thermocouple junction. A gas mass (10) located symmetrically with respect to the thermocouple junctions is heated by a heater (8). Acceleration or tilting of the sensor shifts the relative location of the gas mass relative to the thermocouple junctions, causing differential heating thereof and generation of a corresponding thermocouple output signal.
    • 惯性传感器(16)包括包括第一(4A)和第二(4B)金属迹线的差分热电偶(13),多迹线(6),其第一端连接到第一金属迹线的第一端,以形成第一 ( - )热电偶结,并且第二端连接到第二金属迹线的第一端以形成第二(+)热电偶结。 通过加热器(8)加热位于热电偶接头对称的气体(10)。 传感器的加速或倾斜使气体质量体的相对位置相对于热电偶接头移位,导致其不同的加热并产生相应的热电偶输出信号。