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1. 发明授权

US06175443B1 Article comprising a deformable segmented mirror 有权
标题翻译：文章包括可变形的分段镜
公开(公告)号：US06175443B1
公开(公告)日：2001-01-16
申请号：US09301680
申请日：1999-05-01
申请人： Vladimir A. Aksyuk , Bradley Paul Barber , David J. Bishop , Peter L. Gammel , C. Randy Giles
发明人： Vladimir A. Aksyuk , Bradley Paul Barber , David J. Bishop , Peter L. Gammel , C. Randy Giles
IPC分类号： G02B2600
CPC分类号： G02B6/3518 , G02B6/352 , G02B6/3548 , G02B6/357 , G02B6/3584 , G02B26/0841
摘要： An article for directing optical signals among optical waveguides is disclosed. The article comprises a plurality of mirror elements that are mechanically and electrically interconnected to form a reflective surface. The reflective surface is deformable upon application of a voltage. Optical signals delivered from a source waveguide may be directed to different destination waveguides as the reflective surface is deformed. The plurality of mirror elements is actuated by a single actuator.
摘要翻译：公开了一种用于在光波导中引导光信号的物品。该物品包括机械和电气互连以形成反射表面的多个镜子元件。反射表面在施加电压时可变形。当反射表面变形时，从源极波导传送的光信号可以被引导到不同的目的波导。多个镜元件由单个致动器致动。

2. 发明授权

US6075239A Article comprising a light-actuated micromechanical photonic switch 有权
标题翻译：文章包括光驱微机电光开关
公开(公告)号：US6075239A
公开(公告)日：2000-06-13
申请号：US138686
申请日：1998-08-24
申请人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel , C. Randy Giles
发明人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel , C. Randy Giles
IPC分类号： G02B26/08 , G02B6/12 , G02B6/122 , G02B6/35 , H01H35/00 , H04B10/02 , G02B6/10 , H01J1/56
CPC分类号： G02B6/3568 , G02B6/122 , G02B2006/12104 , G02B6/3514 , G02B6/353 , G02B6/3552 , G02B6/357 , G02B6/3584
摘要： An article comprising a light-actuated photonic switch is disclosed. The light-actuated photonic switch advantageously includes a photogenerator that powers a micro-electromechanical systems (MEMS) switch having very low voltage requirements. The MEMS switch is operable to move a reflector into or out of a path of an optical signal travelling between two waveguides. Since the MEMS switch has such low voltage requirements, a long wave photogenerator, which generates relatively low voltages, can be used. As long wavelength light experiences relatively little attenuation in optical fiber, active lightwave circuits incorporating the present light-actuated photonic switch can have very long fiber runs to remote nodes.
摘要翻译：公开了一种包括光致动力光子开关的物品。光致启动的光子开关有利地包括对具有非常低的电压要求的微机电系统（MEMS）开关供电的光电发生器。 MEMS开关可操作以将反射器移入或移出在两个波导之间行进的光信号的路径。由于MEMS开关具有这样低的电压要求，所以可以使用产生较低电压的长波光生成器。由于长波长的光线在光纤中经历相对较小的衰减，所以结合本光驱光电开关的主动光波电路可以具有到远程节点的非常长的光纤运行。

3. 发明授权

US5923798A Micro machined optical switch 失效
标题翻译：微加工光开关
公开(公告)号：US5923798A
公开(公告)日：1999-07-13
申请号：US856569
申请日：1997-05-15
申请人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel
发明人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel
IPC分类号： G02B26/08 , G02B6/35 , G02B6/26
CPC分类号： G02B6/357 , G02B6/3514 , G02B6/353 , G02B6/3548 , G02B6/3552 , G02B6/3594
摘要： Optical switches utilizing electrostatically-driven actuators formed from micro machined plates are disclosed. Under an applied voltage, a movable plate moves toward a fixed plate or a conductive region of an underlying support. The switches further include a mechanical linkage from the actuator to an optical device. The displacement of the movable plate generated at the actuator is transferred, via the mechanical linkage, to the optical device. The optical device, which is positioned in close proximity to optically-aligned spaced optical fibers, is movable into and out of an optical path defined by the optical cores of the optical fibers by the action of the actuator. An "in-plane" optical switch includes an actuator having two vertically-oriented electrodes, which generates a substantially horizontally-directed displacement of the movable plate and the linked optical device. An "out-of-plane" optical switch includes an actuator having at least one horizontally-disposed suspended above a conductive region of an underlying support. The actuator generates a substantially vertically-directed displacement of the movable plate and the linked optical device.
摘要翻译：公开了利用由微加工板形成的静电致动致动器的光开关。在施加的电压下，可移动板朝向下方支撑件的固定板或导电区移动。开关还包括从致动器到光学装置的机械连杆。在致动器处产生的可动板的位移通过机械连杆传递到光学装置。位于靠近光学对准间隔开的光纤的光学装置可通过致动器的动作进入和离开由光纤的光纤芯限定的光路。 “平面内”光开关包括具有两个垂直取向的电极的致动器，其产生可移动板和连接的光学装置的大致水平定向的位移。 “平面外”光开关包括具有至少一个水平放置的致动器，该至少一个悬挂在下面的支撑件的导电区域的上方。致动器产生可移动板和连接的光学装置的基本垂直定向的位移。

