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    • 7. 发明申请
    • APPARATUS AND METHOD FOR WEB COOLING IN A VACUUM COATING CHAMBER
    • 用于在真空涂料室中进行网状冷却的装置和方法
    • WO2002070778A1
    • 2002-09-12
    • PCT/US2002/005679
    • 2002-02-27
    • APPLIED PROCESS TECHNOLOGIESMADOCKS, John, E.LEMME, Charles, D.
    • MADOCKS, John, E.LEMME, Charles, D.
    • C23C16/00
    • C23C16/466C23C14/562
    • A chill drum (14) is modified to improve heat transfert between the drum and a flexible web substrate (20) disposed around the drum. The drum surface (22) contains a series of passages (44) and distribution holes (46). A working gas is injected into these passages and flows out of the distribution holes into the space between the web and drum. A cover (32) prevents working gas from escaping from frum passages in the area not covered by the web, and supplies the working gas to the passages at the drum cover. Once gas is in the passages, leakage only occurs from the edges of the web. The pressure in the passages remains essentially constant around the drum, producing uniform elevated pressures under the entire web. Elevated pressure behind the web significantly improves overall heat transfert, thereby allowing higher deposition rates and other process advantages.
    • 改变冷却鼓(14)以改善滚筒与布置在滚筒周围的柔性幅材基片(20)之间的热传递。 鼓表面(22)包含一系列通道(44)和分配孔(46)。 工作气体注入这些通道并从分配孔流出到卷筒和滚筒之间的空间中。 盖(32)防止工作气体从未被卷筒纸覆盖的区域中的通道中逸出,并将工作气体供应到鼓罩上的通道。 一旦气体在通道中,泄漏只从网的边缘发生。 通道中的压力在鼓周围保持基本恒定,在整个幅材下产生均匀的升高的压力。 幅材后面的高压显着地改善了总体传热,从而允许更高的沉积速率和其它工艺优点。