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    • 9. 发明申请
    • APPARATUS, METHOD AND COMPUTER-READABLE MEDIUM FOR TESTING A PANEL OF INTERFEROMETRIC MODULATORS
    • 用于测试干涉仪调制器面板的装置,方法和计算机可读介质
    • WO2010008759A2
    • 2010-01-21
    • PCT/US2009/047847
    • 2009-06-18
    • QUALCOMM MEMS TECHNOLOGIES, INC.NACHMAN, RamezCHEN, LeiYU, Tao
    • NACHMAN, RamezCHEN, LeiYU, Tao
    • G01R27/28G01R31/14
    • G02B26/001B81C99/0045G01R31/302
    • In some embodiments, each interferometric modulator has a stiction threshold voltage. If a voltage above the stiction threshold voltage is applied to the interferometric modulator, the interferometric modulator enters a stiction state permanently, i.e., becomes "stuck," and the interferometric modulator becomes inoperable. Disclosed are apparatuses, methods and computer-readable media for testing a panel of interferometric modulators. A ramped voltage waveform is applied to a plurality of interferometric modulators of the panel. In response to applying the ramped voltage, the stiction threshold voltage is identified. At or above this voltage, the number of stuck interferometric modulators in the panel reaches or exceeds a first threshold number, for example, 50% of the total number of the interferometric modulators constituting the panel. The embodiments can be used to establish stiction benchmark for panel manufacturing processes, to collect data for generating statistical distribution, etc.
    • 在一些实施例中,每个干涉式调制器具有静态阈值电压。 如果高于静态阈值电压的电压被施加到干涉式调制器,则干涉式调制器永久地进入静态状态,即变得“卡住”,并且干涉式调制器变得不可操作。 公开了用于测试一组干涉式调制器的装置,方法和计算机可读介质。 斜坡电压波形被施加到面板的多个干涉式调制器。 响应于施加斜坡电压,识别出静态阈值电压。 在该电压以上时,面板中的卡住的干涉式调制器的数量达到或超过第一阈值数,例如构成面板的干涉式调制器总数的50%。 这些实施例可以用于建立面板制造过程的静态基准,收集用于生成统计分布的数据等。