4. 发明授权

US5912094A Method and apparatus for making a micro device 失效
标题翻译：制造微型装置的方法和装置
公开(公告)号：US5912094A
公开(公告)日：1999-06-15
申请号：US856565
申请日：1997-05-15
申请人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel
发明人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel
IPC分类号： G03F1/00 , G03F9/00
CPC分类号： G03F9/00 , C23C14/042
摘要： A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180.degree. to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.
摘要翻译：公开了铰接式掩模及其制造MEMS器件的方法。根据本发明，铰链式掩模和MEMS器件的一部分同时形成在支撑件上。在掩模中形成开口，开口限定可以图案化层的形式转移的图案。在MEMS器件释放之后，铰链式掩模在大约180度的范围内旋转以位于MEMS器件的顶部。铰接的掩模用作微尺寸的荫罩，以在MEMS装置上沉积任意组合物的图案化膜。由于铰链板是通过原始光刻形成的，所以它以高精度对准MEMS装置。

5. 发明授权

US5995688A Micro-opto-electromechanical devices and method therefor 失效
标题翻译：微光机电装置及其方法
公开(公告)号：US5995688A
公开(公告)日：1999-11-30
申请号：US88182
申请日：1998-06-01
申请人： Vladimir A. Aksyuk , Bradley P. Barber , David J. Bishop , Peter L. Gammel , C. Randy Giles
发明人： Vladimir A. Aksyuk , Bradley P. Barber , David J. Bishop , Peter L. Gammel , C. Randy Giles
IPC分类号： G02B26/02 , G02B6/12 , G02B6/35 , G02B6/36 , G02B6/42
CPC分类号： G02B6/353 , G02B6/3552 , G02B6/3566 , G02B6/3572 , G02B6/423 , G02B6/4232
摘要： A micro-opto-electromechanical systems (MOEMS) device comprises a micro-electromechanical systems (MEMS) device and a silicon optical-bench (SiOB) device or system. The MEMS device interacts with the SiOB mechanically or electromagnetically. In one embodiment, the MEMS device is operable to provide a switching function for the SiOB device. The MEMS device comprises an actuator that is mechanically linked to an optical interruptor that prevents at least a portion of an optical signal incident thereon from propagating therethrough. In an actuated state, the actuator causes the optical interrupter to move into an optical path of an optical signal traveling through an SiOB device. The signal is at least partially reflected or absorbed such that only a portion of the signal propagates beyond the point of contact with the optical interrupter. Since SiOB processing is typically incompatible with MEMS device processing, the MEMS and SiOB devices are formed on separate supports and then attached, such as via flip-chip bonding methods.
摘要翻译：微光机电系统（MOEMS）装置包括微机电系统（MEMS）装置和硅光学台（SiOB）装置或系统。 MEMS器件机械地或电磁地与SiOB相互作用。在一个实施例中，MEMS器件可操作以提供用于SiOB器件的切换功能。 MEMS器件包括机械地连接到光学断路器的致动器，其防止入射到其上的光信号的至少一部分传播通过其中。在致动状态下，致动器使光断续器移动到穿过SiOB器件的光信号的光路中。信号至少部分地被反射或吸收，使得只有一部分信号传播超过与光学断续器的接触点。由于SiOB处理通常与MEMS器件处理不兼容，所以MEMS和SiOB器件形成在单独的支撑件上，然后被连接，例如通过倒装芯片接合方法。

6. 发明授权

US5963367A Micromechanical xyz stage for use with optical elements 失效
标题翻译：用于光学元件的微机械xyz平台
公开(公告)号：US5963367A
公开(公告)日：1999-10-05
申请号：US935971
申请日：1997-09-23
申请人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel
发明人： Vladimir A. Aksyuk , David J. Bishop , Peter L. Gammel
IPC分类号： G12B5/00 , G01N37/00 , G01Q10/04 , G01Q60/18 , G02B21/26 , H02N1/00
CPC分类号： G01Q10/04 , B82Y35/00 , H02N1/008 , H01H2001/0068 , Y10S977/872
摘要： A micromachined xyz stage, and microscopes utilizing such a stage, are disclosed. The xyz stage includes co-planar x- and y-drive means linked to a sample stage. Such x- and y- drive means are operable to position the sample stage in an x-y plane. The xyz stage further includes z-drive operable to moves the sample stage out of the x-y plane. The z-drive can be implemented by suspending a flat-plate electrode over the sample stage using hinged plate supports. As a voltage is applied across the plate electrode and the sample stage, an electrostatic force is generated, causing the sample stage to move towards the plate electrode. The hinged plate supports facilitate assembly of the z-drive, in addition to providing support for it in its assembled configuration. By incorporating an optical fiber, the aperture of which has be drawn down to submicron size, a near-field scanning optical microscope can be formed. By forming a micromachined tip on the xyz stage, a scanning tunneling microscope or an atomic force microscope can be formed.
摘要翻译：公开了一种微加工xyz级和利用这种级的显微镜。 xyz级包括连接到样品台的共平面x和y驱动装置。这种x和y驱动装置可操作以将样品台定位在x-y平面中。 xyz平台还包括可操作以将样品台移出x-y平面的z驱动。 z驱动可以通过使用铰接板支撑件将平板电极悬挂在样品台上来实现。当跨越平板电极和样品台施加电压时，产生静电力，使得样品台朝着平板电极移动。除了为其组装的构造提供支撑之外，铰链板支撑有助于z驱动装置的组装。通过并入其孔径被拉伸至亚微米尺寸的光纤，可以形成近场扫描光学显微镜。通过在xyz平台上形成微加工尖端，可以形成扫描隧道显微镜或原子力显微镜。

7. 发明授权

US06242989B1 Article comprising a multi-port variable capacitor 有权
标题翻译：文章包括一个多端口可变电容器
公开(公告)号：US06242989B1
公开(公告)日：2001-06-05
申请号：US09152185
申请日：1998-09-12
申请人： Bradley Paul Barber , David J. Bishop , Peter L. Gammel , Matthew A. Marcus
发明人： Bradley Paul Barber , David J. Bishop , Peter L. Gammel , Matthew A. Marcus
IPC分类号： H03B101
CPC分类号： H01G5/16
摘要： An article comprising a multi-port variable capacitor is disclosed. In one embodiment, a movable plate is suspended above at least a first and a second, fixed, electrically-isolated electrode. The first electrode is electrically connected to a bias supply, and the second electrode is electrically connected to an AC signal-carrying line. As bias is applied across the first electrode and the movable plate, an electrostatic attraction is developed therebetween that causes the movable plate to move downwardly towards the first electrode. The capacitance of the variable capacitor increases as the separation distance between the movable plate and the fixed electrodes decreases. Unlike conventional variable capacitors, in the present multi-port variable capacitors, the bias (delivered via the first electrode) and the signal (delivered via the second electrode) are electrically isolated from one another. As such, the bias (DC) and signal (AC) paths are advantageously electrically isolated. In an additional embodiment, the movable plate of the present variable capacitor is operable to tilt. The ability to tilt provides additional “signal processing” (i.e., logic) capabilities to the present multi-port variable capacitors. In additional embodiments, an article in accordance with the present teachings comprises a monolithically-integrable, tunable LC circuit, and a variable-frequency oscillator. In such LC circuits and oscillators, the multi-port variable capacitor described herein is used to tune the resonant frequency of the circuit.
摘要翻译：公开了一种包括多端口可变电容器的物品。在一个实施例中，可移动板悬挂在至少第一和第二固定的电隔离电极上方。第一电极电连接到偏置电源，并且第二电极电连接到AC信号传输线。当跨越第一电极和可移动板施加偏压时，在其间形成静电吸引力，使得可动板朝向第一电极向下移动。可变电容器的电容随着可动板和固定电极之间的间隔距离的减小而增加。与传统的可变电容器不同，在本多端口可变电容器中，通过第一电极传送的偏压和信号（经由第二电极传送）彼此电隔离。因此，偏置（DC）和信号（AC）路径有利地电隔离。在另外的实施例中，本可变电容器的可移动板可操作以倾斜。倾斜的能力为当前的多端口可变电容器提供额外的“信号处理”（即逻辑）能力。在另外的实施例中，根据本教导的制品包括单片可积分的可调谐LC电路和可变频率振荡器。在这种LC电路和振荡器中，这里描述的多端口可变电容器用于调谐电路的谐振频率。

8. 发明授权

US6101371A Article comprising an inductor 有权
标题翻译：一种电感器
公开(公告)号：US6101371A
公开(公告)日：2000-08-08
申请号：US152189
申请日：1998-09-12
申请人： Bradley Paul Barber , Nathan Belk , David J. Bishop , Peter L. Gammel
发明人： Bradley Paul Barber , Nathan Belk , David J. Bishop , Peter L. Gammel
IPC分类号： B81C1/00 , H01F17/00 , H01F27/06 , H01L21/02 , H01L27/08 , H04B1/38 , H04B5/00
CPC分类号： B81C1/00007 , H01L27/08 , H01L28/10 , B82Y10/00 , B82Y30/00 , H01F17/0006 , H01F41/041
摘要： An article comprising a micro-machined, passively self-assembling inductor is disclosed. The inductor is fabricated using MEMS technology and advantageously utilizes materials compatible with CMOS such that inductor is monolithically integrable with a CMOS chip. The inductor includes passive self-assembly means by which the inductor loop is moved away from an underlying substrate, typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.
摘要翻译：公开了一种包括微加工的被动自组装电感器的物品。使用MEMS技术制造电感器，并有利地利用与CMOS兼容的材料，使得电感器可与CMOS芯片单片集成。电感器包括无源自组装装置，在电感器组件的最后步骤中，电感器环通过该自组装装置移动远离下面的衬底（通常为硅）。这种被动自组装不需要单独的启动或监视步骤。

9. 发明授权

US07494888B2 Device and method using isotopically enriched silicon 失效
标题翻译：使用同位素富集硅的装置和方法
公开(公告)号：US07494888B2
公开(公告)日：2009-02-24
申请号：US10875029
申请日：2004-06-23
申请人： Peter L. Gammel , Bailey R. Jones , Isik Kizilyalli , Hugo F. Safar
发明人： Peter L. Gammel , Bailey R. Jones , Isik Kizilyalli , Hugo F. Safar
IPC分类号： H01L21/331
CPC分类号： H01L29/16 , H01L21/02381 , H01L21/0245 , H01L21/02532 , H01L21/0262 , H01L21/322 , H01L21/823412 , H01L21/823807 , H01L29/1033 , H01L29/167 , H01L29/6659 , H01L29/7833
摘要： The present invention provides a process for manufacturing a semiconductor device that can be incorporated into an integrated circuit. The method includes, forming a first doped layer of isotopically enriched silicon over a foundational substrate, forming a second layer of an isotopically enriched semiconductor material silicon over the first doped layer, and constructing active devices on the second layer. The device includes a first doped layer of an isotopically enriched semiconductor material and a second layer of an isotopically enriched semiconductor material located over the first doped layer, and active devices located on the second layer.
摘要翻译：本发明提供一种可并入集成电路的半导体器件的制造方法。该方法包括：在基础衬底上形成同位素富集的硅的第一掺杂层，在第一掺杂层上形成同位素富集的半导体材料硅的第二层，以及在第二层上构建有源器件。该器件包括同位素富集的半导体材料的第一掺杂层和位于第一掺杂层上方的同位素富集的半导体材料的第二层以及位于第二层上的有源器件。

10. 发明授权

US06307447B1 Tuning mechanical resonators for electrical filter 有权
标题翻译：调谐电机滤波器的机械谐振器
公开(公告)号：US06307447B1
公开(公告)日：2001-10-23
申请号：US09432040
申请日：1999-11-01
申请人： Bradley Paul Barber , Yiu-Huen Wong , Peter L. Gammel
发明人： Bradley Paul Barber , Yiu-Huen Wong , Peter L. Gammel
IPC分类号： H03H954
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0435 , Y10T29/42
摘要： The present invention is a method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, in a case where the resonant frequencies of the resonators are a function of each resonator thickness. According to this method the resonators are each formed with an etchable top electrode layer which includes a material having different etching properties as a topmost layer for each of the resonators having different resonant frequencies. By selectively etching these etchable layers one at a time in the presence of the others, one may adjust the resonant frequencies of each of the resonators without need to mask the resonators during the etching process. Associated with this method there is a resonator structure having a top electrode structure having a topmost layer having different etching characteristics for different resonators.
摘要翻译：本发明是在谐振器的谐振频率为每个谐振器厚度的函数的情况下，调整形成在公共基板上的多个机械谐振器的不同谐振频率的方法。根据该方法，谐振器各自形成有可蚀刻的顶部电极层，其包括具有不同蚀刻性质的材料作为具有不同谐振频率的每个谐振器的最顶层。通过在其他存在的情况下一次一个地选择性地蚀刻这些可蚀刻层，可以调整每个谐振器的谐振频率，而不需要在蚀刻过程期间掩蔽谐振器。与该方法相关联的是具有顶部电极结构的谐振器结构，其具有不同谐振器的具有不同蚀刻特性的最顶层。

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